Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/67005—Apparatus not specifically provided for elsewhere
  • H01L21/67011—Apparatus for manufacture or treatment
  • H01L21/67017—Apparatus for fluid treatment
  • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
  • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
  • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B08—CLEANING
  • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
  • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
  • B08B3/04—Cleaning involving contact with liquid
  • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
  • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B08—CLEANING
  • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
  • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
  • B08B3/02—Cleaning by the force of jets or sprays

Definitions

• the present invention relates to a cleaning method and a cleaning apparatus for precision parts formed of ceramic, glass, metal, or the like. More specifically, a cleaning method for removing abrasive particles and particles and paris from the surface and the inside of through-holes after the grinding process of precision processed parts such as ferrules and split sleeves (hereinafter referred to as ferrules) using a cleaning liquid. And cleaning equipment.
• precision processed parts such as ferrules and split sleeves (hereinafter referred to as ferrules) using a cleaning liquid.
• ferrules precision processed parts
• technologies BackgroundManufacturing precision processed parts such as ferrules for optical connectors, engine oil injection nozzles, injection needles, etc., requires a large number of grinding processes, and degreasing and cleaning of the grinding oil for each grinding process. It is necessary to remove abrasive grains and particles.
• the method of cleaning ferrules used in many manufacturers is a method in which the ferrules are set in a special jig, or the ferrules are taken out of the special jig and put into a cleaning basket or the like. In this state, it is cleaned with an ultrasonic cleaning device, a brush-type cleaning device, a high-pressure shower cleaning device, or the like (Japanese Patent Application Laid-Open No. 11-47505).
• Ultrasonic cleaning equipment can process a large amount of ferrules at one time. Due to the structure of the above, the cleaning liquid hardly penetrates into the through-holes, and bubbles are easily generated due to the caption effect. Since bubbles accumulated in the tapered portion of the ferrules cannot be removed, ultrasonic waves cannot be transmitted and cleaning cannot be performed. In addition, the brush-type cleaning device has a problem in the cleaning method itself because pieces of wire may pierce ferrules. The high-pressure shower system can ensure a certain degree of cleaning performance, but it has problems with productivity and cleaning liquid mist. As described above, none of the conventional cleaning apparatuses is satisfactory in terms of cleanability and productivity.
• alkaline cleaning agents generally used for cleaning equipment are widely used for cleaning parts because they do not have to worry about destruction of the ozone layer, unlike fluorocarbon and chlorinated solvents. Since cleaning is inferior, it is often washed at high temperature and high concentration for a relatively long period of time, and there are various factors such as worker safety, workability such as neutralization of waste liquid, and erosion of parts such as stabilized zirconia. Problem
• the present invention has been made in view of the above circumstances, and provides a cleaning apparatus and a cleaning method for components that enable efficient cleaning of ferrules and other precision components having fine through holes.
• a cleaning apparatus is an apparatus for cleaning an object to be cleaned in a cleaning container incorporated in a cleaning liquid circulation line with a cleaning liquid forcibly flowing through the cleaning container.
• the object to be cleaned having a fine through-hole may be moved in a direction in which the cleaning liquid flows through the through-hole.
• the inside of the washing container is partitioned into an upper chamber and a lower chamber by the holding means, and the cleaning liquid flowing into the upper chamber mainly reaches the lower chamber through a through-hole of an object to be washed. Is desirable.
• the holding means includes a plurality of holding recesses into which the object to be cleaned is loosely fitted, and a flow hole having a smaller diameter than the holding recess provided at the bottom of the holding recess. It is desirable that the through-hole of the object to be cleaned, which is loosely fitted in the holding recess, and the communication hole communicate with each other.
• the apparatus for cleaning parts according to the present invention alternately performs ultrasonic cleaning and high-pressure cleaning in which a high-pressure cleaning liquid flow passes through a through hole of an object to be cleaned. It is characterized by repeating.
• a method for cleaning parts which includes an ultrasonic cleaning and a high-pressure cleaning that allows a high-pressure cleaning liquid flow to pass through a through-hole of an object to be cleaned by using the apparatus for cleaning parts according to the present invention. It is characterized in that it is performed simultaneously.
