WO2006133798A1 - Einrichtung und verfahren zum positionieren und lageerhalten von dünnen substraten am geschnittenen substratblock - Google Patents
Einrichtung und verfahren zum positionieren und lageerhalten von dünnen substraten am geschnittenen substratblock Download PDFInfo
- Publication number
- WO2006133798A1 WO2006133798A1 PCT/EP2006/005037 EP2006005037W WO2006133798A1 WO 2006133798 A1 WO2006133798 A1 WO 2006133798A1 EP 2006005037 W EP2006005037 W EP 2006005037W WO 2006133798 A1 WO2006133798 A1 WO 2006133798A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wafer
- wafer block
- cassette
- wafers
- block
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/04—Processes
- Y10T83/0448—With subsequent handling [i.e., of product]
- Y10T83/0467—By separating products from each other
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/647—With means to convey work relative to tool station
- Y10T83/6571—With means to store work articles
Definitions
- the present invention relates to a device and a method for positioning and maintaining thin substrates, preferably silicon wafers after cutting, preferably wire sawing the substrate block, preferably silicon wafer block, according to the preamble of claim 1 or claim 17.
- wafers are cut out of silicon blocks with wire saws.
- the wafer block is first glued to a carrier glass plate, which in turn is connected to a machine carrier strip.
- a large number of sawing wires penetrate the wafer block at the same time and cut into the glass of the carrier glass plate.
- the individual wafers only stick to an adhesive seam corresponding to the wafer thickness.
- the kerf remains intact. Since it is necessary for the further process to keep the wafers constantly moist, they stick together on their sides facing away from the carrier glass plate by the liquid in tufts. For the further processing process, it is necessary to detach the wafers from the adhesive seam and to separate them.
- Mass production requires automating this process. The aim of every automated production is to maintain an existing order and position.
- the cut wafer block is not in a hanging but horizontally lying arrangement on a support arm of a Hoist kept immersed in liquid.
- the individual wafers tip off from their horizontal position around the adhesive bond with the carrier glass plate at their free end, so that they adhere there to the underlying wafer.
- the wafers are gradually separated from the carrier glass plate, they reach the entire wafer over the whole area, which makes the separation even more difficult.
- the features specified in claim 1 and the features specified in claim 17 are provided in a device and a method of the type mentioned.
- the distance between the individual wafers after the cutting of the wafer block and the position of the individual wafers at least in the area of the connection point with the carrier glass plate also remains after their detachment and so a separation or a single removal of the wafers from sliced wafer block in a simple and fast way is possible.
- the wafers can first be kept at a distance to both side edges of the wafer block in the region near the connection point, even if the individual wafers come to rest against one another at their lower edges remote from the carrier glass plate.
- the features are provided according to claim 3, so that in a simple manner, a fixation of the gaps between the wafers is possible.
- the features of claim 6 are provided. In this way, it is possible to additionally keep the individual wafers in the region of the upper end edge after detachment of the carrier glass plate at a distance. It may be appropriate to facilitate in addition to the upper Andschreibmannn also upper additional guide rails for the further processing or handling of the cut wafer block within the cassette.
- any of claims 15 and / or 16 allow for singulating and removing the wafers from the cassette, either vertically or horizontally, depending on whether the top of the cassette or one of the longitudinal sides of the inverted or rotated cassette remains open . becomes.
- the isolated wafer can according to claim 18 after the
- the wafers are advantageously singled out in one direction and removed from the cut wafer block, which coincides with the profile of the grooves resulting in the sawing of the wafer block in the surfaces of the individual wafers, which causes friction - And toothing-free movement when separating and removing the individual wafer guaranteed.
- This can be done either in a lateral, that is horizontal direction, or according to claim 20 after a 90 a rotation in the vertical direction, so that the predetermined for the insertion of the wafer block reference point remains.
