WO2004097888A2 - X-ray sources - Google Patents

X-ray sources Download PDF

Info

Publication number
WO2004097888A2
WO2004097888A2 PCT/GB2004/001732 GB2004001732W WO2004097888A2 WO 2004097888 A2 WO2004097888 A2 WO 2004097888A2 GB 2004001732 W GB2004001732 W GB 2004001732W WO 2004097888 A2 WO2004097888 A2 WO 2004097888A2
Authority
WO
WIPO (PCT)
Prior art keywords
anode
target
electrons
aperture
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/GB2004/001732
Other languages
English (en)
French (fr)
Other versions
WO2004097888A3 (en
Inventor
Edward James Morton
Russell David Luggar
Paul De Antonis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CXR Ltd
Original Assignee
CXR Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP04729152A priority Critical patent/EP1618585B8/en
Priority to DE602004021372T priority patent/DE602004021372D1/de
Priority to GB0520904A priority patent/GB2417821B/en
Priority to JP2006506165A priority patent/JP4832285B2/ja
Priority to AT04729152T priority patent/ATE433194T1/de
Priority to US10/554,569 priority patent/US7349525B2/en
Application filed by CXR Ltd filed Critical CXR Ltd
Publication of WO2004097888A2 publication Critical patent/WO2004097888A2/en
Publication of WO2004097888A3 publication Critical patent/WO2004097888A3/en
Anticipated expiration legal-status Critical
Priority to US12/033,035 priority patent/US7505563B2/en
Priority to US12/364,067 priority patent/US20090274277A1/en
Priority to US12/478,757 priority patent/US8094784B2/en
Priority to US12/712,476 priority patent/US8243876B2/en
Priority to US12/787,878 priority patent/US8804899B2/en
Priority to US12/788,083 priority patent/US8451974B2/en
Priority to US12/787,930 priority patent/US8223919B2/en
Priority to US12/792,931 priority patent/US8331535B2/en
Priority to US12/835,682 priority patent/US8204173B2/en
Priority to US13/032,593 priority patent/US9113839B2/en
Priority to US13/313,854 priority patent/US9001973B2/en
Priority to US13/346,705 priority patent/US8559592B2/en
Priority to US13/532,862 priority patent/US10591424B2/en
Priority to US13/548,873 priority patent/US9020095B2/en
Priority to US13/870,407 priority patent/US8885794B2/en
Priority to US14/312,540 priority patent/US9183647B2/en
Priority to US14/508,464 priority patent/US9158030B2/en
Priority to US14/635,814 priority patent/US20150357148A1/en
Priority to US14/641,777 priority patent/US9618648B2/en
Priority to US14/798,195 priority patent/US9442082B2/en
Priority to US14/848,176 priority patent/US9606259B2/en
Priority to US14/848,590 priority patent/US9747705B2/en
Priority to US14/930,293 priority patent/US9576766B2/en
Priority to US15/132,439 priority patent/US10483077B2/en
Priority to US15/437,033 priority patent/US20180038988A1/en
Priority to US15/439,837 priority patent/US10175381B2/en
Priority to US16/192,112 priority patent/US10901112B2/en
Priority to US16/745,251 priority patent/US20200200690A1/en
Priority to US17/123,452 priority patent/US11796711B2/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids

Definitions

  • Multifocus X-ray sources generally comprise a single anode, typically in a linear or arcuate geometry, that may be irradiated at discrete points along its length by high energy electron beams from a multi-element electron source.
  • Such multifocus X-ray sources can be used in tomo graphic imaging systems or projection X-ray imaging systems where it is necessary to move the X-ray beam.
  • a plurality of target regions are defined whereby X-rays can be produced independently from each of the target regions by causing electrons to be incident upon it.
  • the anode suitable for use, for example, in X-ray tomography scanning.
  • the X- ray aperture may be one of a plurality of X- ray apertures, each arranged so that X-rays from a respective one of the target regions can pass through it.
  • the anode further defines an electron aperture through which electrons can pass to reach the target.
  • the present invention further provides an anode for an X-ray tube comprising a target arranged to produce X-rays when electrons are incident upon it, the anode defining an electron aperture through which electrons can pass to reach the target.
  • the parts of the anode defining the electron aperture are arranged to be at substantially equal electrical potential. This can result in zero electric field within the electron aperture so that electrons are not deflected by transverse forces as they pass through the electron aperture.
  • the anode is shaped such that there is substantially zero electric field component perpendicular to the direction of travel of the electrons as they approach the anode.
  • the anode has a surface which faces in the direction of incoming electrons and in which the electron aperture is formed, and said surface is arranged to be perpendicular to the said direction.
  • the electron aperture has sides which are arranged to be substantially parallel to the direction of travel of electrons approaching the anode.
  • the electron aperture defines an electron beam direction in which an electron beam can travel to reach the target, and the target has a target surface arranged to be impacted by electrons in the beam, and the electron beam direction is at an angle of 10° or less, more preferably 5° or less, to the target surface.
  • the anode claim further comprises cooling means arranged to cool the anode.
  • the cooling means may comprise a coolant conduit arranged to carry coolant through the anode.
  • the anode comprises two parts and the coolant conduit is provided in a channel defined between the two parts.
  • the present invention further provides an X-ray tube including an anode according to the invention.
  • Figure 3 is a partial perspective view of a part of an anode according to a third embodiment of the invention.
  • Figure 4 is a partial perspective view of the anode of Figure 4.
  • an X-ray tube according to the invention comprises a multi-element electron source 10 comprising a number of elements 12 each arranged to produce a respective beam of electrons, and a linear anode 14, both enclosed in a tube envelope 16.
  • the electron source elements 12 are held at a high voltage negative electrical potential with respect to the anode.
  • the anode 14 is formed in two parts: a main part 18 which has a target region 20 formed on it, and a collimating part 22, both of which are held at the same positive potential, being electrically connected together.
  • the main part 18 comprises an elongate block having an inner side 24 which is generally concave and made up of the target region 20, an X-ray collimating surface 28, and an electron aperture surface 30.
  • the collimating part 22 extends parallel to the main part 18.
  • the collimating part 22 of the anode is shaped so that its inner side 31 fits against the inner side 24 of the main part 18, and has a series of parallel channels 50 formed in it such that, when the two parts 18, 22 of the anode are placed in contact with each other, they define respective electron apertures 36 and X-ray apertures 38.
  • Each electron aperture 36 extends from the surface 42 of the anode 14 facing the electron source to the target 20, and each X-ray aperture extends from the target 20 to the surface 43 of the anode 14 facing in the direction in which the X-ray beams are to be directed.
  • a region 20a of the target surface 20 is exposed to electrons entering the anode 14 through each of the electron apertures 36, and those regions 20a are treated to form a number of discrete targets.
  • the provision of a number of separate apertures through the anode 14, each of which can be aligned with a respective electron source element, allows good control of the X-ray beam produced from each of the target regions 20a. This is because the anode can provide collimation of the X-ray beam in two perpendicular directions.
  • the target region 20 is aligned with the electron aperture 36 so that electrons passing along the electron aperture 36 will impact the target region 20.
  • the two X-ray collimating surfaces 28, 32 are angled slightly to each other so that they define between them an X-ray aperture 38 which widens slightly in the direction of travel of the X-rays away from the target region 20.
  • the target region 20, which lies between the electron aperture surface 30 and the X-ray collimating surface 28 on the main anode part 18 is therefore opposite the region 40 of the collimating part 22 where its electron aperture surface 34 and X-ray collimating surface 32 meet.
  • there is substantially no electric field, the electric potential in that space being substantially constant and equal to the anode potential.
  • each of the source elements 12 is activated in turn to project a beam 44 of electrons at a respective area of the target region 20.
  • the use of successive source elements 12 and successive areas of the target region enables the position of the X-ray source to be scanned along the anode 14 in the longitudinal direction perpendicular to the direction of the incoming electron beams and the X-ray beams.
  • the electrons move in the region between the source 12 and the anode 14 they are accelerated in a straight line by the electric field which is substantially straight and parallel to the required direction of travel of the electrons.
  • the electrons enter the electron aperture 36 they enter the region of zero electric field which includes the whole of the path of the electrons inside the anode 14 up to their point if impact with the target 20. Therefore throughout the length of their path there is substantially no time at which they are subject to an electric field with a component perpendicular to their direction of travel. The only exception to this is any fields which are provided to focus the electron beam.
  • the advantage of this is that the path of the electrons as they approach the target 20 is substantially straight, and is unaffected by, for example, the potentials of the anode 14 and source 12, and the angle of the target 20 to the electron trajectory.
  • the electron beam 44 When the electron beam 44 hits the target 20 some of the electrons produce fluorescent radiation at X-ray energies. This X-ray radiation is radiated from the target 20 over a broad range of angles.
  • the anode 14 being made of a metallic material, provides a high attenuation of X-rays, so that only those leaving the target in the direction of the collimating aperture 38 avoid being absorbed within the anode 14.
  • the anode therefore produces a collimated beam of X-rays, the shape of which is defined by the shape of the collimating aperture 38. Further collimation of the X-ray beam may also be provided, in conventional manner, externally of the anode 14.
  • Some of the electrons in the beam 44 are backscattered from the target 20.
  • Backscattered electrons normally travel to the tube envelope where they can create localised heating of the tube envelope or build up surface charge that can lead to tube discharge. Both of these effects can lead to reduction in lifetime of the tube.
  • electrons backscattered from the target 20 are likely to interact with the collimating part 22 of the anode 14, or possibly the main part 18. In this case, the energetic electrons are absorbed back into the anode 14 so avoiding excess heating, or surface charging, of the tube envelope 16.
  • These backscattered electrons typically have a lower energy than the incident (full energy) electrons and are therefore more likely to result in lower energy bremsstrahlung radiation than fluorescence radiation.
  • the target 20 is at a low angle of preferably less than 10°, and in this case about 5°, to the direction of the incoming electron beam 44, so that the electrons hit the target 20 at a glancing angle.
  • the X-ray aperture 38 is therefore also at a low angle, in this case about 10° to the electron aperture 36.
  • the anode of a second embodiment of the invention is similar to the first embodiment, and corresponding parts are indicated by the same reference numeral increased by 200.
  • the main part 218 of the anode is shaped in a similar manner to that of the first embodiment, having an inner side 224 made up of a target surface 220, and an X-ray collimating surface 228 and an electron aperture surface 230, in this case angled at about 11° to the collimating surface 228.
  • the embodiment of Figures 3 and 4 shows that the collimating apertures 238 broaden out in the horizontal direction, but are of substantially constant height. This produces a fan- shaped beam of X-rays suitable for use in tomo graphic imaging.
  • the beams could be made substantially parallel, or spreading out in both horizontal and vertical directions, depending on the needs of the particular application.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
PCT/GB2004/001732 2003-04-25 2004-04-23 X-ray sources Ceased WO2004097888A2 (en)