• FIG. 1 is a schematic diagram showing a cleaning device according to an embodiment of the present invention.
• FIG. 2A is a plan view of a set jig of the apparatus
• FIG. 2B is a cross-sectional view of the set jig
• FIG. 2C is an enlarged cross-sectional view of the set jig.
• FIG. 3 is a cross-sectional view showing a cleaning container of the apparatus.
• FIG. 4 is a cross-sectional view showing a cleaning container of the apparatus.
• FIG. 5 is a cross-sectional view showing a cleaning container of the apparatus.
• FIG. 6 is a perspective view showing a passest of a set jig of the same device.
• FIG. 7 is a schematic diagram showing a cleaning apparatus according to another embodiment of the present invention.
• FIG. 8 is a sectional view showing a cleaning container of the same device.
• FIG. 9 is a view showing a cleaning process of the same apparatus.
• FIG. 10 is a sectional view showing a cleaning container of the same apparatus.
• FIG. 11 is a cross-sectional view showing a cleaning container of the apparatus.
• FIG. 12 is a schematic diagram illustrating a cleaning apparatus according to a comparative example.
• the cleaning equipment for parts consists of a liquid tank 2 containing the cleaning liquid 1, a liquid outlet 2a of the liquid tank 2, and a liquid return port 2 a circulation line 3 for circulating the cleaning liquid 1 with the b, a cleaning container 4 provided in the middle of the circulation line 3 for accommodating an object to be cleaned, and a liquid pump 5 for forced circulation.
• a direct washing method a method of washing the object to be washed by flowing the washing liquid 1 in the washing container 4 in the vertical direction (hereinafter, referred to as a direct washing method) becomes possible.
• a direct cleaning method a direct path cleaning method using a direct path cleaning apparatus (Arakawa Chemical Industry Co., Ltd., trade name, Patent No. 2621800) is preferable.
• a jig receiver 12 is provided on the entire inner wall surface of the cleaning container 4 in the vertical direction, and a set jig (holding means) 11 described later is placed on the jig receiver 12 to perform cleaning.
• the container 4 is divided into an upper chamber 4a and a lower chamber 4b.
• the outer periphery of the set jig 11 contacts the jig receiver 12 over the entire circumference, and if an unillustrated seal portion is provided at the contact portion, the upper chamber 4a of the washing container 4 can be cleaned.
• the liquid 1 can be prevented from leaking into the lower chamber 4b through the contact portion.
• the cleaning container 4 is provided with an inlet 4c and an outlet 4d for the cleaning liquid 1.
• the return line 10 for returning the cleaning liquid 1 to the liquid tank 2 is connected to the exhaust (vacuum) line 6 at the inlet 4 c of the upper chamber 4 a of the cleaning vessel 4 and to the outlet 4 d of the lower chamber 4 b at the inlet 4 c. It is connected to the.
• a vacuum pump (not shown) is provided in the exhaust (vacuum) line 6, a bypass line 7 is branched from a circulation line 3 in front of the cleaning vessel 4, and a filter (not shown) is provided in the circulation line 3.
• the filter 1 is designed so that the washing liquid 1 is completely filtered.
• Circulation line 3 Bypass line 7, Exhaust (vacuum) line 6 and Return line 1 0 is provided with valves V1 to V4, and switching between the circulation line 3 and the exhaust (vacuum) line 6 is performed by opening and closing these valves V1 to V4.
• the washing container 4 has a pressure-resistant structure. The upper end of the washing container 4 is closed with a lid 8, and a pressure gauge 9 for monitoring the internal pressure of the washing container 4 is attached to the lid 8.
• the cleaning device is equipped with a rinsing liquid tank (not shown), a rinsing liquid circulation line, a liquid drainage compressor, a drying blower and heater, a ventilation line, etc., and the circulation line and ventilation line are cleaned. Connected to Vessel 4. After the object to be cleaned set in the set jig 11 is washed, it is rinsed in the same washing container 4 so that the liquid can be drained and dried.
• the set jig 11 has a plate shape, and is formed with a plurality of holding recesses 11 a for loosely fitting a ferrule (an example of an object to be cleaned) A.
