WO2002061488A1 - Variable mirror and information apparatus comprising variable mirror - Google Patents

Variable mirror and information apparatus comprising variable mirror Download PDF

Info

Publication number
WO2002061488A1
WO2002061488A1 PCT/JP2002/000676 JP0200676W WO02061488A1 WO 2002061488 A1 WO2002061488 A1 WO 2002061488A1 JP 0200676 W JP0200676 W JP 0200676W WO 02061488 A1 WO02061488 A1 WO 02061488A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
variable mirror
reflector
information apparatus
regions
Prior art date
Application number
PCT/JP2002/000676
Other languages
English (en)
French (fr)
Inventor
Yoshihiro Mushika
Teruyuki Takizawa
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to JP2002561998A priority Critical patent/JP3657259B2/ja
Priority to EP02710376A priority patent/EP1365270B1/en
Priority to KR1020037010035A priority patent/KR100863850B1/ko
Priority to US10/470,685 priority patent/US6952304B2/en
Publication of WO2002061488A1 publication Critical patent/WO2002061488A1/ja
Priority to DE60235263T priority patent/DE60235263D1/de
Priority to PCT/JP2002/012344 priority patent/WO2003065103A1/ja
Priority to CNB028269624A priority patent/CN100395579C/zh
Priority to KR1020047005834A priority patent/KR101073175B1/ko
Priority to EP02783632A priority patent/EP1471372B1/en
Priority to JP2003564638A priority patent/JP4164450B2/ja
Priority to US10/491,100 priority patent/US7068415B2/en
Priority to US11/088,207 priority patent/US6995897B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G02B3/0068—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1362—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0043—Inhomogeneous or irregular arrays, e.g. varying shape, size, height
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/123—Integrated head arrangements, e.g. with source and detectors mounted on the same substrate
    • G11B7/124—Integrated head arrangements, e.g. with source and detectors mounted on the same substrate the integrated head arrangements including waveguides
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/13—Optical detectors therefor
    • G11B7/131—Arrangement of detectors in a multiple array
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1365—Separate or integrated refractive elements, e.g. wave plates
    • G11B7/1369—Active plates, e.g. liquid crystal panels or electrostrictive elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1392—Means for controlling the beam wavefront, e.g. for correction of aberration
    • G11B7/13925—Means for controlling the beam wavefront, e.g. for correction of aberration active, e.g. controlled by electrical or mechanical means
    • G11B7/13927—Means for controlling the beam wavefront, e.g. for correction of aberration active, e.g. controlled by electrical or mechanical means during transducing, e.g. to correct for variation of the spherical aberration due to disc tilt or irregularities in the cover layer thickness
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B2007/0003—Recording, reproducing or erasing systems characterised by the structure or type of the carrier
    • G11B2007/0006—Recording, reproducing or erasing systems characterised by the structure or type of the carrier adapted for scanning different types of carrier, e.g. CD & DVD

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Head (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Recording Or Reproduction (AREA)
PCT/JP2002/000676 2001-01-30 2002-01-29 Variable mirror and information apparatus comprising variable mirror WO2002061488A1 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP2002561998A JP3657259B2 (ja) 2001-01-30 2002-01-29 可変形ミラー、および当該可変形ミラーを備えた情報装置
EP02710376A EP1365270B1 (en) 2001-01-30 2002-01-29 Variable mirror and information apparatus comprising variable mirror
KR1020037010035A KR100863850B1 (ko) 2001-01-30 2002-01-29 가변형 미러와 당해 가변형 미러를 구비한 정보 장치 및 보상 광학 장치
US10/470,685 US6952304B2 (en) 2001-01-30 2002-01-29 Variable mirror and information apparatus comprising variable mirror
US10/491,100 US7068415B2 (en) 2002-01-29 2002-11-26 Deformable mirror and optical controller including the deformable mirror
DE60235263T DE60235263D1 (de) 2002-01-29 2002-11-26 Formvariabler spiegel und lichtsteuereinrichtung mit dem formvariablen spiegel
PCT/JP2002/012344 WO2003065103A1 (fr) 2002-01-29 2002-11-26 Miroir a forme variable et dispositif de regulation de lumiere possedant ledit miroir
CNB028269624A CN100395579C (zh) 2002-01-29 2002-11-26 可变形反射镜及具有该可变形反射镜的控制装置
KR1020047005834A KR101073175B1 (ko) 2002-01-29 2002-11-26 가변형 미러, 및 당해 가변형 미러를 구비한 광 제어 장치
EP02783632A EP1471372B1 (en) 2002-01-29 2002-11-26 Shape-variable mirror and light control device having the shape-variable mirror
JP2003564638A JP4164450B2 (ja) 2002-01-29 2002-11-26 可変形ミラー、および当該可変形ミラーを備えた光制御装置
US11/088,207 US6995897B2 (en) 2001-01-30 2005-03-23 Deformable mirror and information device having the deformable mirror

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001021143 2001-01-30
JP2001-021143 2001-01-30
JP2001117845 2001-04-17
JP2001-117845 2001-04-17

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US10470685 A-371-Of-International 2002-01-29
US11/088,207 Division US6995897B2 (en) 2001-01-30 2005-03-23 Deformable mirror and information device having the deformable mirror

Publications (1)

Publication Number Publication Date
WO2002061488A1 true WO2002061488A1 (en) 2002-08-08

Family

ID=26608491

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/000676 WO2002061488A1 (en) 2001-01-30 2002-01-29 Variable mirror and information apparatus comprising variable mirror

Country Status (6)

Country Link
US (2) US6952304B2 (ja)
EP (1) EP1365270B1 (ja)
JP (1) JP3657259B2 (ja)
KR (1) KR100863850B1 (ja)
CN (2) CN100504496C (ja)
WO (1) WO2002061488A1 (ja)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005004128A2 (en) * 2003-07-07 2005-01-13 Matsushita Electric Industrial Co., Ltd. Objective lens, optical pick-up device, and optical disk device
US7068415B2 (en) 2002-01-29 2006-06-27 Matsushita Electric Industrial Co., Ltd. Deformable mirror and optical controller including the deformable mirror
WO2006109687A1 (ja) * 2005-04-11 2006-10-19 Matsushita Electric Industrial Co., Ltd. 微小機械構造体
WO2006112387A1 (ja) * 2005-04-15 2006-10-26 Matsushita Electric Industrial Co., Ltd. 微小機械構造体システムおよびその製造方法
JP2006309243A (ja) * 2005-04-28 2006-11-09 Asml Holdings Nv スーパーピクセル形式の可傾ミラーを用いた光パターン形成装置
JP2007293331A (ja) * 2006-04-06 2007-11-08 Asml Netherlands Bv 非線形バネによる大変形ｍｅｍｓミラーを用いる露光装置及びデバイス製造方法
JP2008512809A (ja) * 2004-09-03 2008-04-24 ステレオ ディスプレイ，インコーポレイテッド 光ピックアップ装置
CN100405480C (zh) * 2003-07-07 2008-07-23 松下电器产业株式会社 物镜、光学拾取装置和光盘装置
JP2009042456A (ja) * 2007-08-08 2009-02-26 Toshiba Corp 形状可変鏡装置およびこの形状可変鏡装置を用いた眼底観察装置
JPWO2007023940A1 (ja) * 2005-08-26 2009-03-26 パナソニック株式会社 アクチュエータ、光ヘッド装置および光情報装置
US7859167B2 (en) * 2004-03-08 2010-12-28 Panasonic Corporation Micro actuator having tilt and vertical displacement and device having such micro actuator
JP2014095757A (ja) * 2012-11-07 2014-05-22 Canon Inc 可変形状ミラーの製造方法
CN104793333A (zh) * 2015-04-29 2015-07-22 中国科学院光电技术研究所 一种大行程高速多级驱动倾斜镜
JP2015212775A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法
US9448403B2 (en) 2013-03-18 2016-09-20 Seiko Epson Corporation Optical scanner, actuator, image display device, and head-mounted display
US9482864B2 (en) 2013-03-18 2016-11-01 Seiko Epson Corporation Optical scanner, actuator, image display device, and head-mounted display

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208541A (ja) * 2001-01-11 2002-07-26 Shiro Sakai 窒化物系半導体装置及びその製造方法
JP2002277736A (ja) * 2001-03-21 2002-09-25 Olympus Optical Co Ltd 撮像装置
JP3548735B2 (ja) 2001-06-29 2004-07-28 士郎 酒井 窒化ガリウム系化合物半導体の製造方法
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
WO2004041710A1 (ja) * 2002-11-06 2004-05-21 Matsushita Electric Industrial Co., Ltd. 変位検出機能を備えたマイクロアクチュエータ、および当該マイクロアクチュエータを備えた可変形ミラー
JP4222569B2 (ja) * 2003-02-25 2009-02-12 パナソニック株式会社 光検出装置
US6995889B2 (en) * 2003-04-22 2006-02-07 Motorola, Inc. Optical reflecting device
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
WO2005024809A2 (en) * 2003-09-04 2005-03-17 Matsushita Electric Industrial Co., Ltd. Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up
CN1601625A (zh) * 2003-09-24 2005-03-30 松下电器产业株式会社 信息装置和光学拾波器
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7835062B2 (en) * 2006-08-30 2010-11-16 Silicon Quest Kabushiki-Kaisha Mircromirror device having a vertical hinge
JP4155166B2 (ja) * 2003-11-10 2008-09-24 コニカミノルタオプト株式会社 光ピックアップ装置
US7898144B2 (en) * 2006-02-04 2011-03-01 Angstrom, Inc. Multi-step microactuator providing multi-step displacement to a controlled object
US7199915B2 (en) * 2004-03-26 2007-04-03 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Buffers for light modulation elements in spatial light modulators
US7667896B2 (en) * 2004-05-27 2010-02-23 Angstrom, Inc. DVD recording and reproducing system
CN100432742C (zh) * 2004-07-30 2008-11-12 索尼株式会社 可变形镜器件和可变形镜板
WO2006030371A1 (en) 2004-09-16 2006-03-23 Koninklijke Philips Electronics N.V. Optical scanning device
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7161730B2 (en) * 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7489434B2 (en) 2007-05-02 2009-02-10 Angstrom, Inc. Hybrid micromirror array lens for reducing chromatic aberration
US7619807B2 (en) * 2004-11-08 2009-11-17 Angstrom, Inc. Micromirror array lens with optical surface profiles
US20060203195A1 (en) * 2005-03-10 2006-09-14 Squire Bret C Integrated ocular examination device
JP4473768B2 (ja) * 2005-04-14 2010-06-02 株式会社東芝 情報記憶媒体、再生方法及び記録方法
US7746935B2 (en) * 2005-05-13 2010-06-29 Xienetics, Inc. Digital amplifier system for driving a capacitive load
US7379247B2 (en) * 2005-05-23 2008-05-27 Olympus Imaging Corp. Image pickup apparatus
JP2007004900A (ja) * 2005-06-23 2007-01-11 Matsushita Electric Ind Co Ltd 光半導体装置及びその製造方法
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US20070181173A1 (en) * 2006-02-09 2007-08-09 Neubauer Jeffrey B Solar electric power generator
US7643203B2 (en) * 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7417784B2 (en) * 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7711239B2 (en) * 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7321457B2 (en) * 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
JP2007328838A (ja) * 2006-06-06 2007-12-20 Sony Corp 光ピックアップ及び光ディスク装置
US20080101748A1 (en) * 2006-10-26 2008-05-01 Hewlett-Packard Development Company Lp Mems device lever
JP4920461B2 (ja) * 2007-03-14 2012-04-18 株式会社トプコン 波面収差補正装置
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
JP5077724B2 (ja) * 2007-06-07 2012-11-21 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィツール用の反射照明システム
US9505606B2 (en) * 2007-06-13 2016-11-29 Angstrom, Inc. MEMS actuator with discretely controlled multiple motions
US7605988B2 (en) * 2007-07-23 2009-10-20 Angstrom, Inc. Compact image taking lens system with a lens-surfaced prism
US7589916B2 (en) * 2007-08-10 2009-09-15 Angstrom, Inc. Micromirror array with iris function
US20090185067A1 (en) * 2007-12-21 2009-07-23 Stereo Display, Inc. Compact automatic focusing camera
US8810908B2 (en) * 2008-03-18 2014-08-19 Stereo Display, Inc. Binoculars with micromirror array lenses
US20090303569A1 (en) * 2008-05-20 2009-12-10 Stereo Didplay, Inc. Self-tilted micromirror device
US8622557B2 (en) * 2008-05-20 2014-01-07 Stereo Display, Inc. Micromirror array lens with self-tilted micromirrors
JP5135505B2 (ja) * 2009-04-30 2013-02-06 歸山 敏之 双安定光位相変調装置
KR101373380B1 (ko) * 2009-07-17 2014-03-13 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 노광 장치 및 그에 포함된 광학 표면에 관한 파라미터의 측정 방법
JP2011065689A (ja) * 2009-09-15 2011-03-31 Jvc Kenwood Holdings Inc 光ディスクドライブ装置
CN102063913B (zh) * 2009-11-12 2013-12-18 日立民用电子株式会社 变形镜致动器和光盘装置
CN101840193B (zh) * 2010-03-25 2013-03-06 苏州大学 一种制作全息光栅的方法
FR2973168B1 (fr) * 2011-03-24 2013-05-17 Thales Sa Systeme d'actionnement pour reflecteur d'antenne a surface reflechissante deformable
US9509956B2 (en) * 2011-11-07 2016-11-29 The Regents Of The University Of Colorado, A Body Corporate High-speed wavefront optimization
US9348138B2 (en) * 2012-06-15 2016-05-24 Mitsubishi Electric Corporation Laser processing device
JP6308790B2 (ja) 2013-02-18 2018-04-11 キヤノン株式会社 可変形状ミラー及びその製造方法
US9314980B2 (en) * 2013-03-19 2016-04-19 Goodrich Corporation High correctability deformable mirror
FR3010805A1 (fr) * 2013-09-13 2015-03-20 Airbus Operations Sas Procede et dispositif d'aide au pilotage d'un aeronef lors d'un vol parabolique en vue de generer une impesanteur dans l'aeronef.
JP2015066611A (ja) 2013-09-27 2015-04-13 セイコーエプソン株式会社 アクチュエーターの駆動システム、光学モジュール及び電子機器
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Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253841A (ja) * 1988-03-31 1989-10-11 Matsushita Electric Ind Co Ltd ホログラムを用いた受光装置及び光ヘッド装置
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
EP0790604A2 (en) * 1996-02-13 1997-08-20 Kabushiki Kaisha Toshiba Reproduction device for optical disks
JPH09237425A (ja) * 1995-12-28 1997-09-09 Olympus Optical Co Ltd 光ディスク装置
JPH10222856A (ja) * 1997-02-07 1998-08-21 Olympus Optical Co Ltd 光学式情報記録再生装置
JPH10289468A (ja) * 1997-04-10 1998-10-27 Konica Corp 光ピックアップ装置及びその光源ユニット
JPH1173658A (ja) * 1997-06-30 1999-03-16 Matsushita Electric Ind Co Ltd 光学ヘッド及び、情報記録・再生装置
JPH11231234A (ja) * 1998-02-12 1999-08-27 Asahi Optical Co Ltd 反射鏡
JPH11305159A (ja) * 1998-04-17 1999-11-05 Seiko Instruments Inc 微小揺動ミラー素子及びこれを用いたレーザ走査装置
JP2000137926A (ja) * 1998-10-29 2000-05-16 Pioneer Electronic Corp 収差補償装置、光ピックアップ、情報再生装置及び情報記録装置
JP2000182268A (ja) * 1998-12-11 2000-06-30 Pioneer Electronic Corp 収差補正装置及びこれを用いた光ピックアップ装置
JP2000235715A (ja) * 1999-02-15 2000-08-29 Sony Corp 光学ヘッド
JP2001242394A (ja) * 2000-02-25 2001-09-07 20 10 Perfect Vision Optische Geraete Gmbh 波面を模すための能動ミラーをプログラムする方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737621A (en) 1985-12-06 1988-04-12 Adaptive Optics Assoc., Inc. Integrated adaptive optical wavefront sensing and compensating system
JPH0784196A (ja) 1993-09-13 1995-03-31 Canon Inc 光偏向器およびそれを用いた表示装置
KR100224621B1 (ko) * 1996-09-16 1999-10-15 윤종용 두께가 다른 디스크 호환을 위한 기록재생용 광픽업
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US6057913A (en) 1997-02-05 2000-05-02 Mems Optical Inc. Compact shearing wavefront sensor and method
KR19980069199A (ko) * 1997-02-27 1998-10-26 배순훈 광효율을 향상시킬 수 있는 박막형 광로 조절장치 및 그 제조 방법
JP3420025B2 (ja) 1997-06-23 2003-06-23 株式会社東芝 光ディスク装置
KR100483599B1 (ko) 1997-06-30 2005-09-14 마츠시타 덴끼 산교 가부시키가이샤 광학헤드및정보기록재생장치
EP0984440A3 (en) * 1998-09-04 2000-05-24 Matsushita Electric Industrial Co., Ltd. Aberration detection device and optical information recording and reproducing apparatus
CN1601625A (zh) * 2003-09-24 2005-03-30 松下电器产业株式会社 信息装置和光学拾波器

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253841A (ja) * 1988-03-31 1989-10-11 Matsushita Electric Ind Co Ltd ホログラムを用いた受光装置及び光ヘッド装置
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
JPH09237425A (ja) * 1995-12-28 1997-09-09 Olympus Optical Co Ltd 光ディスク装置
EP0790604A2 (en) * 1996-02-13 1997-08-20 Kabushiki Kaisha Toshiba Reproduction device for optical disks
JPH10222856A (ja) * 1997-02-07 1998-08-21 Olympus Optical Co Ltd 光学式情報記録再生装置
JPH10289468A (ja) * 1997-04-10 1998-10-27 Konica Corp 光ピックアップ装置及びその光源ユニット
JPH1173658A (ja) * 1997-06-30 1999-03-16 Matsushita Electric Ind Co Ltd 光学ヘッド及び、情報記録・再生装置
JPH11231234A (ja) * 1998-02-12 1999-08-27 Asahi Optical Co Ltd 反射鏡
JPH11305159A (ja) * 1998-04-17 1999-11-05 Seiko Instruments Inc 微小揺動ミラー素子及びこれを用いたレーザ走査装置
JP2000137926A (ja) * 1998-10-29 2000-05-16 Pioneer Electronic Corp 収差補償装置、光ピックアップ、情報再生装置及び情報記録装置
JP2000182268A (ja) * 1998-12-11 2000-06-30 Pioneer Electronic Corp 収差補正装置及びこれを用いた光ピックアップ装置
JP2000235715A (ja) * 1999-02-15 2000-08-29 Sony Corp 光学ヘッド
JP2001242394A (ja) * 2000-02-25 2001-09-07 20 10 Perfect Vision Optische Geraete Gmbh 波面を模すための能動ミラーをプログラムする方法

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
KRISHNAMOORTHY MALI R. ET AL.: "Development of microelectromechanical deformable mirrors for phase modulation of light", OPTICAL ENGINEERING, vol. 36, no. 2, February 1997 (1997-02-01), pages 542 - 548, XP002954463 *
See also references of EP1365270A4 *
TADASHI ARIGA: "Hosho kogaku no tsushin keisoku eno oyo", THE JOURNAL OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. 80, no. 12, 1997, pages 1237 - 1241, XP002954462 *

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7068415B2 (en) 2002-01-29 2006-06-27 Matsushita Electric Industrial Co., Ltd. Deformable mirror and optical controller including the deformable mirror
US7813235B2 (en) 2003-07-07 2010-10-12 Panasonic Corporation Objective lens, optical pick-up device, and optical disk device
WO2005004128A3 (en) * 2003-07-07 2005-09-01 Matsushita Electric Ind Co Ltd Objective lens, optical pick-up device, and optical disk device
WO2005004128A2 (en) * 2003-07-07 2005-01-13 Matsushita Electric Industrial Co., Ltd. Objective lens, optical pick-up device, and optical disk device
US7920442B2 (en) 2003-07-07 2011-04-05 Panasonic Corporation Objective lens, optical pick-up device, and optical disk device
US7920443B2 (en) 2003-07-07 2011-04-05 Panasonic Corporation Objective lens, optical pick-up device, and optical disk device
US7301864B2 (en) 2003-07-07 2007-11-27 Matsushita Electric Industrial Co., Ltd. Objective lens, optical pick-up device, and optical disk device
CN100405480C (zh) * 2003-07-07 2008-07-23 松下电器产业株式会社 物镜、光学拾取装置和光盘装置
US7859167B2 (en) * 2004-03-08 2010-12-28 Panasonic Corporation Micro actuator having tilt and vertical displacement and device having such micro actuator
JP2008512809A (ja) * 2004-09-03 2008-04-24 ステレオ ディスプレイ，インコーポレイテッド 光ピックアップ装置
JP4851443B2 (ja) * 2005-04-11 2012-01-11 パナソニック株式会社 微小機械構造体
WO2006109687A1 (ja) * 2005-04-11 2006-10-19 Matsushita Electric Industrial Co., Ltd. 微小機械構造体
US7742219B2 (en) 2005-04-11 2010-06-22 Panasonic Corporation Micromachine structure
WO2006112387A1 (ja) * 2005-04-15 2006-10-26 Matsushita Electric Industrial Co., Ltd. 微小機械構造体システムおよびその製造方法
US7855825B2 (en) 2005-04-15 2010-12-21 Panasonic Corporation Micromachine structure system and method for manufacturing same
JP4921366B2 (ja) * 2005-04-15 2012-04-25 パナソニック株式会社 微小機械構造体システムおよびその製造方法
JP2006309243A (ja) * 2005-04-28 2006-11-09 Asml Holdings Nv スーパーピクセル形式の可傾ミラーを用いた光パターン形成装置
JPWO2007023940A1 (ja) * 2005-08-26 2009-03-26 パナソニック株式会社 アクチュエータ、光ヘッド装置および光情報装置
JP2007293331A (ja) * 2006-04-06 2007-11-08 Asml Netherlands Bv 非線形バネによる大変形ｍｅｍｓミラーを用いる露光装置及びデバイス製造方法
JP2009042456A (ja) * 2007-08-08 2009-02-26 Toshiba Corp 形状可変鏡装置およびこの形状可変鏡装置を用いた眼底観察装置
JP2014095757A (ja) * 2012-11-07 2014-05-22 Canon Inc 可変形状ミラーの製造方法
US9448403B2 (en) 2013-03-18 2016-09-20 Seiko Epson Corporation Optical scanner, actuator, image display device, and head-mounted display
US9482864B2 (en) 2013-03-18 2016-11-01 Seiko Epson Corporation Optical scanner, actuator, image display device, and head-mounted display
JP2015212775A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法
CN104793333A (zh) * 2015-04-29 2015-07-22 中国科学院光电技术研究所 一种大行程高速多级驱动倾斜镜

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JP3657259B2 (ja) 2005-06-08
CN100504496C (zh) 2009-06-24
CN101546575B (zh) 2012-11-07
CN101546575A (zh) 2009-09-30
KR100863850B1 (ko) 2008-10-15
US6995897B2 (en) 2006-02-07
EP1365270A1 (en) 2003-11-26
EP1365270A4 (en) 2007-11-28
EP1365270B1 (en) 2012-01-18
US20050168798A1 (en) 2005-08-04
CN1489716A (zh) 2004-04-14
KR20030072395A (ko) 2003-09-13
US6952304B2 (en) 2005-10-04
JPWO2002061488A1 (ja) 2004-06-03
US20040061917A1 (en) 2004-04-01

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