GB2389555A - Resistor trimming with small uniform spot from solid-state UV laser - Google Patents

Resistor trimming with small uniform spot from solid-state UV laser Download PDF

Info

Publication number
GB2389555A
GB2389555A GB0317857A GB0317857A GB2389555A GB 2389555 A GB2389555 A GB 2389555A GB 0317857 A GB0317857 A GB 0317857A GB 0317857 A GB0317857 A GB 0317857A GB 2389555 A GB2389555 A GB 2389555A
Authority
GB
United Kingdom
Prior art keywords
laser
solid
state
resistor trimming
small uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0317857A
Other versions
GB0317857D0 (en
Inventor
Edward J Swenson
Richard S Harris
Yunlong Sun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of GB0317857D0 publication Critical patent/GB0317857D0/en
Publication of GB2389555A publication Critical patent/GB2389555A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/08—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by electric discharge, e.g. by spark erosion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Laser Beam Processing (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

A uniform laser spot, such as from an imaged shaped Gaussian output (118) or a clipped Gaussian spot, that is less than 20 @m in diameter can be employed for both thin and thick film resistor trimming to substantially reduce microcracking. These spots can be generated in an ablative, nonthermal, UV laser wavelength to reduce the HAZ and/or shift in TCR.

Description

GB 2389555 A continuation (72) Inventor(s): Edward J Swenson Richard S
Harris Yunlong Sun (74) Agent and/or Address for Service: Forrester Ketley & Co Forrester House, 52 Bounds Green Road, LONDON, N11 2EY, United Kingdom
GB0317857A 2001-02-01 2002-01-31 Resistor trimming with small uniform spot from solid-state UV laser Withdrawn GB2389555A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US26617201P 2001-02-01 2001-02-01
US30170601P 2001-06-28 2001-06-28
PCT/US2002/003006 WO2002060633A1 (en) 2001-02-01 2002-01-31 Resistor trimming with small uniform spot from solid-state uv laser

Publications (2)

Publication Number Publication Date
GB0317857D0 GB0317857D0 (en) 2003-09-03
GB2389555A true GB2389555A (en) 2003-12-17

Family

ID=26951663

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0317857A Withdrawn GB2389555A (en) 2001-02-01 2002-01-31 Resistor trimming with small uniform spot from solid-state UV laser

Country Status (8)

Country Link
JP (1) JP2004519095A (en)
KR (1) KR100894025B1 (en)
CN (1) CN1232379C (en)
CA (1) CA2434969A1 (en)
DE (1) DE10295946B4 (en)
GB (1) GB2389555A (en)
TW (1) TW523837B (en)
WO (1) WO2002060633A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7358157B2 (en) * 2002-03-27 2008-04-15 Gsi Group Corporation Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby
TWI223284B (en) * 2002-03-28 2004-11-01 Gsi Lumonics Corp Method and system for high-speed, precise micromachining an array of devices
JP4664269B2 (en) * 2006-12-05 2011-04-06 住友重機械工業株式会社 Laser processing apparatus and laser processing method
KR100858674B1 (en) * 2007-06-08 2008-09-16 주식회사 이오테크닉스 Method for trimming resistor using laser
DE102009020272B4 (en) * 2009-05-07 2014-09-11 Tyco Electronics Amp Gmbh Laser welding system
US8742288B2 (en) * 2011-06-15 2014-06-03 Asm Technology Singapore Pte Ltd Laser apparatus for singulation, and a method of singulation
WO2014126137A1 (en) * 2013-02-13 2014-08-21 住友化学株式会社 Laser irradiation device and manufacturing method of laminate optical member
CN103441102B (en) * 2013-08-23 2015-08-26 华东光电集成器件研究所 Ceramic thick film resistor device unit is utilized to repair the method for thick film hybrid integrated circuit
CN104091664B (en) * 2014-06-12 2016-10-26 北京锋速精密设备有限公司 A kind of novel function curve follows resistor repair and carving method
LT6428B (en) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Method and device for laser processing of transparent materials
CN109903943B (en) * 2019-04-29 2021-06-22 深圳市杰普特光电股份有限公司 Resistance value adjusting method and device, storage medium and equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104480A (en) * 1990-10-12 1992-04-14 General Electric Company Direct patterning of metals over a thermally inefficient surface using a laser
US5233327A (en) * 1991-07-01 1993-08-03 International Business Machines Corporation Active resistor trimming by differential annealing
US5675310A (en) * 1994-12-05 1997-10-07 General Electric Company Thin film resistors on organic surfaces
US5685995A (en) * 1994-11-22 1997-11-11 Electro Scientific Industries, Inc. Method for laser functional trimming of films and devices
US5753391A (en) * 1995-09-27 1998-05-19 Micrel, Incorporated Method of forming a resistor having a serpentine pattern through multiple use of an alignment keyed mask