• the lower end of the recess 11a is formed in a tapered shape, and the lower end communicates with a flow hole 1lb having a smaller diameter than the holding recess 11a.
• inverted U-shaped handles 11 c are erected on both sides of the set jig 11.
• the holding recess 11a and the flow hole are not limited.
• a plurality of ferrules A may be loosely fitted in one holding recess 11a.
• the ferrule A having the fine through-hole A 1 is fitted into the holding recess 11 a of the set jig 11, whereby the ferrule A is erected and held.
• the through hole A 1 of the hole A communicates with the through hole 1 1 b of the set jig 11.
• the set jig 11 can withstand the pressure difference between the upper chamber 4 a and the lower chamber 4 b of the cleaning container 4 caused by the cleaning liquid 1 sent by the liquid sending pump 5, its material and structure are as follows. There is no particular limitation.
• the set jig 1 1 is supported by the jig receiver 1 2. However, if the contact area with the jig receiver 1 2 is small and the rigidity of the set jig 1 1 is low, the set jig 1 1 may be damaged or deformed.
• the set jig 11 is housed in the cleaning container 4 by operating means 20 shown in FIG. 3, and is taken out of the cleaning container 4 after cleaning.
• the operating means 20 includes a pair of hooks 20a facing outward, a hook holder 20b for holding the interval between the pair of hooks 20a so as to be able to expand and contract as shown by an arrow, and the hook holder 20.
• a moving means (not shown) for raising and lowering and moving the b in the horizontal direction as shown by arrows is provided.
• the distance between the hooks 20a is widened, the handle 11c of the set jig 11 is hooked, and the hook holder 20b is lowered in this state.
• 1 1 can be placed on the jig receiver 1 2 of the washing container 4.
• the pair of hooks 20a having a reduced interval is lowered into the washing container 4 with the lid 8 opened, and then the interval between the hooks 20a is expanded to set the jig 11 1 Raise the hook 20a with the hand 1 1c hooked. Thereby, the set jig 11 can be taken out of the cleaning container 4.
• the ferrule A is fitted into the holding recess 1 1 a of the set jig 1 1, the set jig 11 is placed on the jig receiver 12 of the washing container 4, and the lid 8 of the washing container 4 is closed.
• the valve V3 is opened, the other valves VI, V2, and V4 are closed, and the vacuum pump is operated to reduce the pressure in the cleaning vessel 4.
• the pulp V3 is closed, only the valve V4 is opened, and the washing liquid 1 is pulled up.
• the valves VI and V2 are opened and the feed pump 5 is operated.
• the valve V2 is gradually closed after the liquid sending pump 5 enters a steady operation state, and when the pressure gauge 9 indicates a predetermined pressure, the closing operation of the valve V2 is stopped and the state is maintained.
• the pressure in the washing container 4 can also be adjusted by controlling the rotation speed of the liquid sending pump 5 using the impeller.
• the cleaning liquid 1 is forcibly circulated in the circulation line 3, and in the cleaning container 4, the cleaning liquid 1 passes from the upper chamber 4a through the through-hole A1 of the ferrule A and the circulation hole 1 1b of the set jig 11. To lower room 4b. At this time, the cleaning liquid 1 hardly passes between the set jig 11 and the jig receiver 12 of the cleaning container 4 and between the ferrule A and the holding recess 11 a of the set jig 11. .
• the cleaning liquid 1 mainly passes through the fine through-hole A1 of the ferrule A and reaches the lower chamber 4b of the cleaning container 4, so that the cleaning liquid 1 passes through the through-hole A1 as a high-pressure cleaning liquid flow.
• Foreign matter such as oil and abrasive particles attached to the hole wall of the through hole A1 can be washed away.
• an ultrasonic oscillator 21 for oscillating ultrasonic waves is installed in the cleaning container 4, so that the direct cleaning method and the ultrasonic cleaning method can be used in combination.
• the ultrasonic vibrator 21 is generally provided on the side wall or the bottom of the cleaning container 4, and an ultrasonic oscillator is connected to the ultrasonic vibrator 21.
• Known ultrasonic transducers such as a magnetostrictive transducer and an electrostrictive transducer can be used as the ultrasonic transducer 21.
