WO2005121889A3 - Techniques de modulation pour modulateur acousto-optique destinees a ameliorer les performances d'un systeme laser - Google Patents

Techniques de modulation pour modulateur acousto-optique destinees a ameliorer les performances d'un systeme laser Download PDF

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Publication number
WO2005121889A3
WO2005121889A3 PCT/US2005/019775 US2005019775W WO2005121889A3 WO 2005121889 A3 WO2005121889 A3 WO 2005121889A3 US 2005019775 W US2005019775 W US 2005019775W WO 2005121889 A3 WO2005121889 A3 WO 2005121889A3
Authority
WO
WIPO (PCT)
Prior art keywords
facilitate
modulation techniques
aom
pulse
system performance
Prior art date
Application number
PCT/US2005/019775
Other languages
English (en)
Other versions
WO2005121889A2 (fr
Inventor
Jay Johnson
David Watt
Brian Baird
Richard Harris
Original Assignee
Electro Scient Ind Inc
Jay Johnson
David Watt
Brian Baird
Richard Harris
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/138,659 external-priority patent/US7133188B2/en
Application filed by Electro Scient Ind Inc, Jay Johnson, David Watt, Brian Baird, Richard Harris filed Critical Electro Scient Ind Inc
Priority to DE112005001324T priority Critical patent/DE112005001324T5/de
Priority to GB0623494A priority patent/GB2428399B/en
Priority to CN2005800233157A priority patent/CN101035647B/zh
Priority to JP2007515671A priority patent/JP4791457B2/ja
Priority to KR1020067025776A priority patent/KR101290665B1/ko
Publication of WO2005121889A2 publication Critical patent/WO2005121889A2/fr
Publication of WO2005121889A3 publication Critical patent/WO2005121889A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

Selon l'invention, les techniques de contrôle numérique de fréquence et/ou de modulation d'amplitude d'un modulateur acousto-optique (60) intracavité et/ou extracavité : facilitent sensiblement l'extinction complète d'un faisceau laser (90), afin d'empêcher une énergie laser indésirable d'empiéter sur une pièce à travailler (80) ; favorisent la stabilité d'amplitude d'impulsions laser par un contrôle en boucle fermée d'une énergie laser à impulsions successives ; facilitent le contrôle de placement de faisceau, entre autres le contrôle en boucle fermée pour des applications telles que la correction d'erreurs d'alignement, la rectification de trajet de faisceau ou le placement tertiaire ; et facilitent l'utilisation d'au moins un transducteur sur un modulateur acousto-optique (60) pour réaliser les applications susmentionnées.
PCT/US2005/019775 2004-06-07 2005-06-06 Techniques de modulation pour modulateur acousto-optique destinees a ameliorer les performances d'un systeme laser WO2005121889A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE112005001324T DE112005001324T5 (de) 2004-06-07 2005-06-06 AOM-Modulationstechniken zur Verbesserung von Lasersystemleistung
GB0623494A GB2428399B (en) 2004-06-07 2005-06-06 AOM modulation techniques for improving laser system performance
CN2005800233157A CN101035647B (zh) 2004-06-07 2005-06-06 用于提高激光系统性能的声光调制器调制技术
JP2007515671A JP4791457B2 (ja) 2004-06-07 2005-06-06 レーザシステム性能を改善するためのａｏｍ変調技術
KR1020067025776A KR101290665B1 (ko) 2004-06-07 2005-06-06 레이저 시스템 성능 향상을 위한 ａｏｍ 변조 기술

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
US57779604P 2004-06-07 2004-06-07
US60/577,796 2004-06-07
US11/138,659 US7133188B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing an upstream Bragg adjustment device
US11/138,657 2005-05-25
US11/138,076 US7133187B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing plurality of transducers to improve laser system performance
US11/138,657 US7133182B2 (en) 2004-06-07 2005-05-25 AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systems
US11/138,075 2005-05-25
US11/138,662 2005-05-25
US11/138,076 2005-05-25
US11/138,078 US7027199B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques for facilitating pulse-to-pulse energy stability in laser systems
US11/138,659 2005-05-25
US11/138,662 US7019891B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing plurality of tilt-angled transducers to improve laser system performance
US11/138,078 2005-05-25
US11/138,075 US7133186B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing transducers to modulate different axes

Publications (2)

