1247632 玖、發明說明： I：發明戶斤屬之技術領域】 發明領域 本發明係有關於由陶瓷或玻璃或金屬等所形成的精密 5 零件之洗淨方法及洗淨裝置。更詳而言之，係有關於藉洗 淨液除去以套圈或對開套筒（以下，稱作套圈類）為首之精密 加工零件磨削步驟後之表面或貫通孔内部的研磨粒或微粒 或毛邊等之洗淨方法及洗淨裝置。 I：先前技術3 10 發明背景 在製造光連結器之套圈類、引擎之喷油嘴、注射針等 精密加工零件時，必須進行多數磨削步驟，而在每個各磨 削步驟中，必須把磨削油之脫脂洗淨，除去研磨粒、微粒 類。此係由於在各磨削步驟所使用之磨削油或研磨粒之種 15 類不同，若將磨削油成份或研磨粒帶入下一步驟，則有發 生譬如，由異種研磨粒之混入而引起磨削加工不良或由研 磨粒燒結引起研磨粒之不能除去或由於磨削油之混合而使 脂洗淨困難等之不便之故。 以往，在大多數的製造廠中所採用的套圈類之洗淨方 20 法，係在將套圈類固定在專用夾具之狀態下，或誰將套圈 類從專用夾具取出並零散地置入洗淨籠等狀態下，以超音 波洗淨裝置或刷式洗淨裝置或高壓喷淋洗淨裝置等洗淨 (特開平11-47705號公報）。 雖然利用超音波洗淨裝置可一次處理大量的套圈類， 1247632 先#物之構造上’洗淨液胸浸透到貫通孔内部，又， ^穴f果，很容易發生氣泡，且由於積存於套圈類錐形 。刀之氧泡不能除去，故超音波無法傳達而不能洗淨。又， 5 10 、1式洗淨裝置’也有鋼絲破片刺進套圈類之情形，洗淨方 =本身㈣題。再者，利用高㈣淋方式雖能確保某種程 、又^洗々it ’但有生產性之問題m輯霧等問題。在 洗手! 生或生產性等方面，如此習知洗淨裝置都無法滿足。 友再者，現在’―般在洗淨裝置中所使用之驗系洗淨劑 兵鼠氣院或氣系溶劑不同’雖由於無須擔心臭氧層破壞等 =為使⑽零件之洗淨，但由於洗淨性差，多半在高溫、 南濃度下進行比較長時狀洗淨，因此有作業者之安全 性’廢液之中和處理料紐，安定化氧化 等各式各樣問題。 而且，在具有微細貫通孔之套圈類，研磨粒或磨削液 15或毛邊等容易積存於貫通孔内之後，孔徑越變小洗淨液或 沖洗液越難以浸透貫通孔内，洗淨非常的困難。特別是， 使用表面張力大的水（純水）或鹼性洗淨劑等水系洗淨劑 呤，該傾向更為顯著，而且不只洗淨，沖洗或乾燥也需要 很長的時間。 20 本發明係鑑於這樣的情況而作成者，其目的在於提供 一種可有效地洗淨以套圈類為首之具有微細貫通孔精密零 件之零件類之洗淨裝置及洗淨方法。 C發明内容：！ 發明概述 1247632 本發明之一種洗淨裝置，係將納入洗淨液循環管線中 洗淨容器内之被洗淨物，藉由強制流過前述洗淨容器内之 洗淨液洗淨的裝置，其特徵在於： 該洗淨裝置具有保持裝置，用以保持具有微細貫通孔 5 之被洗淨物，使該貫通孔之貫通方向與前述洗淨液之液流 方向同方向或與其接近之方向， 又，高壓洗淨液流可通過被洗淨物之貫通孔内。。 再者，較佳地，藉前述保持裝置將前述洗淨容器内隔 開為上室與下室，且流入前述上室之前述洗淨液係主要地 10 通過被洗淨物之貫通孔而到達前述下室。 又，較佳地，前述保持裝置具有可供前述被洗淨物游 嵌的複數保持用凹部，與設置於該保持用凹部底部且具有 比該保持用凹部更小之直徑之流通孔，又，游嵌於前述保 持用凹部之前述被洗淨物貫通孔與前述流通孔互相連通。 15 再者，較佳地，該洗淨裝置更包含以超音波洗淨前述 被洗淨物之超音波洗淨裝置。 本發明之一種零件類之洗淨方法，係利用本發明之零 件類洗淨裝置，交替地反覆進行超音波洗淨與使高壓洗淨 液通過被洗淨物貫通孔内之高壓洗淨。 20 本發明其他形態中零件類之洗淨方法，係利用本發明 之零件類洗淨裝置，同時地進行超音波洗淨與使高壓洗淨 液通過被洗淨物貫通孔内之高壓洗淨。 圖式簡單說明 第1圖是顯示本發明實施形態之洗淨裝置的概略圖。 1247632 第2(a)圖係同裝置之固定夾具平面圖，（b)係同固定失 具之截面圖，（c)係同固定夾具之放大截面圖。 第3圖是顯示同裝置之洗淨容器截面圖。 第4圖是顯示同裝置之洗淨容器截面圖。 5 第5圖是顯示同裝置之洗淨容器截面圖。 弟6圖疋减示同裝置之固定夾具之籃筐之立體圖。 第7圖是顯示本發明之其他實施形態之洗淨裝置的概 略圖。 第8圖是顯示同裝置之洗淨容器之截面圖。 10 第9圖是顯示同裝置之洗淨步驟之圖。 第10圖是顯示同裝置之洗淨容器之截面圖。 第11圖是顯示同裝置之洗淨容器之截面圖。 第圖是顯示有關於比較例洗淨裝置之概略圖。 I：實施方式3 15 為實施發明之較佳形態 以下，參閱圖式說明實施形態。 以下，按照所附圖式說明本實施形態。 由第1圖概略地所示全體之流程圖可明白，零件類之洗 淨裝置包含有儲存洗淨液1之液箱2，在液箱2之液出口 2&與 20 液回流口 2b之間循環洗淨液1之循環管線3，設置於循環管 線3途中可收容被洗淨物之洗淨容器4及強制循環用之送液 泵5。因此，可以有在洗淨容器4内使洗淨液1縱向地流通以 洗淨被洗淨物之方法（以下，稱為直通式洗淨法）。此外，直 通式洗淨法係使用直接通路洗淨裝置（荒川化學工業（股）、 1247632 商品名、專利第2621800號)之直接通路洗淨法較適合。 在洗淨容器4縱向之中間部内壁面全周地設置有夾具 架12，且將在該夾具架12上承載後述之固定夾具（定位裝 置）11，藉此可將洗淨容器4區隔為上室4a與下室4b。固定 5 夾具11之外周部與夾具架12全周地接觸，又，若在該接觸 部份設置圖外之密封部，則能防止洗淨容器4之上室4a的洗 淨液1通過前述接觸部份漏出而掉進下室4b。再者，如第3 圖所示，洗淨容器4設置有洗淨液1之流入口 4c及流出口 4d。 在洗淨容器4的上室4 a之流入口 4 c連接排氣（真空）管線 10 6,在下室4b之流出口 4d連接用以回流洗淨液1至液箱2元返 送管線10。在排氣（真空）管線6設置有圖外之真空泵，由洗 淨容器4前之循環管線3係以旁通管線7分岐，在循環管線3 中設有圖外之過濾器，且可藉由該過濾器全量地過濾洗淨 液1 0 15 在循環管線、旁通管線、排氣（真空）管線6及回流管線 10，設置有閥VI〜V4，由該等閥VI〜V4之開閉操作，可切 換循環管線3與排氣（真空）管線6，又，藉由使用旁通管線7 可使洗淨液1直接流回液箱2之流量調節，可控制洗淨容器4 之内壓，防止由送液泵5而引起洗淨容器4之内壓急劇的上 20 升。此外，洗淨容器4係耐壓構造，洗淨容器4上端以蓋8閉 塞，且在該蓋8安裝用以監視洗淨容器4内壓之壓力計9。 再者，在洗淨裝置包含有未圖示沖洗液之液箱，沖洗 液之循環管線，斷液用之壓縮機，乾燥用鼓風機及加熱器， 送風管線等，循環管線及送風管線等，循環管線及送風管 1247632 線係連接洗淨容器、4。而且，在洗淨固定於固定夾具u的被 洗淨物之後’於同-洗淨容器4内沖洗，並進行斷液及乾燥。 如第2圖所不，固定夾具u係板狀，且形成有用以游嵌 套圈（被洗淨物之-例)A之複數個保持用凹部Ua。各保持 5用凹部1U之下端部形成錐形狀，且該下端部連通具有比保 持用凹部Ua小之直徑之流通孔llb。又，在固定夾具^側 部立設倒U字狀把手11〇:。 此外，只要如後述通過洗淨液丨為主的套圈A之貫通孔 A1而到達洗淨容器4之下室4b即可，不必限定保持用凹部 10 Ua及流通孔lib之形狀或位置等，譬如，也可在一個保持 用凹部11a游嵌複數個套圈A。 而且，由於將具有微細的貫通孔A1之套圈A嵌入固定 夾具11之保持用凹部11a，可立設保持套圈A的同時，連通 套圈a之貫通孔Ai與固定夾具π之流通孔llb。固定夾具^ 15只要可耐由送液泵5所送液之洗淨液產生的洗淨容器4的上 至4a與下室4b之差壓，並不特別的限定其材質或構造。 再者，固定夾具11雖藉夾具架12支撐，但有夾具架12 之接觸面積小，固定夹具11之剛性低與因高壓洗淨液丨而固 定夾具11破損或變形之虞。因此，在不妨礙通過套圈A之貫 2〇通孔A1之洗淨液流，使用補強材補強固定夾具U，也可增 大夾具架12之支撐面積。 固定夾具11藉第3圖所示之操作裝置2〇收納於洗淨容 器4内，洗淨後可由洗淨容器4取出。操作裝置加包含有向 外側之一對鉤20a，如箭頭可擴縮地保持一對鉤2如間隔之 10 Ϊ247632 釣保持體2Gb與如箭頭可將該釣保持體2Gb移動1升降或水 平方向的圖外之移動裝置。只要利用該操作裝置2〇，放大 鉤2如間隔，掛住固定夾具11之手把11c，在該狀態下由下 降鉤保持體20b，就可將固定夾具1丨載置於洗淨容器4之夾 5具架12。又，只要洗淨結束，將間隔窄小的一對鉤2〇a下降 至蓋8打開的洗淨容器4内，接著放大鉤2加間隔，在掛住固 定炎具11之把手llc狀態下上升鉤2〇a。由此，能由洗淨容 器4取出固定夾具u。 接著，說明關於套圈A之貫通孔八丨洗淨方法。在固定 10夾具11之保持凹部lla嵌入套圈A，將該固定夹具11載置於 洗淨容器4之夾具架12，關閉洗淨容器4之蓋8。接著，開啟 閥V3，關閉其他閥V1、v2、V4，作動真空泵將洗淨容器4 内減壓。其次，關閉閥V3，僅開啟閥V4，提升洗淨液1之 後，開啟閥VI、V2作動送液泵5。而且，送液泵5成為定期 15運轉狀態後漸漸關閉閥V2,壓力計9在所示一定壓力時點停 止閥V2之關閉動作而保持該狀態。此外，藉使用變流器控 制送液泵5之馬達旋轉數亦可調整洗淨容器4内之壓力。 藉此，洗淨液1強制循環循環管管線3，在洗淨容器4 中，洗淨液1係由上室4a通過套圈A之貫通孔A1及固定夾具 20 11之流通孔Hb到達下室4b。此時，洗淨液1幾乎沒有通過 固定夾具11及洗淨容器4之夾具架丨2之間或套圈A及固定夾 具11之保持用凹部14間之情形。 如此，由於洗淨液1主要通過套圈A微細的貫通孔A1到 達洗淨容器4之下室4b，洗淨液1變成高壓洗淨液流而通過 1247632 貫通孔A1内，能衝走黏附於貫通孔A1孔壁之油分或研磨粒 等異物。 經過一定時間洗淨套圈A之貫通孔A1之後，開啟旁通 閥V2 ’在洗淨容器4内壓降低之後停止送液泵5。 5 再者，如第3圖所示，洗淨容器4設置有振盪超音波之 起曰波振Μ器21 ’故可合併使用直通式洗淨法與超a波洗 淨法。超音波振盪器21—般是設於洗淨容器4之側壁或底 部，且超音波振盪器21連接有超音波振盪裝置。超音波振 烫器21可採用如磁致伸縮型振盪器、電致伸縮变振烫器等 10公知者。超音波洗淨係關閉閥V3、V4，開啟閥VI、V2， 作動送液泵5，且在洗淨容器4内充滿洗淨液1狀態下實施， 超音波洗淨之時期係在強制循環洗淨液丨前後。 如此，併用使用同一洗淨容器4之直通式洗淨法及超音 波洗淨法’只要交替反覆實施兩洗淨法，就可提高洗淨效 15率，能在短時間實行洗淨度很高的洗淨。特別是，在微粒 子等異物黏附於貫通孔A1孔壁之被洗淨物有效。譬如，在 洗淨剌入貫通孔A1孔壁之研磨粒時，藉超音波在由孔壁拉 開研磨粒之後，藉高壓洗淨液流洗掉漂於貫通孔A1内之該 研磨粒’由此，可短時間洗淨，又，不需要確保超音波洗 20淨專用空間。此外，在同時實施兩洗淨法時，由於是以高 壓洗淨液流與超音波同時洗淨貫通孔A，因此即使利用高壓 洗淨液亦可採用不會由於超音波而降低洗淨能力之超音波 洗淨裝置。 第4圖〜第6圖表示使用藍筐13、13Α、13β將固定爽具 12 1247632 11收容於洗淨容器4之實施形態。 第4圖所示之籃筐13係形成板狀，在籃筐13上面側設有 固定夾具11可嵌入之凹部13a，在該凹部13a底面部設有對 應固疋爽具11的流通孔11 b之通液孔13 b，在凹部13 a在嵌入 5固定夾具11時各通液孔13b與固定夾具11之各流通孔llb連 通。又，在籃筐13兩側部立設倒u字狀把手13e。此外，使 用附帶把手13c之籃筐13、13A、13B時，在固定夾具}1不 設置把手lie也可。 第5圖所示之藍筐13A形成有底筒狀，在藍筐13A底部 · 10設有通液孔13b，在本體部13d未設通液孔，在形成链M 13A上端之外凸緣13e立設把手13e。而且，將收二定= 11之籃筐13A固定於洗淨容器4内時，將其外凸緣i域載置 於洗淨容器4之夾具架12上。 第6圖所不之备筐削係為了增加被洗淨物之處理量，構 15成為可多段式地收容固定夾如，且在筒狀本體W一側面 設有開口部13e者。在該開口部…兩側形成有導溝⑶，開閉 開口部13e之蓋體⑶兩緣部可滑動自如地嵌入導溝所，且在 · 本體13d兩側板設有上下適當間隔之複數個夾具架❿，在本 體m上端形成外凸緣nh，在該外凸緣说安震把手I%。而 2〇且，揭起橫蓋13f，由開口部13e插入固定夾具u載置於各夾 具架Hg之後，以蓋體ni閉塞開口部ne，由於將藍僮别之 外凸緣13h掛住洗淨容器4之夾具架12，可將藍董别固定於 洗淨容器4内。 再者’在籃筐13、13A、13B及固定夾具丨丨之接觸部份， 13 1247632 籃筐13、13A、13B及洗淨容器4之接觸部份，也可由設置 圖外之密封部防止由該接觸部份漏洩洗淨液1。此外，只要 能適應固定夾具11之大小或形狀，並沒有特別限定籃筐 13、13A、13B之大小或形狀。 5 第7圖表示交替配設直通式洗淨專用洗淨容器4與超音 波洗淨專用洗淨容器41，使用該等洗淨容器4、41同時控制 複數個固定夾具11交替地實施直通式洗淨與超音波洗淨之 裝置。又，在該裝置具有斷液用壓縮機（圖示省略)及乾燥容 器42，在該乾燥容器42藉加熱器42a及鼓風機42b可供給暖 10 風。在洗淨容器4無超音波振盪器21，收納於洗淨容器4内 的固定夾具11之套圈A藉循環之洗淨液1高壓洗淨液流洗淨 其貫通孔。又，洗淨容器41藉圖外真空泵之減壓可吸上洗 淨液1。 如在第8圖洗淨容器41内之中間部份設置有夾具架 15 41c，藉載置於夾具架41c之固定夾具11，可將洗淨容器41 分成上室41a與下室41b。在洗淨容器41下部設有超音波振 盪器21。又，在洗淨容器41之上室41a開著流出口 41d。在 下室41b底部開著流入口 41e，洗淨容器41上端係以蓋41f閉 塞。 20 第9圖表示使用第7圖所示裝置之洗淨步驟。此外，在 該洗淨步驟，使用連設之複數操作裝置20流水作業式地搬 送固定夾具11。 而且，以複數個固定夾具11分別固定被洗淨物之後， 將該等複數個固定夾具11放入洗淨容器4、41洗淨被洗淨物 1247632 之後，如箭頭所示，在隔壁之洗淨容器4、41陸續移換而交 互地實行直通式洗淨與超音波洗淨，在最後移換至乾燥容 器42以乾燥被洗淨物。此外，關於黏附於被洗淨物貫通孔 之洗淨液，做成在下一步驟直通式洗淨之前實施斷液，以 5 提高在該下一步驟之洗淨效率。 此外，作為超音波洗淨專用洗淨容器41，使用如第10 圖在上部及下部設有超音波振盪器21者或如第11圖在左右 兩側部設有超音波振盪器21者也可。 作為在以上洗淨裝置及洗淨方法所使用之洗淨液1，純 10 水或工業用水以外，亦可使用碳氫化合物系溶劑、乙二醇 醚系化合物或醇系化合物之洗淨劑，或由該等與各種界面 活化劑及水等混合物構成之洗淨劑，或由前述混合物構成 之乳膠系洗淨劑、其他陽離子性、陰離子性、非離子性之 洗淨劑等各種洗淨劑。亦可適當地使用加熱器來加溫，以 15 提高洗淨劑之洗淨力。 在該洗淨步驟所使用的洗淨劑，雖因洗淨物材質而不 同，但在陶瓷製套圈A，實際上使用的液氫離子指數(pH) 係8〜14之驗系洗淨劑較為理想。 再者，沖洗液，雖使用純水較為理想，但由要求製品 20 清淨度上使用離子交換水或自來水也可。又，為提高乾燥 效率，也可於沖洗步驟後使用醇類或含揮發性高的溶劑成 份等之除水劑。 此外，被洗淨物並不限於套圈A。 實施例說明 15 1247632 固定夾具Π係長尺寸x寬尺寸x厚尺寸為80公厘χ8〇公 厘χ5公厘，可搭載100個套圈（外徑2.5公厘、貫通孔内徑 0.125公厘、長度10公厘）。 使用第1圖所示裝置，將磨削步驟結束之100個套圈之 5固定夾具11載置於洗淨容器4之作為洗淨劑使用荒川化學 工業（股）公司製八彳7ST-880之3°/〇水溶液，作為 沖洗水則使用純水，實行如在表1記載之洗淨實驗。此外， 在洗淨谷為4设有超音波振盈21。由於洗淨液1主要通過 套圈之微細貫通孔A1流入下室4b，變成洗淨容器4之上室内 10 壓達到5公斤/平方公分之高壓直接通路。 比較例係由下一個洗淨裝置，實行如表丨記載之洗淨實 驗。比較例之洗淨裝置具有如第12圖在底部設有多數個通 液孔100之籃筐101，將該籃筐101載置於洗淨容器102内之 支承部103，洗淨容器102可分為上室1〇4與下室1〇5。而且， 15無須使用固疋炎具11可將1〇〇個套圈直接投入籃筐ιοί内， 與實施例同樣，作動循環管線中之送液泵實行直接通路洗 淨。此時，洗淨容器之上室内壓並未上升。 貫驗結果，係如在表丨所示，在比較例中，合格率雖限 於50%以下，但在實驗例可達到83%而得到相當好的洗 2〇淨效果，X，如實施例2，在超音波洗淨之後實施直接通路 洗淨，如實驗例3首先實行超音波洗淨，且由交替地進行直 接通路洗淨與超音波洗淨，可再提高合格率。結果，可了 解到實施例1〜3適合套圈A微細的貫通孔八丨之洗淨。 16 1247632 與燕多ακ邾it泰蚪AH第。 ^^^#i^^#®-^fiias^^>^i©^#-^H>^^^^~nH^rrb。 CS 桊歡吟^1 DP燊 Η 蘇 ii^^^~t:c;s。 實施例3 實施例2 實施例1 比較例 條件 攝氏70度χ5分 攝氏70度χ5分 I i US洗淨1 攝氏50度χ5分 高壓DP 攝氏50度χ5分 高壓DP 攝氏70度xlO分 高壓DP 攝氏70度xlO分 DP DP洗淨1 攝氏70度χ5分 1 ! ! US洗淨2 _1 攝氏50度χ5分 高壓DP 1 1 1 DP洗淨2 攝氏50度xlO分 高壓DP 攝氏50度XlO分 高壓DP 攝氏50度xlO分 高壓DP 攝氏50度xlO分 DP 精加工清洗 純水1 常溫χ3分 攝氏100度χ7分 厂常溫X 3分 |攝氏100度χ7分 常溫χ3分i 攝氏100度χ7分| 常溫χ3分i 攝氏100度χ7分| 乾燥 | 93%(88%) 89%(76%) 83%(40%) 50%(30%)以下 結果(％) 合格率（完全率） >11247632 玖, INSTRUCTION DESCRIPTION: I: TECHNICAL FIELD OF THE INVENTION The present invention relates to a cleaning method and a cleaning device for a precision 5 part formed of ceramic, glass or metal. More specifically, there is a method for removing abrasive particles or particles inside the surface or through-hole after the grinding step of the precision machined part, which is a ferrule or a split sleeve (hereinafter referred to as a ferrule). Or a cleaning method such as a burr or the like. I: Prior Art 3 10 BACKGROUND OF THE INVENTION In the manufacture of precision-machined parts such as ferrules of optical connectors, injectors for engines, injection needles, etc., many grinding steps must be performed, and in each of the grinding steps, The degreasing of the grinding oil is washed to remove abrasive grains and fine particles. This is due to the 15 types of grinding oil or abrasive grains used in each grinding step. If the grinding oil component or the abrasive particles are brought to the next step, it may occur, for example, by mixing of the different kinds of abrasive grains. It is inconvenient to cause poor grinding processing or inability to remove the abrasive grains due to sintering of the abrasive grains or difficulty in cleaning the grease due to mixing of the grinding oil. In the past, the ferrule type of cleaning method used in most manufacturing plants was to fix the ferrules in a special fixture, or to remove the ferrules from the special fixtures and to loosely place them. In the state of being washed, etc., it is washed with an ultrasonic cleaning device, a brush cleaning device, a high-pressure shower cleaning device, or the like (Japanese Unexamined Patent Application Publication No. Hei No. No. No. No. No. No. 11-47705). Although the ultrasonic cleaning device can handle a large number of ferrules at a time, 1247632 firstly, the structure of the 'washing liquid chest is soaked into the inside of the through hole, and the hole is easy to occur, and it is accumulated in Ferrule type cone. The oxygen bubble of the knife cannot be removed, so the ultrasonic wave cannot be conveyed and cannot be washed. In addition, the 5 10 and 1 type cleaning device also has the case where the steel wire fragments are pierced into the ferrule, and the cleaning side = itself (4). Furthermore, the use of the high (four) leaching method can ensure a certain degree of process, and it is also a problem of productivity. In the case of hand washing, raw or productive, such conventional cleaning devices are not satisfactory. In addition, the friend's cleaning system used in the cleaning device is different from the gas solvent. Although there is no need to worry about the destruction of the ozone layer, etc., it is necessary to wash the parts (10). The poor netness is mostly washed at a high temperature and a south concentration for a long period of time. Therefore, there are various problems such as the safety of the operator, the waste liquid, the treatment material, and the stabilization and oxidation. Further, in the ferrule having the fine through-holes, the abrasive grains, the grinding liquid 15 or the burrs are easily accumulated in the through-holes, and the pore size becomes smaller. The washing liquid or the rinsing liquid hardly penetrates into the through-holes, and the washing is very difficult. Difficulties. In particular, the use of water-based detergents such as water (pure water) having a large surface tension or an alkaline detergent is more remarkable, and it takes a long time not only to wash, but also to rinse or dry. The present invention has been made in view of such circumstances, and an object of the invention is to provide a cleaning apparatus and a cleaning method for efficiently cleaning parts having fine through-hole precision parts, such as ferrules. C invention content:! SUMMARY OF THE INVENTION 1247632 A cleaning apparatus according to the present invention is a device for washing a washed object in a washing liquid in a washing liquid circulation line and forcibly flowing through the washing liquid in the washing container, The cleaning device includes a holding device for holding the object to be cleaned having the fine through-holes 5 such that the through-holes are in the same direction as or in the direction of the flow direction of the cleaning liquid, The high pressure washing liquid flow can pass through the through hole of the washed object. . Further, preferably, the holding device separates the inside of the washing container into an upper chamber and a lower chamber, and the washing liquid flowing into the upper chamber is mainly passed through the through hole of the object to be washed. The aforementioned lower chamber. Moreover, it is preferable that the holding device has a plurality of holding recesses for allowing the object to be washed, and a flow hole provided in the bottom of the holding recess and having a smaller diameter than the holding recess, The through-hole through-hole that is fitted in the holding recessed portion communicates with the through-hole. Further preferably, the cleaning device further comprises an ultrasonic cleaning device that ultrasonically washes the object to be washed. In the cleaning method of a component according to the present invention, ultrasonic cleaning is alternately repeated by the cleaning device of the present invention, and the high pressure cleaning liquid is washed through the high pressure in the through hole of the object to be washed. In the cleaning method of the parts according to another aspect of the present invention, the component cleaning device of the present invention simultaneously performs ultrasonic cleaning and high pressure washing of the high pressure cleaning liquid through the through hole of the object to be washed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a washing apparatus according to an embodiment of the present invention. 1247632 Figure 2(a) is a plan view of the fixed fixture of the same device, (b) is a cross-sectional view of the fixed fixture, and (c) is an enlarged cross-sectional view of the fixture. Figure 3 is a cross-sectional view showing the washing container of the same apparatus. Figure 4 is a cross-sectional view showing the washing container of the same apparatus. 5 Figure 5 is a cross-sectional view showing the washing container of the same device. Figure 6 is a perspective view of the basket of the fixed fixture of the same device. Fig. 7 is a schematic view showing a washing apparatus according to another embodiment of the present invention. Figure 8 is a cross-sectional view showing the washing container of the same apparatus. 