WO2002103373A1 - Contacteur conducteur et ensemble de sondes electriques - Google Patents

Contacteur conducteur et ensemble de sondes electriques Download PDF

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Publication number
WO2002103373A1
WO2002103373A1 PCT/JP2001/005224 JP0105224W WO02103373A1 WO 2002103373 A1 WO2002103373 A1 WO 2002103373A1 JP 0105224 W JP0105224 W JP 0105224W WO 02103373 A1 WO02103373 A1 WO 02103373A1
Authority
WO
WIPO (PCT)
Prior art keywords
support hole
conductive contact
conductor
plunger
holder
Prior art date
Application number
PCT/JP2001/005224
Other languages
English (en)
Japanese (ja)
Inventor
Toshio Kazama
Shigeki Ishikawa
Original Assignee
Nhk Spring Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2000132688A priority Critical patent/JP2001318107A/ja
Application filed by Nhk Spring Co., Ltd. filed Critical Nhk Spring Co., Ltd.
Priority to CN01823375.9A priority patent/CN1267733C/zh
Priority to PCT/JP2001/005224 priority patent/WO2002103373A1/fr
Priority to KR1020037016215A priority patent/KR100583794B1/ko
Publication of WO2002103373A1 publication Critical patent/WO2002103373A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded

Definitions

  • the present invention relates to a conductive contact and an electric probe unit.
  • a plunger as a needle portion is brought into contact with a contact object such as a crystal display substrate, a TAB, or a package substrate (PKG) to take out an electric signal, and through an external circuit through a signal transmission line such as a lead conductor.
  • a contact object such as a crystal display substrate, a TAB, or a package substrate (PKG)
  • PKG package substrate
  • Conductive contacts such as small conductive contacts, socket pins (SCP), thin probes (THP), etc.
  • SCP socket pins
  • TTP thin probes
  • a conventional electric probe unit used for electrical inspection of a conductor pattern or an electronic element of a printed wiring board includes a plunger as a conductive needle portion, and a holder for supporting the plunger so that it can be protruded and retracted in an axial direction. ⁇ The protruding end of the plunger is protruded from the front end (one axial end) of the holder. The object is brought into resilient contact with the contacted object.
  • a conductive contact 100 shown in FIG. 7 is known.
  • the conductive contact 100 is provided with a plunger assembly 5 in which a pair of plungers 3, 4 are connected to both ends of a coil spring 2, into a support hole 7 provided in an insulating holder 6, and into the plunger 3. It is mounted by allowing and reciprocating the plungers 3 and 4, and the plungers 3 and 4 are prevented from falling out when they protrude outward.
  • the holder 6 is composed of an intermediate insulator 8, an upper insulator 9 and a lower insulator 10 stacked one above the other with the intermediate insulator 8 interposed therebetween, and the plungers 1 and 4 are Each part has a stepped body with different diameters, and this step is The diameter is fixed to the side insulator 9 and the lower insulator 10 to prevent it from falling off.
  • the projecting end of the upper plunger 3 is elastically connected to a lead conductor (not shown) fixed to a wiring plate (not shown) stacked on the holder 6.
  • the protruding end of the lower plunger 4 is resiliently brought into contact with a contact object (not shown) to be inspected, thereby forming a printed circuit formed on the substrate. Is inspected for short circuit or disconnection.
  • the conductive contact 100 is provided when foreign matter is interposed between the plunger 3 or 4 and the holder 6 to prevent the plunger 3 or 4 from coming and going, or the plunger 3 or 4 When the is broken, replace the plunger assembly 5 in order to avoid a decrease in inspection accuracy due to poor contact with the lead conductors or the contact object to be inspected.
  • the arrangement pitch is set to, for example, 0.1 in order to cope with the fine pitch of the contacted object (higher processing speed, finer pitch with the miniaturization and thinner chip).
  • the upper insulator 9 (or lower insulator 10) must be detached from the intermediate insulator 8, positioned, and re-attached. Disassembly and reassembly are required, requiring a high degree of skill. Disclosure of the invention
  • An object of the present invention is to provide a conductive contact that can easily replace a plunger assembly without disassembling and reassembling a holder.
  • the present invention provides an insulator having a support hole, a lead conductor exposed at one end of the support hole, a first conductor portion exposed to the outside at the other end of the support hole, and A resilient conductor assembly comprising a second conductor portion in contact with the lead conductor, the resilient conductor assembly being retained in the support hole and being attached thereto;
  • the insulator is characterized in that the insulator is separated to allow access to the inside of the support hole.
  • FIG. 1 is a perspective view of an electric probe unit according to one embodiment of the present invention.
  • FIG. 2 is a sectional view of a conductive contact of the electric probe unit of FIG. 1 of the present invention.
  • FIG. 3 is a perspective view of a lead conductor of the conductive contact of FIG.
  • FIG. 5 is a cross-sectional view of a conductive contact of an electric utility unit according to another embodiment of the present invention.
  • FIG. 7 is a sectional view of a main part of a conductive contact of a conventional electric probe unit.
  • FIG. 1 shows an electric unit PU according to a first embodiment of the present invention.
  • the probe unit PU is configured as a probe card and has a relatively large board, a double-sided performance board H2, and a relatively flat transformer board, a relatively small relay board screwed under the performance port H2.
  • H1 and one or more electrical probe modules PM are screwed under the transformer H1.
  • Professional united PU The probe module PM is supported by a computer-assisted multi-axis positioning robot (not shown) called “Tesu”, and can be mounted on a printed circuit board, microchip, or semiconductor wafer at any position in the design space area. Inspection body
  • the electric probe module PM is incorporated in a substantially flat insulating module housing MH fixed to the transformer H1 and in a module housing MH, for example, with a contact lower end at a design distance of about 0.15 mm. It consists of a plurality (four in this embodiment) of electric probe blocks PB arranged exclusively for the target as a matrix of hundreds and thousands of conductive contacts 1 exposed to the outside. Each probe 1 is connected to a corresponding lead conductor of a wiring board stacked on the transformer H1.
  • FIG. 2 shows an optional conductive contact 1 of the electric probe unit PU of FIG.
  • the probe unit PU is composed of a probe holder 6 as an insulating plate fixed to the module housing MH and a wiring plate 11 as an insulating substrate on which a lead conductor 12 is laminated and formed on the probe holder 6.
  • a probe holder 6 as an insulating plate fixed to the module housing MH
  • a wiring plate 11 as an insulating substrate on which a lead conductor 12 is laminated and formed on the probe holder 6.
  • the conductive contact 1 has a plunger assembly 5 having a pair of plungers 3 and 4 fixed to both ends of a coil spring 2, and a supporting hole 7 provided in an insulating holder 6 and a plunger 3 and 4.
  • the reciprocating movement is allowed and received.
  • the one end side of the banger 4 protrudes outward and is installed in a state where it is prevented from falling out.
  • the other end of the banger 3 is mounted on the holder 6 and the wiring plate 11 laminated on the holder 6 1
  • the lead conductor 1 of the wiring plate 1 Elastic contact with 2 and connect it electrically.
  • Plungers 3 and 4 are made of 0.1 mm outer diameter tool steel (SK), which is pre-treated with Ni plating and finished with Au plating.
  • the coil spring 2 is made of a spiral piano wire (SWP A) which is ground-treated with a 0.3 mm thick M plating and finished with a 0.3 mm to 0.5 m thick Au plating.
  • SWP A spiral piano wire
  • the plunger assembly 5 is inserted into and removed from the support hole 7 through the opening 9a on the lamination side of the wiring plate 11 of the support hole ⁇ .
  • the holder 6 includes an intermediate insulator 8 and an upper insulator 9 and a lower insulator 10 which are vertically stacked with the intermediate insulator 8 interposed therebetween.
  • the support hole 7 is constituted by mutually communicating through holes 8a, 9a, 10a formed concentrically with the insulators 8, 9, 10 respectively.
  • the support hole 7 has the through holes 9a and 10a communicating with the upper side and the lower side of the through hole 8a, respectively, so that the through holes 8a and 9a have substantially the same diameter, and the through hole 10a
  • the hole diameter of a is set smaller than the through hole 8a.
  • the end of the support hole 7 on the side of the wiring plate 11 is constituted by the through hole 9a.
  • the plungers 3 and 4 are provided with enlarged diameter body portions 3 a and 4 a having a diameter that can be slid while being guided by the through holes 8 a and 9 a, and a diameter capable of winding the coil end of the coil spring 2.
  • the needle portion 4c is guided by the through hole 10a of the lower insulator 10 and has a diameter capable of moving up and down.
  • the plunger assembly 5 is fixed to the plungers 3 and 4 by press-fitting the bosses 3 b and 4 b into both ends of the coil spring 2.
  • the connection of plungers 3 and 4 can also be made by brazing, soldering or using an adhesive.
  • the plunger assembly 5 is inserted into the support hole 7 from the opening 9 a side of the support hole 7, with the needle 4 c of the plunger 4 leading, and the end face of the body 4 a is placed on the lower insulator 10.
  • the needle portion 4c is received in the support hole 7 with the needle portion 4c protruding outward from the lower insulator 10 through the through hole 10a.
  • the plunger 3 connected to the other end of the coil spring 2 is not prevented from coming off. It protrudes outward from the opening 9a of the support hole 7 by the free length of the coil spring 2.
  • a wiring plate 11 which is also a part of the holder 6 is laminated on the upper surface of the upper insulator 9, and the wiring plate 11 has a large-diameter holding hole at a portion facing the opening 9 a of the support hole 7.
  • 11a is provided at a predetermined depth.
  • the holding hole 11a receives a substantially circular flat portion 12a formed at the end of a lead conductor 12 made of a single wire such as an enamel wire as a signal transmission line.
  • the flat portion 1 2 a may be formed by press-working the end of the lead conductor 12 in a direction perpendicular to the axis and plastically deforming the end portion, as shown in FIG.
  • the outer diameter of the lead conductor 12 (the outer diameter of the enameled wire) is formed larger than the outer diameter d (d + c) of a substantially circular shape.
  • the lead conductor 12 extends outward through a lead conductor ⁇ through hole 1 1b as a small-diameter hole provided in the wiring plate 11 so as to communicate with the holding hole 11a, and as a measuring instrument. Connected to the external circuit 13.
  • the lead conductor through-hole 11 b is large enough to prevent the flat portion 12 a from coming off, and has a diameter that allows the lead conductor 12 to pass through.
  • the flat portion 1 2a received in the holding hole 1 1a is prevented from falling off in the extending direction of the lead conductor 1 2 by the step portion of the holding hole 11 1a and the lead conductor ⁇ through hole 1 1b. .
  • the retaining holes are considered part of the support holes.
  • the axial end face 1 2 b of the lead conductor 12 in which the flat portion 9 a is received in the holding hole 8 a is positioned so as to face the opening 9 a of the support hole 7 from within the holding hole 11 a.
  • the needle portion 3c of the plunger 3 comes into contact with the end surface 1 2b temporarily.
  • a probe unit is formed by arranging a plurality of conductive contacts 1 at predetermined pitches in the vertical and horizontal directions, and by bringing the probe close to the inspection target, for example, the semiconductor chip mounting substrate 14, the probe needle can be used as an inspection needle.
  • the protruding end of the needle portion 4c of the plunger 4 on the side is made to abut on the electrode 14a as the contacted body.
  • the electric signal picked up by the plunger 4 reaches the end surface 12 b of the lead conductor 12 via the plunger assembly 5 and passes through the lead conductor 12. Transmitted to external circuit 13.
  • the conductive contact 1 is attached to the holder 6 when it is necessary to replace the defective plunger, such as when the plunger 3 or 4 does not come and go or when the plunger 3 or 4 is broken.
  • the opening 9 a of the support hole 7 can be opened, and the plunger assembly 5 having the defective plunger is pulled out through the opening 9 a. Can be eliminated.
  • a new plunger assembly 5 is inserted into the empty support hole 7, and the wiring plate 11 is stacked on the holder 6, so that the plunger assembly 5 can be replaced. This replacement operation does not require disassembly and reassembly of the holder 6 itself, and therefore can be easily performed without requiring a high level of skill.
  • the lead conductor 12 need not be made thinner than necessary. Therefore, a conductor having a diameter of 0.8 mm or more can be used without using a conductor having a diameter of 0.07 mm or less, at which the conductor resistance is relatively large.
  • the width (d + h) of the flat portion 9a is about 0.10 to 0.11 mm, and the fine pitch is reduced. Even if the pitch is about 0.15 mm, the holding hole 11a can be formed without interference between adjacent conductive contacts.
  • FIG. 4 shows a conductive contact 20 according to a second embodiment of the present invention from which the wiring plate 11 is omitted.
  • This conductive contact 20 differs from the conductive contact 1 in the shape of one plunger 3 constituting the plunger assembly 5.
  • a needle portion 3f electrically connected to the lead conductor 12 is formed as a tip of the rod-shaped body 3d.
  • the needle portion 3f is formed by forming the tip of the rod-shaped body 3d into a sharp conical portion. This may be a flat surface or the like, and an appropriate shape is selected.
  • the plunger 3 has a connecting boss 3 e protruding from the rear end of the rod-shaped body 3 d, and is press-fitted to the connecting boss 3 e and connected to the end of the coil spring 2. .
  • the plunger 4 is connected to the other end of the coil spring 2 as in the above embodiment.
  • the holder 6 of the conductive contact 20 is composed of two intermediate insulators 15 and 16, an upper insulator 9 and a lower insulator 9 which are vertically stacked with the intermediate insulators 15 and 16 interposed therebetween. It is composed of an insulator 10.
  • the support hole 7 is formed by mutually communicating through holes 9 a, 10 a, 15 a, and 16 a formed concentrically with the insulators 9, 10, 15, and 16, respectively.
  • the through holes 9a, 15a, 16a are formed to have substantially the same hole diameter, and the through hole 10a is formed to be smaller than that.
  • the opening of the support hole 7 on the lamination side of the wiring plate 11 is formed by the through hole 9a, and the rod-shaped body 3d of the plunger 3 is formed by L9a, 15a, and 16a are formed so that they can move while being guided in the plunger assembly 5, so that the plunger assembly 5 has an opening 9a on the lamination side of the wiring plate 11 of the support hole 7.
  • the conductive contact 20 can provide the same function and effect as the above-described embodiment, and can be easily processed because the plunger 13 is not a stepped body, and cost can be reduced.
  • FIG. 5 shows a conductive contact 21 according to a third embodiment as a modification of the second embodiment.
  • the configuration of the holder 6 of the conductive contact 21 is different from that of the conductive contact 20.
  • the holder 6 of the conductive contact 21 is composed of only two intermediate insulators 15 and 16 laminated in two layers, and the support hole 7 has through holes 15 a, 16a and 16b are connected to each other.
  • the through hole 16 b is a small hole for guiding the needle portion 4 c of the plunger 4 so as to be slidable, and a through hole 16 a is formed below the intermediate insulator 16.
  • the opening of the support hole 7 on the lamination side of the wiring plate 11 is constituted by a through hole 15a, and the plunger assembly 5 is connected to the lamination side of the wiring plate 11 of the support hole 7 on the lamination side. It can be inserted into and removed from the support hole 7 through the opening 15.
  • the conductive contact 21 has the same effect as the conductive contact 20 described above, and has a smaller number of parts because the upper insulator 9 and the lower insulator 10 are not used. The assemblability is improved, and the relative positional relationship between the through hole 16a and the through hole 16b forming the support hole 7 can be accurately maintained.
  • FIG. 6 shows a conductive contact 22 according to a fourth embodiment as a modification of the third embodiment. The configuration of the wiring plate 11 of the conductive contact 22 differs from that of the conductive contact 21.
  • a circuit board or an FPC flexible board
  • an example using a circuit board is described. Show.
  • a circuit board configured by embedding circuit conductors 26 in the base 25 is used as the wiring plate 11, and the plunger 3 of the plunger assembly 5 has a needle portion 3 f is resiliently brought into contact with the exposed surface 26 a of the circuit conductor 26 exposed on the outer surface of the base 25, thereby achieving electrical connection with the circuit conductor 26.
  • the other end 26 b of the circuit conductor 26 is connected to an external circuit 13 as a measuring instrument (see FIG. 1) via an appropriate lead conductor (not shown).
  • the conductive contact 22 has the same function and effect as the conductive contact 21.
  • a needle-like body having a pair of conductive needles joined to both ends of a coil panel is provided in a support hole provided in a holder made of an insulator. It is received while allowing the body to reciprocate, and the conductive needle-like body at one end protrudes outward and is attached so as not to come off. And a conductive contact having the conductive needle at the other end electrically connected to and attached to a wiring plate laminated on the holder. The wiring plate is inserted into and removed from the support hole through an opening on the lamination side of the wiring plate.
  • the opening on the wiring plate stacking side of the support hole can be opened, and the insertion and removal of the plunger assembly into and from the support hole can be performed through this opening.
  • a defect occurs in the conductive contact, it is only necessary to remove the wiring plate stacked on the holder without disassembling and reassembling the holder itself, and to remove the defect plunger assembly from the support hole.
  • the new plunger assembly can be inserted into the empty support hole, and the wiring plate can be stacked on the holder to complete the replacement of the plunger assembly.
  • the conductive needle on the other end side of the needle-shaped body has a needle portion electrically connected to the wiring plate as a tip of a rod-shaped body. Therefore, since the plunger on the other end is not a stepped body portion, the plunger can be easily processed, and the cost can be reduced. Industrial applicability
  • the conductive contact which can replace
  • the electric probe unit using the conductive contact can be comprised. Can be configured.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

L'invention concerne un contacteur conducteur, comprenant un ensemble (5) de pistons formé par deux pistons (3, 4) montés sur les deux extrémités d'un ressort (2) hélicoïdal. Cet ensemble piston est inséré un orifice (7) récepteur ménagé dans un support (6) formé d'un isolant, de manière à permettre le déplacement des deux pistons (3, 4) par un mouvement d'aller-retour. Le piston (4) situé à une extrémité du ressort hélicoïdal est poussé vers l'extérieur et verrouillé, et le piston (3) situé à l'autre extrémité est installé de manière à former une connexion électrique avec une plaque de connexion (11) qui vient recouvrir le support (6), et l'ensemble (5) piston peut être introduit dans orifice (7) récepteur et extrait de celui-ci à travers une section (9a) d'ouverture située du côté plaque (11) de connexion de l'orifice (7) récepteur, cette section (9a) d'ouverture pouvant être ouverte par le retrait de la plaque (11) de connexion.
PCT/JP2001/005224 2000-05-01 2001-06-19 Contacteur conducteur et ensemble de sondes electriques WO2002103373A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000132688A JP2001318107A (ja) 2000-05-01 2000-05-01 導電性接触子
CN01823375.9A CN1267733C (zh) 2000-05-01 2001-06-19 导电性探针及电探测装置
PCT/JP2001/005224 WO2002103373A1 (fr) 2000-05-01 2001-06-19 Contacteur conducteur et ensemble de sondes electriques
KR1020037016215A KR100583794B1 (ko) 2000-05-01 2001-06-19 도전성 접촉자 및 전기 프로브 유닛

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000132688A JP2001318107A (ja) 2000-05-01 2000-05-01 導電性接触子
PCT/JP2001/005224 WO2002103373A1 (fr) 2000-05-01 2001-06-19 Contacteur conducteur et ensemble de sondes electriques

Publications (1)

Publication Number Publication Date
WO2002103373A1 true WO2002103373A1 (fr) 2002-12-27

Family

ID=26345095

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/005224 WO2002103373A1 (fr) 2000-05-01 2001-06-19 Contacteur conducteur et ensemble de sondes electriques

Country Status (3)

Country Link
JP (1) JP2001318107A (fr)
KR (1) KR100583794B1 (fr)
WO (1) WO2002103373A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4304699B2 (ja) * 2001-12-28 2009-07-29 日本発條株式会社 検査用ソケット
JP4900843B2 (ja) 2008-12-26 2012-03-21 山一電機株式会社 半導体装置用電気接続装置及びそれに使用されるコンタクト
KR101696240B1 (ko) * 2011-01-14 2017-01-13 리노공업주식회사 프로브
KR101306049B1 (ko) * 2011-10-14 2013-09-09 (주)다솔이엔지 4 포인트 프로브
CN106226562A (zh) * 2016-07-11 2016-12-14 无锡宏纳科技有限公司 弹簧下压型芯片测试夹具

Citations (7)

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Publication number Priority date Publication date Assignee Title
JPS5691492A (en) * 1979-12-26 1981-07-24 Hitachi Ltd Method of mounting lead wire
JPH06180328A (ja) * 1992-12-14 1994-06-28 Ibiden Co Ltd プリント配線板の検査治具
JPH08184631A (ja) * 1994-12-27 1996-07-16 Fuji Micro Kogyo Kk 配線パターン検査装置
JPH11281674A (ja) * 1998-03-27 1999-10-15 Ibiden Co Ltd 導通検査装置
US5990697A (en) * 1996-06-28 1999-11-23 Nhk Spring Co., Ltd. Electroconductive contact unit having compression spring with normally and coarsely wound segments
JP2000009753A (ja) * 1998-06-23 2000-01-14 Yokowo Co Ltd プローブカード
US6150616A (en) * 1996-04-12 2000-11-21 Nhk Spring Co., Ltd. Electroconductive contact unit system

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Publication number Priority date Publication date Assignee Title
JPS48100659A (fr) * 1972-04-01 1973-12-19
JP2539453B2 (ja) * 1987-09-11 1996-10-02 株式会社日立製作所 半導体素子検査装置
JP2639943B2 (ja) * 1987-09-11 1997-08-13 古野電気株式会社 ハードウェアデバッガ
GB2214362A (en) * 1988-01-13 1989-08-31 Gab Hsu Detachable open/short testing fixture device for testing P.C. Boards
JP3192270B2 (ja) * 1993-05-10 2001-07-23 株式会社日立製作所 電極の接続装置
JPH09251033A (ja) * 1996-03-15 1997-09-22 Sharp Corp 液晶表示パネルの検査装置
JPH1026646A (ja) * 1996-07-12 1998-01-27 Toyo Denshi Giken Kk コンタクト装置
JPH1145746A (ja) * 1997-07-28 1999-02-16 Yokowo Co Ltd 導電性接触子

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691492A (en) * 1979-12-26 1981-07-24 Hitachi Ltd Method of mounting lead wire
JPH06180328A (ja) * 1992-12-14 1994-06-28 Ibiden Co Ltd プリント配線板の検査治具
JPH08184631A (ja) * 1994-12-27 1996-07-16 Fuji Micro Kogyo Kk 配線パターン検査装置
US6150616A (en) * 1996-04-12 2000-11-21 Nhk Spring Co., Ltd. Electroconductive contact unit system
US5990697A (en) * 1996-06-28 1999-11-23 Nhk Spring Co., Ltd. Electroconductive contact unit having compression spring with normally and coarsely wound segments
JPH11281674A (ja) * 1998-03-27 1999-10-15 Ibiden Co Ltd 導通検査装置
JP2000009753A (ja) * 1998-06-23 2000-01-14 Yokowo Co Ltd プローブカード

Also Published As

Publication number Publication date
KR20040007691A (ko) 2004-01-24
KR100583794B1 (ko) 2006-05-25
JP2001318107A (ja) 2001-11-16

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