WO2005064994A1 - 有機el素子、有機el表示装置、有機el素子の製造方法および有機el素子の製造装置 - Google Patents
有機el素子、有機el表示装置、有機el素子の製造方法および有機el素子の製造装置 Download PDFInfo
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/622—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene containing four rings, e.g. pyrene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2101/00—Properties of the organic materials covered by group H10K85/00
- H10K2101/80—Composition varying spatially, e.g. having a spatial gradient
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
- H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
- H10K85/633—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine comprising polycyclic condensed aromatic hydrocarbons as substituents on the nitrogen atom
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6572—Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
Definitions
- Organic EL element Organic EL display device, method for manufacturing organic EL element, and apparatus for manufacturing organic EL element.
- the present invention relates to an organic EL device, an organic EL display device, a method for manufacturing an organic EL device, and a device for manufacturing an organic EL device.
- CRT Cathode Ray Tube
- CRTs organic electroluminescent devices
- Organic EL devices have attracted attention as next-generation display devices because they have characteristics such as self-luminous emission and high-speed response.
- the organic EL element has a structure in which an organic EL layer, which is a light emitting layer, is sandwiched between a positive electrode and a negative electrode. Holes are injected from the positive electrode into the organic EL layer, and electrons are injected from the negative electrode. By the recombination, the organic EL layer emits light.
- a hole injection layer made of, for example, 2-— is provided between the positive electrode and the hole transport layer to lower the operating voltage of the organic EL device.
- a hole injection layer made of, for example, 2-— is provided between the positive electrode and the hole transport layer to lower the operating voltage of the organic EL device.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2000-2005
- Patent Document 2 Japanese Patent Application Laid-Open No. Hei 4-292970
- Patent Document 3 Japanese Patent Application Laid-Open No. 2000-19696
- FIG. 1A is a diagram schematically showing a structure of an organic EL display device using an organic EL element
- FIG. 1B is a diagram showing an equivalent circuit thereof.
- a specific object of the present invention is to make it possible to suppress the leakage current of the organic EL element while suppressing the operation by improving the conductivity of the organic EL element.
- An object of the present invention is to provide an EL display device and a method for manufacturing the organic EL element. Disclosure of the invention
- the organic EL device includes at least a light emitting layer between a positive electrode and a negative electrode, a hole transport layer adjacent to the positive electrode side of the light emitting layer, and a light emitting layer.
- the hole injection layer is characterized in that it is continuously changed in the thickness direction.
- the conductivity of the hole injection layer is formed so as to be continuously changed in the thickness direction of the hole injection layer. Therefore, a region where the carrier is dried in the hole injection layer is formed.
- the leakage current of the organic EL element can be suppressed while the operating voltage is suppressed by improving the conductivity of the organic EL element.
- the organic EL display device may include, at least between the positive electrode and the negative electrode, at least a light emitting layer, a hole transport layer adjacent to the positive electrode side of the light emitting layer, and an electron adjacent to the negative electrode side of the tiff self-negative light emitting layer.
- the conductivity of the hole injection layer is continuously changed in the thickness direction of the hole injection layer, the concentration of the carrier in the hole injection layer is increased.
- a region in which the resistance is reduced is formed, and while suppressing the operation by improving the conductivity of the organic EL element, the leakage current of the j EL element is suppressed, and the crosstalk is suppressed.
- a step of forming a hole injection layer on a positive electrode formed on a substrate; and a step of forming a hole transport layer on a hole injection layer Forming a light-emitting layer on the hole-transporting layer, forming an electron-injecting / transporting layer on the disturbing light-emitting layer, and forming a negative electrode on the electron-injecting / transporting layer.
- the step of forming the hole injection layer is performed by a vacuum evaporation method using an evaporation source.
- a self-evaporation source and an organic EL are used. It is characterized in that it includes a step of changing the distance between the element and the object to be processed.
- the method includes a step of changing the distance between the self-evaporation source and the target on which the organic EL element is formed. Therefore, the HI direction of the hole layer is included. Thus, it is possible to form a film in which the material to be introduced into the layer is changed.
- an apparatus for manufacturing an organic EL device comprising: a processing container; an exhaust unit configured to exhaust the inside of the processing container; and a processing target plate provided on a first side inside the processing container.
- An apparatus for manufacturing an organic EL element, which is vapor-deposited by self-treatment comprising: a moving unit that moves the vaporizing unit in the processing container; and the moving unit controls at least the evaporation source.
- FIG. 1A is a diagram schematically showing a conventional organic EL display device
- FIG. 1B is an equivalent circuit diagram thereof.
- FIG. 2 is a cross-sectional view schematically showing an organic EL device according to the present invention.
- 3A to 3C are cross-sectional views schematically showing details of the hole injection layer of the organic EL device in FIG.
- FIGS. 4A to 4C are diagrams schematically showing the concentrations of the ceptors in the hole injection layer shown in FIGS. 3A to 3C.
- FIG. 5 is a diagram showing characteristics of an organic EL device using the hole injection layer shown in FIGS. 4A to 4C.
- FIG. 6 is a perspective view schematically showing an organic EL display device according to the present invention.
- FIG. 7 is a diagram schematically showing a method of forming an organic layer when a MEL element is formed.
- FIG. 8 is a cross-sectional view schematically showing an organic EL device manufacturing apparatus according to the present invention.
- FIG. 9 is a diagram showing the concentration of components introduced into the organic layer formed by the manufacturing apparatus of FIG.
- FIGS. 10A and 10B are diagrams showing the results of examining the variation in luminance and luminance half-life of the organic EL device manufactured by the manufacturing apparatus shown in FIG.
- FIG. 11 is a diagram schematically showing an example of a substrate when an organic EL device is manufactured by the manufacturing apparatus shown in FIG.
- FIG. 12 is a diagram showing an example of the positional relationship between the target plate and the evaporation source when the shelf EL element is manufactured by the manufacturing apparatus of FIG.
- FIGS. 13 to 13L are diagrams showing examples of the state of the concentration of the component introduced into the organic layer formed by the manufacturing apparatus of FIG.
- 14A to 14F are diagrams illustrating examples of molecular formulas of vapor deposition materials that can be used in the manufacturing apparatus illustrated in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
- FIG. 2 is a diagram schematically showing a cross section of an example of the configuration of the organic EL device according to the present invention. It is.
- a transparent electrode for example, a positive electrode 201 made of ITO is formed on a substrate 101 made of, for example, glass. It has a structure in which an optical layer 501 composed of an organic EL layer is sandwiched between a positive electrode 201 and a negative electrode 71 composed of, for example, A1.
- An electron injecting and transporting layer 600 is formed between the light emitting layer 501 and the negative electrode 701, and the light emitting layer is formed between the light emitting layer 501 and the positive electrode 201.
- the hole transport layer 401 is formed so as to be in contact with the layer 501, and the hole transport layer 401 is further provided between the hole transport layer 401 and the positive electrode 201.
- a hole and a layer 301 are formed so as to be in contact with the positive electrode 201.
- the organic EL element 100 when ffi is applied in the forward direction between the negative electrode 701 and the positive electrode 201, electrons are lifted from the negative electrode 701, and the positive electrode From 1, holes are injected into the ttit self-luminous layer 501. Due to the recombination of the electrons and the holes, the light emitting layer 501 emits light at a wavelength corresponding to the energy gap of the light emitting layer 501.
- the knitted positive electrode 201 uses ITO, which has a large work function, for example, a conductive oxide, and the negative electrode uses a small work function, for example, A1-Li.
- ITO which has a large work function, for example, a conductive oxide
- the negative electrode uses a small work function, for example, A1-Li.
- a hole injection layer 301 and an electron transport layer 600 are provided.
- an acceptor is introduced into the hole injection layer 301 to increase conductivity, and holes are efficiently injected from the positive electrode 201 into the light emitting layer 501. It has become.
- the layer sandwiching the light emitting layer 501 preferably has a function of efficiently injecting carriers into the light emitting layer 501 and confining carriers.
- the hole transport layer 401 is provided to efficiently transport holes to the light emitting layer and to allow electrons from the light emitting layer 501 to pass to the positive electrode 201 side.
- the hole transport layer 401 may be referred to as an electron Plh layer.
- the electrons injected into the light emitting layer 501 pass through the self-hole transporting layer (electron blocking layer) 401, and the electrons are completely injected into the hole transporting layer 401. It is difficult to prevent the passage of electrons, that is, to prevent the so-called through-hole.
- the conductivity of the hole injection layer 301 is changed to the side of the hole injection layer 301 facing the positive electrode 201.
- the hole transport layer was formed so as to change continuously toward the side facing the hole transport layer 401.
- the leakage current of the organic EL element can be suppressed while the operating voltage is suppressed by improving the conductivity of the organic EL element.
- the leakage current of the organic EL element can be suppressed while the operating voltage is suppressed by improving the conductivity of the organic EL element.
- the conductivity can be controlled by doping the tfilB positive electrode layer 301 ′ with an acceptor.
- the thickness direction of the positive hole injection layer 301 ie,
- the concentration of the ceptor is continuous in the direction from 01 to the hole transport layer 410.
- the hole layer 3101 to 310C which is an example in which the conductivity of the hole injection layer 301 is changed, is shown next.
- 3 ⁇ ⁇ Figure 3 shows.
- Direction of the hole injection layer 301 is the X-axis direction.
- the ceptor concentration of the hole injection layer 301A is close to the knitting cathode 201. It is formed to be lower.
