Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
  • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
  • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
  • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
  • B65G39/02—Adaptations of individual rollers and supports therefor
  • B65G39/06—Adaptations of individual rollers and supports therefor the roller sleeves being shock-absorbing, e.g. formed by helically-wound wires
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Definitions

• the present invention relates to a transfer device.
• a color filter constituting a color liquid crystal display panel is manufactured by coating a glass substrate with red, green, and blue resists, and is cleaned during the manufacturing process. Cleaning is performed by using a combination of a wet cleaning method using pure water and a U v / o 3 cleaning method in order to further enhance the cleaning effect.
• This UVZOS cleaning is a type of UV treatment, which removes organic substances by using organic matter to reduce the molecular weight of the organic matter using ultraviolet light and generating ozone and oxygen active groups from oxygen in the air using ultraviolet light. is there.
• FIG. 13 is a perspective view showing an open state of the ultraviolet processing apparatus used in such a cleaning step.
• a transfer device 53 provided with a large number of feed rollers 52 is provided to feed a plurality of glass substrates (not shown) as an object to be processed. It can be transported sequentially on the roller 52 in the direction of the arrow in FIG.
• a metal feed roller 52 that is unlikely to deteriorate due to ultraviolet irradiation has been used.
• the metal feed roller 52 is hard, abrasion may occur when the metal feed roller 52 comes into contact with the glass substrate, and the yield of the product is reduced.
• feed rollers 52 are installed not only at both ends, which have little effect on product quality, but also at positions closer to the inside to prevent the glass substrate from bending. do it Since glass substrates had to be supported, the problem of lowering the yield was growing. Therefore, in order to avoid this problem, a resin roller that does not easily cause abrasion is used as the feed roller 52. However, the resin-made feed roller 52 deteriorates faster than the metal-made feed roller 52, and thus has a problem that it needs to be frequently inspected and replaced. Further, in this replacement work, first, the roller shaft 54 is removed from the transport device 53, the roller shaft 54 is removed from the feed roller 52, and then the roller shaft 54 is connected to a new feed roller 52. , And re-attach it to the transport device 53 again. In addition, there has been a problem that the operation efficiency of the device is reduced due to a long maintenance work. Disclosure of the invention
• a transport device for solving the above-mentioned problems is a transport device that includes a roller shaft provided with a roller, and transports an object to be transported that is in contact with the roller.
• a ring member is provided in contact with the object to be conveyed while being conveyed, and the ring member is provided with a dividing portion for dividing the ring member in a radial direction. It should be noted that the case where the roller is composed of only the ring member is naturally included in the first invention according to the present invention.
• a second invention is the transport device according to the first invention, wherein the roller includes a holding member, wherein the holding member comprises a first holding portion, and a second holding member fixed to the first holding portion.
• the ring member can be attached to the holding member by being sandwiched between the first holding portion and the second holding portion.
• a third invention is the transport device according to the first invention, wherein the roller includes a holding member, and one of the ring member and the holding member is provided with an overhang portion that protrudes in an axial direction. And the other is provided with a concave portion into which the overhang portion can be fitted.
• a fourth invention is the transfer device according to the second invention, wherein one of the ring member and the holding member is provided with an overhang portion that protrudes in the axial direction, and the other includes: A recess is provided in which the overhang portion can be fitted.
• a fifth invention is the transport device according to the fourth invention, wherein the first holding unit is fixable to the roller shaft, and the ring member is fixable to the holding member. The overhanging portion or the concave portion is provided on the first holding portion.
• a sixth invention is the transfer device according to the first invention, wherein a portion of the ring member, which is in contact with the transferred object during transfer, is configured to prevent damage to the transferred object due to contact with the ring member.
• a seventh aspect of the present invention is the transport device according to the first aspect of the present invention, wherein a portion of the contour of the dividing portion, which is in contact with the transported object during transport, is a roller shaft. Plane containing the axis of rotation It does not fit inside.
• An eighth invention is the transport device according to the second invention, characterized in that the second holding section can be fixed to the first holding section with a screw.
• a ninth invention is the transfer device according to the eighth invention, wherein the first holding portion or the second holding portion has a mounting hole formed by connecting a large-diameter hole and a small-diameter hole.
• the holding part provided with the mounting hole is screwed to the other holding part by a screw penetrating the mounting hole, and the screw is a screw part and a screw part.
• a tenth aspect of the present invention is the transport device according to any one of the first to ninth aspects, wherein the dividing portion provided on the ring member is provided at one position.
• a transport device is a transport device having a roller shaft having rollers, and transporting a transported object in contact with the roller.
• the contact portion is made of resin, and the portion made of resin is sandwiched between non-resin parts.
• the non-resin part does not necessarily have to be divided into two or more parts, and a groove is formed in the non-resin part, and the part made of the resin is fitted in the groove. Even in this case, it corresponds to the eleventh invention according to the present invention.
• the ring member by providing the ring member with the dividing portion, the ring member can be attached to and detached from the roller shaft without removing the roller shaft from the transfer device.
• the ring member is disposed so as to be sandwiched between the first holding portion and the second holding portion.
• the second holding unit since the second holding unit is fixed to the first holding unit, it can be fixed at a position closer to the portion of the ring member that comes into contact with the conveyed object than the roller shaft (see FIG. 5). Therefore, the position of the portion of the ring member that is in contact with the transported object can be accurately fixed. As a result, it is possible to accurately fix a portion of both ends of the dividing portion that is in contact with the transported object, and to prevent the transported object from rattling at the time of transport due to a shift in the position of both ends of the dividing portion.
• one of the ring member and the holding member is provided with an overhang portion projecting in the axial direction, and the other is provided with a concave portion into which the overhang portion can be fitted. Is provided.
• the ring member since the ring member has the dividing portion, the ring member is likely to be deformed by receiving heat, interference with the transported body, and the like.
• the displacement of the ring member is restricted by fitting the overhanging portion into the concave portion, and the ring member has its shape. It is securely fixed to the holding member while maintaining its shape. Thereby, the deformation of the ring member can be prevented, and the transferred object can be smoothly transferred.
• the first holding portion is fixed to the roller shaft so as not to be free to move, and the ring member is fitted to the holding portion. According to such a configuration, the ring member can be held without misalignment with respect to the roller shaft, and the substrate can be smoothly transported.
• a seventh aspect of the present invention is the transport device according to the first aspect, wherein a portion of the contour of the dividing portion, which is in contact with the transported object during transport, is in a plane including a rotation axis of the roller shaft. It does not fit. If the ring member shrinks due to fluctuations in the ambient temperature, etc., the split part may open. Here, if the dividing portion is formed so as to fit within a plane including the rotation axis of the roller shaft, the open portion will be perpendicular to the direction of transport of the glass substrate. There is a risk of rattling during transport of the body.
• a portion of the contour of the dividing portion that comes into contact with the transported object when the transported object is transported does not fit in a plane including the rotation axis of the roller shaft. Therefore, the transported object is always supported by one of the divided ends on both sides of the dividing part. For this reason, according to the seventh aspect, it is possible to smoothly transport the transported object while avoiding rattling.
• the eighth aspect even if the second holding portion is not removed and the screw is not completely removed, the ring member is formed by the first and second holding portions only by slightly loosening the screw. The fixing is released, and the ring member can be replaced. Therefore, the time required for the replacement of the ring member can be significantly reduced.
• the ninth aspect it is possible to easily attach and detach the second holding part to and from the first holding part by removing and inserting the head from the large-diameter hole without removing the headed screw. it can. Thereby, maintenance work can be performed more easily.
• the ring member is provided with one dividing portion, even if the pressure of the ring member by the holding portion is loosened during use of the transfer device, the ring member is displaced from the roller shaft. The advantage is that it does not fall.
• FIG. 1 is a side view of a cleaning device according to a first embodiment.
• FIG. 2 is a perspective view of an ultraviolet-ray attaching device.
• FIG. 3 is a perspective view of a feed roller.
• FIG. 4 is an exploded perspective view of the feed roller.
• FIG. 5 is a side sectional view of the feed roller.
• FIG. 6 is a side sectional view showing a state in which a glass substrate is transferred by a transfer device.
• 7 to 9 are views showing steps of a replacement work of a ring member.
• FIGS. 10 and 11 are exploded perspective views of the feed roller of the second embodiment.
• FIG. 12 is an exploded perspective view of a feed roller according to another embodiment.
• FIG. 13 is a perspective view showing a conventional transport device. BEST MODE FOR CARRYING OUT THE INVENTION
• the transfer device 1 of the present invention is provided in a cleaning device 2 for cleaning a glass substrate 7 for a liquid crystal display (corresponding to a transferred object of the present invention), and is a device for transferring the glass substrate 7.
• the cleaning device 2 has an infrared pre-heating device 4 on the left side and a cooling device 5 on the right side, as viewed from the front of the ultraviolet asher device 3, and a cooling device 5 on the right side.
• the cleaning device 6 is arranged continuously.
• Each of the devices 3, 4, 5, and 6 is provided with a transfer device 1 so that the glass substrate 7 is transferred sequentially from the left to the right as indicated by the arrow in the figure. It has a continuous washing line.
• the ultraviolet asher 3 will be described as an example.
• the main body 11 of the ultraviolet asher 3 has a box-like shape with an open upper surface, and two lamp houses 12 are arranged so as to close the opening (see FIG. 2).
• the lamp house 12 located on the left side when viewed from the front of the main body 11 has front and rear ends on the left edge thereof connected to the front wall 11 A and the rear wall 11 B of the main body 11 via a hinge mechanism.
• the lamp house 12 supports the left half of the top opening of the main body 11 so that it can be opened and closed leftward.
• the lamp house 12 located on the right side when viewed from the front of the main body 11 also has front and rear ends 11 A and 11 A of the main body 11 via the hinge mechanism.
• the lamp house 12 supports the right half of the top opening of the main body 11 so that it can be opened and closed in the horizontal direction.
• the support stays 17 assist the movement of the lamp house 12 in the opening direction, and can maintain the open state of the lamp house 12.
• a plurality of lamps 13 for irradiating ultraviolet rays are arranged in a portion of the lamp house 12 which becomes a lower surface when it is in the closed position.
• the lamp 13 as a whole has a long shape having a length substantially equal to the facing distance between the conveyor frame walls 21, but the base 13 A is located on the front side of the main body 11.
• the base 13 A is fixed to the fixing part 14 provided in the lamp house 12 by screwing, and the rear end of the glass tube part 13 B is fixed to the lamp house 1 by a holding clip 15 which is screwed. 2 is fixed to the lower plate 12A.
• a group of electric wires (not shown) connected to the base 13 A is assembled at the front side in the lamp house 12, and a flexible bellows tube 1 provided between the front end of the lamp house 12 and the main body 11.
• the transfer device 1 is assembled to the main body 11. Inside the main body 11, two conveyor frame walls 21 are provided in parallel along a front wall 11A and a rear wall 11B. A plurality of columnar roller shafts 22 are extended in the front-rear direction between the conveyor frame walls 21 and are rotatably supported via bearings (not shown).
• a plurality of feed rollers 23 are attached to each roller shaft 22 at a substantially uniform pitch, and the roller shaft 22 is driven by a driving device provided in the main body 11. Rotating Thus, the glass substrate 7 placed on the feed roller 23 can be transported.
• the feed roller 23 is composed of a ring member 24 that directly contacts the glass substrate 7 and a holding member 27 that holds the ring member 24 on the roller shaft 22 (FIGS. 3 to 5). See).
• the ring member 24 is made of polytetrafluoroethylene (PTFE) resin, which is soft enough not to damage the glass substrate 7 and is not easily deteriorated by ultraviolet rays. It is formed in a flat annular shape with a large inner diameter.
• PTFE polytetrafluoroethylene
• a rib 25 (corresponding to the overhang portion of the present invention) is formed in the radially inner region so as to protrude in the axial direction over the entire circumference. Also, at any one position in the ring member 24, a cutting portion 26 is formed by cutting the ring along the axial direction, and by expanding the cutting portion 26, The roller shaft 22 can be attached to and detached from the roller shaft 22.
• the holding member 27 is formed as a whole from stainless steel in an annular shape, and includes a fixing ring 28 (corresponding to a first holding portion of the present invention) fixed to the roller shaft 22 and a fixing ring 28.
• a fixing plate 36 (corresponding to a second holding portion of the present invention) for sandwiching the ring member 24 between the ring 28 and the ring member 28.
• the fixing ring 28 has an inner diameter substantially equal to the outer diameter of the roller shaft 22, and is formed in an annular shape having an outer diameter slightly smaller than the ring member 24.
• One surface of the fixing ring 28 is a mounting surface 29 to which the ring member 24 is attached.
• the mounting surface 29 has a radially outer region dug down by a thickness equal to the thickness of the ring member 24 over the entire circumference to form a stepped portion 30.
• a groove 31 (corresponding to four parts of the present invention) 1 into which the rib 25 of the ring member 24 can be fitted is formed over the entire circumference.
• the ring member 24 described above is fitted into the stepped portion 30 while aligning the rib 25 with the groove portion 31.
• a screw hole 33 into which a head screw 32 for screwing the fixing plate 36 can be screwed.
• the screw holes 33 are provided at three places at equal intervals on the same circumference.
• a cylindrical portion 34 is formed in the radially inner region to protrude in the axial direction over the entire circumference.
• the roller shaft 22 is tightly fitted into the cylindrical portion 34, so that the fixing ring 28 is concentric with the roller shaft 22 and moves freely in the radial direction. It is fixed to impossible.
• a set screw hole 35 is formed at a substantially central position in the length direction of the cylindrical portion 34, and a set screw (not shown) is attached to the set screw hole 35 to be tightened.
• the fixing ring 28 is fixed so as to be able to rotate integrally with the roller shaft 22.
• the fixing plate 36 is formed in a flat annular shape having an outer diameter substantially equal to that of the fixing ring 28.
• the inner diameter of the fixing plate 36 is slightly larger than the outer diameter of the roller shaft 22 so that the fixing plate 36 can be easily slid in the axial direction when attaching to or detaching from the fixing ring 28. I'm sorry.
• a mounting hole 37 for passing the headed screw 32 is formed at a position matching the screw hole 33 of the fixing ring 28.
• This mounting hole 37 has a large diameter hole 37 A slightly larger than the head 32 A of the head screw 32 and a screw portion 32 B of the head screw 32 that is larger than the head.
• a small-diameter hole 37 B formed smaller than 32 A is formed in a round hole shape connected in the circumferential direction.
• the fixing plate 36 is attached to the mounting surface 29 of the fixing ring 28 so that the small diameter hole 37 B of the mounting hole 37 is aligned with the screw hole 33 of the fixing ring 28. It is fixed by passing the headed screw 32 through the small hole 37B and screwing it into the screw hole 33. As a result, the ring member 24 is sandwiched between the fixed plate 36 and the fixed ring 28 and is held so as not to fall off.
• the glass substrate 7 is placed on the feed roller 23 of the transfer device 1 and the driving device is driven. Then, the rotation of the roller shaft 22 rotates the feed roller 23 fixed to the roller shaft 22 so as to be integrally rotatable. Thereby, the glass substrate 7 placed on the feed roller 23 is transported from left to right in FIG. Then, while the glass substrate passes through each of the devices 3, 4, 5, and 6, the processing of the glass substrate 7 is sequentially performed. That is, the glass substrate 7 is subjected to a heat treatment when passing through the infrared preheating device 4, and then is conveyed into the ultraviolet asher 3 where the resist is ashesed.
• the metal holding member 27 is formed smaller in diameter than the ring member 24, it does not contact the glass substrate 7, and only the soft ring member 24 touches the glass substrate 7. (See Figure 6). This prevents the glass substrate 7 from being damaged by the feed roller 23.
• the ring member 24 is disposed so as to be sandwiched between a fixing ring 28 and a fixing plate 36 that can be fixed to the fixing ring 28. At this time, the fixing plate 3 6 As a result, the ring member 24 can be fixed at a position closer to the portion in contact with the glass substrate 7 than the roller shaft 22 (see FIG. 5).
• the position of the portion of the ring member 24 that is in contact with the glass substrate 7 can be accurately fixed.
• it is possible to accurately fix a portion of the both ends of the dividing section 26 that is in contact with the glass substrate 7, and the glass substrate 7 at the time of conveyance due to a shift in the position of both ends of the dividing section 26 is improved. Tattering can be prevented.
• the ring member 24 since the ring member 24 includes the dividing portion 26, the ring member 24 is liable to be deformed due to interference with the heat base material.
• the rib 25 is provided on the ring member 24 and the rib 25 is fitted into the groove 31 of the fixing ring 28, the movement of the ring member 24 with respect to the fixing ring 28 is restricted, and the ring The member 24 is securely fixed to the holding member 2.7 while maintaining its shape. Thereby, deformation of the ring member 24 is prevented, and the glass substrate 7 can be smoothly transported.
• the ring member 24 is fitted to the fixing ring 28 that is non-movably fixed to the roller shaft 22, misalignment of the ring member 24 with respect to the roller shaft 22 can be prevented.
• the rib 25 and the groove 31 are formed over the entire circumference, the ring member 24 is reliably held in an annular shape.
• the ring member 24 has only one dividing portion 26, even if the pressure of the ring member 24 by the fixing plate 36 is loosened during use of the transfer device, the ring member 24 can be rotated by the roller shaft. The advantage of not falling off from 22 is obtained. Since the ring member 24 deteriorates relatively early due to the influence of heat, ultraviolet rays, etc., the replacement operation is performed as follows. First, loosen the head screw 3 2 slightly, and fix the head 3 2 A of the head screw 3 2 to the mounting hole 3 7 Rotate the fixing plate 36 until it is aligned with the large-diameter hole 37 A (see Fig. 7).
• the new ring member 24 is attached to the holding member 27 by going through the procedure reverse to the removal procedure. That is, the ring member 24 is twisted to expand the dividing portion 26, and the roller shaft 22 is advanced into the ring from here, thereby attaching the ring member 24 to the roller shaft 22.
• the ring member 24 is fitted to the fixing ring 28 so that the rib 25 is aligned with the groove 31.
• the fixing plate 36 is slid toward the fixing ring 28 so that the head 32 A of the head screw 32 passes through the large-diameter hole 37 A, and is brought into contact with the mounting surface 29.
• the fixing plate 36 is rotated until the screw portion 3 2 B of the headed screw 32 enters the small-diameter hole 37 B, and the fixing plate 36 is held so as not to come off. Finally, tighten the head screw 32 to fix the ring member 24 between the fixing plate 36 and the fixing ring 28
• the ring member 24 is formed with the dividing portion 26, only the ring member 24 can be attached and removed without removing the roller shaft 22 from the transport device 1.
• the mounting holes 37 provided in the fixing plate 36 are formed into a burring hole shape, the headed screw 32 cannot be removed from the fixing ring 28 without removing the fixing plate 36 from the fixing ring 28. Can be attached and detached.
• the ring member 2 directly in contact with the glass substrate 7 4 is made of a soft resin material, and the ring member 24 is provided with a dividing portion 26 so that replacement work can be easily performed.
• the glass substrate 7 can be transported without being damaged, and the maintenance work can be easily performed.
• the ring member 24 made of resin is interposed between the fixing ring 28 made of stainless steel and the fixing plate 36 made of stainless steel.
• the transport device 1 provided in the ultraviolet asshing device 3 has been described as an example, but the transport devices provided in the other devices 4, 5, and 6 have the same configuration, and have the same operation. It works.
• the glass substrate 7 is transported by the rotation of the feed rollers 23, but the glass substrate 7 is transported by power other than the rollers, and the rollers are merely used for alignment of the glass substrate 7. Even when it is used, the effects of the present invention can be obtained similarly (the same applies to the second embodiment and other embodiments).
• the dividing portion 41 is provided obliquely with respect to the axial direction of the ring member 40. If the ring member 40 shrinks due to a change in the ambient temperature or the like, the split portion 41 may open.
• the dividing portion 41 is 85
• this open portion will be perpendicular to the direction of conveyance of the glass substrate 7, so that the glass substrate 7. May occur.
• the dividing portion 41 is provided obliquely to the axial direction of the ring member 40, the glass substrate 7 is always supported by either of the divided ends 41A and 41B. . Therefore, the glass substrate 7 can be smoothly transported while avoiding rattling.
• the dividing part 26 is provided at one place of the ring member 24, but as shown in FIG. 12, the dividing part 42 may be provided at two places, Alternatively, it may be provided at three or more locations.
• Such a configuration can be preferably applied particularly when the ring member 43 is made of a relatively hard material such as PEEK resin and cannot be twisted unless a large force is applied.
• the groove 31 is provided on the fixed ring 28 side, but a concave portion may be provided on the fixed plate side.
• a projecting portion may be provided on the holding member side, and a portion may be provided on the ring member side.
• both the holding member and the fixing plate may be provided with recesses or overhangs, and overhangs or recesses that can be fitted with these may be provided on both sides of the ring member.
• the rib 25 and the groove 31 are provided over the entire circumference of the ring member 24 and the fixed ring 28, but are provided only on a part of the circumference. May be.
• the headed screw 32 is provided on the fixing ring 28 side and the mounting hole 37 is provided on the fixing plate 36 side, but the mounting hole is provided on the fixing ring side and the fixing plate side
• a headed screw may be provided on the head.
• the ring member 24 may be formed of a force other than the PTFE resin or another resin.
• polyimide resins such as Sepra (registered trademark) and high density polyethylene (UPE) can be suitably used.
• PEEK resin having excellent heat resistance can be preferably used.
• those resins which have been subjected to a modification treatment such as mixing of fibers or the like, annealing treatment, cross-linking or the like can be used.
• the holding member 27 is made of stainless steel, but may be made of aluminum, ceramics, or the like.
• the feed roller may be configured such that the position of attachment to the roller shaft is shifted in the axial direction between the respective roller shafts. In this way, it is possible to avoid the occurrence of abrasion caused by the feed roller constantly contacting a specific position of the conveyed material.
• the transport device according to the present invention is useful as a device for transporting a transported object, and particularly, when the transported object is easily damaged such as glass, or when the transported object is subjected to an ultraviolet treatment. It is suitable for use in the process.

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• Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Nonlinear Science (AREA)
• General Physics & Mathematics (AREA)
• Mechanical Engineering (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Manufacturing & Machinery (AREA)
• Chemical & Material Sciences (AREA)
• Crystallography & Structural Chemistry (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Optics & Photonics (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Rollers For Roller Conveyors For Transfer (AREA)
• Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
• Delivering By Means Of Belts And Rollers (AREA)

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• 2002
  • 2002-05-14 JP JP2002138363A patent/JP2003327320A/ja active Pending
• 2003
  • 2003-05-12 CN CNB038105977A patent/CN100420615C/zh not_active Expired - Fee Related
  • 2003-05-12 KR KR1020047018237A patent/KR100983419B1/ko active IP Right Grant
  • 2003-05-12 WO PCT/JP2003/005885 patent/WO2003095341A1/ja active Application Filing
  • 2003-05-14 TW TW092113054A patent/TWI277588B/zh not_active IP Right Cessation

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