Publication Number Publication Date
WO2005121889A2 WO2005121889A2 (fr) 2005-12-22
WO2005121889A3 true WO2005121889A3 (fr) 2006-10-19

Family

ID=35503778

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/019775 WO2005121889A2 (fr) 2004-06-07 2005-06-06 Techniques de modulation pour modulateur acousto-optique destinees a ameliorer les performances d'un systeme laser

Country Status (5)

Country Link
JP (2) JP4791457B2 (fr)
KR (1) KR101290665B1 (fr)
DE (1) DE112005001324T5 (fr)
GB (1) GB2428399B (fr)
WO (1) WO2005121889A2 (fr)

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GB0617945D0 (en) * 2006-09-12 2006-10-18 Ucl Business Plc Imaging apparatus and methods
TWI594828B (zh) 2009-05-28 2017-08-11 伊雷克托科學工業股份有限公司 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法
CN110039173B (zh) 2010-10-22 2021-03-23 伊雷克托科学工业股份有限公司 用于光束抖动和刮削的镭射加工系统和方法
DE112012002844T5 (de) * 2011-07-05 2014-04-24 Electronic Scientific Industries, Inc. Verfahren zur Laserbearbeitung mit einem thermisch stabilisierten akustooptischen Strahlablenker und thermisch stabilisiertes Hochgeschwindigkeits-Laserbearbeitungssystem
US8848277B2 (en) * 2012-05-31 2014-09-30 Asml Netherlands B.V. System and method for protecting a seed laser in an EUV light source with a Bragg AOM
JP6516722B2 (ja) * 2013-03-15 2019-05-22 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド ビームポジショナのレーザ出射に基づく制御
DE102014013567B3 (de) * 2014-09-18 2015-10-08 Iai Industrial Systems B.V. Gütegeschaltetes CO2-Laser-Materialbearbeitungssystem mit akustooptischen Modulatoren
JP6487184B2 (ja) * 2014-11-10 2019-03-20 株式会社ディスコ レーザー発振機構
DE102015213468A1 (de) * 2015-07-17 2017-01-19 Trumpf Laser Gmbh Strahlmodulator mit Frequenzkonversion sowie zugehöriges Verfahren und Laserbearbeitungsmaschine
US10423047B2 (en) * 2016-07-27 2019-09-24 Coherent, Inc. Laser machining method and apparatus
DE102016125630B4 (de) 2016-12-23 2022-07-28 Leica Microsystems Cms Gmbh Optische Anordnung und Verfahren zur Beeinflussung der Strahlrichtung mindestens eines Lichtstrahls
KR101868295B1 (ko) * 2017-11-16 2018-07-17 윤태중 레이저 최대출력 증폭장치 및 방법
US11033981B2 (en) * 2018-07-23 2021-06-15 University Of Maryland, College Park Acousto-optic modulator configurations for quantum processing
US11374375B2 (en) 2019-08-14 2022-06-28 Kla Corporation Laser closed power loop with an acousto-optic modulator for power modulation
WO2021069873A1 (fr) * 2019-10-09 2021-04-15 Mbda Uk Limited Dispositif acousto-optique et procédé
DE102022119609A1 (de) 2022-08-04 2024-02-15 Trumpf Laser Gmbh Lasersystem und Verfahren zur Bereitstellung eines zur Wechselwirkung mit einem Targetmaterial vorgesehenen gepulsten Laserstrahls
US11813697B1 (en) * 2023-04-07 2023-11-14 Intraaction Corp Laser methods of fabrication of clothing

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US5197074A (en) * 1991-12-26 1993-03-23 Electro Scientific Industries, Inc. Multi-function intra-resonator loss modulator and method of operating same
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US20030086447A1 (en) * 1998-10-21 2003-05-08 Eddie H. Young High loss modulation acousto-optic q-switch for high power multimode laser
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Also Published As

Publication number Publication date
DE112005001324T5 (de) 2007-08-23
JP5492763B2 (ja) 2014-05-14
JP2011085952A (ja) 2011-04-28
JP2008502010A (ja) 2008-01-24
GB2428399B (en) 2010-05-05
KR20070030210A (ko) 2007-03-15
JP4791457B2 (ja) 2011-10-12
KR101290665B1 (ko) 2013-07-30
WO2005121889A2 (fr) 2005-12-22
GB0623494D0 (en) 2007-01-03
GB2428399A (en) 2007-01-31

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