- FIG. 1 is a schematic front view of a cut wafer block, as accommodated in a fixing cassette and still connected to a carrier glass plate;
- FIG. 7 is a front view of the wafer block removed from the carrier glass plate in the cassette with a spraying device arranged above the individual wafers and a vacuum tweezers for separating the cut wafer block and removing the wafers from the cassette according to a first exemplary embodiment of the present invention
- FIG. 8 is a sectional view corresponding to the representation of FIG. 2, but according to a second exemplary embodiment of the present invention.
- the device 10 or 10 'shown in the drawing serves to position and position thin substrates, preferably thin silicon wafers 14, after cutting, preferably wire-sawing, a substrate block, preferably a silicon wafer block 13.
- the wafer block 13 is together with a still glued attached carrier glass plate 11 which is fixed to a machine support plate 12, by means of Wire saws cut evenly into thin maximum 0.3 mm thick wafer 14 to the surface of the carrier glass plate 11.
- the device 10 or 10 ' serves to separate the wafer 14 from the wafer block 13 in a simple and fast manner and to supply it to further processing.
- the wafers 14 of the cut wafer block 13 are inserted into a cassette 17 suspended from the support glass plate 11.
- the wafers 14 are still arranged at their connection splices 25 at a distance from the resulting saw gap 15, while they are connected in tufts with their adjacent wafers 14 in the region of their lower edges 26 facing away from the splice adhesion points 25 (FIG. 1).
- the cassette 17 has an open from its top side in cross-section U-shaped construction, in which at both ends a respective U-shaped frame part 27.1 and 27.2 is provided which is arranged parallel to the wafers 14 and their shegespalte 15.
- the distance between the two frame parts 27.1 and 27.2 is slightly larger than the dimension of the wafer block 13 or the carrier glass plate 11.
- the two frame parts 27.1 and 27.2 are on the one hand by round bars designed as lateral guide rails 18.1 and 18.2 and on the other hand also designed as round bars bottom support bars 19.1 and kept 19.2 at a distance.
- the distance of the opposing guide rails 18.1 and 18.2 arranged in the upper area of the frame parts 27.1 corresponds to the width of the wafer 14 or of the wafer block 13 so that the cut wafer block 13 fits into the interior of the cassette from the top side of the cassette 17 can be.
- the bottom support bars 19.1 and 19.2 serve as a support of the lower edges 26 of the wafer 14, so have a corresponding horizontal distance from each other.
- the wafer block 13 is located over a substantial length within the cartridge 17th In an upper region of the two frame parts 27.1 and 27.2 and above the two guide rails 18.1 and 18.2 opposing Andrückrucn 20.1 and 20.2 are held in the horizontal direction movable.
- the pressure bars 20.1 and 20.2 which are held movable relative to one another in the direction of the arrows A, serve to position and maintain the position of the wafer 14 suspended from the support glass plate 11 and thus to fix or maintain the saw gap 15 between the wafers 14 in a region below the connection adhesion points 25 to obtain.
- the pressure bars 20.1 and 20.2 are moved in the direction of the arrow A towards the side edges 28 of the wafer 14, so that the wafers 14 are shown in the manner shown in FIG be kept in this area at a distance.
- the Andschreibancen 20.1 and 20.2. can be formed in different ways, as shown in Figures 3 to 6.
- Each Andschreibor 20 has the wafer block 13 and the wafers 14 facing essays 32, 33, 34 and 36, which are able to press into the still present in this area thin kerf 15 or push and thus the wafer 14 at Keep this point at a distance and to give them a lateral grip, if in a subsequent step, the support glass plate 11 with the machine support bar 12 after removal or detachment of the adhesive at the Vietnamesesklederellen 25 removed or removed.
- the elastic attachment 32 has horizontally forwardly spaced triangular or wedge-shaped webs 37.
- the attachment 33 has a resilient blade 38 as a distance-retaining and holding element.
- the attachment 34 is in FIG Formed a plastic bead 39, which is introduced in a groove of the pressure strip 20 and protrudes beyond the front edge thereof.
- the lamella 38 or the bead 39 deforms in such a way that it is pressed in regions between the wafers 14 and into their saw gaps 15.
- the attachment 36 has a brush strip 40 which, by pivoting the pressure strip 20 in the direction of the arrow B, is brought to the side edges 28 of the wafer 14 in such a way that bristles 41 reach the saw gaps 15 in certain regions.
- a sprayer 48 provided with a plurality of nozzle members 49 is positioned above the upper edge 29 of the wafer 14.
- the wafers 14 are sprinkled with a liquid which reaches into the kerfs 15 in the region of the upper edges of the wafers 14 and thereby the wafers 14 are opened along their lower edge, over which the wafers 14 hang one another in tufts, so that also there again a small gap arises.
- a vacuum tweezers 50 Adjacent to one of the frame parts 27.1 and 27.2 is a vacuum tweezers 50, with which the individual wafers 14 can be separated in a large area and removed from the cut block. In the embodiment of Figure 7, this is in the direction of arrow C, i. over the open upper side of the cartridge 17 away.
- Figure 8 shows a second preferred embodiment of the present invention, in which device 10 'the cassette 17' is substantially the same is formed, ie, with frame members 27 '.1 and 27' .2, with guide rails 18 '.1 and 18' .2 and support beams 19 '.1 and 19' .2 and with in the upper part of the cassette 17 and above the Guide rails 18 'arranged Andschreibartn 20'.1 and 20'.2 is provided.
- the wafers 14 formed by the cutting (wire sawing) of the wafer block 13 are suspended over the bonding glass plates 11 on the support glass plate 11 via the open top side of the cassette 17 'until they rest on the support struts 19' .1 and 19 '.2 used.
- one or more juxtaposed upper Andschreibn 55 are brought over the upper edges 29 of the wafer 14 and placed in the vertical direction according to arrow D on this such that the upper edges 29 of the wafer 14 are held in position and location.
- These one or more upper Andschreibnchn 55 may have a corresponding in the Andschreibangn 20 'embodiment; in any case, they are designed such that they have distancing and holding attachments 56 which maintain the sawing gaps 15 in this upper region.
- one or more additional upper guide rails 58 ' may be disposed adjacent.
- a spraying device 48 with nozzles 49 can be arranged between the upper pressure bars 55 and the upper guide bars 58 in a manner not shown, which serve to open or separate the adjoining wafers 14 in the region of their lower edge 26.
- the cassette 17' is opened at one of the two side areas.
- the guide rail 18 '.2 and the Andrückology 20' .2 from the side region of the cassette 17 'removable or movable such that this side of the cassette 17' is opened.
- a vacuum tweezers 50 ' covers the individual wafers 14 over a large area. According to FIG. 8, the vacuum tweezers 50 'can move each individual wafer 14 in the direction of the arrow E in the horizontal direction out of the now open side of the cassette 17'.
- the device 10 'or the cassette 17' according to the dot-dashed arrow F is rotated by 90 2 , so that the wafer 14 by the vacuum tweezers 50 'according to the embodiment of Figure 7 in the vertical direction 6 are moved out of the cassette 17 ', so that the reference plane or the reference point corresponding to the insertion of the cut wafer block 13 remains.
- the movement of the individual wafers 14 relative to each other is in both cases different from the embodiment according to FIG. 7 in a direction parallel to grooves formed by the wire sawing on the surfaces of the wafers 14.
- the movement of the wafers 14 with the help of the vacuum tweezers 50 takes place transversely to the direction of possible grooves in the wafer surfaces, which entails rubbing against each other and thus obstructing the separation.
- the moving out of the wafer 14 by means of the vacuum tweezers 50 'from the cassette 17' is guided and facilitated by the mutually opposite support members 19 '.1, 19' .2 and the at least one upper guide rail 58 '.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Sewing Machines And Sewing (AREA)
- Vehicle Body Suspensions (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Supplying Of Containers To The Packaging Station (AREA)
- Vending Machines For Individual Products (AREA)
Abstract
Description
Claims
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200650005299 DE502006005299D1 (de) | 2005-06-13 | 2006-05-26 | Einrichtung zum positionieren und lageerhalten von |
EP20060753899 EP1901897B1 (de) | 2005-06-13 | 2006-05-26 | Einrichtung zum positionieren und lageerhalten von dünnen substraten am geschnittenen substratblock |
JP2008516159A JP2008544506A (ja) | 2005-06-13 | 2006-05-26 | 切断された基板ブロックへ薄い基板を位置決め及びブロック化するための装置及び方法 |
AU2006257479A AU2006257479A1 (en) | 2005-06-13 | 2006-05-26 | Device and method for positioning and blocking thin substrates on a cut substrate block |
AT06753899T ATE447468T1 (de) | 2005-06-13 | 2006-05-26 | Einrichtung zum positionieren und lageerhalten von dünnen substraten am geschnittenen substratblock |
US11/921,958 US7766001B2 (en) | 2005-06-13 | 2006-05-26 | Device and method for positioning and blocking thin substrates on a cut substrate block |
DE200620020613 DE202006020613U1 (de) | 2005-06-13 | 2006-05-26 | Einrichtung zum Positionieren und Lageerhalten von dünnen Substraten am geschnittenen Substralblock |
KR1020087000514A KR101319669B1 (ko) | 2005-06-13 | 2006-05-26 | 절단된 기판 블록에 박판을 배치하고 블록킹하는 장치 및 그의 방법 |
CN2006800208094A CN101193732B (zh) | 2005-06-13 | 2006-05-26 | 用于定位和保持切开的衬底块上的薄衬底的装置和方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005028112A DE102005028112A1 (de) | 2005-06-13 | 2005-06-13 | Verfahren zur Positionierung und Lageerhaltung von Substraten, insbesondere von dünnen Siliziumwafern nach dem Drahtsägen zu deren Vereinzelung |
DE102005028112.5 | 2005-06-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006133798A1 true WO2006133798A1 (de) | 2006-12-21 |
Family
ID=36756622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2006/005037 WO2006133798A1 (de) | 2005-06-13 | 2006-05-26 | Einrichtung und verfahren zum positionieren und lageerhalten von dünnen substraten am geschnittenen substratblock |
Country Status (11)
Country | Link |
---|---|
US (1) | US7766001B2 (de) |
EP (2) | EP2127838B1 (de) |
JP (1) | JP2008544506A (de) |
KR (1) | KR101319669B1 (de) |
CN (1) | CN101193732B (de) |
AT (2) | ATE494116T1 (de) |
AU (1) | AU2006257479A1 (de) |
DE (4) | DE102005028112A1 (de) |
ES (2) | ES2336362T3 (de) |
RU (1) | RU2007145099A (de) |
WO (1) | WO2006133798A1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008004548A1 (de) * | 2008-01-15 | 2009-07-16 | Rec Scan Wafer As | Waferstapelreinigung |
DE102008037652A1 (de) | 2008-08-14 | 2010-04-29 | Wacker Schott Solar Gmbh | Träger, Verfahren und Vorrichtung zum Herstellen von Wafern sowie Verwendung der hergestellten Wafer |
DE102008045990A1 (de) | 2008-09-05 | 2010-03-11 | Wacker Schott Solar Gmbh | Vorrichtung und Verfahren zur Behandlung eines Waferkamms |
DE102008053598A1 (de) * | 2008-10-15 | 2010-04-22 | Gebr. Schmid Gmbh & Co. | Verfahren zum Lösen von Wafern von einem Waferträger und Vorrichtung dafür |
DE102008053597A1 (de) | 2008-10-15 | 2010-04-22 | Gebr. Schmid Gmbh & Co. | Reinigungsvorrichtung für einen Waferblock |
DE102008053596A1 (de) | 2008-10-15 | 2010-04-22 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Reinigung eines Waferblocks sowie Trägereinrichtung für einen Waferblock |
DE102008060014A1 (de) | 2008-11-24 | 2010-05-27 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Handhabung eines zersägten Waferblocks |
DE102008060012A1 (de) * | 2008-11-24 | 2010-05-27 | Gebr. Schmid Gmbh & Co. | Verfahren zum Drehen eines zersägten Waferblocks und Vorrichtung dafür |
DE102009023122A1 (de) * | 2009-05-22 | 2010-11-25 | Gebr. Schmid Gmbh & Co. | Träger für einen Siliziumblock sowie Herstellungsverfahren eines solchen Trägers |
DE102009040503A1 (de) * | 2009-08-31 | 2011-03-03 | Gebr. Schmid Gmbh & Co. | Verfahren zur Herstellung von Wafern |
DE102010022289A1 (de) * | 2009-09-17 | 2011-05-26 | Gebrüder Decker GmbH & Co. KG | Vorrichtung und Verfahren zum Reinigen von Wafern II |
GB0919379D0 (en) * | 2009-11-04 | 2009-12-23 | Edwards Chemical Man Europ Ltd | Wafer prcessing |
DE102010050897B4 (de) * | 2010-07-09 | 2014-05-22 | Interpane Entwicklungs-Und Beratungsgesellschaft Mbh | Trägervorrichtung und Verfahren zum Schneiden eines an der Trägervorrichtung befestigten Materialblocks |
DE102010031364A1 (de) * | 2010-07-15 | 2012-01-19 | Gebr. Schmid Gmbh & Co. | Träger für einen Siliziumblock, Trägeranordnung mit einem solchen Träger und Verfahren zur Herstellung einer solchen Trägeranordnung |
DE102010045098A1 (de) * | 2010-09-13 | 2012-03-15 | Rena Gmbh | Vorrichtung und Verfahren zum Vereinzeln und Transportieren von Substraten |
DE102011018523A1 (de) * | 2011-03-23 | 2012-09-27 | Schott Solar Ag | Herstellung von gesägten Wafern durch Vereinzelung mit einem kalten Fluid |
EP2711979A1 (de) | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Wafer-Schneidsystem |
EP2711151A1 (de) * | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Verfahren zur Herstellung von Wafern |
EP2711978A1 (de) | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Verfahren zur Herstellung von Wafern |
EP2720258A1 (de) | 2012-10-12 | 2014-04-16 | Meyer Burger AG | System zur Handhabung von Wafern |
EP2944444A1 (de) | 2014-05-16 | 2015-11-18 | Meyer Burger AG | Waferverarbeitungsverfahren |
CN104129003A (zh) * | 2014-07-29 | 2014-11-05 | 江苏美科硅能源有限公司 | 一种硅片切割用粘接工装 |
JP6699196B2 (ja) * | 2016-01-22 | 2020-05-27 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
JP6668776B2 (ja) * | 2016-01-22 | 2020-03-18 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
KR102165569B1 (ko) * | 2018-10-15 | 2020-10-14 | 세메스 주식회사 | 다이 이젝팅 장치 |
CN109356492A (zh) * | 2018-11-02 | 2019-02-19 | 佛山市观景门窗科技有限公司 | 加强抗风压和密封性能的新型玻璃垫块及隔音玻璃 |
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EP0762483A1 (de) * | 1995-09-06 | 1997-03-12 | Nippei Toyama Corporation | Plättchenbehandlungssystem |
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US20040159316A1 (en) * | 2003-01-13 | 2004-08-19 | Andreas Muller | Wire sawing device |
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JPH0826380A (ja) * | 1994-05-10 | 1996-01-30 | Toshio Ishikawa | 基板用カセットにおけるサイドレール及び基板用カセット |
DE69526038T2 (de) * | 1994-12-15 | 2002-10-31 | Sharp Kk | Drahtgittersäge und Sägeverfahren |