Priority Applications (35)

Application Number Priority Date Filing Date Title
DE602004021372T DE602004021372D1 (de) 2003-04-25 2004-04-23 Röntgenquellen
GB0520904A GB2417821B (en) 2003-04-25 2004-04-23 X-ray sources
JP2006506165A JP4832285B2 (ja) 2003-04-25 2004-04-23 Ｘ線源
AT04729152T ATE433194T1 (de) 2003-04-25 2004-04-23 Röntgenquellen
US10/554,569 US7349525B2 (en) 2003-04-25 2004-04-23 X-ray sources
EP04729152A EP1618585B8 (en) 2003-04-25 2004-04-23 X-ray sources
US12/033,035 US7505563B2 (en) 2003-04-25 2008-02-19 X-ray sources
US12/364,067 US20090274277A1 (en) 2003-04-25 2009-02-02 X-Ray Sources
US12/478,757 US8094784B2 (en) 2003-04-25 2009-06-04 X-ray sources
US12/712,476 US8243876B2 (en) 2003-04-25 2010-02-25 X-ray scanners
US12/787,930 US8223919B2 (en) 2003-04-25 2010-05-26 X-ray tomographic inspection systems for the identification of specific target items
US12/788,083 US8451974B2 (en) 2003-04-25 2010-05-26 X-ray tomographic inspection system for the identification of specific target items
US12/787,878 US8804899B2 (en) 2003-04-25 2010-05-26 Imaging, data acquisition, data transmission, and data distribution methods and systems for high data rate tomographic X-ray scanners
US12/792,931 US8331535B2 (en) 2003-04-25 2010-06-03 Graphite backscattered electron shield for use in an X-ray tube
US12/835,682 US8204173B2 (en) 2003-04-25 2010-07-13 System and method for image reconstruction by using multi-sheet surface rebinning
US13/032,593 US9113839B2 (en) 2003-04-25 2011-02-22 X-ray inspection system and method
US13/313,854 US9001973B2 (en) 2003-04-25 2011-12-07 X-ray sources
US13/346,705 US8559592B2 (en) 2003-04-25 2012-01-09 System and method for image reconstruction by using multi-sheet surface rebinning
US13/532,862 US10591424B2 (en) 2003-04-25 2012-06-26 X-ray tomographic inspection systems for the identification of specific target items
US13/548,873 US9020095B2 (en) 2003-04-25 2012-07-13 X-ray scanners
US13/870,407 US8885794B2 (en) 2003-04-25 2013-04-25 X-ray tomographic inspection system for the identification of specific target items
US14/312,540 US9183647B2 (en) 2003-04-25 2014-06-23 Imaging, data acquisition, data transmission, and data distribution methods and systems for high data rate tomographic X-ray scanners
US14/508,464 US9158030B2 (en) 2003-04-25 2014-10-07 X-ray tomographic inspection system for the identification of specific target items
US14/635,814 US20150357148A1 (en) 2003-04-25 2015-03-02 X-Ray Sources
US14/641,777 US9618648B2 (en) 2003-04-25 2015-03-09 X-ray scanners
US14/798,195 US9442082B2 (en) 2003-04-25 2015-07-13 X-ray inspection system and method
US14/848,176 US9606259B2 (en) 2003-04-25 2015-09-08 X-ray tomographic inspection system for the identification of specific target items
US14/848,590 US9747705B2 (en) 2003-04-25 2015-09-09 Imaging, data acquisition, data transmission, and data distribution methods and systems for high data rate tomographic X-ray scanners
US14/930,293 US9576766B2 (en) 2003-04-25 2015-11-02 Graphite backscattered electron shield for use in an X-ray tube
US15/132,439 US10483077B2 (en) 2003-04-25 2016-04-19 X-ray sources having reduced electron scattering
US15/437,033 US20180038988A1 (en) 2003-04-25 2017-02-20 X-ray Tomographic Inspection System for the Identification of Specific Target Items
US15/439,837 US10175381B2 (en) 2003-04-25 2017-02-22 X-ray scanners having source points with less than a predefined variation in brightness
US16/192,112 US10901112B2 (en) 2003-04-25 2018-11-15 X-ray scanning system with stationary x-ray sources
US16/745,251 US20200200690A1 (en) 2003-04-25 2020-01-16 X-Ray Tomographic Inspection Systems for the Identification of Specific Target Items
US17/123,452 US11796711B2 (en) 2003-04-25 2020-12-16 Modular CT scanning system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0309374.7A GB0309374D0 (en) 2003-04-25 2003-04-25 X-ray sources
GB0309374.7 2003-04-25

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
US12/211,219 Continuation-In-Part US7724868B2 (en) 2003-04-25 2008-09-16 X-ray monitoring
US12/712,476 Continuation-In-Part US8243876B2 (en) 2003-04-25 2010-02-25 X-ray scanners
US12/758,764 Continuation-In-Part US7929663B2 (en) 2003-04-25 2010-04-12 X-ray monitoring

Related Child Applications (7)

Application Number Title Priority Date Filing Date
US10/478,757 A-371-Of-International US7615966B2 (en) 2001-05-25 2002-05-28 Method and apparatus for managing energy in plural energy storage units
US10554569 A-371-Of-International 2003-04-25
US10554569 A-371-Of-International 2004-04-23
US10/554,569 A-371-Of-International US7349525B2 (en) 2003-04-25 2004-04-23 X-ray sources
US10/554,569 Continuation US7349525B2 (en) 2003-04-25 2004-04-23 X-ray sources
US12/033,035 Continuation US7505563B2 (en) 2003-04-25 2008-02-19 X-ray sources
US12/787,878 Continuation-In-Part US8804899B2 (en) 2003-04-25 2010-05-26 Imaging, data acquisition, data transmission, and data distribution methods and systems for high data rate tomographic X-ray scanners

Publications (2)

Publication Number Publication Date
WO2004097888A2 true WO2004097888A2 (en) 2004-11-11
WO2004097888A3 WO2004097888A3 (en) 2005-05-12

Family

ID=9957199

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/001732 Ceased WO2004097888A2 (en) 2003-04-25 2004-04-23 X-ray sources

Country Status (8)

Country Link
US (3) US7349525B2 (enExample)
EP (1) EP1618585B8 (enExample)
JP (1) JP4832285B2 (enExample)
CN (1) CN100570804C (enExample)
AT (1) ATE433194T1 (enExample)
DE (1) DE602004021372D1 (enExample)
GB (2) GB0309374D0 (enExample)
WO (1) WO2004097888A2 (enExample)

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US9001973B2 (en) 2003-04-25 2015-04-07 Rapiscan Systems, Inc. X-ray sources
US9020095B2 (en) 2003-04-25 2015-04-28 Rapiscan Systems, Inc. X-ray scanners
US9048061B2 (en) 2005-12-16 2015-06-02 Rapiscan Systems, Inc. X-ray scanners and X-ray sources therefor
US9113839B2 (en) 2003-04-25 2015-08-25 Rapiscon Systems, Inc. X-ray inspection system and method
US9208988B2 (en) 2005-10-25 2015-12-08 Rapiscan Systems, Inc. Graphite backscattered electron shield for use in an X-ray tube
US9420677B2 (en) 2009-01-28 2016-08-16 Rapiscan Systems, Inc. X-ray tube electron sources
US9726619B2 (en) 2005-10-25 2017-08-08 Rapiscan Systems, Inc. Optimization of the source firing pattern for X-ray scanning systems
US9747705B2 (en) 2003-04-25 2017-08-29 Rapiscan Systems, Inc. Imaging, data acquisition, data transmission, and data distribution methods and systems for high data rate tomographic X-ray scanners
US10295483B2 (en) 2005-12-16 2019-05-21 Rapiscan Systems, Inc. Data collection, processing and storage systems for X-ray tomographic images
US10483077B2 (en) 2003-04-25 2019-11-19 Rapiscan Systems, Inc. X-ray sources having reduced electron scattering
US10585206B2 (en) 2017-09-06 2020-03-10 Rapiscan Systems, Inc. Method and system for a multi-view scanner
US10591424B2 (en) 2003-04-25 2020-03-17 Rapiscan Systems, Inc. X-ray tomographic inspection systems for the identification of specific target items
US10825640B2 (en) 2018-04-12 2020-11-03 Hamamatsu Photonics K.K. X-ray tube
US11212902B2 (en) 2020-02-25 2021-12-28 Rapiscan Systems, Inc. Multiplexed drive systems and methods for a multi-emitter X-ray source
CN115065761A (zh) * 2022-06-13 2022-09-16 中亿启航数码科技(北京)有限公司 一种多镜头扫描装置及其扫描方法
CN115131497A (zh) * 2021-03-25 2022-09-30 H3D股份有限公司 用于三维源定位的成像系统

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DE102010030713B4 (de) 2010-02-17 2018-05-03 rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG Röntgenquelle zur Erzeugung von Röntgenstrahlen mit einem Hohlkörpertarget und ein Verfahren zur Erzeugung von Röntgenstrahlung in einem Hohlkörpertarget
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