- a low-concentration low-concentration layer 301 b having a low ceptor concentration is formed on the side facing the positive electrode 201, and the positive electrode layer 301 and the positive hole are further formed.
- a high concentration layer 301 a having a high ceptor concentration is formed between the transport layers 401. Therefore, the electrons that have passed through the self-hole transporting layer 401 prevent the low-concentration layer 301b from passing through the hole-injecting layer 301A and have a high receptor concentration.
- the high-concentration layer 301a the conductivity of the hole injection layer 301A is maintained high, and holes are efficiently injected into the light emitting layer, so that the organic EL element is formed. This has the effect of suppressing the operating voltage.
- ITO used for the positive electrode 201 has a large surface roughness of the film, that is, a large unevenness on the surface of the film. I got it.
- the electric field concentration effect due to the surface roughness of the positive electrode and the leakage due to the electric field concentration effect It also has the effect of suppressing an increase in current.
- the ceptor concentration of the hole injection layer 301B is changed to the hole transport layer 401 It is formed so as to be lower near the point.
- a low concentration layer 301 d force S is formed on the side facing the hole transport layer 401, and the low concentration layer 301 is formed.
- a high concentration layer 301c having a high ceptor concentration is formed between 1d and the positive electrode 201. Therefore, it is assumed that electrons passing through the hole transport layer 401 pass through the hole layer 3 ⁇ 4 ⁇ 1 ⁇ by the low-concentration layer 310d!
- the conductivity of the hole injection layer 301B is maintained high, and holes are efficiently injected into the light emitting layer.
- the effect of suppressing the operating voltage of the organic EL element is achieved.
- the ceptor concentration of the hole injection layer 301 C is changed between the vicinity of the negative electrode 201 and the hole injection layer 301. If the height is reduced in both the vicinity of the layer 401, the effect of suppressing the leak current is further increased. ''
- the receptor concentration is low and the low-concentration layer 301g is on the side facing the positive electrode 201, and the hole transport layer 401
- a low-concentration layer 301 f having a low ceptor concentration is formed on the side facing the surface, and a high-concentration layer having a high ceptor concentration is provided between the low-concentration layer 301 g and the low-concentration layer 301 f. 301 e is formed.
- Pl h indicates that the electrons that have passed through the hole transport layer 401 pass through the hole injection layer 301 C by the low concentration layer 301 f and the above-mentioned extra layer 301 g.
- the high-concentration layer 301e having a high ceptor concentration is formed, so that the conductivity of the hole injection layer 301C is maintained high, and holes are efficiently injected into the light emitting layer. As a result, the operation voltage of the organic EL element is suppressed.
- FIG. 4A is a diagram showing an example in which the hole injection layer 301 A shown in FIG. 3A is used for the hole injection layer in the organic EL device shown in FIG. Shows schematically the receptor concentration of the hole injection layer.
- the same reference numerals are given to the parts described above and the description is omitted, but in this figure, illustration is omitted except for the hole injection layer, the positive electrode, and the hole transport layer.
- the X-axis direction in this figure corresponds to the X-axis direction in FIG. (The same applies to FIGS. 4B to 4C below.)
- the substrate 101 is made of glass
- the positive electrode 201 is an ITO electrode
- the hole injection layer 301A is 2-TNATA (4,4', 4 "-tris (2-naphthylphenyl amino) triphenylamine, Bando Chemistry)
- F4-TCNQ (2,3,5,6-tetrafluoro-1,7,8,8-tetracyanoquinodimethane, Aldrich
- the light-emitting layer 501 emits light using A 1 q (TYE 701, Toyo Ink) as a host A1q was used for the electron transport layer 601 and A1-Li was used for the negative electrode 701.
- inorganic materials such as I, TCNQ (7,7,8,8, - tetramethyl Xia eaves diacetic methane), TCNE ( It is also possible to use an organic material such as a compound having a cyano group such as' tetracyanoethylene) or a compound having a nitro group such as TNF (trinitrofluorenone) and DNF (dinitrofluorenone).
- the glass substrate with ITO was subjected to ultrasonic cleaning with water, acetone, and isopropyl alcohol, and then subjected to UV ozone treatment or oxygen plasma treatment.
- UV ozone treatment UV irradiation was performed in the atmosphere for 20 minutes.
- the following film is deposited on the ITO surface, which serves as the positive electrode, at room temperature and at a pressure of 1 ⁇ 10 16 torr, using a vacuum evaporation system.
- 2-TNATA and F4-TCNQ were vapor-deposited at a deposition rate of 0.1 nm / s and 0.00004 nmZs, respectively, to a thickness of 1 Onm (0.04%), thereby forming a low concentration film 301b. Further, 2-TNATA and F4-TCNQ were deposited at a deposition rate of 0.1 nmZs and 0.00012 nmZs, respectively, to a thickness of 30 nm (0.12%) to form the high concentration film 301a.
- HiNPD was deposited at a deposition rate of 0.1 nmZs to a thickness of 10 nm to form a hole transport layer 401.
- A1q doped with a luminescent material was deposited to a thickness of 30 nm to form a luminescent layer 501.
- an electron transport layer 601 is formed by forming A1q to a thickness of 20 nm on the light emitting layer, and a 0.5 nm thick LiF is formed as a negative electrode and a 100 nm thick A1 is formed as a shelf EL element. Was formed.
- the organic EL device thus formed has ITO as the positive electrode and A1-Li as the negative electrode. When a voltage of V or more was applied, green luminous power was observed.
- FIG. 4A is a diagram schematically showing the concentration of the scepter in the X-axis direction, that is, the film pressure direction of the hole injection layer. It can be seen that the receptor concentration is high in the high concentration layer .301a.
- Such a hole injection layer is preferably formed to a thickness of 40 to 50 nm. Further, in the hole injection layer, it is preferable that the receptor concentration is changed by at least 10% or more from the low-concentration layer 301b to the high-concentration layer 301a.
- the gradient of the ceptor concentration is not a steep change but a continuous change, and may be a gentle gradient. I like it. This is because the life of the organic EL element is prolonged when the concentration gradient of the acceptor is formed gently. Further, a manufacturing apparatus used for forming an organic layer having such a concentration change or concentration gradient will be described later.
- FIG. 4B is a diagram showing an example in which the hole injection layer 301B shown in FIG. 3B is used as the hole injection layer in the organic EL device shown in FIG. This is a diagram schematically showing the ceptor concentration of the injection layer.
- the structures of the substrate 101, the positive electrode 201, the hole transport layer (electron suppressing layer) 401, the light emitting layer 501, the electron transport layer 601 and the negative electrode 701 are the same as those described in the first embodiment. It can be formed by the method described in Example 1.
- the hole injection layer 301B has 2-TNA TA, and F4-TCNQ is used as an acceptor to be doped into the positive L injection layer. Thus, a hole injection layer 301B was formed.
- 2-TNATA and F4-TCNQ were evaporated at a deposition rate of 0.1 nm / s and 0.000 012 nmZs, respectively, to a thickness of 30 nm (0.12%) to form the high concentration film 301c.
- 2-TN.ATA and F4-TCNQ were deposited at a deposition rate of 0.1 nm / s and a thickness of 10 nm (0.04%) at 0.1 0004 nmZs, respectively.
- a ttrt low-concentration film 301 d was formed.
- FIG. 4B is a diagram schematically showing the concentration of the receptor in the X-axis direction, that is, the film pressure direction of the hole injection layer. It can be seen that the ceptor concentration is high and the ceptor concentration is low in the low concentration layer 301d.
- Such a hole injection layer is preferably formed to a thickness of 40 to 50 nm. Further, in the case of the hole layer, the effect of suppressing the leak current is increased when the receptor concentration is changed by at least 10% or more from the high concentration layer 301c to the low concentration layer 301d. It is.
- the gradient of the sceptor concentration is not steep, for the same reason as the boundary g1 of the first embodiment, It is a continuous change and preferably has a gentle gradient. .
- FIG. 4C is a diagram showing an example in which the hole injection layer 301C shown in FIG. 3C is used as the hole injection layer in the organic EL device shown in FIG. This is a diagram schematically showing the ceptor concentration of the injection layer.
- the structures of the substrate 101, the positive electrode 201, the hole transport layer (electron suppressing layer) 401, the light emitting layer 501, the A 1 q in the electron transport layer 601 and the negative electrode 701 are the same as those described in the first embodiment. It can be formed by the method described in Embodiment 1.
- 2-TNATA is used for the hole injection layer 301C
- F4-TCNQ is used for the acceptor doped into the hole injection layer.
- a hole injection layer 301C was formed.
- 2-TNATA and F4-TCNQ were deposited at a deposition rate of 0.1 nm / s and 0.00004 nm / s, respectively, to a thickness of 10 nm (0.04%) to form the low concentration film 3Olg. Further, 2-TNATA and F4-TCNQ were each deposited at a deposition rate of 0.1 nmZs and 0.00016 nm / s to a thickness of 20 nm (0.16%) to form the high concentration film 301e.
- 2—TNATA and F4—TCNQ were deposited at a deposition rate of 0.1 nmZs, 0.00004 nmZs, and a thickness of 10 nm ( (0.04%) by vapor deposition to form the low-concentration film 301f to form the positive layer 301C.
