WO2008146451A1 - 半導体試験装置および試験方法 - Google Patents

半導体試験装置および試験方法 Download PDF

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Publication number
WO2008146451A1
WO2008146451A1 PCT/JP2008/001183 JP2008001183W WO2008146451A1 WO 2008146451 A1 WO2008146451 A1 WO 2008146451A1 JP 2008001183 W JP2008001183 W JP 2008001183W WO 2008146451 A1 WO2008146451 A1 WO 2008146451A1
Authority
WO
WIPO (PCT)
Prior art keywords
dut
voltage
supplied
noise
testing
Prior art date
Application number
PCT/JP2008/001183
Other languages
English (en)
French (fr)
Inventor
Mitsuo Matsumoto
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to DE112008001433T priority Critical patent/DE112008001433T5/de
Priority to US12/602,144 priority patent/US8433990B2/en
Priority to JP2009516168A priority patent/JP5171817B2/ja
Publication of WO2008146451A1 publication Critical patent/WO2008146451A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver

Abstract

　半導体試験装置１００において、電圧源１０は、ＤＵＴ２００に供給すべき電源電圧を生成する。判定処理部３０は、ＤＵＴ２００に所定のテストシーケンスを実行させる。ノイズ発生部２０は、テストシーケンスの実行中、ＤＵＴ２００に供給される電源電圧Ｖｄｄに周期的なパルス状のノイズ電圧Ｖｎを重畳する。ノイズ発生部２０は、ＤＵＴ２００に供給されるクロック信号ＣＫと同期したノイズ電圧Ｖｎを重畳する。
PCT/JP2008/001183 2007-05-28 2008-05-12 半導体試験装置および試験方法 WO2008146451A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE112008001433T DE112008001433T5 (de) 2007-05-28 2008-05-12 Halbleiter-Testgerät und Testverfahren
US12/602,144 US8433990B2 (en) 2007-05-28 2008-05-12 Semiconductor test apparatus and test method
JP2009516168A JP5171817B2 (ja) 2007-05-28 2008-05-12 半導体試験装置および試験方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007140762 2007-05-28
JP2007-140762 2007-05-28

Publications (1)

Publication Number Publication Date
WO2008146451A1 true WO2008146451A1 (ja) 2008-12-04

Family

ID=40074729

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001183 WO2008146451A1 (ja) 2007-05-28 2008-05-12 半導体試験装置および試験方法

Country Status (5)

Country Link
US (1) US8433990B2 (ja)
JP (1) JP5171817B2 (ja)
DE (1) DE112008001433T5 (ja)
TW (1) TWI367339B (ja)
WO (1) WO2008146451A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180134177A (ko) * 2017-06-08 2018-12-18 에스케이하이닉스 주식회사 반도체 테스트 시스템 및 테스트 방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8707232B2 (en) * 2011-06-08 2014-04-22 Mentor Graphics Corporation Fault diagnosis based on design partitioning
CN102540055B (zh) * 2011-12-22 2015-07-29 深圳创维数字技术有限公司 一种检测逻辑电平极限值的方法及装置
CN102565679B (zh) * 2011-12-22 2015-07-15 深圳创维数字技术有限公司 一种检测供电电压极限值的方法及装置
KR101891433B1 (ko) * 2017-02-28 2018-08-24 재단법인 한국기계전기전자시험연구원 전원 노이즈 발생장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454473A (ja) * 1990-06-22 1992-02-21 Advantest Corp 半導体試験装置
JP2004309153A (ja) * 2003-04-02 2004-11-04 Advantest Corp ノイズ試験装置

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Publication number Priority date Publication date Assignee Title
US4280220A (en) * 1979-09-17 1981-07-21 Fairchild Camera & Instrument Corp. Electronic testing system
US5144225A (en) * 1989-03-31 1992-09-01 Schlumberger Technologies, Inc. Methods and apparatus for acquiring data from intermittently failing circuits
JPH0545396A (ja) 1991-08-15 1993-02-23 Tokyo Gas Co Ltd ノイズ試験器
JPH05107321A (ja) 1991-10-15 1993-04-27 Hitachi Ltd 集積回路測定装置
JPH06308197A (ja) 1993-04-27 1994-11-04 Fujitsu Ltd Ｉｃ素子試験装置
US5929628A (en) * 1996-12-05 1999-07-27 Teradyne, Inc. Apparatus and method for performing amplitude calibration in an electronic circuit tester
US5883523A (en) 1997-04-29 1999-03-16 Credence Systems Corporation Coherent switching power for an analog circuit tester
JP3566882B2 (ja) * 1999-04-30 2004-09-15 アンリツ株式会社 回線品質評価装置
JP2002016493A (ja) * 2000-06-30 2002-01-18 Hitachi Ltd 半導体集積回路および光伝送用送信回路
JP2004209153A (ja) 2003-01-08 2004-07-29 Otsuka Pharmaceut Factory Inc 輸液バッグの口部構造
JP4157144B2 (ja) 2005-05-09 2008-09-24 株式会社アドバンテスト 試験装置、試験方法、および半導体デバイス
CA2693626A1 (en) * 2007-07-11 2009-01-15 Marimils Oy Method and device for capacitive detection of objects
JP4538066B2 (ja) * 2008-08-26 2010-09-08 株式会社東芝 乱数生成装置
WO2010029597A1 (ja) * 2008-09-10 2010-03-18 株式会社アドバンテスト 試験装置および回路システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454473A (ja) * 1990-06-22 1992-02-21 Advantest Corp 半導体試験装置
JP2004309153A (ja) * 2003-04-02 2004-11-04 Advantest Corp ノイズ試験装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180134177A (ko) * 2017-06-08 2018-12-18 에스케이하이닉스 주식회사 반도체 테스트 시스템 및 테스트 방법
KR102288464B1 (ko) 2017-06-08 2021-08-10 에스케이하이닉스 주식회사 반도체 테스트 시스템 및 테스트 방법

Also Published As

Publication number Publication date
US8433990B2 (en) 2013-04-30
US20100161264A1 (en) 2010-06-24
TW200909834A (en) 2009-03-01
DE112008001433T5 (de) 2010-04-15
TWI367339B (en) 2012-07-01
JP5171817B2 (ja) 2013-03-27
JPWO2008146451A1 (ja) 2010-08-19

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