WO2007037005A1 - Dispositif de réception de pièces de travail - Google Patents

Dispositif de réception de pièces de travail Download PDF

Info

Publication number
WO2007037005A1
WO2007037005A1 PCT/JP2005/017939 JP2005017939W WO2007037005A1 WO 2007037005 A1 WO2007037005 A1 WO 2007037005A1 JP 2005017939 W JP2005017939 W JP 2005017939W WO 2007037005 A1 WO2007037005 A1 WO 2007037005A1
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
air
glass substrate
air ejection
work
Prior art date
Application number
PCT/JP2005/017939
Other languages
English (en)
Japanese (ja)
Inventor
Makoto Fujiyoshi
Original Assignee
Hirata Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corporation filed Critical Hirata Corporation
Priority to KR1020087004476A priority Critical patent/KR100957615B1/ko
Priority to CN2005800516673A priority patent/CN101273448B/zh
Priority to JP2007537504A priority patent/JP4758432B2/ja
Priority to PCT/JP2005/017939 priority patent/WO2007037005A1/fr
Priority to TW095135389A priority patent/TW200716467A/zh
Publication of WO2007037005A1 publication Critical patent/WO2007037005A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Manipulator (AREA)

Abstract

La présente invention concerne un dispositif de réception de pièces de travail qui fait flotter de manière stable une pièce de travail dans l’air. Dans le dispositif de réception de pièces de travail, les opérations de levage et d’abaissement effectuées par un dispositif de levage entraînent l’entrée d’un dispositif de projection d’air dans une cassette de réception. Une pièce de travail à décharger à l’extérieur de la cassette de réception flotte alors grâce au dispositif de projection d’air. Le dispositif de réception de pièces de travail possède un amortisseur qui fait saillie depuis la surface supérieure du dispositif de projection d’air afin de venir au contact de la surface inférieure de la pièce de travail se trouvant dans un état flottant.
PCT/JP2005/017939 2005-09-29 2005-09-29 Dispositif de réception de pièces de travail WO2007037005A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020087004476A KR100957615B1 (ko) 2005-09-29 2005-09-29 가공대상물 수납장치
CN2005800516673A CN101273448B (zh) 2005-09-29 2005-09-29 工件存放装置
JP2007537504A JP4758432B2 (ja) 2005-09-29 2005-09-29 ワーク収納装置
PCT/JP2005/017939 WO2007037005A1 (fr) 2005-09-29 2005-09-29 Dispositif de réception de pièces de travail
TW095135389A TW200716467A (en) 2005-09-29 2006-09-25 Work receiving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2005/017939 WO2007037005A1 (fr) 2005-09-29 2005-09-29 Dispositif de réception de pièces de travail

Publications (1)

Publication Number Publication Date
WO2007037005A1 true WO2007037005A1 (fr) 2007-04-05

Family

ID=37899444

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/017939 WO2007037005A1 (fr) 2005-09-29 2005-09-29 Dispositif de réception de pièces de travail

Country Status (5)

Country Link
JP (1) JP4758432B2 (fr)
KR (1) KR100957615B1 (fr)
CN (1) CN101273448B (fr)
TW (1) TW200716467A (fr)
WO (1) WO2007037005A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101656220B (zh) * 2008-08-22 2012-07-18 Sfa工程股份有限公司 用于传送玻璃的盒和机械手、以及具有该盒和机械手的盒系统
WO2017072858A1 (fr) * 2015-10-27 2017-05-04 平田機工株式会社 Unité de transfert, appareil de transfert et procédé de transfert
JP2018139280A (ja) * 2017-02-24 2018-09-06 リンテック株式会社 位置決め装置および位置決め方法
JP2019033170A (ja) * 2017-08-08 2019-02-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、位置合わせ装置および位置合わせ方法
JP2020128290A (ja) * 2019-02-12 2020-08-27 日本電産サンキョー株式会社 基板搬送装置および基板搬送装置の制御方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101126997B1 (ko) * 2008-04-15 2012-03-27 토레 엔지니어링 가부시키가이샤 판상 부재의 반송 장치 및 판상 부재의 반송 방법
KR101213052B1 (ko) * 2010-04-08 2012-12-18 주식회사 태성기연 판유리 수납장치
CN102001525B (zh) * 2010-09-30 2012-07-04 东莞宏威数码机械有限公司 锁定式升降平移传输设备
CN102092584B (zh) * 2010-09-30 2012-10-17 东莞宏威数码机械有限公司 旋转式平台传输装置
KR101895796B1 (ko) * 2016-11-14 2018-09-07 ㈜한국몰드김제 슬라이딩부를 구비한 차량용 패널 성형 장치
KR20190059575A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004096679A1 (fr) * 2003-04-30 2004-11-11 Olympus Corporation Dispositif de levitation de substrat
JP2005075643A (ja) * 2004-01-23 2005-03-24 Hitachi Kiden Kogyo Ltd 基板収納装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0514034A (ja) * 1991-06-27 1993-01-22 Nissan Motor Co Ltd 偏波発生器
JP2003040422A (ja) 2001-07-27 2003-02-13 Toyota Industries Corp 物体浮揚搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004096679A1 (fr) * 2003-04-30 2004-11-11 Olympus Corporation Dispositif de levitation de substrat
JP2005075643A (ja) * 2004-01-23 2005-03-24 Hitachi Kiden Kogyo Ltd 基板収納装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101656220B (zh) * 2008-08-22 2012-07-18 Sfa工程股份有限公司 用于传送玻璃的盒和机械手、以及具有该盒和机械手的盒系统
WO2017072858A1 (fr) * 2015-10-27 2017-05-04 平田機工株式会社 Unité de transfert, appareil de transfert et procédé de transfert
US10919710B2 (en) 2015-10-27 2021-02-16 Hirata Corporation Transport unit, transfer apparatus, and transfer method
JP2018139280A (ja) * 2017-02-24 2018-09-06 リンテック株式会社 位置決め装置および位置決め方法
JP2019033170A (ja) * 2017-08-08 2019-02-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、位置合わせ装置および位置合わせ方法
JP7021877B2 (ja) 2017-08-08 2022-02-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、位置合わせ装置および位置合わせ方法
JP2020128290A (ja) * 2019-02-12 2020-08-27 日本電産サンキョー株式会社 基板搬送装置および基板搬送装置の制御方法
JP7271211B2 (ja) 2019-02-12 2023-05-11 ニデックインスツルメンツ株式会社 基板搬送装置および基板搬送装置の制御方法

Also Published As

Publication number Publication date
TW200716467A (en) 2007-05-01
TWI374109B (fr) 2012-10-11
JPWO2007037005A1 (ja) 2009-04-02
KR20080030111A (ko) 2008-04-03
CN101273448B (zh) 2010-05-12
KR100957615B1 (ko) 2010-05-13
CN101273448A (zh) 2008-09-24
JP4758432B2 (ja) 2011-08-31

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