• the ultrasonic cleaning is performed with the valves V3 and V4 closed, the valves VI and V2 opened, and the liquid supply pump 5 operated to fill the cleaning container 4 with the cleaning liquid 1, and the ultrasonic cleaning is performed.
• the cleaning is performed before and after the cleaning liquid 1 is forcibly circulated.
• the cleaning efficiency is improved, and the cleaning degree is high in a short time. Washing can be performed.
• it is effective for an object to be cleaned in which foreign matter such as fine particles adheres to the hole wall of the through hole A1.
• the abrasive particles floating in the through hole A1 are washed with a high-pressure cleaning liquid flow. Wash off.
• the basket 13A shown in FIG. 5 is formed in a cylindrical shape with a bottom.
• the basket 13A has a liquid passage hole 13b at the bottom, and a body 13d has a liquid passage hole.
• the basket 13 B shown in FIG. 6 is configured to accommodate a set jig 11 in a multi-stage manner in order to increase the throughput of the object to be cleaned.
• a guide groove 13 ⁇ is formed on both sides of the opening 13 e, and both edges of the lid 13 1 that opens and closes the opening 13 e are formed in the guide groove 13 f.
• a plurality of jig holders 13 g are provided on both sides of the main body 13 d at appropriate intervals vertically, and an outer flange 13 h is formed at the upper end of the main body 13 d.
• a handle 13c is attached to the outer collar 13h.
• seal parts are provided at the contact parts between the baskets 13, 13A, 13B and the set jig 11, and the contact parts between the baskets 13, 13, 13A, 13B and the washing container 4. This may prevent the cleaning liquid 1 from leaking from the contact portion.
• the size and shape of the baskets 13, 13 A and 13 B are not particularly limited as long as they can be adapted to the size and shape of the set jig 11.
• FIG. 7 shows that washing containers 4 exclusively used for direct-type cleaning and washing containers 41 exclusively used for ultrasonic cleaning are alternately arranged, and a plurality of set jigs 1 1 are simultaneously used by using these washing containers 4 and 4 1.
• an apparatus that alternately performs direct cleaning and ultrasonic cleaning by controlling the cleaning.
• the apparatus is provided with a compressor (not shown) for draining liquid and a drying container 42, and hot air is supplied to the drying container 42 by a heater 42a and a blower 42b.
• the cleaning container 4 does not have the ultrasonic vibrator 21 and the ferrule A of the set jig 1 1 housed in the cleaning container 4 has its through-hole washed by the circulating high-pressure cleaning liquid flow of the cleaning liquid 1.
• the cleaning vessel 41 sucks up the cleaning liquid 1 by decompression by a vacuum pump (not shown). '
• a jig receiver 4 1c is provided in an intermediate portion of the cleaning container 41, and the cleaning container 41 is placed in the upper chamber by a set jig 11 placed on the jig receiver 4 1c.
• An ultrasonic vibrator 21 is provided at the lower part of the washing container 41, which is divided into 41 a and a lower chamber 41 b.
• an outlet 41 d opens in the upper chamber 41 a of the washing vessel 41
• an inlet 41 e opens in the bottom of the lower chamber 41 b
• the upper end of the washing vessel 41 has a lid 4. Blocked at 1 f.
• FIG. 9 shows a cleaning step using the apparatus shown in FIG.
• the set jig 11 is transported in a tact manner using a plurality of operating means 20 provided in series.
• the plurality of set jigs 11 are put into the cleaning containers 4 and 41, and the objects to be cleaned are washed. As shown by the arrows, the cleaning is successively transferred to the adjacent cleaning containers 4 and 41, and the direct cleaning and the ultrasonic cleaning are alternately performed. Finally, the cleaning is transferred to the drying container 42 and the object to be cleaned is dried. The cleaning liquid adhering to the through-hole of the object to be cleaned is drained before the direct cleaning in the next step so as to increase the cleaning efficiency in the next step.
• an ultrasonic vibrator 21 is provided on the upper and lower parts as shown in FIG. 10, or an ultrasonic vibrator 2 is provided on both right and left sides as shown in FIG. One provided with 1 may be used.