10 Figure 9 is a diagram showing the cleaning steps of the same device. Figure 10 is a cross-sectional view showing the washing container of the same apparatus. Figure 11 is a cross-sectional view showing the washing container of the same apparatus. The figure is a schematic view showing a comparative cleaning apparatus. I: Embodiment 3 15 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments will be described with reference to the drawings. Hereinafter, the present embodiment will be described with reference to the drawings. As is apparent from the entire flow chart schematically shown in Fig. 1, the cleaning device for the component includes the liquid tank 2 for storing the cleaning liquid 1, between the liquid outlet 2& and the liquid return port 2b of the liquid tank 2 The circulation line 3 of the circulating cleaning liquid 1 is installed in the washing container 4 for storing the laundry and the liquid feeding pump 5 for forced circulation in the middle of the circulation line 3. Therefore, there is a method in which the cleaning liquid 1 is vertically distributed in the washing container 4 to wash the object to be washed (hereinafter referred to as a straight-through washing method). In addition, the direct-flow cleaning method is preferably a direct path cleaning method using a direct path cleaning device (Arakawa Chemical Industry Co., Ltd., 1247632 trade name, patent No. 2621800). A jig holder 12 is provided on the inner wall surface of the intermediate portion in the longitudinal direction of the washing container 4, and a fixing jig (positioning device) 11 to be described later is carried on the jig holder 12, whereby the washing container 4 can be partitioned into the upper portion. Room 4a and lower chamber 4b. The outer peripheral portion of the fixing 5 jig 11 is in contact with the entire circumference of the jig holder 12, and if the sealing portion outside the drawing is provided in the contact portion, the cleaning liquid 1 of the chamber 4a above the cleaning container 4 can be prevented from passing through the aforementioned contact. Part of it leaked out and fell into the lower chamber 4b. Further, as shown in Fig. 3, the washing container 4 is provided with an inflow port 4c and an outflow port 4d of the washing liquid 1. The inflow port 4c of the upper chamber 4a of the washing container 4 is connected to the exhaust (vacuum) line 106, and the outlet port 4d of the lower chamber 4b is connected to the refluxing liquid 1 to the tank 2 return line 10. The exhaust (vacuum) line 6 is provided with a vacuum pump outside the drawing, and the circulation line 3 before the washing container 4 is branched by the bypass line 7, and the filter outside the figure is provided in the circulation line 3, and can be The filter filters the washing liquid 1 0 15 in a full amount in the circulation line, the bypass line, the exhaust (vacuum) line 6 and the return line 10, and is provided with valves VI to V4, and the opening and closing operations of the valves VI to V4 are performed. The circulation line 3 and the exhaust (vacuum) line 6 can be switched, and the flow rate of the cleaning liquid 1 can be directly returned to the liquid tank 2 by using the bypass line 7, and the internal pressure of the washing container 4 can be controlled to prevent The liquid pressure pump 5 causes a sharp upper 20 liters of the internal pressure of the washing container 4. Further, the washing container 4 is a pressure resistant structure, the upper end of the washing container 4 is closed by a lid 8, and the pressure gauge 9 for monitoring the internal pressure of the washing container 4 is attached to the lid 8. Further, the cleaning device includes a liquid tank not having the rinsing liquid, a circulation line for the rinsing liquid, a compressor for liquid cutting, a blower for drying, a heater, a supply line, a circulation line, a supply line, and the like, and the circulation. The pipeline and the air supply pipe 1247632 are connected to the washing container, 4. Then, after washing and fixing the object to be fixed in the fixing jig, the inside of the same washing container 4 is rinsed, and the liquid is cut and dried. As shown in Fig. 2, the fixing jig u is in the form of a plate, and a plurality of holding recesses Ua for inserting the ferrule (the example of the object to be washed) A are formed. Each of the holding portions 5 has a tapered shape at the lower end portion of the concave portion 1U, and the lower end portion communicates with the flow hole 11b having a smaller diameter than the holding concave portion Ua. Further, an inverted U-shaped handle 11 立 is erected on the side of the fixing jig. In addition, as long as the through hole A1 of the ferrule A, which is mainly composed of the cleaning liquid 后, is reached, the lower chamber 4b of the cleaning container 4 is obtained, and the shape or position of the holding recess 10 Ua and the flow hole lib are not necessarily limited. For example, a plurality of ferrules A may be fitted in one of the holding recesses 11a. Further, since the ferrule A having the fine through hole A1 is fitted into the holding concave portion 11a of the fixing jig 11, the through hole Ai of the ferrule a and the flow