TWI367339B - Test apparatus and test method for semiconductor - Google Patents

Test apparatus and test method for semiconductor

Info

Publication number
TWI367339B
TWI367339B TW097119408A TW97119408A TWI367339B TW I367339 B TWI367339 B TW I367339B TW 097119408 A TW097119408 A TW 097119408A TW 97119408 A TW97119408 A TW 97119408A TW I367339 B TWI367339 B TW I367339B
Authority
TW
Taiwan
Prior art keywords
test
semiconductor
test method
test apparatus
Prior art date
Application number
TW097119408A
Other languages
English (en)
Other versions
TW200909834A (en
Inventor
Mitsuo Matsumoto
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of TW200909834A publication Critical patent/TW200909834A/zh
Application granted granted Critical
Publication of TWI367339B publication Critical patent/TWI367339B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
TW097119408A 2007-05-28 2008-05-26 Test apparatus and test method for semiconductor TWI367339B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007140762 2007-05-28

Publications (2)

Publication Number Publication Date
TW200909834A TW200909834A (en) 2009-03-01
TWI367339B true TWI367339B (en) 2012-07-01

Family

ID=40074729

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097119408A TWI367339B (en) 2007-05-28 2008-05-26 Test apparatus and test method for semiconductor

Country Status (5)

Country Link
US (1) US8433990B2 (zh)
JP (1) JP5171817B2 (zh)
DE (1) DE112008001433T5 (zh)
TW (1) TWI367339B (zh)
WO (1) WO2008146451A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8707232B2 (en) * 2011-06-08 2014-04-22 Mentor Graphics Corporation Fault diagnosis based on design partitioning
CN102540055B (zh) * 2011-12-22 2015-07-29 深圳创维数字技术有限公司 一种检测逻辑电平极限值的方法及装置
CN102565679B (zh) * 2011-12-22 2015-07-15 深圳创维数字技术有限公司 一种检测供电电压极限值的方法及装置
KR101891433B1 (ko) * 2017-02-28 2018-08-24 재단법인 한국기계전기전자시험연구원 전원 노이즈 발생장치
KR102288464B1 (ko) * 2017-06-08 2021-08-10 에스케이하이닉스 주식회사 반도체 테스트 시스템 및 테스트 방법

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280220A (en) * 1979-09-17 1981-07-21 Fairchild Camera & Instrument Corp. Electronic testing system
US5144225A (en) * 1989-03-31 1992-09-01 Schlumberger Technologies, Inc. Methods and apparatus for acquiring data from intermittently failing circuits
JP2930669B2 (ja) * 1990-06-22 1999-08-03 株式会社アドバンテスト 半導体試験装置
JPH0545396A (ja) * 1991-08-15 1993-02-23 Tokyo Gas Co Ltd ノイズ試験器
JPH05107321A (ja) * 1991-10-15 1993-04-27 Hitachi Ltd 集積回路測定装置
JPH06308197A (ja) 1993-04-27 1994-11-04 Fujitsu Ltd Ｉｃ素子試験装置
US5929628A (en) * 1996-12-05 1999-07-27 Teradyne, Inc. Apparatus and method for performing amplitude calibration in an electronic circuit tester
US5883523A (en) * 1997-04-29 1999-03-16 Credence Systems Corporation Coherent switching power for an analog circuit tester
JP3566882B2 (ja) * 1999-04-30 2004-09-15 アンリツ株式会社 回線品質評価装置
JP2002016493A (ja) * 2000-06-30 2002-01-18 Hitachi Ltd 半導体集積回路および光伝送用送信回路
JP2004209153A (ja) 2003-01-08 2004-07-29 Otsuka Pharmaceut Factory Inc 輸液バッグの口部構造
JP2004309153A (ja) 2003-04-02 2004-11-04 Advantest Corp ノイズ試験装置
WO2006120853A1 (ja) 2005-05-09 2006-11-16 Advantest Corporation 試験装置、試験方法、および半導体デバイス
JP2010533288A (ja) * 2007-07-11 2010-10-21 マリミルス オーワイ 物体を容量検出する方法および装置
JP4538066B2 (ja) * 2008-08-26 2010-09-08 株式会社東芝 乱数生成装置
WO2010029597A1 (ja) * 2008-09-10 2010-03-18 株式会社アドバンテスト 試験装置および回路システム

Also Published As

Publication number Publication date
US20100161264A1 (en) 2010-06-24
JP5171817B2 (ja) 2013-03-27
US8433990B2 (en) 2013-04-30
WO2008146451A1 (ja) 2008-12-04
JPWO2008146451A1 (ja) 2010-08-19
TW200909834A (en) 2009-03-01
DE112008001433T5 (de) 2010-04-15

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