WO2001084547A1 - Appareil de moulage pour disques compacts - Google Patents

Appareil de moulage pour disques compacts Download PDF

Info

Publication number
WO2001084547A1
WO2001084547A1 PCT/JP2001/003766 JP0103766W WO0184547A1 WO 2001084547 A1 WO2001084547 A1 WO 2001084547A1 JP 0103766 W JP0103766 W JP 0103766W WO 0184547 A1 WO0184547 A1 WO 0184547A1
Authority
WO
WIPO (PCT)
Prior art keywords
stamper
mold
mounting surface
disk
layer
Prior art date
Application number
PCT/JP2001/003766
Other languages
English (en)
Japanese (ja)
Inventor
Kensuke Uemura
Raharjo Purwadi
Morioki Shibuya
Original Assignee
Itac Limited
Nagata Seiki Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itac Limited, Nagata Seiki Kabushiki Kaisha filed Critical Itac Limited
Priority to AU52666/01A priority Critical patent/AU5266601A/en
Publication of WO2001084547A1 publication Critical patent/WO2001084547A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/26—Moulds
    • B29C45/263—Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
    • B29C45/2632—Stampers; Mountings thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/26—Moulds
    • B29C45/263—Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
    • B29C45/2632—Stampers; Mountings thereof
    • B29C2045/2634—Stampers; Mountings thereof mounting layers between stamper and mould or on the rear surface of the stamper
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates

Definitions

  • the present invention relates to a molding device for molding a compact disk, a magneto-optical disk, an optical disk, a laser disk, and the like.
  • a molding device for a disk such as a compact disk is provided with a stamper 52 which is a mold for molding a disk such as a compact disk, and a stamper 52 for fixing the stamper 52 in a cavity 51. And a mold 50 having a mounting surface 50c.
  • reference numeral 57 denotes a feeder mouth for injecting a resin material into the mold 50.
  • the mold 50 includes a fixed mold 50a, a movable mold 50b for opening and closing the mold 50, and a first mold for fixing the stamper 52 to the movable mold 50b. , Second holding members 55 and 56, a gate forming body 53 for forming a gate 53 a, and a gate cutting member 54.
  • the moving mold 50b is made of steel and quenched.
  • the moving die 50b is provided with the stamper mounting surface 50c.
  • the mounting surface 50c is hard-plated and polished with high precision.
  • the cavity 51 is a disk-shaped space formed when the fixed mold 50a and the movable mold 50b are closed.
  • the stamper 52 is a donut-shaped metal sheet. The inner peripheral edge of the central child is held by the cylindrical first holding member 55, and the outer peripheral edge of the stamper 52 is held by the second holding member 56, and comes into contact with the mounting surface 50c in the cavity 51 to be air-tightly fixed. Have been.
  • An air vent 56a is formed between the second holding member 56 and the fixed mold 50a in order to improve the injection of the molten resin material into the cavity 51.
  • the gate forming body 53 is air-tightly fixed in a central hole of the fixed mold 50a.
  • the gate cut member 54 is airtightly held in the cylindrical first holding member 55 so as to be movable rightward in the drawing.
  • the gate forming body 53 and the gate cut member 54 form a gate 53a communicating with the cavity 51.
  • the gate 53a is composed of a horizontal columnar passage and a disk-shaped passage intersecting the horizontal columnar passage.
  • the molten resin material to be a disk such as a compact disk is injected into the cavity 51 of the mold 50 through the gate 53a by the feeder mouth 57. This is solidified under pressure to form a disk on which the surface shape of the stamper 52 has been transferred.
  • the temperature of the molten resin material is usually 360 ° C.
  • the surface temperature of the side of the stamper in contact with the molten resin is 360 ° C.
  • the mounting surface of the moving-side mold 50b is 100 ° C.
  • the mounting surface of the stamper 52 to the movable mold 50b expands and contracts due to the action of heat and pressure.
  • molding is repeatedly performed using the mold 50.
  • the mounting surface of the stamper 52 to the moving die 50b is damaged by friction, causing cracks, and frequent replacement of the stamper.
  • the life of the entire disk forming apparatus such as a compact disk is shortened.
  • DLC diamond-like carbon
  • the number of usable shots is about 20,000 times, and the effect of improving the life is insufficient.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a disk forming apparatus such as a compact disk which has a reduced manufacturing cost and a long life. Disclosure of the invention
  • the present invention includes a stamper that is a molding die of a disc such as a compact disc, and a mold having a mounting surface for fixing the stamper in a cavity.
  • the present invention relates to a disk forming apparatus for forming a disk to which a surface shape of a stamper is transferred by press-fitting a resin material into the cavity. '' Further, in order to achieve the above object, the disk forming apparatus of the present invention W
  • Both the mounting surface on the mold side and the mounting surface on the mold side are covered with a DLC layer, and the ratio of sp 3 bonds occupied by carbon in the DLC layer is 30% or more and 85% or less.
  • the Vickers hardness of the surface of the D1 layer is not less than 3000ks f / mm 2 (29.419 X 10 3 N / mm 2 ) and not more than 9000 kgf / mm 2 (88.260 X IO 3 N / mm 2 ).
  • the surface hardness of the DLC layer is higher than 3000 kgf / mm 2 (29.419 X 10 3 N / mm 2 ). Is also small, and sufficient durability cannot be obtained.
  • the ratio of sp 3 bonds exceeds 85%, the surface hardness of the DLC layer becomes larger than 9000 kgf / mm 2 (88.260 x 10 3 N / mm 2 ), but the ratio of SP 2 bonds decreases As a result, separation and cracking of the D1 layer is likely to occur due to an increase in internal stress.
  • both the mounting surface of the stamper on the side of the die and the mounting surface of the die side are covered with a DLC layer, and the sp 3 bond occupied by carbon in the DLC layer.
  • the surface hardness of the DLC layer is 3000 kgf / mm 2 (29.419 X 10 3 N / mm 2 ) Since it is less than 9000 kgf / mm 2 (88.260 X 10 3 N / mm 2 ), the mold and stamper have sufficient durability. As a result, the life of the entire disc forming apparatus is prolonged.
  • Hard material-hard material combination In this combination, the contact area A does not increase due to the load at the time of contact, but the shear stress s increases.
  • both the mounting surface on the mold on the stamper side and the mounting surface on the mold side are covered with the DLC layer, and the mounting surface on the stamper side and the die side Either one or both of the DLC layers formed on the mounting surface of the above is further coated with a polyfluorohydrocarbon layer.
  • the hardness of the polyfluorohydrocarbon layer is lower than the hardness of the DLC layer and the mounting surface of the stamper or the mold that is not covered by the DLC layer.
