WO2002010859A1 - Radiation-sensitive composition, insulating film and organic el display element - Google Patents

Radiation-sensitive composition, insulating film and organic el display element Download PDF

Info

Publication number
WO2002010859A1
WO2002010859A1 PCT/JP2001/006425 JP0106425W WO0210859A1 WO 2002010859 A1 WO2002010859 A1 WO 2002010859A1 JP 0106425 W JP0106425 W JP 0106425W WO 0210859 A1 WO0210859 A1 WO 0210859A1
Authority
WO
WIPO (PCT)
Prior art keywords
insulating film
radiation
organic
display element
saisfactorily
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2001/006425
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Masayoshi Suzuki
Hirofumi Sasaki
Isao Nishimura
Fumiko Yonezawa
Masayuki Endo
Kazuaki Niwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000226468A external-priority patent/JP3909552B2/ja
Priority claimed from JP2000370381A external-priority patent/JP3915402B2/ja
Priority claimed from JP2000379680A external-priority patent/JP2002182380A/ja
Application filed by JSR Corp filed Critical JSR Corp
Priority to EP01984445A priority Critical patent/EP1312982A4/en
Priority to US10/089,154 priority patent/US6797450B2/en
Publication of WO2002010859A1 publication Critical patent/WO2002010859A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/844—Encapsulations

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Electroluminescent Light Sources (AREA)
PCT/JP2001/006425 2000-07-27 2001-07-26 Radiation-sensitive composition, insulating film and organic el display element Ceased WO2002010859A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01984445A EP1312982A4 (en) 2000-07-27 2001-07-26 RADIATION SENSITIVE COMPOSITION, INSULATING FILM AND ELECTROLUMINESCENCE SCREEN
US10/089,154 US6797450B2 (en) 2000-07-27 2001-07-26 Radiation-sensitive composition, insulating film and organic EL display element

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2000226468A JP3909552B2 (ja) 2000-07-27 2000-07-27 感放射線性樹脂組成物および有機ｅｌ素子の絶縁膜
JP2000-226468 2000-07-27
JP2000-370381 2000-12-05
JP2000370381A JP3915402B2 (ja) 2000-12-05 2000-12-05 有機ｅｌ表示素子の絶縁膜形成用感放射線性樹脂組成物、それから形成された絶縁膜、および有機ｅｌ表示素子
JP2000379680A JP2002182380A (ja) 2000-12-14 2000-12-14 有機ｅｌ表示素子の絶縁膜形成用感放射線性樹脂組成物、それから形成された絶縁膜、および有機ｅｌ表示素子
JP2000-379680 2000-12-14

Publications (1)

Publication Number Publication Date
WO2002010859A1 true WO2002010859A1 (en) 2002-02-07

Family

ID=27344179

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/006425 Ceased WO2002010859A1 (en) 2000-07-27 2001-07-26 Radiation-sensitive composition, insulating film and organic el display element

Country Status (5)

Country Link
US (1) US6797450B2 (enExample)
EP (1) EP1312982A4 (enExample)
KR (1) KR100745331B1 (enExample)
TW (1) TWI297104B (enExample)
WO (1) WO2002010859A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1496396A4 (en) * 2002-04-18 2007-09-05 Nissan Chemical Ind Ltd POSITIVELY PHOTOSENSITIVE RESIN COMPOSITION AND PATTERN FORMATION METHOD
JP2014202895A (ja) * 2013-04-04 2014-10-27 東京応化工業株式会社 感光性樹脂組成物

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4524944B2 (ja) * 2001-03-28 2010-08-18 Ｊｓｒ株式会社 感放射線性樹脂組成物、その層間絶縁膜およびマイクロレンズの形成への使用、ならびに層間絶縁膜およびマイクロレンズ
US6984476B2 (en) * 2002-04-15 2006-01-10 Sharp Kabushiki Kaisha Radiation-sensitive resin composition, forming process for forming patterned insulation film, active matrix board and flat-panel display device equipped with the same, and process for producing flat-panel display device
JP4232527B2 (ja) * 2003-05-09 2009-03-04 Ｊｓｒ株式会社 垂直配向型液晶表示素子用の突起および垂直配向型液晶表示素子用のスペーサーの形成方法
US7221095B2 (en) * 2003-06-16 2007-05-22 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method for fabricating light emitting device
KR100571721B1 (ko) * 2004-02-10 2006-04-17 삼성전자주식회사 신너 조성물 및 이를 이용한 포토레지스트의 제거 방법
JP4993119B2 (ja) 2005-04-19 2012-08-08 日産化学工業株式会社 光架橋硬化のレジスト下層膜を形成するためのレジスト下層膜形成組成物
JP5048754B2 (ja) * 2006-04-13 2012-10-17 コーロン インダストリーズ インク ポジティブ型フォトレジスト用組成物およびこれから製造されたポジティブ型フォトレジストフィルム
JP2008077057A (ja) * 2006-08-21 2008-04-03 Jsr Corp 感光性絶縁樹脂組成物及びその硬化物並びにそれを備える電子部品
KR101249992B1 (ko) * 2007-07-03 2013-04-02 주식회사 엘지화학 유기 절연막용 감광성 수지 조성물 및 이로부터 제조된유기 절연막
JP5240380B1 (ja) * 2011-07-05 2013-07-17 Ｊｓｒ株式会社 樹脂組成物、重合体、硬化膜および電子部品
CN103988127B (zh) 2011-12-09 2019-04-19 旭化成株式会社 感光性树脂组合物、固化浮雕图案的制造方法、半导体装置及显示体装置
KR101413078B1 (ko) * 2011-12-30 2014-07-02 제일모직 주식회사 포지티브형 감광성 수지 조성물
KR101249997B1 (ko) * 2012-02-29 2013-04-03 주식회사 엘지화학 유기 절연막용 감광성 수지 조성물 및 이로부터 제조된 유기 절연막
JP6155823B2 (ja) * 2012-07-12 2017-07-05 Jsr株式会社 有機ｅｌ素子、感放射線性樹脂組成物および硬化膜
JP6621233B2 (ja) * 2014-07-25 2019-12-18 東京応化工業株式会社 有機ｅｌ表示素子における絶縁膜形成用の感光性樹脂組成物
CN109426070A (zh) * 2017-08-25 2019-03-05 京东方科技集团股份有限公司 光刻胶组合物、金属图案以及阵列基板的制备方法
CN111138616B (zh) * 2018-11-02 2022-03-08 万华化学（北京）有限公司 一种胺扩链剂及其制备方法，及聚氨酯泡沫