- FIG. 4C is a diagram schematically showing the concentration of the receptor in the X-axis direction, that is, the film pressure direction of the hole injection layer. It can be seen that the sceptor concentration is high and the ceptor concentration is low in the low concentration layers 301 g and 301 f.
- Such a hole injection layer is preferably formed at 40 to 50 nm. Further, in the hole injection layer, if the ceptor concentration is changed by at least 10% or more from the low-concentration layer 301 g to the high-concentration layer 301 e, an effect of suppressing a leak current is obtained. Is large, which is preferable. When the ceptor concentration is changed by at least 10% or more from the high-concentration layer 301 e to the low-concentration layer 301 f, the effect of suppressing the leak current increases, It is suitable.
- the gradient of the sceptor concentration is not steep, but continuous. It is a great change, it is preferable to have a gentle gradient.
- the results of comparing the leak current, light emission luminance, operating voltage, and light emission efficiency of the organic EL elements of Examples 1 to 3 were described. Is shown in FIG. Also, as a comparative example, the results of the case where the conductivity was made substantially uniform in the hole injection layer are also shown.
- the hole injection layer was formed by depositing 2-TNATA and F4-TCNQ at a deposition rate of 0.1 nm mZ s, 0.00001 mNs, and a thickness of 40 nm (0.1 mm). %) Evaporated ones were used, and the other configuration was the same as in Examples 1 to 3.
- the leakage current, the operating voltage, and the luminous efficiency were maintained at substantially the same values as in the comparative example, while the leakage current was lower than in the comparative example
- the suppressed effect was mm. That is, the conventional problem that the doping of the hole injection layer increases the leakage current when doped with the acceptor while maintaining the effect of increasing the luminous brightness and the luminous efficiency and suppressing the operating voltage by increasing the luminous efficiency and luminous efficiency. The effect of suppressing the points was obtained.
- Example 1 the leakage current of Example 1 is lower than that of Example 2
- this is the surface roughness of the ITO film used for the positive electrode 201, that is, the leakage caused by the unevenness of the film surface. This is considered to be the result of suppressing the increase in the blocking current.
- Example 3 Furthermore, in ⁇ of Example 3, the leakage current was smaller than in Examples 1 and 2, and the conductivity of the hole injection layer and the concentration of this ⁇ ceptor were close to the positive electrode and the hole transport layer. Since it is formed to be low in both the vicinity, the effect of suppressing the leakage current has been increased, and the conventional effect of suppressing the operation by increasing the luminance and luminous efficiency by doping the acceptor has been maintained.
- An organic EL display device can be formed using any one of the organic EL elements shown in Embodiments 1 to 3.
- FIG. 6 shows an organic EL display device according to Embodiment 4 of the present invention.
- 1 is a perspective view of an example of a formed organic EL display device 10 OA.
- the organic EL display device has a diagonal line size (screen size) of 3.5 inches, for example, and can be manufactured by a normal organic EL display device manufacturing method.
- the control device can be the same as that of a normal organic EL.
- the organic EL display device has high power and luminous efficiency, and operates vigorously.
- the power consumption is small due to low power consumption, and the operating voltage is low, so that the life of the display device is long and long. Has features.
- the organic thin film layers such as the light emitting layer, the electron injection transport layer, the hole transport layer, and the hole injection layer of the organic EL device shown in Examples 1 to 3 were formed by the vacuum evaporation method as described above. You.
- FIG. 7 schematically shows a part of the configuration of a conventional vacuum evaporation apparatus.
- a conventional vacuum deposition apparatus heats a deposition source P0 holding a material iq provided in a vacuum (not shown) by, for example, high electric resistance heating means h. It has a structure in which it is vaporized by evaporation or sublimation, and is vapor-deposited on the target plate Su.
- the conductivity is controlled by continuously changing the conductivity of the hole injection layer, so that the reproducibility of the film thickness of the formed film is good. Also, it is necessary that the reproducibility of the concentration of the added material be good in order to change the conductivity. It was difficult to form these with a conventional device.
- Japanese Patent Application Laid-Open No. 2003-77662 discloses that a concentration gradient of an additive added to a film is provided by moving a substrate above a plurality of fixed evaporation sources. Although a method of forming a thin film has been proposed, if this method is employed, the manufacturing apparatus itself becomes very large and expensive. '
- This embodiment solves the problems of the conventional vacuum deposition equipment, and has good controllability and reproducibility of the formed Mff, and controllability and reproduction of the concentration gradient of additives and components in the film.
- An organic EL manufacturing equipment with excellent properties will be explained.
- FIG. 8 is a diagram schematically showing a vacuum evaporation apparatus 10 which is an organic EL production apparatus according to the present embodiment. .
- the outline of the vacuum evaporation apparatus 10 is as follows.