  • a soft polyfluorohydrocarbon layer is laminated on one or both of the hard DLC layers covering the stamper one-side mounting surface and the mold-side mounting surface. Therefore, the frictional force at the portion where the mounting surface on one side of the stamper and the mounting surface on the mold side contact each other is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended. Still further, in the disk forming apparatus of the present invention, one of the mounting surface on the mold on one side of the stamper and the mounting surface on the mold side is covered with a DLC layer, and the other of the one is polyfluorocarbonized. It is characterized by being covered with a hydrogen layer.
  • the hardness of the polyfluorocarbon hydrocarbon layer is desirably lower than the hardness of the stamper or the mold mounting surface on which the polyfluorocarbon hydrocarbon layer is covered, and the DLC layer.
  • one of the mounting surface of the stamper on the side of the die and the mounting surface of the die side is covered with the DLC layer of the guest, and The other is covered with a soft polyfluorohydrocarbon layer, and the other is harder than the polyfluorohydrocarbon layer. Therefore, the frictional force at the portion where the stamper-side mounting surface and the mold-side mounting surface are in contact with each other is reduced. It becomes smaller. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended.
  • the mounting surface on the mold side is covered with a DLC layer, and the DLC layer formed on the mounting surface on the mold side further comprises a polyfluorocarbon layer. Characterized by being coated with
  • the hardness of the polyfluorohydrocarbon layer is preferably lower than the hardness of the DLC layer and the hardness of the mounting surface on the stamper side.
  • a soft polyfluorohydrocarbon layer is laminated on a hard DLC layer covering the mold-side mounting surface, and the mounting surface on the stamper side is relatively thin. Since it is harder than the polyfluorohydrocarbon layer, the frictional force at the contact portion between the stamper-side mounting surface and the mold-side mounting surface is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended.
  • the mounting surface of the stamper on one side of the mold is covered with a DLC layer, and the DLC layer formed on the mounting surface of the stamper is further provided with a DLC layer. It is characterized by being covered with a polyfluorinated hydrocarbon layer.
  • the hardness of the polyfluorohydrocarbon layer is desirably lower than the hardness of the DLC layer and the hardness of the mounting surface on the mold side. ;
  • the soft polyfluorinated hydrocarbon layer is laminated on the hard DLC layer covering the mounting surface on one side of the stamper, and the mounting surface on the mold side is relatively small. Since it is harder than the polyfluorohydrocarbon layer, the frictional force at the contact portion between the stamper-side mounting surface and the mold-side mounting surface is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disk forming apparatus is extended.
  • the disk forming apparatus of the present invention is characterized in that, in addition to any one of the features described above, the surface roughness of the (! IX layer is 0.6 or less.
  • the surface roughness of the DLC layer is as small as 0.6 win or less and the surface is smooth, so that the shear stress s is reduced, and the stamper side mounting surface and the metal The frictional force at the point of contact with the mold side mounting surface is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disk forming apparatus is extended.
  • the surface of the DLC layer can be irradiated with oxygen by using the function attached to the sputtering apparatus. Can be reduced.
  • the disk forming apparatus of the present invention is characterized in that the sp 3 the ratio of binding is 85% or less than 30% the Vickers hardness of the surface of the diamond-like car carbon layer 3000kgf / mm 2 (29. 419 x lO 3 N / mm 2),. Or 9000 kgf / mrn 2 (88.260 X lO 3 N / mm 2 ) or less. If the ratio of sp 3 bonds to carbon atoms in the DLC layer is less than 30%, the surface hardness of the DLC layer becomes It is smaller than 3000 kgf / nrai 2 (29. 419 x 10 3 N / mm 2 ), and sufficient durability cannot be obtained.
  • the sp 3 bond ratio exceeds 85%, the surface hardness of the DLC layer becomes larger than 9000 kgf / mm 2 (88.260 X 10 3 N / mm 2 ), but the sp 2 bond ratio decreases. As a result, the internal stress increases, so that the separation and cracking of the DLC layer tends to occur.
  • both the mounting surface of the stamper on the side of the die and the mounting surface of the die side are covered with a DLC layer, and sp 3 occupied by carbon in the DLC layer. Since the bonding ratio is 30% or more and 85% or less, separation and cracking of the DLC layer are unlikely to occur, and the surface hardness of the DLC layer is 3000 kgf / ⁇ 2 (29.419 X 10 3 N / mm 2 ) Since it is not less than 9000 kgf / mm 2 (88.260 ⁇ 10 3 N / mm 2 ), the mold and the stamper have the effect of having sufficient durability.
  • any of the above-described disc forming apparatuses of the present invention various diamond thin film techniques may be used for the method of forming the DLC layer in the present invention.
  • various diamond thin film techniques may be used for the method of forming the DLC layer in the present invention.
  • the arc sputtering method it is possible to easily form a DLC layer having the characteristics of the present invention.
  • a magnetron sputtering apparatus can be used for the method of forming the polyfluorohydrocarbon layer, which reduces the manufacturing cost of the disk forming apparatus of the present invention. Can be suppressed.
  • FIG. 1 is a diagram showing a first embodiment of the present invention.
  • FIG. 2 is a diagram showing a second or third embodiment of the present invention.
  • FIG. 3 is a diagram schematically showing a sputtering apparatus used in the present invention.
  • FIG. 4 is a graph showing a phenomenon of reduction in surface roughness due to oxygen irradiation used in the present invention.
  • FIG. 5 is a diagram showing Table 1 showing combinations of layers covering respective mounting surfaces of a die and a stamper provided in a disk forming apparatus such as a compact disk of the present invention.
  • FIG. 6 is a diagram showing Table 2 showing the results of measuring the life by the number of serviceable shots of the stamper of the disk forming apparatus. '
  • FIG. 7 is a cross-sectional view showing a main part around a die of a disk forming apparatus such as a compact disk.
  • FIG. 1 shows an enlarged view of a part of the mounting portion of the stamper 52 to the mold 50 in the disk forming apparatus of the present invention as a first embodiment, and FIG. 2 as a second or third embodiment.
  • both the mounting surface 50c of the moving mold 50b and the mounting surface 52a of the stamper 52 are covered with the DLC layers 1 and 2.
  • the DL The ratio of sp 3 bonds occupied by carbon in the layer C is 85% or less than 30% Bidzukasu hardness of the surface of the DLC layer is 3000 kgf / Yuzuru 2 (29. 419 x lO 3 N / mm 2) or more 9000.
  • the surface roughness of the DLC layer is 0.6 rn or less.
  • the DLC layers 1 and 2 that cover both the mounting surface 52a on the stamper 52 side and the mounting surface 50c of the moving mold 50b as described above are provided by the arc sputtering device 4 shown in FIG. 3 and the magnet not shown.
  • a film can be easily formed by a sputtering method using an opening sputtering apparatus.
  • '' 5 is a vacuum deposition chamber
  • 6 is a gas inlet
  • 7 is a sample holder
  • 8 is a 1st target table
  • 9 is a 2nd target table
  • 10 is a sputtering power supply for a 2nd target.
  • the stamper 52 when a DLC layer is applied to the mounting surface 52a on the side of the stamper 52 used as a molding matrix, the stamper 52 is placed on the sample holder 7 in the vacuum film forming chamber 5.
  • the solid carbon as the target material on the first target base 8 is fixed.
  • One or more transition metal elements selected from the group consisting of titanium, tantalum, tungsten, molybdenum, and niobium are fixed as target materials on the second target table 9.
  • a gas selected from the group consisting of helium, neon, argon, and nitrogen is introduced from the gas inlet 6 into the vacuum film forming chamber 5, and the surface of the stamper 52 is ion-washed.
  • the metal on the second target table 9 is used as an evening gate to perform a transition of the transition metal element. Is preferably formed.
  • the pulse frequency of the pulse sputtering power supply 12 for the first target is set to 0.1 to 5 Hz, and the pulsed arc sputtering is performed using the solid carbon on the first target table 8 as a target.
  • the temperature of the DLC layer formed by pulse index notching will be over 100 ° C, and warpage will occur.
  • the surface hardness of the DLC layer is less than 3000 kgf / ram 2 (29.419 x 10 3 N / job 2 ). Poor, insufficient durability.
  • the ratio of sp 3 bonds of the DLC layer is more than 85%, the surface hardness of the DLC layer is 9000 kgf / ⁇ 2 (88. 260 x lO 3 N / mm
  • the ratio of sp 2 bonds in the DLC layer decreases.
  • the internal stress of the DLC layer increases, so that the separation and cracking of the DLC layer is likely to occur.
  • the ratio of sp 3 bonds in the carbon of the DLC layer is set to 30% or more and 85% or less.
  • the surface hardness is 3000 kgf / mm 2 (29.419 x lO
  • the surface of the DLC layer with oxygen from the gas inlet 6 in the vacuum film forming chamber 5.
  • This oxygen irradiation greatly reduces the surface roughness of the DLC layer to 0.6 m or less.
  • the surface of the DLC layer becomes smoother, the shear stress s is reduced, and the frictional force is significantly reduced, so that the life of the mold and the stamper in contact therewith can be prolonged. .
  • the process of forming the DLC layer and irradiating oxygen is repeated until the thickness of the DLC layer reaches a desired value in the range of 0.5 to 2.0 urn.
  • the pulse frequency of the first target pulse sputtering power supply 12 is set in the range of 10 to 30 Hz.
  • the process of forming the DLC layer and irradiating oxygen is repeated until the thickness of the DLC layer reaches a desired value in the range of 0.5 to 2.0 m.
  • both the mounting surface of the stamper on one side of the die and the mounting surface of the die side are covered with a DLC layer. Since the ratio of sp 3 bonds occupying is 30% or more and 85% or less, separation and cracking of the DLC layer are less likely to occur, and the surface hardness of the DLC layer is 3000 kgf / fuji 2 (29.419 x 10 3 N / mm 2 ) or more and 9000 kgf / customer 2 (88, 260 X 10 3 N / mm 2 ) or less, the mold and the stamper have sufficient durability. As a result, the life of the entire disc forming apparatus is prolonged.
  • the surface roughness of the DLC layer is as small as 0.6 x ra or less, and the surface is smooth, so that the shear stress s is small, and the mounting surface on one side of the stamper and the mold side This has the effect of reducing the frictional force at the contact portion with the mounting surface.
  • the durability of the stamper and the mold is further improved, and the life of the entire disc forming apparatus is further extended.
  • both the mounting surface 50c of the moving mold 50b and the mounting surface 52a on the stamper 52 side are covered with the DLC layers 1 and 2.
  • the DLC layer formed on the mounting surface 52a on the side of the stamper 52 is covered with the fluorinated hydrocarbon layer 3.
  • the thickness of the DLC layer is in the range of 0.5 to 3.0 m, and the thickness of the polyfluorohydrocarbon layer '3 is in the range of 1.0 ⁇ ra
  • the ratio of sp 3 bonds occupied by carbon in the DLC layer is 30% or more and 85% or less, and the hardness of the surface of the DLC layer is 3000 kgf / mm 2 (29.41 9 ⁇ 10 3 N / mm 2 ) or more and 9000 kgf / mm 2 (88.260 ⁇ 10 3 N / mra 2 ) or less.
  • the surface roughness of the DLC layer is preferably 0.6 ⁇ m or less.
  • a method of forming the DLC layers 1 and 2 on the mounting surface of the moving mold 50b and the stamper 52 and the polyfluorohydrocarbon layer on the DLC layer 2 of the stamper 52 in the second embodiment will be described.
  • a film is formed using the sputtering apparatus 4.
  • the formation of the DLC layers 1 and 2 on the mounting surface 50c of the movable mold 50b and the mounting surface 52a of the stamper 52 is performed by the same method as described in the first embodiment.
  • the stamper 52 whose mounting surface 52a is covered with the DLC layer 2 is placed in a magnetron sputtering apparatus.
  • Polyfluorohydrocarbon is used as a target material for magnetron sputtering.
  • Argon gas is introduced into the magnetron sputtering apparatus so that the pressure is in the range of 0.3 to 1.0 Pa.
  • the high frequency voltage of the sputtering power source for evening get was set to 4 kV and the frequency was set to 13.56 MHz, and magnetron sputtering was performed using polyfluorohydrocarbon as a target.
  • a polyfluorinated hydrocarbon layer is laminated on the DLC layer covering the mounting surface.
  • both the mounting surface 50c of the moving die 50b and the mounting surface 52a of the stamper 52 are covered with the DLC layers 1 and 2, and the mounting of the moving die 50b is performed.
  • DLC layer deposited on surface 50c This is a form covered with a hydrocarbon layer.
  • the thickness of the DLC layer is in the range of Q.5 to 3.0 jum, and the thickness of the polyfluorinated hydrocarbon layer 3 is in the range of 1 or less.
  • the ratio of sp 3 bonds occupied by carbon in the DLC layer is not less than 30 ° and not more than 85 °, and the hardness of the surface of the DLC layer is 3000 kgf7 sq. 2 (29.41 9 ⁇ 10 3 N / mm 2 ) It is preferably at least 9000 kgf / mra 2 (88.260 ⁇ 10 3 N / mm 2 ). Further, the surface roughness of the DLC layer is preferably not more than 0.6. '' The method of forming the DLC layer 2 and the polyfluorohydrocarbon layer 3 on the mounting surface of the moving mold 50b and the stamper 52 in the third embodiment is the same as the method described in the second embodiment. Done in a way.
  • the disk forming apparatus according to the present invention described in the second and third embodiments is characterized in that one of the hard DLC layer covering the one-side mounting surface of the stamper and the hard DLC layer covering the mounting surface on the mold side is provided with a soft polyfide hydrocarbon layer. Are laminated, so that the frictional force at the portion where the mounting surface on one side of the stamper and the mounting surface on the mold side contact each other is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended.
  • the ratio of sp 3 bonds occupied by carbon of the DLC layer of 85% or less than 303 ⁇ 4, the Pitsuka Ichisu hardness of the surface of the DLC layer 3000 kgf / Yuzuru 2 (29. 419 X '10 3 N / ram 2 ) or more and 9000 kgf / mm 2 (88.260 X 10 3 N / mm 2 ) or less, the separation and cracking of DLC hardly occur, and the mold and stamper must have sufficient durability. Becomes As a result, the life of the entire disc forming apparatus is further extended.
  • the surface roughness of the DLC layer was as small as 0.6 m or less, and the surface was smooth, so that the shear stress s was reduced. Frictional force at the point of contact with It has the effect of becoming. As a result, the durability of the stamper and the mold is further improved, and the life of the entire disc molding apparatus is further extended.
  • Table 1 shows combinations of layers covering the mounting surfaces 50c and 52a of the die and the stamper provided in the disk forming apparatus such as the compact disk of the present invention as Table 1.
  • the fourth and fifth embodiments are embodiments in which the manufacturing cost is minimized when manufacturing the disk forming apparatus of the present invention. It is desirable that the hardness of the polyfluorinated hydrocarbon layer is lower than the hardness of a mounting surface of a stamper or a mold covered with the polyfluorohydrocarbon layer.
  • the sixth embodiment is a form in which the life of the disk forming apparatus can be extended to the longest.
  • the seventh embodiment is a form of a disk forming apparatus that can obtain sufficient durability even by using a conventionally used stamper.
  • the hardness of the polyfluorocarbon layer is preferably lower than the hardness of the DLC layer and the hardness of the mounting surface on the stamper side which has been conventionally used.
  • a soft polyfluorinated hydrocarbon layer is laminated and coated on the hard DLC layer that covers the mold side mounting surface. Since the mounting surface on one side is relatively harder than the hydrocarbon layer, even in the case of a conventionally used stamper, the friction in the contact portion between the mounting surface on the stamper side and the mounting surface on the mold side. The force is reduced. As a result, it is possible to have sufficient durability as compared with the conventional disk forming apparatus.
  • the eighth embodiment is a form of a disk forming apparatus that can obtain sufficient durability even using a conventionally used mold.
