JP4758432B2 - ワーク収納装置 - Google Patents

ワーク収納装置 Download PDF

Info

Publication number
JP4758432B2
JP4758432B2 JP2007537504A JP2007537504A JP4758432B2 JP 4758432 B2 JP4758432 B2 JP 4758432B2 JP 2007537504 A JP2007537504 A JP 2007537504A JP 2007537504 A JP2007537504 A JP 2007537504A JP 4758432 B2 JP4758432 B2 JP 4758432B2
Authority
JP
Japan
Prior art keywords
workpiece
air
air ejection
glass substrate
suction pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007537504A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2007037005A1 (ja
Inventor
誠 藤吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Publication of JPWO2007037005A1 publication Critical patent/JPWO2007037005A1/ja
Application granted granted Critical
Publication of JP4758432B2 publication Critical patent/JP4758432B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
JP2007537504A 2005-09-29 2005-09-29 ワーク収納装置 Expired - Fee Related JP4758432B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2005/017939 WO2007037005A1 (ja) 2005-09-29 2005-09-29 ワーク収納装置

Publications (2)

Publication Number Publication Date
JPWO2007037005A1 JPWO2007037005A1 (ja) 2009-04-02
JP4758432B2 true JP4758432B2 (ja) 2011-08-31

Family

ID=37899444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007537504A Expired - Fee Related JP4758432B2 (ja) 2005-09-29 2005-09-29 ワーク収納装置

Country Status (5)

Country Link
JP (1) JP4758432B2 (enrdf_load_stackoverflow)
KR (1) KR100957615B1 (enrdf_load_stackoverflow)
CN (1) CN101273448B (enrdf_load_stackoverflow)
TW (1) TW200716467A (enrdf_load_stackoverflow)
WO (1) WO2007037005A1 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101126997B1 (ko) * 2008-04-15 2012-03-27 토레 엔지니어링 가부시키가이샤 판상 부재의 반송 장치 및 판상 부재의 반송 방법
KR100973190B1 (ko) * 2008-08-22 2010-07-30 주식회사 에스에프에이 기판 이송용 카세트 및 기판 이송용 로봇, 그리고 그것들을구비한 기판 이송용 카세트 시스템
KR101213052B1 (ko) * 2010-04-08 2012-12-18 주식회사 태성기연 판유리 수납장치
CN102092584B (zh) * 2010-09-30 2012-10-17 东莞宏威数码机械有限公司 旋转式平台传输装置
CN102001525B (zh) * 2010-09-30 2012-07-04 东莞宏威数码机械有限公司 锁定式升降平移传输设备
KR102052667B1 (ko) 2015-10-27 2019-12-05 히라따기꼬오 가부시키가이샤 이송 유닛, 이동 탑재 장치 및 이동 탑재 방법
KR101895796B1 (ko) * 2016-11-14 2018-09-07 ㈜한국몰드김제 슬라이딩부를 구비한 차량용 패널 성형 장치
JP6842948B2 (ja) * 2017-02-24 2021-03-17 リンテック株式会社 位置決め装置および位置決め方法
JP7021877B2 (ja) * 2017-08-08 2022-02-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、位置合わせ装置および位置合わせ方法
KR20190059575A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치
CN109283713B (zh) * 2018-10-25 2024-07-09 Tcl王牌电器(惠州)有限公司 气浮倾斜定位机构
JP7271211B2 (ja) * 2019-02-12 2023-05-11 ニデックインスツルメンツ株式会社 基板搬送装置および基板搬送装置の制御方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004096679A1 (ja) * 2003-04-30 2004-11-11 Olympus Corporation 基板浮上装置
JP2005075643A (ja) * 2004-01-23 2005-03-24 Hitachi Kiden Kogyo Ltd 基板収納装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0514034A (ja) * 1991-06-27 1993-01-22 Nissan Motor Co Ltd 偏波発生器
JP2003040422A (ja) 2001-07-27 2003-02-13 Toyota Industries Corp 物体浮揚搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004096679A1 (ja) * 2003-04-30 2004-11-11 Olympus Corporation 基板浮上装置
JP2005075643A (ja) * 2004-01-23 2005-03-24 Hitachi Kiden Kogyo Ltd 基板収納装置

Also Published As

Publication number Publication date
TW200716467A (en) 2007-05-01
JPWO2007037005A1 (ja) 2009-04-02
TWI374109B (enrdf_load_stackoverflow) 2012-10-11
CN101273448A (zh) 2008-09-24
KR100957615B1 (ko) 2010-05-13
KR20080030111A (ko) 2008-04-03
CN101273448B (zh) 2010-05-12
WO2007037005A1 (ja) 2007-04-05

Similar Documents

Publication Publication Date Title
JP4378301B2 (ja) 基板処理装置及び基板処理方法及び基板処理プログラム
TWI374109B (enrdf_load_stackoverflow)
JP5152469B2 (ja) 基板搬送装置
JP2005223119A (ja) 塗布膜形成装置および塗布膜形成方法
JP5028919B2 (ja) 基板搬送装置及び基板搬送方法
JP2008166348A (ja) 基板搬送装置
JP4634265B2 (ja) 塗布方法及び塗布装置
JP5720186B2 (ja) ワーク移載装置
JP4796128B2 (ja) 移載ロボット
JP4904722B2 (ja) 基板搬送装置
KR20130090829A (ko) 기판 처리 장치 및 기판 처리 방법
WO2003037576A1 (fr) Appareil et procede de transfert de substrat
JP4933625B2 (ja) 基板搬送システム
JP5720201B2 (ja) ワーク移載装置
KR20130017443A (ko) 기판 도포 장치, 부상식 기판 반송 장치 및 부상식 기판 반송 방법
KR100633848B1 (ko) 기판 반입출 장치 및 기판 반입출 방법, 기판 반송장치 및기판 반송방법
JP6804155B2 (ja) 基板浮上搬送装置
KR101031105B1 (ko) 소형 디스플레이 패널 세정장치
JP2009032915A (ja) 基板保持装置
JP6595276B2 (ja) 基板処理装置および基板処理方法
JP2018143942A (ja) 塗布装置および塗布方法
JP2005064431A (ja) 基板搬送装置及び基板搬送方法
JP5663297B2 (ja) 塗布装置
KR100626555B1 (ko) 비금속재 절단장치
JP4316336B2 (ja) 部品実装ヘッド及び部品実装装置

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110318

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110427

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110520

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110602

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140610

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees