WO2004107048A3 - Mikrolithographische projektionsbelichtungsanlage - Google Patents

Mikrolithographische projektionsbelichtungsanlage Download PDF

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Publication number
WO2004107048A3
WO2004107048A3 PCT/EP2004/005816 EP2004005816W WO2004107048A3 WO 2004107048 A3 WO2004107048 A3 WO 2004107048A3 EP 2004005816 W EP2004005816 W EP 2004005816W WO 2004107048 A3 WO2004107048 A3 WO 2004107048A3
Authority
WO
WIPO (PCT)
Prior art keywords
projection
projection objective
exposure system
lens
projection exposure
Prior art date
Application number
PCT/EP2004/005816
Other languages
English (en)
French (fr)
Other versions
WO2004107048A2 (de
Inventor
Aurelian Dodoc
Karl Heinz Schuster
Joerg Mallmann
Wilhelm Ulrich
Hans-Juergen Rostalksi
Original Assignee
Zeiss Carl Smt Ag
Aurelian Dodoc
Karl Heinz Schuster
Joerg Mallmann
Wilhelm Ulrich
Hans-Juergen Rostalksi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Smt Ag, Aurelian Dodoc, Karl Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalksi filed Critical Zeiss Carl Smt Ag
Priority to KR1020057022510A priority Critical patent/KR101050287B1/ko
Priority to JP2006529950A priority patent/JP4602336B2/ja
Priority to US10/917,371 priority patent/US7532306B2/en
Publication of WO2004107048A2 publication Critical patent/WO2004107048A2/de
Publication of WO2004107048A3 publication Critical patent/WO2004107048A3/de
Priority to US11/285,283 priority patent/US7570343B2/en
Priority to US12/199,998 priority patent/US20080316452A1/en
Priority to US12/611,999 priority patent/US20100045952A1/en
Priority to US14/852,824 priority patent/US20160131980A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70975—Assembly, maintenance, transport or storage of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)

Abstract

Eine mikrolithographische Projektionsbelichtungsanlage enthält eine Beleuchtungseinrichtung (12) zur Erzeugung von Projektionslicht (13) und ein Projektionsobjektiv (20; 220; 320; 420; 520; 620; 720; 820; 920; 1020; 1120), mit dem ein in einer Objektebene (22) des Projektionsobjektivs anordenbares Retikel (24) auf eine in einer Bildebene (28) des Projektionsobjektivs anordenbare lichtempfindliche Schicht (26) abbildbar ist. Das Projektionsobjektiv ist für einen Immersionsbetrieb ausgelegt, bei dem eine bildseitig letzte Linse (L5; L205; L605; L705; L805; L905; L1005; L1105) des Projektionsobjektivs in eine Immersionsflüssigkeit (34; 334a; 434a; 534a) eintaucht. Ein für das Projektionslicht (13) durchlässiges Abschlusselement (44; 244; 444; 544; 644; 744; 844; 944; 1044; 1144) ist zwischen der bildseitig letzten Linse und der lichtempfindlichen Schicht derart befestigt.
PCT/EP2004/005816 2003-05-30 2004-05-28 Mikrolithographische projektionsbelichtungsanlage WO2004107048A2 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
KR1020057022510A KR101050287B1 (ko) 2003-05-30 2004-05-28 마이크로리소그래픽 투사 노출 장치
JP2006529950A JP4602336B2 (ja) 2003-05-30 2004-05-28 マイクロリソグラフィ用投影露光システム
US10/917,371 US7532306B2 (en) 2003-05-30 2004-08-13 Microlithographic projection exposure apparatus
US11/285,283 US7570343B2 (en) 2003-05-30 2005-11-23 Microlithographic projection exposure apparatus
US12/199,998 US20080316452A1 (en) 2003-05-30 2008-08-28 Microlithographic projection exposure apparatus
US12/611,999 US20100045952A1 (en) 2003-05-30 2009-11-04 Microlithographic projection exposure apparatus
US14/852,824 US20160131980A1 (en) 2003-05-30 2015-09-14 Microlithographic projection exposure apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10324477A DE10324477A1 (de) 2003-05-30 2003-05-30 Mikrolithographische Projektionsbelichtungsanlage
DE10324477.8 2003-05-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/917,371 Continuation US7532306B2 (en) 2003-05-30 2004-08-13 Microlithographic projection exposure apparatus

Publications (2)

Publication Number Publication Date
WO2004107048A2 WO2004107048A2 (de) 2004-12-09
WO2004107048A3 true WO2004107048A3 (de) 2005-04-28

Family

ID=33482288

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/005816 WO2004107048A2 (de) 2003-05-30 2004-05-28 Mikrolithographische projektionsbelichtungsanlage

Country Status (5)

Country Link
US (5) US7532306B2 (de)
JP (1) JP4602336B2 (de)
KR (1) KR101050287B1 (de)
DE (1) DE10324477A1 (de)
WO (1) WO2004107048A2 (de)

Cited By (5)

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KR100742766B1 (ko) 2004-12-28 2007-07-25 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조 방법
US8102507B2 (en) 2004-12-30 2012-01-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9140996B2 (en) 2005-11-16 2015-09-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9268236B2 (en) 2005-06-21 2016-02-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder
US9500943B2 (en) 2003-05-06 2016-11-22 Nikon Corporation Projection optical system, exposure apparatus, and exposure method

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US7372541B2 (en) * 2002-11-12 2008-05-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
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JP4582089B2 (ja) 2003-04-11 2010-11-17 株式会社ニコン 液浸リソグラフィ用の液体噴射回収システム
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
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