• the cleaning liquid 1 used in the cleaning apparatus and the cleaning method described above includes, in addition to pure water and industrial water, a hydrocarbon-based solvent, a cleaning agent for a glycol ether compound or an alcohol-based compound, or a detergent for these and various surfactants. And various detergents such as an emulsion-based detergent comprising the above-mentioned mixture, a cationic, anionic, and a nonionic detergent.
• the cleaning agent may be used by appropriately heating it with a heater.
• the cleaning agent used in this cleaning step varies depending on the material of the cleaning object.
• an alkaline cleaning agent having a pH of 8 to 14 of the liquid actually used is preferable.
• ion-exchanged water or city water may be used depending on required cleanliness of the product.
• a draining agent containing alcohols or highly volatile solvent components may be used after the rinsing step.
• the items to be cleaned are not limited to Ferrule A.
• Set jig 1 has a vertical dimension x a horizontal dimension x a thickness dimension of 80 mm x 80 mm x 5 mm, and a valve (outer diameter is 2.5 mm, inner diameter of through hole is 0.125 mm, length 100 mm) can be mounted.
• a set jig 11 on which 100 ferrules for which the grinding process has been completed is set is placed on the jig receiver of the cleaning vessel 4, and Arakawa is turned into a cleaning agent.
• a washing experiment was performed as shown in Table 1 using a 3% aqueous solution of Pine Alpha ST-880 manufactured by Gaku Kogyo Co., Ltd., and using pure water as a rinse water.
• the cleaning container 4 is provided with an ultrasonic vibrator 21. Since flow into the cleaning solution 1 is lower chamber 4 mainly passes through the fine pore Do through hole A 1 of Fel Ichiru b, the internal pressure of the upper chamber of the cleaning container 4 becomes high pressure direct path to reach 5 kg / cm 2 .
• a cleaning experiment was performed by the following cleaning apparatus as shown in Table 1.
• the cleaning device of the comparative example is provided with a passt 101 having a large number of liquid passage holes 100 at the bottom as shown in FIG. 12 and receiving the passest 101 in a washing container 102.
• the washing container 102 placed on the section 103 is divided into an upper room 104 and a lower room 105.
• 100 ferrules are directly put into the packet 101 without using the set jig 11, and the pump for feeding in the circulation line is operated in the same manner as in the embodiment. Direct pass washing was performed. At this time, the internal pressure in the upper chamber of the washing container did not increase.
• the pass rate in the comparative example was less than 50%, as shown in Table 1.However, in Example 1, the pass rate reached 83%, and a considerable cleaning effect was obtained.
• the pass rate was further improved by performing direct-pass cleaning after ultrasonic cleaning, or performing ultrasonic cleaning first as in Example 3, and alternately performing direct-pass cleaning and ultrasonic cleaning. As a result, it was found that Examples 1 to 3 were suitable for cleaning the fine through-hole A1 of the ferrule A.
• Drying was performed by a direct pass method.
• US stands for ultrasonic cleaning
• DP stands for direct pass cleaning
• a high-pressure cleaning liquid intensively flows through the through-hole of the object to be cleaned, and the cleaning effect can be enhanced. It improves the cleaning effect of precision parts such as ferrules of optical connectors, and enables cleaning in a short time. Also, compared to the conventional method of hitting and cleaning one object at a time by high-pressure shower cleaning, for example, cleaning of several hundred units is possible, and mass productivity is improved.

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• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Cleaning By Liquid Or Steam (AREA)
• Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

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• 2002
  • 2002-10-24 JP JP2002310179A patent/JP3846584B2/ja not_active Expired - Lifetime
• 2003
  • 2003-10-09 WO PCT/JP2003/012935 patent/WO2004037452A1/ja active Application Filing
  • 2003-10-09 KR KR1020057006911A patent/KR100988294B1/ko active IP Right Grant
  • 2003-10-09 CN CNB2003801020750A patent/CN100336611C/zh not_active Expired - Fee Related
  • 2003-10-14 TW TW092128411A patent/TWI247632B/zh not_active IP Right Cessation
• 2006
  • 2006-03-02 HK HK06102724A patent/HK1082930A1/xx not_active IP Right Cessation

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