GB2428399A - Aom modulation techniques for improving laser system performance - Google Patents
Aom modulation techniques for improving laser system performance Download PDFInfo
- Publication number
- GB2428399A GB2428399A GB0623494A GB0623494A GB2428399A GB 2428399 A GB2428399 A GB 2428399A GB 0623494 A GB0623494 A GB 0623494A GB 0623494 A GB0623494 A GB 0623494A GB 2428399 A GB2428399 A GB 2428399A
- Authority
- GB
- United Kingdom
- Prior art keywords
- facilitate
- modulation techniques
- aom
- pulse
- system performance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
Abstract
Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.
Description
GB 2428399 A continuation (72) Inventor(s): Jay Johnson David Watt Brian
Baird Richard Harris (74) Agent and/or Address for Service: Forrester Ketley & Co Forrester House, 52 Bounds Green Road, LONDON, Nil 2EV, United Kingdom
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57779604P | 2004-06-07 | 2004-06-07 | |
US11/138,659 US7133188B2 (en) | 2004-06-07 | 2005-05-25 | AOM modulation techniques employing an upstream Bragg adjustment device |
US11/138,076 US7133187B2 (en) | 2004-06-07 | 2005-05-25 | AOM modulation techniques employing plurality of transducers to improve laser system performance |
US11/138,662 US7019891B2 (en) | 2004-06-07 | 2005-05-25 | AOM modulation techniques employing plurality of tilt-angled transducers to improve laser system performance |
US11/138,075 US7133186B2 (en) | 2004-06-07 | 2005-05-25 | AOM modulation techniques employing transducers to modulate different axes |
US11/138,078 US7027199B2 (en) | 2004-06-07 | 2005-05-25 | AOM modulation techniques for facilitating pulse-to-pulse energy stability in laser systems |
US11/138,657 US7133182B2 (en) | 2004-06-07 | 2005-05-25 | AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systems |
PCT/US2005/019775 WO2005121889A2 (en) | 2004-06-07 | 2005-06-06 | Aom modulation techniques for improving laser system performance |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0623494D0 GB0623494D0 (en) | 2007-01-03 |
GB2428399A true GB2428399A (en) | 2007-01-31 |
GB2428399B GB2428399B (en) | 2010-05-05 |
Family
ID=35503778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0623494A Expired - Fee Related GB2428399B (en) | 2004-06-07 | 2005-06-06 | AOM modulation techniques for improving laser system performance |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP4791457B2 (en) |
KR (1) | KR101290665B1 (en) |
DE (1) | DE112005001324T5 (en) |
GB (1) | GB2428399B (en) |
WO (1) | WO2005121889A2 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0617945D0 (en) * | 2006-09-12 | 2006-10-18 | Ucl Business Plc | Imaging apparatus and methods |
TWI523720B (en) | 2009-05-28 | 2016-03-01 | 伊雷克托科學工業股份有限公司 | Acousto-optic deflector applications in laser processing of features in a workpiece, and related laser processing method |
JP6055414B2 (en) | 2010-10-22 | 2016-12-27 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | Laser processing system and method for beam dithering and skiving |
CN104159697B (en) * | 2011-07-05 | 2017-02-15 | 伊雷克托科学工业股份有限公司 | The system and method for temperature stability is in use provided for acousto-optic beam deflector and acousto-optic modulator |
US8848277B2 (en) * | 2012-05-31 | 2014-09-30 | Asml Netherlands B.V. | System and method for protecting a seed laser in an EUV light source with a Bragg AOM |
CN105102174B (en) * | 2013-03-15 | 2017-05-31 | 伊雷克托科学工业股份有限公司 | Based on the beam positioner that laser radiation is controlled |
DE102014013567B3 (en) * | 2014-09-18 | 2015-10-08 | Iai Industrial Systems B.V. | Q-switched CO2 laser material processing system with acousto-optic modulators |
JP6487184B2 (en) * | 2014-11-10 | 2019-03-20 | 株式会社ディスコ | Laser oscillation mechanism |
DE102015213468A1 (en) * | 2015-07-17 | 2017-01-19 | Trumpf Laser Gmbh | Beam modulator with frequency conversion and associated method and laser processing machine |
US10423047B2 (en) * | 2016-07-27 | 2019-09-24 | Coherent, Inc. | Laser machining method and apparatus |
DE102016125630B4 (en) | 2016-12-23 | 2022-07-28 | Leica Microsystems Cms Gmbh | Optical arrangement and method for influencing the beam direction of at least one light beam |
KR101868295B1 (en) * | 2017-11-16 | 2018-07-17 | 윤태중 | Apparatus and Method for amplifying maximum output of laser |
US11033981B2 (en) * | 2018-07-23 | 2021-06-15 | University Of Maryland, College Park | Acousto-optic modulator configurations for quantum processing |
US11374375B2 (en) | 2019-08-14 | 2022-06-28 | Kla Corporation | Laser closed power loop with an acousto-optic modulator for power modulation |
US20240069406A1 (en) * | 2019-10-09 | 2024-02-29 | Mbda Uk Limited | Acousto-optic device and method |
DE102022119609A1 (en) | 2022-08-04 | 2024-02-15 | Trumpf Laser Gmbh | Laser system and method for providing a pulsed laser beam intended to interact with a target material |
US11813697B1 (en) * | 2023-04-07 | 2023-11-14 | Intraaction Corp | Laser methods of fabrication of clothing |
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US5197074A (en) * | 1991-12-26 | 1993-03-23 | Electro Scientific Industries, Inc. | Multi-function intra-resonator loss modulator and method of operating same |
US5751585A (en) * | 1995-03-20 | 1998-05-12 | Electro Scientific Industries, Inc. | High speed, high accuracy multi-stage tool positioning system |
US5837962A (en) * | 1996-07-15 | 1998-11-17 | Overbeck; James W. | Faster laser marker employing acousto-optic deflection |
US5847960A (en) * | 1995-03-20 | 1998-12-08 | Electro Scientific Industries, Inc. | Multi-tool positioning system |
US6339604B1 (en) * | 1998-06-12 | 2002-01-15 | General Scanning, Inc. | Pulse control in laser systems |
US6341029B1 (en) * | 1999-04-27 | 2002-01-22 | Gsi Lumonics, Inc. | Method and apparatus for shaping a laser-beam intensity profile by dithering |
US6407363B2 (en) * | 2000-03-30 | 2002-06-18 | Electro Scientific Industries, Inc. | Laser system and method for single press micromachining of multilayer workpieces |
US6430465B2 (en) * | 2000-01-11 | 2002-08-06 | Electro Scientific Industries, Inc. | Abbe error correction system and method |
US20020117481A1 (en) * | 2001-02-16 | 2002-08-29 | Mark Unrath | On-the-fly beam path error correction for memory link processing |
US20030086447A1 (en) * | 1998-10-21 | 2003-05-08 | Eddie H. Young | High loss modulation acousto-optic q-switch for high power multimode laser |
US6706999B1 (en) * | 2003-02-24 | 2004-03-16 | Electro Scientific Industries, Inc. | Laser beam tertiary positioner apparatus and method |
US20050161444A1 (en) * | 2003-10-17 | 2005-07-28 | Gsi Lumonics Corporation | Flexible scan field |
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JPS60136719A (en) * | 1983-12-26 | 1985-07-20 | Matsushita Electric Ind Co Ltd | Acoustooptic device |
JPS6139023A (en) * | 1984-07-31 | 1986-02-25 | Ricoh Co Ltd | Controlling method of light |
JPS62215917A (en) * | 1986-03-18 | 1987-09-22 | Hamamatsu Photonics Kk | Electric signal generating device synchronizing with optical pulse train |
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-
2005
- 2005-06-06 JP JP2007515671A patent/JP4791457B2/en active Active
- 2005-06-06 DE DE112005001324T patent/DE112005001324T5/en not_active Withdrawn
- 2005-06-06 GB GB0623494A patent/GB2428399B/en not_active Expired - Fee Related
- 2005-06-06 KR KR1020067025776A patent/KR101290665B1/en active IP Right Grant
- 2005-06-06 WO PCT/US2005/019775 patent/WO2005121889A2/en active Application Filing
-
2010
- 2010-12-24 JP JP2010287047A patent/JP5492763B2/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4352402A (en) * | 1979-06-25 | 1982-10-05 | Vdo Adolf Schindling Ag | Safety circuit for an apparatus for regulating the traveling speed of a vehicle |
US5197074A (en) * | 1991-12-26 | 1993-03-23 | Electro Scientific Industries, Inc. | Multi-function intra-resonator loss modulator and method of operating same |
US5751585A (en) * | 1995-03-20 | 1998-05-12 | Electro Scientific Industries, Inc. | High speed, high accuracy multi-stage tool positioning system |
US5847960A (en) * | 1995-03-20 | 1998-12-08 | Electro Scientific Industries, Inc. | Multi-tool positioning system |
US5837962A (en) * | 1996-07-15 | 1998-11-17 | Overbeck; James W. | Faster laser marker employing acousto-optic deflection |
US6339604B1 (en) * | 1998-06-12 | 2002-01-15 | General Scanning, Inc. | Pulse control in laser systems |
US20030086447A1 (en) * | 1998-10-21 | 2003-05-08 | Eddie H. Young | High loss modulation acousto-optic q-switch for high power multimode laser |
US6341029B1 (en) * | 1999-04-27 | 2002-01-22 | Gsi Lumonics, Inc. | Method and apparatus for shaping a laser-beam intensity profile by dithering |
US6430465B2 (en) * | 2000-01-11 | 2002-08-06 | Electro Scientific Industries, Inc. | Abbe error correction system and method |
US6407363B2 (en) * | 2000-03-30 | 2002-06-18 | Electro Scientific Industries, Inc. | Laser system and method for single press micromachining of multilayer workpieces |
US20020117481A1 (en) * | 2001-02-16 | 2002-08-29 | Mark Unrath | On-the-fly beam path error correction for memory link processing |
US6706999B1 (en) * | 2003-02-24 | 2004-03-16 | Electro Scientific Industries, Inc. | Laser beam tertiary positioner apparatus and method |
US20050161444A1 (en) * | 2003-10-17 | 2005-07-28 | Gsi Lumonics Corporation | Flexible scan field |
Also Published As
Publication number | Publication date |
---|---|
GB0623494D0 (en) | 2007-01-03 |
KR101290665B1 (en) | 2013-07-30 |
JP2008502010A (en) | 2008-01-24 |
DE112005001324T5 (en) | 2007-08-23 |
WO2005121889A3 (en) | 2006-10-19 |
WO2005121889A2 (en) | 2005-12-22 |
GB2428399B (en) | 2010-05-05 |
JP2011085952A (en) | 2011-04-28 |
JP4791457B2 (en) | 2011-10-12 |
JP5492763B2 (en) | 2014-05-14 |
KR20070030210A (en) | 2007-03-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20120606 |