  • the hardness of the polyfluorocarbon layer is preferably lower than the hardness of the DLC layer and the hardness of the mounting surface on the mold side which has been conventionally used.
  • the mounting surface on the-side is the hard film of the DLC layer and the soft film of the Since the mounting surface on the mold side is relatively harder than the polyfluorohydrocarbon layer, the mold used in the related art is a stano, one-side mounting. The frictional force at the contact point between the surface and the mold side mounting surface is reduced. As a result, it is possible to have sufficient durability as compared with the conventional disk forming apparatus.
  • a mold is placed on the sample holder 17 installed in the vacuum film formation chamber 5 in Fig. 3, and after exhausting the inside of the vacuum film formation chamber 5, argon ions are introduced from the gas inlet 6 to the surface of the mold.
  • argon ions are introduced from the gas inlet 6 to the surface of the mold.
  • titanium was placed on the second evening platform 9 and carbon was placed on the first evening platform 8.
  • the sputtering power source 10 for the second target was turned on, and a titanium layer was formed.
  • pulse sputtering was performed with the pulse frequency of the pulse sputtering power source 12 for the first evening set to 20 Hz.
  • oxygen irradiation was performed from the gas inlet 6 to smooth the surface. This pulsed padding and oxygen irradiation process was repeated twice.
  • the sp 3 bond content of carbon was 75%.
  • the surface had a Pickers hardness of 8000 kgf / mm 2 (78.453 ⁇ 10 3 N / drawing 2 ).
  • a CD copying stamper was placed on a sample holder 7 installed in a vacuum film forming chamber 5, and a pulse frequency of a sputtering power supply was set to 2 Hz, and a film was formed in the same manner as described above.
  • the sp 3 bond content of carbon was 70%.
  • the surface had a hardness of 6500 kgf / mm 2 (63.743 ⁇ 10 3 N / ram 2 ).
  • a compact disk was manufactured by a disk forming apparatus equipped with the above-mentioned mold and stamper. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.
  • Magnet mouth Susuno A stamper is placed in the cutter, and polytetrafluoroethylene (Teflon, du Pont) is one of polyfluorocarbons under the conditions of high-frequency voltage of 4 kV, frequency of 13.65 MHz, and argon pressure of 0.8 Pa. Was used as a target to shine and shoot. A porous fluorocarbon layer was formed on the mounting surface on the sumper side without pores.
  • Teflon, du Pont polytetrafluoroethylene
  • a compact disk was manufactured by the disk forming apparatus equipped with the mold and the stamper.
  • the life was measured by the number of durable shots of the stamper of the disk forming device.
  • the results are shown in Table 6 in Table 2. '
  • the compact disk was manufactured by a disk forming device equipped with a mold and a stamper.
  • the life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.
  • a mold having a DLC layer formed by the same method as in Example 1 was placed in a magnet opening sputtering apparatus, and a high-frequency voltage of 4 kV and a frequency of 13.
  • Polytetrafluoroethylene (Teflon, trade name of du Pont) one of polyfluorocarbons, was irradiated with magnetron under the conditions of 13.65 MHz and an argon pressure of 0.8 Pa.
  • a DLC-coated mold having a hydrogen fluoride layer on the surface was obtained. Its surface hardness was 30 kgf / fan 2 (294 N / ⁇ 2 ).
  • a DLC layer was formed on the mounting surface on the stamper side in the same manner as in Example 1.
  • the sp 3 bond content of carbon was 70%. Further, the surface thereof had a hardness of 6500 kgf / mm 2 (63.743 ⁇ 10 3 N / mm 2 ).
  • a compact disk was manufactured by a disk forming apparatus equipped with the above-mentioned mold and stamper. The life was measured by the number of durable shots on the stamper of the disk forming apparatus. The results are shown in Table 6 in Table 2.
  • the mold having the DLC layer formed in the same manner as in Example 1 was It is placed in a net mouth sprinkling device, and under the conditions of a high-frequency voltage of 4 kV, a frequency of 65 MHz, and an argon pressure of 0 ⁇ Pa, polytetrafluoroethylene (Teflon, trade name of du Pont) ) was used as a target for magnetron irradiation.
  • a DLC-coated mold having a polyfluorohydrocarbon layer on the surface was obtained. Its surface hardness was 30 kgf / mm 2 (294 N / ⁇ 2 ).
  • a compact disk was manufactured by a disk forming apparatus equipped with the above-mentioned mold and stamper. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.
  • a conventional mold with a DLC layer generated only by the CVD method on the mounting surface on the mold side, and a conventional stamper without the DLC layer also having a polyfluorohydrocarbon layer '' was manufactured.
  • the life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.
  • a DLC layer was formed only on the mounting surface on the mold side and only on the mounting surface on the stamper side by the CVD method.
  • a compact disk was manufactured by a conventional disk forming apparatus equipped with these conventional dies and stampers. The service life was measured by the number of serviceable shots of the stamper of the disk forming apparatus. The results are shown in Table 6 in Table 2.
  • FIG. 4 shows the results of irradiation with oxygen ions having an energy of 0.1 to 10 keV when the thickness of the DLC layer is about 2 in.
  • the present invention is suitable as a compact disk device, a magneto-optical disk, an optical disk, a laser disk, etc., which has a reduced production cost and a long service life.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

L'invention concerne un appareil de moulage de disques comprenant un disque mère, c'est-à-dire un disque (52) de moulage, et une matrice (50b) dont une face (50c) sert à fixer le disque (52) de moulage dans la cavité et à mouler un disque ayant la même forme superficielle que le disque (52) de moulage transféré, par l'introduction, sous pression, d'un matériau du type résine fondue dans la cavité. Ledit appareil est caractérisé en ce que la face (52a) du disque (52) de moulage fixée à la matrice et la face (50c) de fixation côté matrice (50b) sont enduites de couches DLC (1, 2), la proportion de liaisons sp3 occupées par un carbone dans lesdites couches DLC (1, 2) étant de l'ordre de 30 à 85 %, et la dureté Vickers à la surface des couches DLC (1, 2) étant de l'ordre de 3000 kgf/mm2 (29,419 X 103 N/mm2) à 9000 kgf/mm2 (88,260 X 103 N/mm2). En outre, l'appareil de moulage de disques est caractérisé en ce que l'une quelconque des couches DLC (1, 2) ou les deux couches DLC sont également enduites d'une couche (3) de polyfluorohydrocarbures.
PCT/JP2001/003766 2000-04-28 2001-05-01 Appareil de moulage pour disques compacts WO2001084547A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU52666/01A AU5266601A (en) 2000-04-28 2001-05-01 Disc molding apparatus for compact disc

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000134244A JP2001312844A (ja) 2000-04-28 2000-04-28 コンパクトディスクなどのディスク成形装置
JP2000-134244 2000-04-28

Publications (1)

Publication Number Publication Date
WO2001084547A1 true WO2001084547A1 (fr) 2001-11-08

Family

ID=18642556

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/003766 WO2001084547A1 (fr) 2000-04-28 2001-05-01 Appareil de moulage pour disques compacts

Country Status (3)

Country Link
JP (1) JP2001312844A (fr)
AU (1) AU5266601A (fr)
WO (1) WO2001084547A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2825377B1 (fr) * 2001-05-31 2003-09-19 Essilor Int Inserts de moulage
JP4190371B2 (ja) * 2003-08-26 2008-12-03 Ｔｄｋ株式会社 凹凸パターン形成用スタンパー、凹凸パターン形成方法および磁気記録媒体

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267937A (ja) * 1986-05-16 1987-11-20 Hitachi Maxell Ltd 光記録媒体製造用成形機
JPH0222012A (ja) * 1988-07-11 1990-01-24 Tdk Corp 成形用スタンパーとその製造方法
JPH06187673A (ja) * 1992-12-16 1994-07-08 Ricoh Co Ltd 光ディスク製造用スタンパ及びその製造方法
JPH07232354A (ja) * 1993-12-28 1995-09-05 Tdk Corp ディスク基板成形用ディスク原盤、金型、及びこれらの組み合わせ
JPH08238630A (ja) * 1995-03-03 1996-09-17 Teijin Ltd 光ディスク基板成形装置
JPH1064127A (ja) * 1996-08-19 1998-03-06 Matsushita Electric Ind Co Ltd 光ディスクの成形方法および成形装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3319217B2 (ja) * 1995-05-08 2002-08-26 ミノルタ株式会社 光学レンズ用金型およびその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267937A (ja) * 1986-05-16 1987-11-20 Hitachi Maxell Ltd 光記録媒体製造用成形機
JPH0222012A (ja) * 1988-07-11 1990-01-24 Tdk Corp 成形用スタンパーとその製造方法
JPH06187673A (ja) * 1992-12-16 1994-07-08 Ricoh Co Ltd 光ディスク製造用スタンパ及びその製造方法
JPH07232354A (ja) * 1993-12-28 1995-09-05 Tdk Corp ディスク基板成形用ディスク原盤、金型、及びこれらの組み合わせ
JPH08238630A (ja) * 1995-03-03 1996-09-17 Teijin Ltd 光ディスク基板成形装置
JPH1064127A (ja) * 1996-08-19 1998-03-06 Matsushita Electric Ind Co Ltd 光ディスクの成形方法および成形装置

Also Published As

Publication number Publication date
AU5266601A (en) 2001-11-12
JP2001312844A (ja) 2001-11-09

Similar Documents

Publication Publication Date Title
JP5393108B2 (ja) 硬質多層膜成形体の製造方法
US5780119A (en) Treatments to reduce friction and wear on metal alloy components
US5605714A (en) Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys
JP3737291B2 (ja) ダイヤモンドライクカーボン硬質多層膜成形体
WO2010050542A1 (fr) Corps formant un film multicouche dur et son procédé de fabrication
EP1086797B1 (fr) Moule et procede de moulage de resine pour la formation d'un revetement dur sur un moule
JP4139102B2 (ja) ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
WO2004076710A1 (fr) Film de carbone amorphe, procede de production de celui-ci et materiau revetu dudit film de carbone amorphe
JP2004169137A (ja) 摺動部材
WO2001084547A1 (fr) Appareil de moulage pour disques compacts
TW201505816A (zh) 隔熱模具及其製造方法
JP5660697B2 (ja) 硬質皮膜被覆部材およびその製造方法
JP5418917B2 (ja) 皮膜密着性に優れた表面被覆部品の製造方法
US6314763B1 (en) Method of manufacturing a 2-5 inch diameter glass substrate for a magnetic disk
CN115044880B (zh) 一种镀膜治具及镀膜方法
JP2001329360A (ja) 硬質皮膜ワーク及びその加工方法
JP3540350B2 (ja) スタンパおよび積層構造
JPH10226874A (ja) 硬質炭素膜及びその被覆部材
JP2007031797A (ja) ダイヤモンドライクカーボン皮膜被覆部材およびその製造方法
JP3171583B2 (ja) 樹脂成形用金型および樹脂成形用金型への硬質被膜形成方法
JP5245103B2 (ja) 厚膜ｄｌｃ被覆部材およびその製造方法
TWI248420B (en) Mold and method for molding optical glass products
US20110076476A1 (en) Method of Producing a Hydrogenated Amorphous Carbon Coating
AU718549B2 (en) Mold for pressing and molded glass substrate for computer me mory by using it
WO2002085237A2 (fr) Revetement de type diamant, procede de placage et fraise dentaire comportant ce revetement de type diamant

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase