WO2003040711A1 - Dispositif de controle de substrat - Google Patents

Dispositif de controle de substrat Download PDF

Info

Publication number
WO2003040711A1
WO2003040711A1 PCT/JP2002/011507 JP0211507W WO03040711A1 WO 2003040711 A1 WO2003040711 A1 WO 2003040711A1 JP 0211507 W JP0211507 W JP 0211507W WO 03040711 A1 WO03040711 A1 WO 03040711A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspecting device
substrate inspecting
gate type
type arm
fixed stage
Prior art date
Application number
PCT/JP2002/011507
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Nobuo Fujisaki
Kazuya Ito
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001339938A external-priority patent/JP3929285B2/ja
Priority claimed from JP2002000767A external-priority patent/JP2003202209A/ja
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to KR1020047006299A priority Critical patent/KR100634652B1/ko
Publication of WO2003040711A1 publication Critical patent/WO2003040711A1/ja

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2002/011507 2001-11-05 2002-11-05 Dispositif de controle de substrat WO2003040711A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020047006299A KR100634652B1 (ko) 2001-11-05 2002-11-05 기판 검사 장치

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001339938A JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置
JP2001-339938 2001-11-05
JP2002-000767 2002-01-07
JP2002000767A JP2003202209A (ja) 2002-01-07 2002-01-07 基板検査装置

Publications (1)

Publication Number Publication Date
WO2003040711A1 true WO2003040711A1 (fr) 2003-05-15

Family

ID=26624355

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/011507 WO2003040711A1 (fr) 2001-11-05 2002-11-05 Dispositif de controle de substrat

Country Status (4)

Country Link
KR (1) KR100634652B1 (ko)
CN (1) CN100368794C (ko)
TW (1) TWI264532B (ko)
WO (1) WO2003040711A1 (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006292404A (ja) * 2005-04-06 2006-10-26 Olympus Corp 外観検査装置
JP2011099875A (ja) * 2011-02-18 2011-05-19 Olympus Corp 外観検査装置
CN103487716A (zh) * 2013-10-10 2014-01-01 南京华睿川电子科技有限公司 一种电容屏功能片智能测试机
ES2649541A1 (es) * 2017-03-21 2018-01-12 Orbita Ingenieria, S.L. Sistema para controlar la calidad de envasado de un producto

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KR101166828B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 평판표시장치용 검사장비 및 검사 방법
KR100844830B1 (ko) * 2006-03-24 2008-07-08 에버테크노 주식회사 Ｌｃｄ패널 검사장치 및 방법
KR100811544B1 (ko) * 2007-04-18 2008-03-07 홍지훈 평면 디스플레이 검사및 결함제거장치
JP5038191B2 (ja) * 2008-03-04 2012-10-03 有限会社共同設計企画 電子部品検査方法およびそれに用いられる装置
TWI381257B (zh) * 2008-07-07 2013-01-01 Race Ahead Technology Co Ltd 自動調整照明強度的基材檢測裝置及方法
TWI381161B (zh) * 2009-04-17 2013-01-01 Favite Inc 四龍門式檢測機台
JP5247664B2 (ja) * 2009-11-18 2013-07-24 株式会社日立ハイテクノロジーズ 基板検査装置及びその測定運用システム
TWI407268B (zh) * 2010-07-28 2013-09-01 Au Optronics Corp 工作台
KR102095947B1 (ko) 2012-06-29 2020-04-02 루돌프 테크놀로지스 인코퍼레이티드 부상형 센서 헤드
CN102879405B (zh) * 2012-09-29 2014-09-24 肇庆中导光电设备有限公司 紧凑型的检测台以及应用该检测台的检测方法
CN103915048A (zh) * 2013-01-06 2014-07-09 北京京东方光电科技有限公司 检测传感器调节装置及方法、基板检测装置
CN103217443A (zh) * 2013-04-02 2013-07-24 苏州长城开发科技有限公司 用于软性印刷电路板的检查装置
CN103763910B (zh) * 2013-12-31 2016-06-15 埃泰克汽车电子(芜湖)有限公司 一种用于保险丝安装位置的检测装置及其检测方法
CN103837552A (zh) * 2014-03-14 2014-06-04 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测系统
CN106290390B (zh) * 2015-05-24 2019-11-26 上海微电子装备（集团）股份有限公司 缺陷检测装置及方法
CN104914601A (zh) * 2015-06-29 2015-09-16 吴中区横泾博尔机械厂 自动屏幕组装机的屏幕检测装置
CN105665290A (zh) * 2016-04-14 2016-06-15 东莞天龙阿克达电子有限公司 一种护风圈自动检测机
JP6852735B2 (ja) * 2016-06-23 2021-03-31 日本電気硝子株式会社 ガラス基板歪測定方法及びガラス基板歪測定装置
CN106442560A (zh) * 2016-08-23 2017-02-22 汕头大学 一种显示屏的定位测量与缺陷检测方法
CN106896540A (zh) * 2017-03-07 2017-06-27 苏州海摩鑫智能装备有限公司 龙门定位平台
JP2018181931A (ja) * 2017-04-05 2018-11-15 株式会社ディスコ 切削装置
JP7045890B2 (ja) * 2018-03-20 2022-04-01 株式会社Ｓｃｒｅｅｎホールディングス パターン描画装置およびパターン描画方法
CN110308256B (zh) * 2018-03-20 2022-07-05 宝山钢铁股份有限公司 钢板下表周期缺陷测量装置
CN112540262A (zh) * 2020-11-18 2021-03-23 广西电网有限责任公司电力科学研究院 电压时间型馈线自动化测试系统及其测试方法
CN112720384B (zh) * 2020-12-21 2022-08-26 苏州科韵激光科技有限公司 显示面板对准装置和显示面板对准方法
CN114071882A (zh) * 2021-11-03 2022-02-18 西安航天华阳机电装备有限公司 一种柔性版帖版设备
CN114166753B (zh) * 2021-12-09 2022-08-23 黑龙江职业学院(黑龙江省经济管理干部学院) 一种基于图像处理的玻璃屏幕内部损伤检测装置和方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08145901A (ja) * 1994-11-21 1996-06-07 Hitachi Electron Eng Co Ltd 透明金属薄膜基板の異物検査装置
JPH08171057A (ja) * 1994-12-19 1996-07-02 Olympus Optical Co Ltd 複数ヘッド顕微鏡装置
JPH08271798A (ja) * 1995-03-29 1996-10-18 Olympus Optical Co Ltd 複数ヘッド顕微鏡
JPH1194756A (ja) * 1997-09-24 1999-04-09 Olympus Optical Co Ltd 基板検査装置
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
JP2001519890A (ja) * 1995-10-06 2001-10-23 フォトン・ダイナミクス・インコーポレーテッド 透明な構造における三次元の欠陥位置を検出するための技術

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100432359B1 (ko) * 1999-09-22 2004-05-20 올림푸스 가부시키가이샤 평행기구 및 검사장치
JP4662482B2 (ja) * 2006-06-28 2011-03-30 株式会社キーエンス レーザ加工条件設定装置、レーザ加工装置、レーザ加工条件設定方法、レーザ加工条件設定プログラム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08145901A (ja) * 1994-11-21 1996-06-07 Hitachi Electron Eng Co Ltd 透明金属薄膜基板の異物検査装置
JPH08171057A (ja) * 1994-12-19 1996-07-02 Olympus Optical Co Ltd 複数ヘッド顕微鏡装置
JPH08271798A (ja) * 1995-03-29 1996-10-18 Olympus Optical Co Ltd 複数ヘッド顕微鏡
JP2001519890A (ja) * 1995-10-06 2001-10-23 フォトン・ダイナミクス・インコーポレーテッド 透明な構造における三次元の欠陥位置を検出するための技術
JPH1194756A (ja) * 1997-09-24 1999-04-09 Olympus Optical Co Ltd 基板検査装置
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006292404A (ja) * 2005-04-06 2006-10-26 Olympus Corp 外観検査装置
JP4704793B2 (ja) * 2005-04-06 2011-06-22 オリンパス株式会社 外観検査装置
JP2011099875A (ja) * 2011-02-18 2011-05-19 Olympus Corp 外観検査装置
CN103487716A (zh) * 2013-10-10 2014-01-01 南京华睿川电子科技有限公司 一种电容屏功能片智能测试机
CN103487716B (zh) * 2013-10-10 2016-05-18 南京华睿川电子科技有限公司 一种电容屏功能片智能测试机
ES2649541A1 (es) * 2017-03-21 2018-01-12 Orbita Ingenieria, S.L. Sistema para controlar la calidad de envasado de un producto

Also Published As

Publication number Publication date
TWI264532B (en) 2006-10-21
KR100634652B1 (ko) 2006-10-13
TW200302345A (en) 2003-08-01
CN100368794C (zh) 2008-02-13
KR20040063131A (ko) 2004-07-12
CN1582393A (zh) 2005-02-16

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