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63226005A (en) 1987-03-13 1988-09-20 松下電器産業株式会社 Laser trimming of film resistor
JPH0484686A (en) * 1990-07-27 1992-03-17 Advantest Corp Laser beam machine
JPH05347205A (en) * 1992-06-15 1993-12-27 Tdk Corp Electronic component and manufacture thereof
JP3304130B2 (en) * 1992-07-27 2002-07-22 松下電器産業株式会社 Method of manufacturing rectangular thin film chip resistor
US5265114C1 (en) * 1992-09-10 2001-08-21 Electro Scient Ind Inc System and method for selectively laser processing a target structure of one or more materials of a multimaterial multilayer device
JPH06251914A (en) * 1993-02-27 1994-09-09 Taiyo Yuden Co Ltd Manufacturing method of circuit board having trimming resistance
DE4336482A1 (en) * 1993-10-26 1995-04-27 Bosch Gmbh Robert Method of trimming a magnetoresistive sensor
JPH0864407A (en) * 1994-08-26 1996-03-08 Matsushita Electric Ind Co Ltd Manufacture of resistance part
JPH09232520A (en) * 1996-02-28 1997-09-05 Matsushita Electric Works Ltd Semiconductor device and manufacturing method thereof
JPH09246023A (en) * 1996-03-14 1997-09-19 Rohm Co Ltd Resistance value adjusting method of thin film resistor, adjusting method of resistance value of heating element of thin film type thermal print head, and thin film type thermal print head
US5864430A (en) * 1996-09-10 1999-01-26 Sandia Corporation Gaussian beam profile shaping apparatus, method therefor and evaluation thereof
JPH10149908A (en) * 1996-11-19 1998-06-02 Rohm Co Ltd Method for adjusting resistance of thin film resistor, method for adjusting resistance of heat generating section of thin film thermal print head, and thin film thermal print head
JPH11162702A (en) 1997-11-25 1999-06-18 Taiyo Yuden Co Ltd Chip parts
WO1999040591A1 (en) * 1998-02-06 1999-08-12 Electro Scientific Industries, Inc. Passive resistive component surface ablation trimming technique using q-switched, solid-state ultraviolet wavelength laser
JPH11320134A (en) * 1998-05-06 1999-11-24 Canon Inc Laser trimming processing device and processing method
JP3334684B2 (en) * 1999-06-29 2002-10-15 松下電器産業株式会社 Electronic components and wireless terminals
TW482705B (en) * 1999-05-28 2002-04-11 Electro Scient Ind Inc Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104480A (en) * 1990-10-12 1992-04-14 General Electric Company Direct patterning of metals over a thermally inefficient surface using a laser
US5233327A (en) * 1991-07-01 1993-08-03 International Business Machines Corporation Active resistor trimming by differential annealing
US5685995A (en) * 1994-11-22 1997-11-11 Electro Scientific Industries, Inc. Method for laser functional trimming of films and devices
US5675310A (en) * 1994-12-05 1997-10-07 General Electric Company Thin film resistors on organic surfaces
US5849623A (en) * 1994-12-05 1998-12-15 General Electric Company Method of forming thin film resistors on organic surfaces
US5753391A (en) * 1995-09-27 1998-05-19 Micrel, Incorporated Method of forming a resistor having a serpentine pattern through multiple use of an alignment keyed mask

Also Published As

Publication number Publication date
TW523837B (en) 2003-03-11
WO2002060633A1 (en) 2002-08-08
KR100894025B1 (en) 2009-04-22
DE10295946T5 (en) 2004-04-22
DE10295946B4 (en) 2013-09-26
CN1232379C (en) 2005-12-21
JP2004519095A (en) 2004-06-24
CN1489504A (en) 2004-04-14
KR20030079981A (en) 2003-10-10
GB0317857D0 (en) 2003-09-03
CA2434969A1 (en) 2002-08-08

Similar Documents

Publication Publication Date Title
GB2389555A (en) Resistor trimming with small uniform spot from solid-state UV laser
WO1999013539A3 (en) Laser with line narrowing output coupler
GB2422343A (en) Laser processing of a locally heated target material
WO2001071867A3 (en) Optical amplifiers and lasers
CA2373565A1 (en) Beam shaping and projection imaging with solid state uv gaussian beam to form vias
AU6316698A (en) Excimer laser with greater spectral bandwidth and beam stability
GB2394671A (en) Improved hand-held laser device for skin treatment
CA2182597A1 (en) Gain controlled optical fibre amplifier
WO2001028052A3 (en) Optoelectronic device incorporating a tunable laser and method of characterisation thereof
WO2002037621A3 (en) Tunable controlled laser array
AU7422494A (en) High power, high gain, two-stage optical amplifiers
AU3141999A (en) Cold light-uv-radiation device
GB2396646A (en) Adjustable expansion cone assembly
WO2002032050A3 (en) Techniques for hiding network element names and addresses
CA2222498A1 (en) Aqueous hand disinfectant composition comprising a lower alcohol and a diol
CA2338684A1 (en) Injectable propofol formulations
EP1039599A3 (en) Semiconductor optical device apparatus
GB2390834A (en) Processing a memory link with a set of at least two laser pulses
AU2001286170A1 (en) High-peak-power laser device and application to the generation of light in the extreme ultraviolet
GB9409502D0 (en) Coating compositions stabilized against damage by light, heat and oxygen
CA2221693A1 (en) Optical amplifier
EP0496897A4 (en) Method for manufacturing high temperature superconductive oxide thin film
AU2001251655A1 (en) Cytokine uses; compositions; methods
CA2252722A1 (en) Ge-ga-s-based glass composition having light amplifying characteristic and apparatus for optical communications using the same
ATE321291T1 (en) BEAM SHAPING DEVICE FOR CHANGING THE BEAM CROSS SECTION OF A LIGHT BEAM

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)