WO2008139834A1 - フィルム搬送装置および巻取式真空成膜方法 - Google Patents

フィルム搬送装置および巻取式真空成膜方法 Download PDF

Info

Publication number
WO2008139834A1
WO2008139834A1 PCT/JP2008/057600 JP2008057600W WO2008139834A1 WO 2008139834 A1 WO2008139834 A1 WO 2008139834A1 JP 2008057600 W JP2008057600 W JP 2008057600W WO 2008139834 A1 WO2008139834 A1 WO 2008139834A1
Authority
WO
WIPO (PCT)
Prior art keywords
film
winding
guide
type vacuum
conveying device
Prior art date
Application number
PCT/JP2008/057600
Other languages
English (en)
French (fr)
Inventor
Takayoshi Hirono
Isao Tada
Atsushi Nakatsuka
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to KR1020097025757A priority Critical patent/KR101133835B1/ko
Priority to US12/597,916 priority patent/US20100055311A1/en
Priority to DE112008001359T priority patent/DE112008001359T5/de
Priority to JP2009514053A priority patent/JP5024972B2/ja
Priority to CN2008800159769A priority patent/CN101680083B/zh
Publication of WO2008139834A1 publication Critical patent/WO2008139834A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H27/00—Special constructions, e.g. surface features, of feed or guide rollers for webs
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/13—Parts concerned of the handled material
    • B65H2701/131—Edges
    • B65H2701/1315—Edges side edges, i.e. regarded in context of transport

Abstract

【課題】ベースフィルムの成膜領域を保護でき、かつ安定したフィルム走行性を実現する。 【解決手段】本発明に係る巻取式真空成膜装置１０は、ベースフィルムＦの両側縁部を支持する一対の環状のガイド部１７ｂを有するガイドローラ１７Ａと、ガイドローラ１７Ａに対向して配置されベースフィルムＦの両側縁部を一対のガイド部１７ｂに向けて押圧する補助ローラ１８とを含むガイドユニット２０を有する。これにより、ベースフィルムＦの成膜領域Ｆｃとガイドユニット２０のガイドローラ１７Ａおよび補助ローラ１８の各々のロール面との接触を回避でき、当該成膜領域Ｆｃの保護を図ることができる。
PCT/JP2008/057600 2007-05-14 2008-04-18 フィルム搬送装置および巻取式真空成膜方法 WO2008139834A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020097025757A KR101133835B1 (ko) 2007-05-14 2008-04-18 필름 반송 장치 및 권취식 진공 성막 방법
US12/597,916 US20100055311A1 (en) 2007-05-14 2008-04-18 Film Conveyor Apparatus and Roll-to-Roll Vacuum Deposition Method
DE112008001359T DE112008001359T5 (de) 2007-05-14 2008-04-18 Filmfördergerät und Rolle-zu-Rolle-Vakuumbeschichtungsverfahren
JP2009514053A JP5024972B2 (ja) 2007-05-14 2008-04-18 フィルム搬送装置および巻取式真空成膜方法
CN2008800159769A CN101680083B (zh) 2007-05-14 2008-04-18 薄膜传送装置和卷绕式真空成膜方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-127877 2007-05-14
JP2007127877 2007-05-14

Publications (1)

Publication Number Publication Date
WO2008139834A1 true WO2008139834A1 (ja) 2008-11-20

Family

ID=40002052

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057600 WO2008139834A1 (ja) 2007-05-14 2008-04-18 フィルム搬送装置および巻取式真空成膜方法

Country Status (8)

Country Link
US (1) US20100055311A1 (ja)
JP (1) JP5024972B2 (ja)
KR (1) KR101133835B1 (ja)
CN (1) CN101680083B (ja)
DE (1) DE112008001359T5 (ja)
RU (1) RU2434079C2 (ja)
TW (1) TWI434948B (ja)
WO (1) WO2008139834A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010174264A (ja) * 2009-01-27 2010-08-12 Hitachi Zosen Corp 真空成膜装置
JP2010174370A (ja) * 2009-05-11 2010-08-12 Hitachi Zosen Corp 減圧ユニット及び圧力復元ユニット
JP2011006737A (ja) * 2009-06-25 2011-01-13 Hitachi Zosen Corp 真空成膜装置及び真空成膜方法
JP2011038162A (ja) * 2009-08-13 2011-02-24 Fuji Electric Holdings Co Ltd 薄膜積層体の製造装置
JP2012132080A (ja) * 2010-12-24 2012-07-12 Sumitomo Metal Mining Co Ltd キャンロール上でのシワ伸ばし方法及びシワ伸ばし装置、並びにこれを備えた成膜装置
JP2012219322A (ja) * 2011-04-07 2012-11-12 Ulvac Japan Ltd 巻取式成膜装置及び巻取式成膜方法
JP2017110283A (ja) * 2015-12-18 2017-06-22 株式会社アルバック フィルム搬送装置