Citations (6)

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Publication number Priority date Publication date Assignee Title
JPS59184337A (ja) * 1983-04-04 1984-10-19 Hitachi Ltd 感光性耐熱材料
JPH0284654A (ja) * 1988-06-30 1990-03-26 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
US5518860A (en) * 1994-06-08 1996-05-21 Tokyo Ohka Kogyo Co., Ltd. Positive-working quinonediazide photoresist composition containing hydroxyalkyl substituted pyridine compound
JPH10270173A (ja) * 1997-03-27 1998-10-09 Junji Kido 有機エレクトロルミネッセント素子及びその製造方法
JPH1152560A (ja) * 1997-08-06 1999-02-26 Jsr Corp 感放射線性樹脂組成物
JPH11233259A (ja) * 1997-10-15 1999-08-27 Siemens Ag 有機系エレクトロルミネセンスデバイスの製造方法

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US5217840A (en) * 1985-08-12 1993-06-08 Hoechst Celanese Corporation Image reversal negative working o-quinone diazide and cross-linking compound containing photoresist process with thermal curing treatment and element produced therefrom
JP3114166B2 (ja) * 1992-10-22 2000-12-04 ジェイエスアール株式会社 マイクロレンズ用感放射線性樹脂組成物
US5691101A (en) * 1994-03-15 1997-11-25 Kabushiki Kaisha Toshiba Photosensitive composition
US6168908B1 (en) 1997-10-09 2001-01-02 Jsr Corporation Process for forming a cured film of a thermoplastic resin
JPH11237737A (ja) * 1997-12-19 1999-08-31 Kansai Shingijutsu Kenkyusho:Kk 感光性樹脂組成物およびその製造方法
US5985507A (en) * 1998-02-18 1999-11-16 Olin Microelectronic Chemicals, Inc. Selected high thermal novolaks and positive-working radiation-sensitive compositions
JP3050215B2 (ja) 1998-11-27 2000-06-12 ジェイエスアール株式会社 ネガ型感放射線性樹脂組成物
KR100668244B1 (ko) * 1999-02-15 2007-01-17 에이제토 엘렉토로닉 마티리알즈 가부시키가이샤 감광성 수지 조성물
JP2000347397A (ja) * 1999-06-04 2000-12-15 Jsr Corp 感放射線性樹脂組成物およびその層間絶縁膜への使用
WO2002001922A1 (en) * 2000-06-28 2002-01-03 Toray Industries, Inc. Display

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184337A (ja) * 1983-04-04 1984-10-19 Hitachi Ltd 感光性耐熱材料
JPH0284654A (ja) * 1988-06-30 1990-03-26 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
US5518860A (en) * 1994-06-08 1996-05-21 Tokyo Ohka Kogyo Co., Ltd. Positive-working quinonediazide photoresist composition containing hydroxyalkyl substituted pyridine compound
JPH10270173A (ja) * 1997-03-27 1998-10-09 Junji Kido 有機エレクトロルミネッセント素子及びその製造方法
JPH1152560A (ja) * 1997-08-06 1999-02-26 Jsr Corp 感放射線性樹脂組成物
JPH11233259A (ja) * 1997-10-15 1999-08-27 Siemens Ag 有機系エレクトロルミネセンスデバイスの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1496396A4 (en) * 2002-04-18 2007-09-05 Nissan Chemical Ind Ltd POSITIVELY PHOTOSENSITIVE RESIN COMPOSITION AND PATTERN FORMATION METHOD
JP2014202895A (ja) * 2013-04-04 2014-10-27 東京応化工業株式会社 感光性樹脂組成物

Also Published As

Publication number Publication date
US20030054284A1 (en) 2003-03-20
KR20020072529A (ko) 2002-09-16
TWI297104B (enExample) 2008-05-21
EP1312982A4 (en) 2007-11-07
EP1312982A1 (en) 2003-05-21
US6797450B2 (en) 2004-09-28
KR100745331B1 (ko) 2007-08-02

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