- a material 19 a is held inside the processing vessel 11, and a deposition source 18 a to be immersed and a material 19 b are held, It has a vapor deposition source 19b capable of performing an irritating process, and has a structure in which a material which is irridating on the object to be processed 15 held on the holding table 15 by the holding member 12a is deposited.
- lift self-treatment container 1 1 [this has a first air port 24, and the first air port 24 is connected to a roughing line 25, and an exhaust means (not shown) such as a dry pump Thereby, the inside of the processing container 11 is evacuated. .
- the disgusting treatment container 11 is provided with a second exhaust port 22, and a high vacuum pump, for example, a cryopump, which is an adsorption type pump, is connected to the second exhaust port.
- a high vacuum pump for example, a cryopump, which is an adsorption type pump.
- the inside of the processing container 11 can be maintained at a high vacuum.
- the holding table 12 is supported by, for example, a substantially cylindrical support portion 13, and the space between the support portion 13 and the processing container 11 is sealed by, for example, a magnetic fluid.
- the support section 13 is connected to a rotation mechanism 14, and the holding table 12 is configured to be rotated by the rotation mechanism 14 via the knitting support section 13.
- the rotation of the basket to be processed 15 by the holding table 12 has an effect of improving the uniformity of the thickness of the film deposited on the substrate to be processed 15.
- a detecting means 27 for detecting the thickness of the film to be deposited is provided in the vicinity of the holding table 12.
- the vapor source 18a [the held material 19a] is heated by an unillustrated laser heating means provided in the processing vessel 18a, and is vaporized by evaporation or sublimation. And deposited on the substrate 15.
- the material 19b held in the tiff self-evaporation source 18b is heated by a heating means (not shown) provided in the processing vessel 18b to be vaporized to become a vaporized material 19b '.
- the structure is such that it is deposited on the target plate 15.
- the vapor deposition source 18a is supported by moving means 17a composed of a vertical mechanism such as an articulated arm, and the vapor deposition source 18a is moved vertically by the moving means 17a, In the container 11, a direction substantially in the direction from the side on which the self-evaporation source 18 a is provided to the side on which the holding table 15 is provided, that is, the evaporation source 18 a is the substrate 15 to be processed
- the structure is such that it can be moved in the direction of approaching or moving away from (the direction in the figure is the z-axis direction).
- the vapor deposition source 18 b is supported by a moving unit 17 b including a vertical mechanism such as an articulated arm, and the vapor deposition source 18 b is vertically moved by the moving unit 17 b. That is, it has a structure that can be moved in the z-axis direction. ' In this way, by adopting a structure in which the evaporation source for moving the material for film formation is moved, the amount of the vaporized material to be evaporated can be quickly controlled to improve reproducibility. A thin film can be formed on the target plate.
- the film forming rate can be quickly controlled by the moving means 17a, the thickness of the thin film to be formed can be controlled with good reproducibility.
- ⁇ provided by the vapor deposition source 18a, is moved by the moving means 17a together with the vapor deposition source 18a, and keeps a constant distance from the vapor deposition source 17a. Since the detecting means 20a for detecting the force and the amount of the material to be applied is provided, the reproducibility of the formed film thickness is improved.
- the detecting means 2a is a measuring means for knowing the amount of material vaporized from the vapor deposition source 18a. For example, when the film forming rate is kept constant, the vapor deposition source 18a When the amount of the material to be removed from a increases, the distance d O between the vapor deposition source 18 a and the back plate 15 is controlled by the male and female moving means 17 a to increase. In addition, the evaporation source 18a power is controlled by the moving means 17a so that the distance d0 is reduced when the amount of vaporized material is reduced.
- the detected signal from the detection means 20a is sent to the control device 10 and the moving means 17a is controlled by the control device 10A in accordance with the signal, and the distance is controlled. d 0 is controlled. Further, the control device 10A has a function of controlling the vacuum deposition device 10 related to film formation, such as control of the rotation of the holding table and the heating means, and control based on the detection means 27. I have.
- the distance d0 is quickly controlled to improve the controllability of the film forming speed, and the reproducibility of the film thickness of the formed thin film is improved. Has an advantageous effect.
- the vapor deposition source 18b has a moving means 17b and a detecting means 20b, similarly to the vapor deposition source 18a, and the moving means 1 of ⁇ of the vapor deposition source 18a. 7a and the detection means 20a have the same effects.
- films with various compositions can be formed, and various concentration gradients can be formed with good controllability and good reproducibility.
- the material (or an additive or the like) 19b is mixed or added into a thin film made of the material 19a.
- the ratio of 9b can be controlled, and a concentration gradient can be provided in the film thickness direction.
- FIG. 9 shows an example of the composition of a thin film formed by the vacuum evaporation apparatus 10 according to the present embodiment, and shows the ratio of the material 19b added to the material 19a.
