AU2001286170A1 - High-peak-power laser device and application to the generation of light in the extreme ultraviolet - Google Patents
High-peak-power laser device and application to the generation of light in the extreme ultravioletInfo
- Publication number
- AU2001286170A1 AU2001286170A1 AU2001286170A AU8617001A AU2001286170A1 AU 2001286170 A1 AU2001286170 A1 AU 2001286170A1 AU 2001286170 A AU2001286170 A AU 2001286170A AU 8617001 A AU8617001 A AU 8617001A AU 2001286170 A1 AU2001286170 A1 AU 2001286170A1
- Authority
- AU
- Australia
- Prior art keywords
- peak
- generation
- light
- application
- laser device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lasers (AREA)
- X-Ray Techniques (AREA)
- Laser Surgery Devices (AREA)
Abstract
This device comprises at least three pulsed lasers (2, 4, 6), in order to supply light pulses, and means (14) for directing these pulses substantially onto the same spot of a target (16) and substantially at the same time onto this spot. The lasers are pumped by diodes (40) operating continuously.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0012286 | 2000-09-27 | ||
FR0012286A FR2814599B1 (en) | 2000-09-27 | 2000-09-27 | HIGH-STRENGTH LASER DEVICE CREATED AND APPLICATION TO LIGHT GENERATION IN EXTREME ULTRA VIOLET |
PCT/IB2001/001714 WO2002027872A1 (en) | 2000-09-27 | 2001-09-19 | High-peak-power laser device and application to the generation of light in the extreme ultraviolet |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001286170A1 true AU2001286170A1 (en) | 2002-04-08 |
Family
ID=8854730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001286170A Abandoned AU2001286170A1 (en) | 2000-09-27 | 2001-09-19 | High-peak-power laser device and application to the generation of light in the extreme ultraviolet |
Country Status (12)
Country | Link |
---|---|
US (1) | US20040022295A1 (en) |
EP (1) | EP1320913B1 (en) |
JP (1) | JP5036118B2 (en) |
KR (2) | KR100900164B1 (en) |
CN (1) | CN1279666C (en) |
AT (1) | ATE263447T1 (en) |
AU (1) | AU2001286170A1 (en) |
DE (1) | DE60102597T2 (en) |
FR (1) | FR2814599B1 (en) |
RU (1) | RU2301485C2 (en) |
TW (1) | TW515134B (en) |
WO (1) | WO2002027872A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6972421B2 (en) * | 2000-06-09 | 2005-12-06 | Cymer, Inc. | Extreme ultraviolet light source |
AU2003275002A1 (en) | 2002-10-17 | 2004-05-04 | Lumenis Inc. | System, method, and apparatus to provide laser beams of two or more wavelengths |
FR2859545B1 (en) * | 2003-09-05 | 2005-11-11 | Commissariat Energie Atomique | METHOD AND DEVICE FOR RADIATION LITHOGRAPHY IN THE EXTREME UTRAVIOLET |
FR2884652B1 (en) * | 2005-04-19 | 2009-07-10 | Femlight Sa | DEVICE FOR GENERATING LASER PULSES AMPLIFIED BY OPTICAL FIBERS WITH PHOTONIC LAYERS |
JP4959956B2 (en) * | 2005-06-07 | 2012-06-27 | 株式会社日立製作所 | antenna |
EP2380411B1 (en) | 2008-12-16 | 2015-04-15 | Philips Deutschland GmbH | Method and device for generating euv radiation or soft x-rays with enhanced efficiency |
JP5314433B2 (en) * | 2009-01-06 | 2013-10-16 | ギガフォトン株式会社 | Extreme ultraviolet light source device |
JP5312959B2 (en) * | 2009-01-09 | 2013-10-09 | ギガフォトン株式会社 | Extreme ultraviolet light source device |
WO2011013779A1 (en) | 2009-07-29 | 2011-02-03 | 株式会社小松製作所 | Extreme ultraviolet light source, method for controlling extreme ultraviolet light source, and recording medium in which program therefor is recorded |
JP5578483B2 (en) * | 2009-09-01 | 2014-08-27 | 株式会社Ihi | LPP EUV light source and generation method thereof |
US8462425B2 (en) | 2010-10-18 | 2013-06-11 | Cymer, Inc. | Oscillator-amplifier drive laser with seed protection for an EUV light source |
US9335637B2 (en) * | 2011-09-08 | 2016-05-10 | Kla-Tencor Corporation | Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation |
JP6021454B2 (en) * | 2011-10-05 | 2016-11-09 | ギガフォトン株式会社 | Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation method |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62160781A (en) * | 1986-01-09 | 1987-07-16 | Agency Of Ind Science & Technol | Laser light projecting apparatus |
JPS63272092A (en) * | 1987-04-30 | 1988-11-09 | Yoshiaki Arata | Forming method for superpowered composite laser beam |
EP0377710A4 (en) * | 1988-06-16 | 1991-04-10 | Australasian Lasers Pty. Ltd. | Hybrid laser |
US5009658A (en) * | 1989-04-14 | 1991-04-23 | Karl Storz Endoscopy-America, Inc. | Dual frequency laser lithotripter |
JPH0442979A (en) * | 1990-06-07 | 1992-02-13 | Asahi Glass Co Ltd | Laser diode exciting solid state laser |
US5235607A (en) * | 1990-12-27 | 1993-08-10 | Mitsui Petrochemical Industries, Ltd. | Solid-state laser device and machining apparatus |
JPH06174660A (en) * | 1992-10-08 | 1994-06-24 | Rikagaku Kenkyusho | Forming apparatus of x-ray image |
US5375132A (en) * | 1993-05-05 | 1994-12-20 | Coherent, Inc. | Solid state laser with interleaved output |
US5488619A (en) * | 1994-10-06 | 1996-01-30 | Trw Inc. | Ultracompact Q-switched microlasers and related method |
WO1996016484A1 (en) * | 1994-11-15 | 1996-05-30 | Jmar Technology Company | Low cost, high average power, high brightness solid state laser |
JPH08327794A (en) * | 1995-06-01 | 1996-12-13 | Olympus Optical Co Ltd | Laser plasma light source |
US5838709A (en) * | 1995-06-07 | 1998-11-17 | Nikon Corporation | Ultraviolet laser source |
JPH11233867A (en) * | 1998-02-10 | 1999-08-27 | Nikon Corp | Pulse laser light generator |
JP2000208799A (en) * | 1999-01-13 | 2000-07-28 | Kanegafuchi Chem Ind Co Ltd | Method of processing thin-film body |
US6097742A (en) * | 1999-03-05 | 2000-08-01 | Coherent, Inc. | High-power external-cavity optically-pumped semiconductor lasers |
FR2798781B1 (en) * | 1999-09-22 | 2002-08-30 | Saint Louis Inst | LASER SOURCE CAPABLE OF TRANSMITTING MULTIPLE IMPLUSION BEAMS |
US6541731B2 (en) * | 2000-01-25 | 2003-04-01 | Aculight Corporation | Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates |
US7068689B2 (en) * | 2001-01-18 | 2006-06-27 | Spectra-Physics Gmbh | Frequency-converted laser apparatus with frequency conversion crystals |
-
2000
- 2000-09-27 FR FR0012286A patent/FR2814599B1/en not_active Expired - Fee Related
-
2001
- 2001-09-19 CN CNB018162320A patent/CN1279666C/en not_active Expired - Fee Related
- 2001-09-19 DE DE60102597T patent/DE60102597T2/en not_active Expired - Lifetime
- 2001-09-19 KR KR1020087013881A patent/KR100900164B1/en not_active IP Right Cessation
- 2001-09-19 WO PCT/IB2001/001714 patent/WO2002027872A1/en active IP Right Grant
- 2001-09-19 AT AT01965537T patent/ATE263447T1/en not_active IP Right Cessation
- 2001-09-19 JP JP2002531558A patent/JP5036118B2/en not_active Expired - Fee Related
- 2001-09-19 KR KR10-2003-7004352A patent/KR20030036839A/en not_active Application Discontinuation
- 2001-09-19 AU AU2001286170A patent/AU2001286170A1/en not_active Abandoned
- 2001-09-19 RU RU2003112229/28A patent/RU2301485C2/en not_active IP Right Cessation
- 2001-09-19 US US10/381,015 patent/US20040022295A1/en not_active Abandoned
- 2001-09-19 EP EP01965537A patent/EP1320913B1/en not_active Expired - Lifetime
- 2001-09-26 TW TW090123750A patent/TW515134B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
FR2814599B1 (en) | 2005-05-20 |
RU2301485C2 (en) | 2007-06-20 |
CN1279666C (en) | 2006-10-11 |
KR20080059476A (en) | 2008-06-27 |
EP1320913A1 (en) | 2003-06-25 |
FR2814599A1 (en) | 2002-03-29 |
JP5036118B2 (en) | 2012-09-26 |
EP1320913B1 (en) | 2004-03-31 |
JP2004510356A (en) | 2004-04-02 |
ATE263447T1 (en) | 2004-04-15 |
DE60102597D1 (en) | 2004-05-06 |
KR20030036839A (en) | 2003-05-09 |
US20040022295A1 (en) | 2004-02-05 |
CN1505857A (en) | 2004-06-16 |
TW515134B (en) | 2002-12-21 |
DE60102597T2 (en) | 2005-03-03 |
KR100900164B1 (en) | 2009-06-02 |
WO2002027872A1 (en) | 2002-04-04 |
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