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102031494B (zh) * 2010-12-01 2012-10-03 常州常松金属复合材料有限公司 一种真空镀辊筒传动装置
CN102021529A (zh) * 2010-12-01 2011-04-20 常州常松金属复合材料有限公司 一种真空镀翻转辊道装置
CN103459665B (zh) * 2011-03-29 2017-02-22 凸版印刷株式会社 卷绕成膜装置
JP5987312B2 (ja) 2011-12-16 2016-09-07 日本電気硝子株式会社 成膜装置及び膜付ガラスフィルムの製造方法
DE102012206502B4 (de) * 2012-04-19 2019-01-31 VON ARDENNE Asset GmbH & Co. KG Vorrichtung zum frontseitenberührungsfreien Transport von bandförmigem Material
CN102888592A (zh) * 2012-09-18 2013-01-23 铜陵其利电子材料有限公司 镀膜机导辊支撑装置
TWI587931B (zh) * 2012-11-30 2017-06-21 Ｌｇ化學股份有限公司 滾筒、薄膜形成裝置以及於基板上形成薄膜的方法
JP5868309B2 (ja) 2012-12-21 2016-02-24 株式会社神戸製鋼所 基材搬送ロール
DE102013103590A1 (de) 2013-04-10 2014-10-16 Uwe Beier Vorrichtung zum Bearbeiten von flexiblen Substraten
KR101404408B1 (ko) * 2013-05-03 2014-06-10 성안기계 (주) 필름 반송장치
DE102014105747B4 (de) 2014-04-23 2024-02-22 Uwe Beier Modulare Vorrichtung zum Bearbeiten von flexiblen Substraten
DE102014106690B4 (de) 2014-05-12 2017-12-28 Uwe Beier Vorrichtung zum wechselweisen Bearbeiten von flexiblen, bandförmigen Substraten
JP6526186B2 (ja) * 2015-05-15 2019-06-05 株式会社アルバック 基板除電機構及びこれを用いた真空処理装置
CN111560595A (zh) * 2020-03-30 2020-08-21 维达力实业(深圳)有限公司 含硅负极材料的折返式补锂方法及负极片、电池
CN113913787A (zh) * 2021-10-15 2022-01-11 浙江生波智能装备有限公司 一种新型薄膜制备工艺及真空镀膜设备
CN113969397A (zh) * 2021-10-15 2022-01-25 浙江生波智能装备有限公司 一种新型真空镀膜设备的镀膜控制方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60104313A (ja) * 1983-10-04 1985-06-08 Toray Ind Inc フイルム延伸方法
JPH01312066A (ja) * 1988-06-11 1989-12-15 Tokin Corp 連続薄膜媒体の製造装置
JPH02297412A (ja) * 1989-05-12 1990-12-07 Matsushita Electric Ind Co Ltd フィルムの温度処理方法
JPH0617250A (ja) * 1992-06-30 1994-01-25 Sony Corp エキスパンダーロール
JPH08134645A (ja) * 1994-11-08 1996-05-28 Toray Ind Inc プラスチックフイルム用真空処理装置
JPH11193460A (ja) * 1997-12-26 1999-07-21 Tdk Corp 真空容器内の巻き取り装置
JP2004307890A (ja) * 2003-04-03 2004-11-04 Toppan Printing Co Ltd 真空成膜装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW514557B (en) * 2000-09-15 2002-12-21 Shipley Co Llc Continuous feed coater
JP2004087792A (ja) 2002-08-27 2004-03-18 Hitachi Cable Ltd Ｔａｂテープ用ガイドローラー
LV13253B (en) * 2003-06-30 2005-03-20 Sidrabe As Device and method for coating roll substrates in vacuum
JP4516304B2 (ja) * 2003-11-20 2010-08-04 株式会社アルバック 巻取式真空蒸着方法及び巻取式真空蒸着装置
US8435373B2 (en) * 2005-06-20 2013-05-07 Microcontinumm, Inc. Systems and methods for roll-to-roll patterning
KR100701641B1 (ko) * 2004-08-02 2007-03-30 도레이새한 주식회사 진공증착에 의해 구리도금층을 형성하는 연성회로기판용 적층구조체의 제조방법 및 그 장치
KR20060014664A (ko) * 2004-08-11 2006-02-16 엘지전자 주식회사 자기기록재생장치의 가이드 롤러 조립체
CN100562602C (zh) * 2005-02-16 2009-11-25 株式会社爱发科 卷取式真空成膜装置
JP3795518B2 (ja) 2006-03-01 2006-07-12 株式会社アルバック 巻取式真空蒸着装置及び巻取式真空蒸着方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60104313A (ja) * 1983-10-04 1985-06-08 Toray Ind Inc フイルム延伸方法
JPH01312066A (ja) * 1988-06-11 1989-12-15 Tokin Corp 連続薄膜媒体の製造装置
JPH02297412A (ja) * 1989-05-12 1990-12-07 Matsushita Electric Ind Co Ltd フィルムの温度処理方法
JPH0617250A (ja) * 1992-06-30 1994-01-25 Sony Corp エキスパンダーロール
JPH08134645A (ja) * 1994-11-08 1996-05-28 Toray Ind Inc プラスチックフイルム用真空処理装置
JPH11193460A (ja) * 1997-12-26 1999-07-21 Tdk Corp 真空容器内の巻き取り装置
JP2004307890A (ja) * 2003-04-03 2004-11-04 Toppan Printing Co Ltd 真空成膜装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010174264A (ja) * 2009-01-27 2010-08-12 Hitachi Zosen Corp 真空成膜装置
JP2010174370A (ja) * 2009-05-11 2010-08-12 Hitachi Zosen Corp 減圧ユニット及び圧力復元ユニット
JP2011006737A (ja) * 2009-06-25 2011-01-13 Hitachi Zosen Corp 真空成膜装置及び真空成膜方法
JP2011038162A (ja) * 2009-08-13 2011-02-24 Fuji Electric Holdings Co Ltd 薄膜積層体の製造装置
JP2012132080A (ja) * 2010-12-24 2012-07-12 Sumitomo Metal Mining Co Ltd キャンロール上でのシワ伸ばし方法及びシワ伸ばし装置、並びにこれを備えた成膜装置
JP2012219322A (ja) * 2011-04-07 2012-11-12 Ulvac Japan Ltd 巻取式成膜装置及び巻取式成膜方法
JP2017110283A (ja) * 2015-12-18 2017-06-22 株式会社アルバック フィルム搬送装置