- the concentration of the material 19b increases in the thickness direction of the formed thin film. This is because such a concentration gradient is controlled by controlling the moving means 17b so that the distance between the self-evaporation source 18b and the self-evaporation source 18b is reduced by the moving means 17b as the film formation proceeds. ⁇ It becomes possible to form a film.
- the vapor source 18a may be controlled so as to move away from the object to be processed, or both the vapor source 18b and the vapor source 18a may be controlled to move. .
- the moving means 17a and the moving means 17b are fixed on the moving means 21a and the moving means 21b, respectively.
- the moving means 21a and the disgusting moving means 21b move so as to slide on a substantially rail-shaped slide receiver 16 provided at the bottom of the tfrf self-processing container 10, and the evaporation source 18 a and the evaporation source 18 b can be moved in a direction substantially perpendicular to the substrate to be processed. .
- the movement of the moving means 21a and the self-moving means 21b is controlled by the ffff self-control device 1OA.
- the evaporation sources 18a and 18b can move in a substantially TO direction (X-axis direction in the drawing) with respect to the target plate, so that the deposition rate and the deposition rate can be further improved.
- the effect of improving the controllability of improving the uniformity of the film forming rate in the surface of the processing substrate and the control of controlling the concentration distribution of the added material is expanded, and the controllability is improved. To play. .
- a vapor deposition blocking means 26 having a housing shape having an opening is provided inside the processing container 11. For this reason, by moving the self-evaporation layer 18a or the evaporation source 18b to the inside
- Such a vapor deposition control means is not limited to the shape of the housing, but may be any as long as it blocks a material that evaporates from the vapor deposition source. For example, a plate-shaped or disk-shaped shutter may be used. is there.
- the vacuum evaporation apparatus makes it possible to manufacture, for example, an organic EL element having an organic film laminated thereon as shown in FIG. 2 with good reproducibility and good yield.
- the effect of good controllability and reproducibility of the sceptor concentration in the hole injection layer shown in FIGS. 4A to 4C was obtained, and the gradient of the sceptor concentration at the boundaries gl, g2, g3, and g4. Can be easily formed to a desired value.
- the concentration gradient which is a change in the receptor concentration, is not a steep change, but a continuous change. Therefore, it is possible to form a long-life shelf EL element by forming such a gentle concentration gradient.
- the structure of the formed organic EL element is I TO, NPD to i 1 d 3 (150 nm) / L i F (0.5 nm) / A 1 (100 nm). Concentration gradient was formed as shown in FIG. The molecular formulas of NPD and A 1 q will be described later.
- the device was formed as follows.
- a 200X20 Oftrni glass substrate with an ITO electrode was subjected to ultrasonic cleaning in the order of pure water, acetone, pure water, and isopropyl alcohol for 15 minutes each, followed by UV-zone cleaning.
- the substrate to be processed was set on the holding table as shown.
- the rotation of the holder was set at 10 rpm.
- the vapor deposition source 18b is compared with the inside of the vapor deposition shut-off means 26, and the vapor deposition source 1.8a is used to reduce the ⁇ -NPD film formation rate detected by the detection means 27 to 0.1.
- the position is set to be nm / s by the moving means 17a.
- the evaporation source 18b is moved from the inside of the annoying evaporation blocking means 26 to start the evaporation of Alq3.
- the controller 10A controls the moving source 17b so that the vapor deposition source 18b approaches the object to be processed so that the concentration gradient is set in advance, and the moving unit 17a controls the vapor deposition.
- the source 18a is controlled to move away from the substrate to be processed.
- the film formation rate is controlled to be 0.1 nm / s by the detection means 27, and a fluctuation factor such as a film formation rate due to a change in the vaporization state of the material is caused by the detection means 20a and 20 It is detected by Ob and reflected in the moving speed of the moving means 17a and 17b, respectively, excluding that the fluctuation of the vaporized state of the material affects the film forming speed.
- the evaporation source 18a is controlled to a position where the evaporation source 18a is retracted inside the evaporation blocking means 26.
- A1 was formed to a thickness of 100 nm by vapor deposition, and a glass substrate was attached and sealed with a UV curing adhesive to form an organic EL element.
- FIG. 1OA shows the result of forming the organic EL element in the same manner as in the conventional apparatus by controlling the film forming speed by the current value of the heater of the heating means. Variation was calculated based on the average of the five evaluation results.
- the film forming speed and the components in the film were controlled by controlling the position of the evaporation source 18a or 18b using the vacuum evaporation apparatus according to the present embodiment. It was confirmed that the product had excellent reproducibility of brightness and life, had little variation, and could increase the yield of the formed product.
- the vacuum evaporation apparatus according to the present embodiment is suitable for use in research, development, and inspection of ⁇ ! Films of organic EL devices. There is an effect that it is possible to efficiently perform the program by spending a certain amount of time.
- the film thickness and the doping concentration are evaluated as appropriate.
- a film having a gradient of the dope concentration can be easily formed by a single film formation. Becomes possible.
- an organic EL device having the following configuration was formed.
- the film was formed on the substrate Sub on which the ITO electrode E1 was formed as shown in FIG. 11, and the evaporation sources 18a and 18b were arranged as shown in FIG.
- the parts described above are denoted by the same reference numerals, and description thereof will be omitted.
- the processing board 18a has a distance d 1 of 60 cm, which forms the light-emitting layer (CBP + x% (forms the concentration concentration t bp py) t bp py). place
- the distance d2 in the physical vessel 18b is 35 cm
- the distance d3 in the TO direction to the target S3 ⁇ 4 plate of the processing vessel 18a and the tiff self-processing vessel 18b is 30 cm
- the doping material tb PY is
- the position of the deposited evaporation source 18b is set so that the deposition rate of tbppy on the substrate to be processed is 20: 1 between the fastest part and the slowest part.
- a hole injection layer, 2-TNATA was deposited to a thickness of 40 nm
- a hole transport layer, Hiichi NPD was deposited to a thickness of 10 nm on the substrate.
- tbppy which is a material to be doped into the evaporation source 18
- CBP which is a host material is put in the evaporation source 18a
- the closest to the f! Ff self-evaporation source 18b The film was formed by controlling the position of the processing vessel so that the dope concentration of the substrate at the position became 20 wt%, and the light emitting layer was formed so that the dope concentration changed continuously on the substrate. .
- a BCB layer having a thickness of 10 nm and an A1q layer having a thickness of 20 nm were formed, and a Li FZA1 electrode having a width of lmm serving as a cathode was formed in a strip shape by using a shadow mask so as to be orthogonal to the anode.
- the luminous efficiency of the fabricated device As a result of evaluating the luminous efficiency of the fabricated device, it was found that the luminous efficiency was optimal at a doping concentration of 12%, and that the device life was maximized at a doping concentration of 9%.
- the evaluation of the doping concentration of the light emitting layer which conventionally required a plurality of film formations, can be completed with a single film formation.
- 13A to 13L show examples of the shape of the concentration gradient of the dope material that can be formed by the vacuum evaporation apparatus according to the present embodiment.
- thin films having various concentration gradients can be formed with good reproducibility.
- FIGS. 14A to 14F show examples of molecular formulas of vapor deposition materials that can be used in the vacuum vapor deposition apparatus according to the present embodiment.
- a 1 q 3 is tns (8 to hyaroxyquinoline) aluminum, tbppy is 1,3.6,8 to tetrakis to biphenyl to 4 to yl to yrene, and CBP is .4 'to N to N'-dicarb azole-biphenyl, BCP stands for Bathocuproine.
- tns (8 to hyaroxyquinoline) aluminum
- tbppy is 1,3.6,8 to tetrakis to biphenyl to 4 to yl to yrene
- CBP is .4 'to N to N'-dicarb azole-biphenyl
- BCP stands for Bathocuproine.
- Such a material is an example, and the vapor deposition apparatus according to the present embodiment can form a thin film having a concentration gradient as required by using various other arbitrary materials.
- the organic EL device of the present invention is not limited to display devices such as flat panel displays. In addition, it can be used as a low power light source.
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Abstract
Description
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Priority Applications (5)
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TW092136865A TWI238677B (en) | 2003-12-25 | 2003-12-25 | Organic EL element, organic EL display, process for fabricating organic EL element, and device for fabricating organic EL element |
AU2003292826A AU2003292826A1 (en) | 2003-12-25 | 2003-12-25 | Organic el element, organic el display, process for fabricating organic el element, and system for fabricating organic el element |
PCT/JP2003/016780 WO2005064994A1 (ja) | 2003-12-25 | 2003-12-25 | 有機el素子、有機el表示装置、有機el素子の製造方法および有機el素子の製造装置 |
US10/584,413 US7935433B2 (en) | 2003-12-25 | 2003-12-25 | Organic EL element, organic EL display apparatus, method for manufacturing organic EL element, and apparatus for manufacturing organic EL element |
JP2005512796A JP4445925B2 (ja) | 2003-12-25 | 2003-12-25 | 有機el素子、有機el表示装置、有機el素子の製造方法および有機el素子の製造装置 |
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Also Published As
Publication number | Publication date |
---|---|
TWI238677B (en) | 2005-08-21 |
JP4445925B2 (ja) | 2010-04-07 |
TW200522787A (en) | 2005-07-01 |
JPWO2005064994A1 (ja) | 2007-07-26 |
AU2003292826A1 (en) | 2005-07-21 |
US7935433B2 (en) | 2011-05-03 |
US20080038583A1 (en) | 2008-02-14 |
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