AU8850898A (en) * | 1997-09-10 | 1999-03-29 | Tec-Sem Ag | Transfer device for semiconductor wafers |
DE19900671C2 (de) * | 1999-01-11 | 2002-04-25 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zum Vereinzeln von scheibenförmigen Substraten, insbesondere zur Waferherstellung |
DE19904834A1 (de) * | 1999-02-07 | 2000-08-10 | Acr Automation In Cleanroom | Vorrichtung zum Ablösen, Vereinzeln und Einlagern von dünnen, bruchempfindlichen scheibenförmigen Substraten |
TW434668B (en) * | 2000-01-27 | 2001-05-16 | Ind Tech Res Inst | Wafer rinse apparatus and rinse method of the same |
DE10210271A1 (de) * | 2002-03-08 | 2003-10-02 | Infineon Technologies Ag | Hordenanordnung, Hordenhalter und Verfahren |
-
2005
- 2005-06-13 DE DE102005028112A patent/DE102005028112A1/de not_active Withdrawn
-
2006
- 2006-05-26 US US11/921,958 patent/US7766001B2/en not_active Expired - Fee Related
- 2006-05-26 ES ES06753899T patent/ES2336362T3/es active Active
- 2006-05-26 AU AU2006257479A patent/AU2006257479A1/en not_active Abandoned
- 2006-05-26 EP EP20090011321 patent/EP2127838B1/de not_active Revoked
- 2006-05-26 WO PCT/EP2006/005037 patent/WO2006133798A1/de active Application Filing
- 2006-05-26 KR KR1020087000514A patent/KR101319669B1/ko active IP Right Grant
- 2006-05-26 JP JP2008516159A patent/JP2008544506A/ja active Pending
- 2006-05-26 ES ES09011321T patent/ES2359384T3/es active Active
- 2006-05-26 EP EP20060753899 patent/EP1901897B1/de not_active Not-in-force
- 2006-05-26 DE DE200650005299 patent/DE502006005299D1/de active Active
- 2006-05-26 DE DE200620020613 patent/DE202006020613U1/de not_active Expired - Lifetime
- 2006-05-26 AT AT09011321T patent/ATE494116T1/de active
- 2006-05-26 DE DE200650008686 patent/DE502006008686D1/de active Active
- 2006-05-26 AT AT06753899T patent/ATE447468T1/de active
- 2006-05-26 CN CN2006800208094A patent/CN101193732B/zh not_active Expired - Fee Related
- 2006-05-26 RU RU2007145099/03A patent/RU2007145099A/ru unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0762483A1 (de) * | 1995-09-06 | 1997-03-12 | Nippei Toyama Corporation | Plättchenbehandlungssystem |
DE19950068A1 (de) * | 1999-10-16 | 2001-04-26 | Acr Automation In Cleanroom | Vorrichtung und Verfahren zum Vereinzeln und Ablösen von dünnen, bruchempfindlichen, scheibenförmigen Substraten mit unterschiedlichem Format |
US20040159316A1 (en) * | 2003-01-13 | 2004-08-19 | Andreas Muller | Wire sawing device |
Also Published As
Publication number | Publication date |
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ATE447468T1 (de) | 2009-11-15 |
RU2007145099A (ru) | 2009-07-20 |
KR20080038296A (ko) | 2008-05-06 |
ATE494116T1 (de) | 2011-01-15 |
AU2006257479A1 (en) | 2006-12-21 |
US20090232627A1 (en) | 2009-09-17 |
EP2127838B1 (de) | 2011-01-05 |
DE502006008686D1 (de) | 2011-02-17 |
JP2008544506A (ja) | 2008-12-04 |
DE202006020613U1 (de) | 2009-03-05 |
KR101319669B1 (ko) | 2013-10-17 |
DE502006005299D1 (de) | 2009-12-17 |
EP1901897A1 (de) | 2008-03-26 |
CN101193732A (zh) | 2008-06-04 |
CN101193732B (zh) | 2011-12-21 |
EP2127838A1 (de) | 2009-12-02 |
EP1901897B1 (de) | 2009-11-04 |
DE102005028112A1 (de) | 2006-12-21 |
ES2359384T3 (es) | 2011-05-23 |
ES2336362T3 (es) | 2010-04-12 |
US7766001B2 (en) | 2010-08-03 |
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