hole ll of the fixing jig π can be erected while holding the ferrule A. . The fixing jig 15 is not particularly limited in material or structure as long as it can withstand the differential pressure between the upper portion 4a and the lower chamber 4b of the washing container 4 which is generated by the washing liquid supplied from the liquid feeding pump 5. Further, although the fixing jig 11 is supported by the jig 12, the contact area of the jig 12 is small, the rigidity of the jig 11 is low, and the jig 11 is broken or deformed by the high-pressure washing liquid. Therefore, the support area of the jig holder 12 can be increased by using the reinforcing material to reinforce the fixing jig without obstructing the flow of the cleaning liquid passing through the through hole A1 of the ferrule A. The fixing jig 11 is housed in the washing container 4 by the operating device 2 shown in Fig. 3, and is taken out by the washing container 4 after washing. The operating device includes a pair of outwardly facing hooks 20a, and the pair of hooks 2, such as an arrow, can be expanded and contracted as an interval 10 Ϊ 247,632. The fishing holding body 2Gb can move the fishing holding body 2Gb by 1 as the arrow moves up or down or horizontally. Mobile device outside the picture. As long as the operating device 2 is used, the amplifying hook 2 is spaced apart, and the handle 11c of the fixing jig 11 is hung, and in this state, the fixing jig 1 is placed on the washing container 4 by the descending hook holding body 20b. The clip 5 has a frame 12. Further, as long as the washing is completed, the pair of hooks 2〇a having a narrow interval are lowered into the washing container 4 in which the lid 8 is opened, and then the hooks 2 are enlarged and spaced apart, and the handles of the fixed fixture 11 are raised. Hook 2〇a. Thereby, the fixing jig can be taken out by the washing container 4. Next, a description will be given of a method for cleaning the through hole of the ferrule A. The ferrule A is fitted into the holding recess 11a of the fixing 10 jig 11, and the fixing jig 11 is placed on the jig holder 12 of the washing container 4, and the lid 8 of the washing container 4 is closed. Next, the valve V3 is opened, the other valves V1, v2, and V4 are closed, and the vacuum pump is actuated to decompress the inside of the washing container 4. Next, the valve V3 is closed, only the valve V4 is opened, and after the cleaning liquid 1 is lifted, the valves VI and V2 are opened to operate the liquid feeding pump 5. Further, the liquid supply pump 5 is gradually closed to the valve V2 after the periodic operation state, and the pressure gauge 9 stops the closing operation of the valve V2 at the time of the constant pressure shown, and maintains the state. Further, the pressure in the washing container 4 can be adjusted by controlling the number of motor rotations of the liquid feeding pump 5 by means of a current transformer. Thereby, the cleaning liquid 1 forcibly circulates the circulation pipe line 3, and in the cleaning container 4, the cleaning liquid 1 reaches the lower chamber from the upper chamber 4a through the through hole A1 of the ferrule A and the flow hole Hb of the fixing jig 20 11 4b. At this time, the cleaning liquid 1 hardly passes between the fixing jig 11 and the jig frame 2 of the washing container 4 or between the ferrule A and the holding recess 14 of the fixing jig 11. In this way, the cleaning liquid 1 mainly reaches the lower chamber 4b of the cleaning container 4 through the fine through hole A1 of the ferrule A, and the cleaning liquid 1 becomes a high-pressure washing liquid flow and passes through the 1247632 through-hole A1, and can be washed away and adhered to The oil in the hole wall of the through hole A1 or foreign matter such as abrasive grains. After the through hole A1 of the ferrule A is washed for a certain period of time, the bypass valve V2' is opened to stop the liquid supply pump 5 after the internal pressure of the cleaning container 4 is lowered. Further, as shown in Fig. 3, the cleaning container 4 is provided with a oscillating ultrasonic oscillating wave vibrator 21', so that a straight-through cleaning method and a super-wave cleaning method can be used in combination. The ultrasonic oscillator 21 is generally provided on the side wall or the bottom of the washing container 4, and the ultrasonic oscillator 21 is connected to an ultrasonic oscillating device. The ultrasonic transducer 21 can be used, for example, as a magnetostrictive oscillator, an electrostrictive transducer, or the like. The ultrasonic cleaning system closes the valves V3 and V4, opens the valves VI and V2, and operates the liquid feeding pump 5, and is implemented in a state where the washing container 4 is filled with the washing liquid 1, and the period of ultrasonic cleaning is performed in the forced circulation washing. Before and after the liquid sputum. In this way, by using the straight-through cleaning method and the ultrasonic cleaning method using the same washing container 4, as long as the two washing methods are alternately and repeatedly performed, the washing efficiency can be improved, and the washing degree can be high in a short time. Washed. In particular, it is effective to adhere a foreign matter such as fine particles to the wall of the through hole A1. For example, when cleaning the abrasive grains that have entered the hole of the through hole A1, the abrasive particles are washed by the high pressure washing liquid by the ultrasonic wave after the abrasive particles are pulled apart by the wall of the hole. Therefore, it can be washed in a short time, and there is no need to ensure that the ultrasonic washing 20 net dedicated space. Further, when the two washing methods are simultaneously performed, since the through hole A is washed simultaneously with the high-pressure washing liquid flow and the ultrasonic wave, even if the high-pressure washing liquid is used, the washing ability can be reduced without the ultrasonic wave. Ultrasonic cleaning device. 4 to 6 show an embodiment in which the fixing device 12 1247632 11 is housed in the washing container 4 by using the blue baskets 13, 13A, and 13β. The basket 13 shown in Fig. 4 is formed in a plate shape, and a concave portion 13a into which the fixing jig 11 can be fitted is provided on the upper surface side of the basket 13, and a flow hole 11b corresponding to the solid-drying device 11 is provided on the bottom surface portion of the concave portion 13a. The liquid passage hole 13b communicates with each of the flow holes 11b of the fixing jig 11 when the recess 13a is fitted into the fixing jig 11. Further, an inverted U-shaped handle 13e is erected on both sides of the basket 13. Further, when the baskets 13, 13A, and 13B with the handle 13c are used, the handle lie may not be provided in the fixing jig}1. The blue basket 13A shown in Fig. 5 is formed in a bottomed cylindrical shape, and a liquid passage hole 13b is provided in the bottom portion 10 of the blue basket 13A, and a liquid passage hole is not provided in the main body portion 13d, and a flange 13e is formed on the upper end of the chain M 13A. A handle 13e is erected. Further, when the basket 13A of the second set = 11 is fixed in the washing container 4, the outer flange i is placed on the jig holder 12 of the washing container 4. In order to increase the amount of processing of the object to be washed, the structure 15 is such that the fixing member can be accommodated in a plurality of stages, and the opening portion 13e is provided on one side of the cylindrical body W. Guide grooves (3) are formed on both sides of the opening portion, and both edges of the lid body (3) of the opening and closing opening portion 13e are slidably fitted into the guide groove, and a plurality of jig holders are disposed on the both sides of the main body 13d at appropriate intervals. ❿, an outer flange nh is formed on the upper end of the body m, and the shock absorber I% is said to be on the outer flange. In addition, the horizontal cover 13f is lifted, and the opening 13e is inserted into the fixing jig and placed on each of the jigs Hg, and the opening ne is closed by the cover ni, and the flange 13h is hung by the blue child. The jig holder 12 of the clean container 4 can fix the blue Dong in the washing container 4. Furthermore, in the contact portion of the baskets 13, 13A, 13B and the fixing jig, the contact portions of the 13 1247632 baskets 13, 13A, 13B and the washing container 4 can also be prevented by the sealing portion outside the setting. The contact portion leaks the cleaning solution 1. Further, the size or shape of the baskets 13, 13A, 13B is not particularly limited as long as it can accommodate the size or shape of the fixing jig 11. 5 Fig. 7 shows an alternate washing container 4 for ultrasonic cleaning and a washing container 41 for ultrasonic cleaning, and simultaneously control a plurality of fixing jigs 11 to perform straight-through washing by using the washing containers 4 and 41 simultaneously. Clean and ultrasonic cleaning device. Further, the apparatus includes a compressor for shutting off the liquid (not shown) and a drying container 42. In the drying container 42, the heater 42a and the blower 42b can supply warm air. In the washing container 4, the ultrasonic oscillator 21 is not provided, and the ferrule A of the fixing jig 11 accommodated in the washing container 4 is washed by the circulating cleaning liquid 1 high-pressure washing liquid to pass through the through hole. Further, the washing container 41 can suck up the washing liquid 1 by the pressure reduction of the vacuum pump outside the drawing. The jig holder 15 41c is provided in the middle portion of the cleaning container 41 in Fig. 8, and the cleaning container 41 can be divided into the upper chamber 41a and the lower chamber 41b by the fixing jig 11 placed on the jig holder 41c. An ultrasonic oscillator 21 is provided at the lower portion of the washing container 41. Further, an outlet port 41d is opened in the chamber 41a above the washing container 41. An inflow port 41e is opened at the bottom of the lower chamber 41b, and the upper end of the washing container 41 is closed by a lid 41f. 20 Figure 9 shows the cleaning procedure using the apparatus shown in Figure 7. Further, in the washing step, the fixing jig 11 is conveyed in a flow-through manner using the connected plurality of operating devices 20. Then, after the objects to be washed are fixed by a plurality of fixing jigs 11, the plurality of fixing jigs 11 are placed in the washing containers 4 and 41 to wash the objects 1247632, and then washed in the partition walls as indicated by the arrows. The clean containers 4, 41 are successively changed to alternately perform straight-through washing and ultrasonic cleaning, and finally transferred to the drying container 42 to dry the washed matter. Further, the cleaning liquid adhering to the through-hole of the object to be washed is subjected to liquid-cutting before the straight-line washing in the next step, thereby improving the washing efficiency in the next step. Further, as the ultrasonic cleaning-only washing container 41, the ultrasonic oscillator 21 may be provided on the upper and lower portions as shown in Fig. 10 or the ultrasonic oscillator 21 may be provided on the left and right sides as shown in Fig. 11. . As the cleaning liquid 1 used in the above cleaning apparatus and cleaning method, a pure hydrocarbon or industrial water may be used, and a hydrocarbon-based solvent, a glycol ether-based compound or an alcohol-based compound may be used as a cleaning agent. Or a detergent composed of a mixture of various interface activators and water, or a latex-based detergent composed of the above mixture, and other various cationic, anionic, nonionic detergents and the like. . The heater can also be suitably heated to increase the detergency of the detergent. The detergent used in the washing step differs depending on the material of the washing material. However, in the ceramic ferrule A, the liquid hydrogen ion index (pH) actually used is a detergent of 8 to 14 More ideal. Further, although the rinse liquid is preferably pure water, ion exchange water or tap water may be used for the cleanliness of the product 20 as required. Further, in order to improve the drying efficiency, it is also possible to use an alcohol or a solvent containing a highly volatile solvent component after the rinsing step. Further, the object to be washed is not limited to the ferrule A. DESCRIPTION OF REFERENCE NUMERALS 15 1247632 Fixing jig 长 long dimension x width dimension x thickness dimension 80 mm χ 8 〇 χ 5 mm, can be equipped with 100 ferrules (outer diameter 2.5 mm, through hole inner diameter 0.125 mm, length 10 mm). Using the apparatus shown in Fig. 1, the 5 fixing jigs 11 of the 100 ferrules which have been subjected to the grinding step are placed in the washing container 4 as a cleaning agent, using the Aya 7ST-880 manufactured by Arakawa Chemical Industry Co., Ltd. A 3°/〇 aqueous solution was used as the rinse water, and pure water was used, and the washing test as described in Table 1 was carried out. In addition, there is a supersonic vibration 21 in the wash valley. Since the cleaning liquid 1 mainly flows into the lower chamber 4b through the fine through-holes A1 of the ferrule, it becomes a high-pressure direct passage in which the pressure in the chamber 10 of the washing container 4 reaches 5 kg/cm 2 . In the comparative example, the cleaning operation as described in the table was carried out by the next cleaning device. The washing apparatus of the comparative example has a basket 101 having a plurality of liquid passage holes 100 at the bottom as shown in Fig. 12, and the basket 101 is placed on the support portion 103 in the washing container 102, and the washing container 102 can be divided. For the upper chamber 1〇4 and the lower chamber 1〇5. Moreover, 15 one ferrule can be directly put into the basket ιοί without using the sputum smear 11 as in the embodiment, and the liquid feeding pump in the actuating circulation line is directly cleaned by the passage. At this time, the pressure inside the chamber on the washing container did not rise. The results of the tests are shown in Table ,. In the comparative example, the yield is limited to 50% or less, but in the experimental example, 83% can be obtained to obtain a fairly good cleaning effect, X, as in Example 2. After the ultrasonic cleaning, the direct path cleaning is performed. For the first time, in the experimental example 3, the ultrasonic cleaning is performed, and the direct path cleaning and the ultrasonic cleaning are alternately performed, and the pass rate can be further improved. As a result, it was understood that Examples 1 to 3 were suitable for the cleaning of the fine through-holes of the ferrule A. 16 1247632 with Yan Duo ακ邾it Baht AH. ^^^#i^^#®-^fiias^^>^i©^#-^H>^^^^~nH^rrb. CS 桊欢吟^1 DP燊 Η 苏 ii^^^~t:c;s. Example 3 Example 2 Example 1 Comparative Example Conditions Celsius 70 degrees χ 5 minutes Celsius 70 degrees χ 5 points I i US Wash 1 Celsius 50 degrees χ 5 points High pressure DP Celsius 50 degrees χ 5 points High pressure DP Celsius 70 degrees x lO points High pressure DP Celsius 70 degrees xlO points DP DP wash 1 Celsius 70 degrees χ 5 points 1 ! ! US wash 2 _1 Celsius 50 degrees χ 5 points High pressure DP 1 1 1 DP wash 2 Celsius 50 degrees xlO points High pressure DP Celsius 50 degrees XlO points High pressure DP Celsius 50 degrees xlO points High pressure DP Celsius 50 degrees xlO points DP Finishing cleaning pure water 1 Normal temperature χ 3 points Celsius 100 degrees χ 7 points Factory temperature X 3 points | Celsius 100 degrees χ 7 points Normal temperature χ 3 points i Celsius 100 degrees χ 7 points | Normal temperature χ 3 Points i Celsius 100 degrees χ 7 points | Dry | 93% (88%) 89% (76%) 83% (40%) 50% (30%) of the following results (%) Pass rate (complete rate) >1
17 1247632 根據本發明零件類之洗淨裝置及洗淨方法、由 =液集巾地流人被洗淨物之貫魏，能提高洗淨效Γ “具有洗淨_賴細貫觀之光連結器之套随 密零件之洗淨效果，可在短時間洗淨。又，與習知，^ 恩噴淋洗淨將被洗淨物逐件⑮準洗淨相較，可洗淨譬如^ 百個單位、可提高量產性。 。 【圖式1簡單^ 明】 第1圖是顯示本發明實施形態之洗淨裝置的概略圖。17 1247632 According to the cleaning device and the cleaning method of the parts of the present invention, the cleaning of the parts by the liquid collecting towel can improve the cleaning effect Γ "There is a light connection of washing and aging" The cover of the device can be washed in a short time with the cleaning effect of the parts. Moreover, with the conventional knowledge, the washing of the spray will be washed by the washing agent one by one, and can be washed, such as ^100 [Embodiment 1] FIG. 1 is a schematic view showing a cleaning apparatus according to an embodiment of the present invention.
第2⑷圖係、同裝置之固定夾具平面圖，⑼係同固定夹 1〇具之截面圖’（c)係同固定夾具之放大截面圖。 第3圖是顯示同裝置之洗淨容器截面圖。 第4圖是顯示同裝置之洗淨容器截面圖。 第5圖是顯示同裝置之洗淨容器截面圖。 第6圖是顯示同裝置之固定夾具之籃筐之立體圖。 15 第7圖是顯示本發明之其他實施形態之洗淨裝置的概 略圖。Fig. 2(4) is a plan view of the fixed fixture of the same device, (9) is the same as the fixed clip 1 (c) is a cross-sectional view of the fixed fixture. Figure 3 is a cross-sectional view showing the washing container of the same apparatus. Figure 4 is a cross-sectional view showing the washing container of the same apparatus. Figure 5 is a cross-sectional view showing the washing container of the same apparatus. Fig. 6 is a perspective view showing the basket of the fixing jig of the same device. Fig. 7 is a schematic view showing a washing apparatus according to another embodiment of the present invention.
第8圖是顯示同裝置之洗淨容器之截面圖。 第9圖是顯示同裝置之洗淨步驟之圖。 第10圖是顯示同裝置之洗淨容器之截面圖。 第11圖是顯示同裝置之洗淨容器之截面圖。 第12圖是顯示有關於比較例洗淨裝置之概略圖。 18 1247632 【圖式之主要元件代表符號表】 1···洗淨液 2…液箱 2a···液出口 2b···液回流口 3…循環管線 4、4卜102···洗淨容器 4a、41a、104···上室 4b、41b、105···下室 4c、41e···流入口 4d、41d…流出口 5…送液栗 6···排氣(真空)管線 7···旁通管線 8、41f···蓋 9…壓力計 10…回流管線 11…固定夹具 11a···凹部 lib···流通孔 11c、13c···把手 12、 13g、41c…夾具架 13、 13A、13B、101 …藍筐 13a···凹部 13b、100···通液孔 13d···本體部 13e···開口部 13f···橫蓋Figure 8 is a cross-sectional view showing the washing container of the same apparatus. Fig. 9 is a view showing the washing step of the same apparatus. Figure 10 is a cross-sectional view showing the washing container of the same apparatus. Figure 11 is a cross-sectional view showing the washing container of the same apparatus. Fig. 12 is a schematic view showing a cleaning apparatus of a comparative example. 18 1247632 [Main component representative symbol table of the drawing] 1···washing liquid 2...liquid tank 2a···liquid outlet 2b···liquid return port 3...circulation line 4,4 Bu 102···Clean Containers 4a, 41a, 104, ..., upper chambers 4b, 41b, 105, ..., lower chambers 4c, 41e, ..., inflow ports 4d, 41d, ..., outlets 5, liquid feeds, liquids, 6 (s), exhaust (vacuum) lines 7···Bypass line 8, 41f··· cover 9...pressure gauge 10...return line 11...fixing jig 11a···recessed part lib···through hole 11c, 13c···handle 12, 13g, 41c... Clamp holders 13, 13A, 13B, 101 ... blue basket 13a · · recessed portions 13b, 100 · through liquid holes 13d · main body 13e · · opening 13f · · · cross cover
13h···外凸緣 13l···蓋體 20…操作裝置 20a···釣 20b…鉤保持體 21…超音波振盪器 42···乾燥容器 42a···加熱器13h···outer flange 13l···cover body 20...operating device 20a···fishing 20b...hook holding body 21...ultrasonic oscillator 42···drying container 42a···heater
42b···鼓風機 103···支承部 A···套圈 A1···貫通孔 V：l、V2、V3、V4···閥 1942b···Blower 103···Support section A···Ring A1···through hole V:l, V2, V3, V4··· Valve 19