Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
  • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
  • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
  • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
  • B65G2201/02—Articles
  • B65G2201/0294—Vehicle bodies
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
  • B65G2249/04—Arrangements of vacuum systems or suction cups
  • B65G2249/045—Details of suction cups suction cups

Definitions

• the present invention relates to a workpiece storage device that stores a workpiece such as a glass substrate in a storage cassette.
• an air ejection device and a roller conveyor are disposed below the storage cassette, and the lower side force of the storage cassette is sequentially moved out of the storage cassette.
• An apparatus for carrying out is disclosed.
• the storage cassette is lowered and air is blown from the air ejection device, so that the workpiece in the storage cassette is floated from the mounting portion of each stage, and the edge of the workpiece is pressed and positioned.
• the work is placed on the roller conveyor by lowering the air ejection device, and the work is carried out of the storage cassette by the roller conveyor.
• an object of the present invention is to more stably float the workpiece when the workpiece is floated by air.
• the present invention has a substantially horizontal upper surface on which a plurality of air outlets are formed, and a rectangular plate-like workpiece is placed on the upper surface in a substantially horizontal posture by the ejection of air from the outlet.
• Air jetting means for floating a plurality of mounting parts formed in a plurality of stages in the vertical direction through which the air jetting means can pass; and the work is placed in a substantially horizontal posture;
• Elevating means for moving the air ejecting means up and down relatively up and down, and by moving up and down by the elevating means, the air ejecting means is made to enter the storage cassette, and the work to be carried out from the storage cassette to the outside is provided.
• Air jet In the workpiece storage device that floats from the mounting portion by the means, the work storage device is provided with a pad that protrudes from the upper surface force of the air ejection unit and contacts the lower surface of the workpiece in the floating state. Provided.
• the pad resists rapid movement of the work in a floating state. Therefore, even if an external force is applied to the floating workpiece, the workpiece slip can be reduced and the workpiece can be floated more stably.
• the pad is a suction pad that is sucked to a lower surface of the first coil that is in a floating state due to air suction. Since the workpiece is supported by the suction pad, it is possible to further reduce the slippage of the workpiece and to float the workpiece more stably.
• moving the suction pad by the moving means By moving the suction pad by the moving means, a certain amount of work can be carried out from the storage cassette, and the work can be transferred to the transfer device. Delivery can be done smoothly.
• an auxiliary roller that protrudes from the upper surface of the air ejection unit and abuts on the lower surface of the workpiece that moves as the suction pad moves by the moving unit may be further provided. . A certain amount of work can be carried out more stably.
• the suction pad and the auxiliary roller are provided apart from each other in the work unloading direction, and the suction pad protrudes from the upper surface of the air ejection means.
• a suction pad lifting / lowering means that lifts and lowers between the non-projecting position
• an auxiliary roller lifting / lowering mechanism that lifts and lowers the auxiliary roller between the protruding position protruding from the upper surface of the air ejection means and the non-projecting position.
• Means, and the suction pad and the auxiliary roller can be moved up and down synchronously. Since the suction pad and the auxiliary roller are provided apart from each other in the work unloading direction, the work can be unloaded more stably. Further, by moving the suction pad and the auxiliary roller up and down synchronously, the auxiliary roller can be positioned at the protruding position only when necessary.
• positioning means for positioning the work by pressing an end edge of the work in a floating state in a substantially horizontal direction.
• the slippage of the workpiece can be reduced even if the edge of the workpiece is pressed, and the workpiece can be positioned without damaging the workpiece.
• FIG. 1 is a plan view showing a layout of a work processing facility 100 using a work storage device A according to an embodiment of the present invention.
• FIG. 2 is an external perspective view of a transfer device C.
• FIG. 3 is an external perspective view of a work storage device A.
• FIG. 4 is an external perspective view of the storage cassette 20.
• FIG. 5 is a diagram showing a placement unit for one stage.
• FIG. 6 is an external perspective view of the lifting device 30.
• FIG. 7 is an exploded perspective view of the lifting unit 31.
• FIG. 8 is an external perspective view of the air ejection device 10.
• FIG. 9 is an external perspective view of the positioning device 40.
• FIG. 10 is a block diagram showing a configuration of a control unit 50 of the workpiece storage device A.
• FIG. 11 is an operation explanatory diagram of the work storage device A.
• FIG. 12 is an operation explanatory diagram of the work storage device A.
• FIG. 13 is an operation explanatory view of the work storage device A.
• FIG. 14 is an operation explanatory view of the work storage device A.
• FIG. 15 is an operation explanatory view of the work storage device A.
• FIG. 16 is an operation explanatory diagram of the work storage device A.
• FIG. 17 is an operation explanatory view of the work storage device A.
• FIG. 18 is an operation explanatory diagram of the work storage device A.
• FIG. 19 is an operation explanatory diagram of the work storage device A.
• FIG. 20 is an external perspective view of a storage cassette 20 ′.
• FIG. 21 is an enlarged sectional view of the vicinity of the comb teeth 26a on the carry-in / out port 24 side.
• FIG. 22 is an enlarged cross-sectional view of the vicinity of the comb teeth 26a on the carry-in / out port 24 side.
• FIG. 1 is a plan view showing a layout of a workpiece processing facility 100 using a workpiece storage device A according to an embodiment of the present invention.
• X and Y are the horizontal directions orthogonal to each other, and Z is the vertical direction.
• the workpiece processing facility 100 is a facility for processing a rectangular plate-like glass substrate as a workpiece, and includes a workpiece storage device A, a processing device B, and a transfer device C.
• the transfer device C is movable on the rail 1 extending in the Y direction. In addition, the transfer device C moves in the X direction with respect to the workpiece storage device A and the processing device B as indicated by arrows in FIG. A glass substrate can be carried in and out.
• FIG. 1 a plurality of processing devices B are illustrated, but the processing content of each processing device B may be different or the same content.
• an unprocessed glass substrate is transferred from the work storage device A to the processing device B via the transfer device C, and a processed glass substrate is transferred from the processing device B. It is returned to the work storage device A via the mounting device C.
• FIG. 2 is an external perspective view of the transfer device C in the present embodiment.
• the transfer device C shown in FIG. 2 is an example, and various devices can be used as the transfer device C used together with the work storage device A.
• the transfer device C includes a support table 2, a pair of linear guides 3 provided on the left and right sides of the support table 2, a pair of hand units 4 that move along the linear guide 3, and the support table 2.
• a traveling unit 5 that supports and reciprocates the entire transfer device C along the rail 1 in the Y direction.
• the upper surface of the support table 2 is formed with a plurality of jet outlets 2a for jetting air, and jets air to which an air supply device (for example, compressor) force (not shown) is also supplied.
• the linear guide 3 is a linear motor type and moves the node unit 4 back and forth in the X direction.
• the hand unit 4 has an air suction port 4a formed on the upper surface of the tip thereof, and sucks air by a not-shown air suction device (for example, a compressor).
• the traveling unit 5 includes driving wheels 5a for moving the entire transfer device C along the rail 1 and driving means such as a motor for rotating the driving wheels.
• the transfer apparatus C having such a configuration force will be described.
• the transfer device C is moved by the traveling unit 5 toward the workpiece storage device A and to a matching position.
• the hand unit 4 is moved to the end in the + X direction, air is sucked from the suction port 4a, and the end of the glass substrate stored in the work storage device A is held.
• air is ejected from the ejection port 2 a, the hand unit 4 holding the glass substrate is moved in the X direction, and the glass substrate is moved onto the support table 2.
• the glass substrate is in a floating state on the support table 2 by the ejection of air from the ejection port 2a.
• the transfer unit C is moved by the traveling unit 5 so as to face the processing apparatus B as the glass substrate transfer destination. Move to a suitable position. Subsequently, the hand unit 4 is moved again to the end in the + X direction, and the glass substrate is transferred to the processing apparatus B. Then, the ejection of air from the ejection port 2a and the suction of air from the suction port 4a force are stopped, and one unit of processing is completed.
• the processing device B force also receives the glass substrate and transports it to the workpiece storage device A, the reverse procedure is performed.
• FIG. 3 is an external perspective view of the workpiece storage device A.
• the work storage device A includes an air ejection device 10, a storage cassette 20 disposed above the air ejection device 10, an elevating device 30, and a positioning device 40.
• FIG. 4 is an external perspective view of the storage cassette 20.
• the storage cassette 20 is a cassette that can store glass substrates in multiple stages in the upward and downward direction (Z direction). 3 and 4 show a state in which the glass substrate is not stored.
• the storage cassette 20 forms a substantially rectangular parallelepiped frame body by the plurality of column members 2 la and 21 b and the beam members 22 a to 22 g.
• a plurality of column members 21b are arranged in the X direction, and are arranged in the same number apart from each other in the Y direction. Between the column members 21b in the Y direction and between the column members 21a, the column members 21b are arranged in the vertical direction (Z direction).
• a plurality of wires 23 are stretched with a predetermined pitch. The wire 23 forms a plurality of stages in the vertical direction on which the glass substrate is placed in a substantially horizontal posture.
• FIG. 5 is a diagram showing the placement portion for one stage. Each stage mounting portion is formed by a plurality of wires 23 spaced apart in the X direction at the same height, and the glass substrate W is placed on the wires 23.
• each wire 23 and the outside of the wire 23 at both ends in the X direction form an opening 23a through which an air ejection device 10 described later can pass.
• the wire by using the wire, the interval between the substrates to be stored can be reduced, and the storage efficiency of the storage cassette 200 can be increased.
• both side portions of the storage cassette 20 facing each other in the X direction are opened in a portal shape by the tension member 22a and the column member 21a, respectively, and the side portions in the -X direction are glass substrates.
• the entrance / exit 24 is formed.
• the bottom of the storage cassette 20 is composed of a pair of beam members 22d, a plurality of beam members 22b, and one beam member 22f.
• the entrance 25 that can pass is formed.
• FIG. 6 is an external perspective view of the lifting device 30, and FIG. 7 is an exploded perspective view of the lifting unit 31.
• the raising / lowering device 30 is a device for moving the storage cassette 20 and the air ejection device 10 up and down relatively.
• a configuration in which the air ejection device 10 is fixed and the storage cassette 20 is moved up and down can be fixed.
• the storage cassette 20 can be fixed and the air ejection device 10 can be moved up and down.
• the lifting device 30 is disposed on both sides of the storage cassette 20 facing each other in the Y direction so as to sandwich the storage cassette 20, and a pair of lifting units that cantilever support the storage cassette 20 Consists of 31.
• the elevating unit 31 can be made thinner, and the installation space for the entire work storage device A can be further reduced. Further, it is possible to secure a wider space for the glass substrate loading / unloading port and the air blowing device 10.
• the elevating unit 31 includes a beam member 311 on which the beam member 22d at the bottom of the storage cassette 20 is placed. As each beam member 311 of each lifting unit 31 moves in the vertical direction (Z direction) synchronously, the storage cassette 20 is lifted and lowered.
• the elevating unit 31 includes a support column 312 extending in the vertical direction, and a pair of rail members 313 and a rack 314 extending in the vertical direction are fixed to the inner surface of the column 312. Between each lifting unit 31, a beam member 32 is installed on the upper end of the column 312.
• the beam member 311 is fixed and supported on one side surface of the support plate 315 via a bracket 315a.
• Four slide members 316 movable along the rail member 313 are fixed to the other side surface of the support plate 315, and the beam member 311 and the support plate 315 move up and down by the guide of the rail member 313.
• the drive unit 317 includes a motor 317a and a speed reducer 317b, and is fixed to and supported by one side surface of the support plate 318.
• the output shaft of the speed reducer 317b passes through the support plate 318 and is connected to a pinion 319a disposed on the other side of the support plate 318.
• the support plate 315 and the support plate 318 are fixed to each other at a predetermined interval, and pions 319b to 319d are disposed in the gap between the support plate 315 and the support plate 318. .
• the pions 319b to 319d are rotatably supported between the support plate 315 and the support plate 318, and the pion 319b and the pion 319d rotate following the rotation of the pion 319a.
• the pion 319c rotates following the rotation of the pion 319b.
• Peons 319b through 319d are the same as each other The specification pion, with two pions 319c and 319d mating with each rack 314.
• each lifting / lowering unit 31 is provided with a sensor 31 la at the end of the beam member 311 for detecting a shift in the lifting height of the beam member 311.
• the sensor 31 la is an optical sensor including, for example, a light emitting unit and a light receiving unit, and determines whether or not the force is received by irradiating light in the Y direction with each other as shown in FIG.
• the sensor 31 la determines whether or not the force is received by irradiating light in the Y direction with each other as shown in FIG.
• the sensor 31 la determines whether or not the force is received by irradiating light in the Y direction with each other as shown in FIG.
• the sensor 31 la determines whether or not the force is received by irradiating light in the Y direction with each other as shown in FIG.
• the two sensors 311a provided in each beam member 311 have a configuration in which one of the light emitting unit and the light receiving unit is provided, and the other has the other of the light emitting unit and the light receiving unit. May be. Moreover, it is not restricted to an optical sensor, Other sensors are also employable.
• FIG. 8 is an external perspective view of the air ejection device 10.
• the air ejection device 10 is composed of a plurality of air ejection units 11, and each air ejection unit 11 has an entrance 25, an opening so as not to interfere with the storage cassette 20 when the storage force set 20 is raised or lowered. It is set to a size and position that can pass through part 23a.
• Each air ejection unit 11 has a substantially horizontal upper surface 111 on which a plurality of air ejection ports 111a are formed.
• Each upper surface 11 1 of each air ejection unit 11 is located on substantially the same horizontal plane.
• the ejection port 11 la ejects air supplied from an air supply device (not shown) (for example, a compressor), and floats the glass substrate stored in the storage cassette 20 on the upper surface 111 in a substantially horizontal posture.
• a linear guide 12 is provided on the inner side of each bottom of the base 11.
• Each linear guide 12 is a linear motor type, and reciprocates in the X direction an air actuator 13 disposed on the side of the air ejection unit 11.
• the air actuator 13 is an actuator that expands and contracts in the up and down direction (Z direction) by moving the rod portion up and down, and a suction pad 14 is attached to the rod portion.
• a plurality of air suction ports 14a are provided on the upper surface of the suction pad 14, and air is sucked by an air suction device (for example, a compressor) (not shown).
• the suction pad 14 has a top surface protruding from the top surface 111 of the air ejection unit 11 and a top surface substantially flush with the top surface 111 or lower than the top surface 111!
• the air actuator 13 is moved up and down.
• the amount of protrusion of the upper surface of the suction pad 14 at the protruding position from the upper surface 111 is set to be substantially the same as the floating amount from the upper surface 111 of the glass substrate, and when the suction pad 14 is located at the protruding position, the upper surface of the suction pad 14 is It contacts the lower surface of the glass substrate in a floating state on the upper surface 111 of the air ejection unit 11.
• the means for raising and lowering the suction pad 14 is not limited to the air actuator 13, and other raising and lowering means may be employed.
• the linear guide 12 functions as a moving means for moving the suction pad 14 in the conveyance direction ( ⁇ X direction) of the glass substrate, but means other than the linear guide 12 can be adopted as such a moving means.
• brackets 15 are respectively provided on the inner sides of the bottoms of the two air ejection units 11 located second from the extreme end on the + X direction side.
• An air actuator 16 is attached to the bracket 15.
• the air actuator 16 is an actuator that expands and contracts in the vertical direction (Z direction) by moving the rod portion up and down, and an auxiliary roller 17 is attached to the rod portion.
• the auxiliary roller 17 is a free roller having no driving force.
• the suction pad 14 and the auxiliary roller 17 are located at positions separated from each other in the carry-out direction of the glass substrate.
• the auxiliary roller 17 has an upper end protruding from the upper surface 111 of the air ejection unit 11, and an upper end of the auxiliary roller 17 between the upper surface 111 and substantially the same or lower than the upper surface 111, and a non-projecting position.
• the air actuator 16 is moved up and down.
• the protruding amount of the upper end of the auxiliary roller 17 at the protruding position from the upper surface 111 is set to be substantially the same as the floating amount from the upper surface 111 of the glass substrate, and when the auxiliary roller 17 is positioned at the protruding position, the upper end of the auxiliary roller 17 is Air ejection unit 11 is in contact with the lower surface of the glass substrate in a floating state on the upper surface 111.
• the auxiliary roller 17 moves up and down synchronously with the lifting and lowering of the suction pad 14.
• the means for raising and lowering the auxiliary roller 17 is not limited to the air actuator 16, and other raising and lowering means can be employed.
• FIG. 9 is an external perspective view of the positioning device 40.
• four positioning devices 40 are provided.
• Each of the four positioning devices 40 is a set.
• a pair of positioning devices 40 are arranged in a spaced manner in the Y direction so as to be in direct force with each other!
• the two sets of positioning devices 40 are spaced apart in the X direction.
• Each positioning device 40 includes a circular roller 41 that presses the edges of the glass substrate (both ends in the Y direction in this embodiment) in a substantially horizontal direction, and a pusher that reciprocates the roller 41 in the Y direction. 42.
• the pusher 42 is an air actuator that expands and contracts in the Y direction.
• the roller 41 is rotatably supported at the tip of the pusher 42.
• FIG. 10 is a block diagram showing the configuration of the control unit 50 of the workpiece storage device A.
• the control unit 50 provides a CPU 51 that controls the entire work storage device A, a work area for the CPU 51, a RAM 52 that stores variable data and the like, and stores fixed data such as control programs and control data.
• ROM53 stores fixed data such as control programs and control data.
• the RAM 52 and ROM 53 can employ other storage means.
• the input interface (IZF) 54 is an interface between the CPU 51 and the sensor 311a, and the CPU 51 acquires the detection result of the sensor 311a via the input IZF 54.
• the output interface (IZF) 55 is an interface between the CPU 51, the motor 317a, the linear guide 12 and the control valve.
• the CPU 41 controls the motor 317a, the linear guide 12 and the control valve via the output I / F 55. .
• the control valve controls whether air is ejected from the ejection port 111a of each air ejection unit 11, whether air is sucked from the suction port 14a of the suction pad 14, whether the air actuators 13 and 16 are activated, and the pusher 42 is activated. This is a control valve to be switched.
• a communication interface (IZF) 56 is an interface between the host computer 6 that controls the entire work processing facility 100 and the CPU 51.
• the CPU 51 is connected to the host computer 6 from the host computer 6.
• the workpiece storage device A is controlled according to the command.
• FIG. 11 to FIG. 19 are diagrams for explaining the operation of the work storage device A.
• 11 and 15 are plan views of the air ejection device 10 and the storage cassette 20, and
• FIGS. 12 to 14 and FIGS. 16 to 19 are cross-sectional views taken along line II in FIG. In each figure, only the main part is shown, and the wires 23 and the like are omitted.
• the air ejection device 10 is caused to enter the storage cassette 20 by the lifting operation by the lifting device 30, and the glass on the placement portion (that is, on the wire 23 at each stage) is moved by the air ejection device 10.
• the substrate is suspended from the placement unit.
• the hand unit 4 of the transfer device C is taken out of the storage cassette 20 so as to remove the glass substrate in a floating state.
• FIG. 12 shows a state where the storage cassette 20 is positioned above the air ejection device 10 and the air ejection device 10 has not yet entered the storage cassette 20.
• a glass substrate W is placed on each stage of the storage cassette 20 shown in FIG. The glass substrate W is unloaded from the lower one.
• the lowermost glass substrate W is carried out first.
• FIG. 13 air is ejected from the ejection port 111 a of each air ejection unit 11. Further, the air actuators 13 and 16 raise the suction pad 14 and the auxiliary roller 17 at the end in the + X direction to the protruding positions, respectively, and suck air from the suction port 14a.
• line L1 indicates the position (height) in the Z direction of each upper surface 111 of each air ejection unit 11
• line L2 indicates the position in the Z direction (height) of the upper surface of the suction pad 14 and the upper end of the auxiliary roller 17 Is shown.
• the storage cassette 20 is lowered as shown in FIG. 14 by the elevating device 30 to allow the air ejection device 10 to enter the storage cassette 20, and the upper surface 111 of each air ejection unit 11 is placed at the lowest stage. It should be located at almost the same height as the part.
• the glass substrate W placed on the lowermost placing portion floats due to the ejection of air from the ejection port 111a and enters a floating state.
• the upper surface of the suction pad 14 comes into contact with the lower surface of the glass substrate W, and the glass substrate W is attracted to the suction pad 14 by suction of air from the suction port 14a.
• Suction pad 14 is glass substrate W Is not so much as to fix the glass substrate w. Further, the upper end of the auxiliary roller 17 comes into contact with the lower surface of the glass substrate W.
• the pusher 42 of the positioning device 40 is driven to move the roller 41 toward the storage cassette 20 in the Y direction.
• the height of the roller 41 in the Z direction is set slightly above the height of the upper surface 111 of each air ejection unit 11, and the glass substrate W in which the roller 41 enters the storage cassette 20 and is in a floating state W Press the edge. Thereby, the glass substrate W in a floating state is positioned. After positioning, the roller 41 returns to its original position.
• the glass substrate W When the roller 41 presses the glass substrate W, the glass substrate W may be moved suddenly depending on how each roller 41 hits the glass substrate W, and the glass substrate W may slip.
• the glass substrate W since the glass substrate W is adsorbed by the suction pad 14, the glass substrate W is supported by the suction pad 14, and resists rapid movement of the glass substrate W. Therefore, the slip of the glass substrate W can be reduced and the glass substrate W can be floated more stably.
• the linear guide 13 is driven as shown in FIG. 16, and the suction pad 14 is moved in the ⁇ X direction (the discharge direction of the glass substrate W). Since the glass substrate 14 is adsorbed by the suction pad 14 and air is ejected from the ejection port 111a of each air ejection unit 11, the glass substrate 14 moves in the -X direction as the suction pad 14 moves. To do. As a result, a part of the glass substrate 14 protrudes from the storage cassette 20 as shown in FIG. When the glass substrate W moves, the auxiliary roller 17 provided apart from the suction pad 14 in the unloading direction supports the rear part in the moving direction of the glass substrate W, so that the glass substrate W is more stably supported. Can be moved.
• the hand unit 4 of the transfer apparatus C comes to receive the glass substrate W.
• the hand unit 4 sucks and holds the lower surface of the end portion of the glass substrate W by sucking air from the suction port 4a. Since the glass substrate W is adsorbed by the suction pad 14, the glass substrate W is prevented from slipping when the hand unit 4 comes to receive the glass substrate W.
• the hand unit 4 holds the edge of the glass substrate W, the suction of air from the suction port 14a of the suction pad 14 is stopped, and the suction of the glass substrate W by the suction pad 14 is released.
• the air actuators 13 and 16 are operated to move the suction pad 14 and the auxiliary roller 16 respectively. It moves to the non-projecting position. Air ejection from the air outlet 111a of each air ejection unit 11 continues.
• the hand unit 4 of the transfer device C is moved in the X direction, and the glass substrate W is taken out from the storage cassette 20 and carried out. Also, operate the linear guide 12 to move the suction pad 14 in the + X direction and return it to its original position. In this way, carrying out of one glass substrate W is completed.
• the suction pad 14 Since the suction pad 14 is in the non-projecting position when the hand unit 4 pulls out the glass substrate W, the suction pad 14 is prevented from being rubbed against the lower surface of the glass substrate W to damage the glass substrate W. The suction pad 14 can be returned to the original position at an early stage to prepare for the next glass substrate W being carried out.
• the suction pad 14 of this embodiment moves the suction pad 14 so that the workpiece is transferred to the transfer device C by a certain amount of unloading of the glass substrate W, which is not only for preventing the glass substrate W from slipping. It can also be lubricated.
• the auxiliary roller 17 causes the upper surface 111 of the air ejection unit 11 to protrude only when auxiliary support of the glass substrate W is necessary. be able to.
• FIG. 19 is a view showing a state where the glass substrate W has been unloaded to the middle stage mounting portion.
• the air ejection device 10 enters more into the storage cassette 20. become.
• the glass substrate W is transferred from the transfer device C to the storage cassette 20, it can be performed in substantially the reverse operation as described above, and the storage cassette 20 is sequentially lifted to move the upper stage.
• the glass substrate W is carried in in order from the placement part.
• FIG. 20 is an external perspective view of a storage cassette 20 ′ that solves such a problem.
• the same components as those of the storage cassette 20 described above are denoted by the same reference numerals, and description thereof is omitted.
• the storage cassette 20 includes beam members 22d 'and 22e' in which the beam members 22d and 22e of the storage cassette 20 are extended in the ⁇ X directions, respectively, and a regulating member 26 is provided at each of both ends thereof.
• the restricting member 26 also has a flexible grease and has a plurality of comb teeth 26a that protrude in the Y direction from the rectangular frame-shaped main body portion.
• the comb teeth 26a are arranged in the vertical direction (Z direction) at the same pitch as the placement pitch of each mounting portion of the storage cassette 20 ', and the width in the Z direction is substantially the same as the thickness of the glass substrate W. .
• FIGS. 21 and 22 are enlarged sectional views of the vicinity of the comb teeth 26a of the regulating member 26 on the ⁇ X side.
• FIG. 21 shows a case where the glass substrate W is placed on the placement portion in the storage cassette 20 ′.
• there are comb teeth 26a in the ⁇ X direction of the glass substrate W and when the glass substrate W moves in the ⁇ X direction and is discharged, it interferes with the comb teeth 26a.
• the glass substrate W is restricted from moving in the unloading direction (one X direction) due to vibration or the like when the storage cassette 20 ′ is transported.
• the + X-side restricting member 26 in FIG. 20 similarly restricts the glass substrate W from moving in the + X direction due to vibrations or the like during conveyance of the storage cassette 20 ′.
• FIG. 22 shows a case where one of the glass substrates W is floating on the mounting portion in the storage cassette 20 ′. That is, the lowermost glass substrate W in the figure is in a state of being carried out.
• the glass substrate W can pass through the gap between the comb teeth 26a, and the regulating member 26 restricts the floating glass substrate W from moving in the unloading direction (X direction). do not do.
• the hand unit 4 of the transfer device C In the case of the method of holding and discharging the end of the glass substrate as in the case of the hand unit 4 of the transfer device C described above, conventionally, the hand unit slightly enters the storage cassette, and the glass substrate is removed. However, in the configuration in which the restricting member 26 is provided as in this embodiment, the hand unit 4 and the restricting member 26 interfere with each other so that the hand tube 4 cannot enter the storage cassette 20 ′. [0065] However, in this embodiment, the suction pad 14 moves in this embodiment, so that the glass substrate W can be ejected by a certain amount by the storage force setting 20 'force, and the hand unit 4 does not need to enter the storage cassette 20'. . Accordingly, it can be applied to the storage cassette 20 ′ provided with the regulating member 26.
• the suction pad 14 having the suction function is employed, but the glass substrate W is not necessarily a nod having the suction function to prevent the glass substrate from slipping, and is a pad that resists rapid movement (slip) of the glass substrate W. I just need it.
• a pad having rubber or felt cloth on the upper surface may be used. Needless to say, however, it is effective to prevent the slippage of the glass substrate.

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• 2005
  • 2005-09-29 KR KR1020087004476A patent/KR100957615B1/ko not_active Expired - Fee Related
  • 2005-09-29 JP JP2007537504A patent/JP4758432B2/ja not_active Expired - Fee Related
  • 2005-09-29 CN CN2005800516673A patent/CN101273448B/zh not_active Expired - Fee Related
  • 2005-09-29 WO PCT/JP2005/017939 patent/WO2007037005A1/ja active Application Filing
• 2006
  • 2006-09-25 TW TW095135389A patent/TW200716467A/zh not_active IP Right Cessation

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