Also Published As

Publication number Publication date
JP5024972B2 (ja) 2012-09-12
TW200848540A (en) 2008-12-16
CN101680083B (zh) 2012-01-25
JPWO2008139834A1 (ja) 2010-07-29
RU2434079C2 (ru) 2011-11-20
CN101680083A (zh) 2010-03-24
RU2009146069A (ru) 2011-06-20
DE112008001359T5 (de) 2010-07-08
US20100055311A1 (en) 2010-03-04
KR101133835B1 (ko) 2012-04-06
KR20100006582A (ko) 2010-01-19
TWI434948B (zh) 2014-04-21

Similar Documents

Publication Publication Date Title
WO2008139834A1 (ja) フィルム搬送装置および巻取式真空成膜方法
WO2008143721A3 (en) Photovoltaic cell with reduced hot-carrier cooling
PL2060492T3 (pl) Urządzenie do naciągania folii rękawowej względnie kaptura foliowego na stos towarów
CA2591432A1 (en) Apparatus for splicing a web material
USD627989S1 (en) Angled rolled plan rack
WO2007113514A3 (en) Solar array mounting system
GB0608018D0 (en) No title
EP1764324A3 (en) Sheet conveying apparatus
WO2009054200A1 (ja) スラストころ軸受
MX2009012909A (es) Dispositivo de laminacion, especialmente caja de laminacion de empuje.
EP1318093A3 (en) Roll paper curl correction device and record apparatus with the roll paper curl correction device
WO2010000034A8 (en) Apparatus for continuous strip casting
WO2008042850A3 (en) Curved belt conveyor with autotracking device
DE602004025717D1 (de) Personenbeförderungseinrichtung
UA90384C2 (ru) Устройство для замены и транспортировки прокатных валков
CN202608200U (zh) 光学膜的贴合装置
TW200724360A (en) Method of applying web
TW200704575A (en) Apparatus for carrying substrates
WO2007098345A3 (en) Laminating machine
EP1911889A3 (de) Fahrzeug mit einer bugseitig angeordeten Stütz- und Räumanlage
DE602004001204D1 (de) Stützvorrichtung für eine Rolle eines Bandförderers
CA2508908A1 (en) Package wrapping machine with self-centering film support system
WO2007098346A3 (en) Laminating machine
WO2009028600A1 (ja) 重ね合わせ装置
WO2009054245A1 (ja) ストリップパック装置

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880015976.9

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08740655

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009514053

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12597916

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 1120080013594

Country of ref document: DE

ENP Entry into the national phase

Ref document number: 20097025757

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2009146069

Country of ref document: RU

122 Ep: pct application non-entry in european phase

Ref document number: 08740655

Country of ref document: EP

Kind code of ref document: A1

RET De translation (de og part 6b)

Ref document number: 112008001359

Country of ref document: DE

Date of ref document: 20100708

Kind code of ref document: P