TW200716467A - Work receiving device - Google Patents

Work receiving device

Info

Publication number
TW200716467A
TW200716467A TW095135389A TW95135389A TW200716467A TW 200716467 A TW200716467 A TW 200716467A TW 095135389 A TW095135389 A TW 095135389A TW 95135389 A TW95135389 A TW 95135389A TW 200716467 A TW200716467 A TW 200716467A
Authority
TW
Taiwan
Prior art keywords
work
receiving device
work receiving
air jetting
jetting means
Prior art date
Application number
TW095135389A
Other languages
English (en)
Other versions
TWI374109B (zh
Inventor
Makoto Fujiyoshi
Original Assignee
Hirata Spinning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Spinning filed Critical Hirata Spinning
Publication of TW200716467A publication Critical patent/TW200716467A/zh
Application granted granted Critical
Publication of TWI374109B publication Critical patent/TWI374109B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0294Vehicle bodies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
TW095135389A 2005-09-29 2006-09-25 Work receiving device TW200716467A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2005/017939 WO2007037005A1 (ja) 2005-09-29 2005-09-29 ワーク収納装置

Publications (2)

Publication Number Publication Date
TW200716467A true TW200716467A (en) 2007-05-01
TWI374109B TWI374109B (zh) 2012-10-11

Family

ID=37899444

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095135389A TW200716467A (en) 2005-09-29 2006-09-25 Work receiving device

Country Status (5)

Country Link
JP (1) JP4758432B2 (zh)
KR (1) KR100957615B1 (zh)
CN (1) CN101273448B (zh)
TW (1) TW200716467A (zh)
WO (1) WO2007037005A1 (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101126997B1 (ko) * 2008-04-15 2012-03-27 토레 엔지니어링 가부시키가이샤 판상 부재의 반송 장치 및 판상 부재의 반송 방법
KR100973190B1 (ko) * 2008-08-22 2010-07-30 주식회사 에스에프에이 기판 이송용 카세트 및 기판 이송용 로봇, 그리고 그것들을구비한 기판 이송용 카세트 시스템
KR101213052B1 (ko) * 2010-04-08 2012-12-18 주식회사 태성기연 판유리 수납장치
CN102001525B (zh) * 2010-09-30 2012-07-04 东莞宏威数码机械有限公司 锁定式升降平移传输设备
CN102092584B (zh) * 2010-09-30 2012-10-17 东莞宏威数码机械有限公司 旋转式平台传输装置
KR102052667B1 (ko) * 2015-10-27 2019-12-05 히라따기꼬오 가부시키가이샤 이송 유닛, 이동 탑재 장치 및 이동 탑재 방법
KR101895796B1 (ko) * 2016-11-14 2018-09-07 ㈜한국몰드김제 슬라이딩부를 구비한 차량용 패널 성형 장치
JP6842948B2 (ja) * 2017-02-24 2021-03-17 リンテック株式会社 位置決め装置および位置決め方法
JP7021877B2 (ja) * 2017-08-08 2022-02-17 株式会社Screenホールディングス 基板処理装置、位置合わせ装置および位置合わせ方法
KR20190059575A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치
CN109283713B (zh) * 2018-10-25 2024-07-09 Tcl王牌电器(惠州)有限公司 气浮倾斜定位机构
JP7271211B2 (ja) * 2019-02-12 2023-05-11 ニデックインスツルメンツ株式会社 基板搬送装置および基板搬送装置の制御方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0514034A (ja) * 1991-06-27 1993-01-22 Nissan Motor Co Ltd 偏波発生器
JP2003040422A (ja) 2001-07-27 2003-02-13 Toyota Industries Corp 物体浮揚搬送装置
KR101053770B1 (ko) * 2003-04-30 2011-08-02 올림푸스 가부시키가이샤 기판 부상 장치
JP4731815B2 (ja) * 2004-01-23 2011-07-27 株式会社日立プラントテクノロジー 基板収納装置

Also Published As

Publication number Publication date
JPWO2007037005A1 (ja) 2009-04-02
CN101273448A (zh) 2008-09-24
KR20080030111A (ko) 2008-04-03
CN101273448B (zh) 2010-05-12
TWI374109B (zh) 2012-10-11
WO2007037005A1 (ja) 2007-04-05
KR100957615B1 (ko) 2010-05-13
JP4758432B2 (ja) 2011-08-31

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees