KR100957615B1 - 가공대상물 수납장치 - Google Patents
가공대상물 수납장치 Download PDFInfo
- Publication number
- KR100957615B1 KR100957615B1 KR1020087004476A KR20087004476A KR100957615B1 KR 100957615 B1 KR100957615 B1 KR 100957615B1 KR 1020087004476 A KR1020087004476 A KR 1020087004476A KR 20087004476 A KR20087004476 A KR 20087004476A KR 100957615 B1 KR100957615 B1 KR 100957615B1
- Authority
- KR
- South Korea
- Prior art keywords
- air
- air blowing
- glass substrate
- storage cassette
- suction pad
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0294—Vehicle bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Manipulator (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/017939 WO2007037005A1 (ja) | 2005-09-29 | 2005-09-29 | ワーク収納装置 |
CN2005800516673A CN101273448B (zh) | 2005-09-29 | 2005-09-29 | 工件存放装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080030111A KR20080030111A (ko) | 2008-04-03 |
KR100957615B1 true KR100957615B1 (ko) | 2010-05-13 |
Family
ID=37899444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020087004476A KR100957615B1 (ko) | 2005-09-29 | 2005-09-29 | 가공대상물 수납장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4758432B2 (zh) |
KR (1) | KR100957615B1 (zh) |
CN (1) | CN101273448B (zh) |
TW (1) | TW200716467A (zh) |
WO (1) | WO2007037005A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180053897A (ko) * | 2016-11-14 | 2018-05-24 | ㈜한국몰드김제 | 슬라이딩부를 구비한 차량용 패널 성형 장치 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101126997B1 (ko) * | 2008-04-15 | 2012-03-27 | 토레 엔지니어링 가부시키가이샤 | 판상 부재의 반송 장치 및 판상 부재의 반송 방법 |
KR100973190B1 (ko) * | 2008-08-22 | 2010-07-30 | 주식회사 에스에프에이 | 기판 이송용 카세트 및 기판 이송용 로봇, 그리고 그것들을구비한 기판 이송용 카세트 시스템 |
KR101213052B1 (ko) * | 2010-04-08 | 2012-12-18 | 주식회사 태성기연 | 판유리 수납장치 |
CN102092584B (zh) * | 2010-09-30 | 2012-10-17 | 东莞宏威数码机械有限公司 | 旋转式平台传输装置 |
CN102001525B (zh) * | 2010-09-30 | 2012-07-04 | 东莞宏威数码机械有限公司 | 锁定式升降平移传输设备 |
KR102052667B1 (ko) | 2015-10-27 | 2019-12-05 | 히라따기꼬오 가부시키가이샤 | 이송 유닛, 이동 탑재 장치 및 이동 탑재 방법 |
JP6842948B2 (ja) * | 2017-02-24 | 2021-03-17 | リンテック株式会社 | 位置決め装置および位置決め方法 |
JP7021877B2 (ja) * | 2017-08-08 | 2022-02-17 | 株式会社Screenホールディングス | 基板処理装置、位置合わせ装置および位置合わせ方法 |
KR20190059575A (ko) * | 2017-11-23 | 2019-05-31 | 주식회사 탑 엔지니어링 | 기판 절단 장치 |
CN109283713A (zh) * | 2018-10-25 | 2019-01-29 | Tcl王牌电器(惠州)有限公司 | 气浮倾斜定位机构 |
JP7271211B2 (ja) * | 2019-02-12 | 2023-05-11 | ニデックインスツルメンツ株式会社 | 基板搬送装置および基板搬送装置の制御方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0514034A (ja) * | 1991-06-27 | 1993-01-22 | Nissan Motor Co Ltd | 偏波発生器 |
JP2003040422A (ja) | 2001-07-27 | 2003-02-13 | Toyota Industries Corp | 物体浮揚搬送装置 |
WO2004096679A1 (ja) * | 2003-04-30 | 2004-11-11 | Olympus Corporation | 基板浮上装置 |
JP2005075643A (ja) * | 2004-01-23 | 2005-03-24 | Hitachi Kiden Kogyo Ltd | 基板収納装置 |
-
2005
- 2005-09-29 JP JP2007537504A patent/JP4758432B2/ja not_active Expired - Fee Related
- 2005-09-29 CN CN2005800516673A patent/CN101273448B/zh not_active Expired - Fee Related
- 2005-09-29 WO PCT/JP2005/017939 patent/WO2007037005A1/ja active Application Filing
- 2005-09-29 KR KR1020087004476A patent/KR100957615B1/ko not_active IP Right Cessation
-
2006
- 2006-09-25 TW TW095135389A patent/TW200716467A/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0514034A (ja) * | 1991-06-27 | 1993-01-22 | Nissan Motor Co Ltd | 偏波発生器 |
JP2003040422A (ja) | 2001-07-27 | 2003-02-13 | Toyota Industries Corp | 物体浮揚搬送装置 |
WO2004096679A1 (ja) * | 2003-04-30 | 2004-11-11 | Olympus Corporation | 基板浮上装置 |
JP2005075643A (ja) * | 2004-01-23 | 2005-03-24 | Hitachi Kiden Kogyo Ltd | 基板収納装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180053897A (ko) * | 2016-11-14 | 2018-05-24 | ㈜한국몰드김제 | 슬라이딩부를 구비한 차량용 패널 성형 장치 |
KR101895796B1 (ko) | 2016-11-14 | 2018-09-07 | ㈜한국몰드김제 | 슬라이딩부를 구비한 차량용 패널 성형 장치 |
Also Published As
Publication number | Publication date |
---|---|
CN101273448A (zh) | 2008-09-24 |
JPWO2007037005A1 (ja) | 2009-04-02 |
JP4758432B2 (ja) | 2011-08-31 |
CN101273448B (zh) | 2010-05-12 |
WO2007037005A1 (ja) | 2007-04-05 |
KR20080030111A (ko) | 2008-04-03 |
TWI374109B (zh) | 2012-10-11 |
TW200716467A (en) | 2007-05-01 |
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |