WO2001084547A1

WO2001084547A1 - Disc molding apparatus for compact disc

Info

Publication number: WO2001084547A1
Application number: PCT/JP2001/003766
Authority: WO
Inventors: Kensuke Uemura; Raharjo Purwadi; Morioki Shibuya
Original assignee: Itac Limited; Nagata Seiki Kabushiki Kaisha
Priority date: 2000-04-28
Filing date: 2001-05-01
Publication date: 2001-11-08
Also published as: AU5266601A; JP2001312844A

Abstract

A disc molding apparatus comprising a mother die of disc, i.e. a stamper (52), and a die (50b) having a face (50c) for securing the stamper (52) in the cavity, and molding a disc having the surface shape of the stamper (52) transferred thereto by pressure feeding a molten resin material into the cavity, characterized in that both the face (52a) on the stamper (52) side being fixed to the die and the fixing face (50c) on the die (50b) side are coated with DLC layers (1, 2), the ratio of sp3 bond occupied by carbon in the DLC layers (1, 2) is in the range of 30%-85%, and Vickers hardness on the surface of the DLC layers (1, 2) is in the range of 3000 kgf/mm2 (29.419 103 N/mm2) -9000 kgf/mm2 (88.260 103 N/mm2). The disc molding apparatus is further characterized in that any one or both of the DLC layers (1, 2) is further coated with a polyfluorohydrocarbon layer (3).

Description

Description Disc molding equipment for compact discs, etc.Technical field ''

The present invention relates to a molding device for molding a compact disk, a magneto-optical disk, an optical disk, a laser disk, and the like.

Background art

Conventionally, as shown in FIG. 7, a molding device for a disk such as a compact disk is provided with a stamper 52 which is a mold for molding a disk such as a compact disk, and a stamper 52 for fixing the stamper 52 in a cavity 51. And a mold 50 having a mounting surface 50c. By pressing a molten resin material to be a disc such as a compact disc into the cavity 51, a disc on which the surface control dog of the stamper 52 is transferred is formed.

In FIG. 7, reference numeral 57 denotes a feeder mouth for injecting a resin material into the mold 50.

The mold 50 includes a fixed mold 50a, a movable mold 50b for opening and closing the mold 50, and a first mold for fixing the stamper 52 to the movable mold 50b. , Second holding members 55 and 56, a gate forming body 53 for forming a gate 53 a, and a gate cutting member 54. The moving mold 50b is made of steel and quenched. The moving die 50b is provided with the stamper mounting surface 50c. The mounting surface 50c is hard-plated and polished with high precision.

The cavity 51 is a disk-shaped space formed when the fixed mold 50a and the movable mold 50b are closed. The stamper 52 is a donut-shaped metal sheet. The inner peripheral edge of the central child is held by the cylindrical first holding member 55, and the outer peripheral edge of the stamper 52 is held by the second holding member 56, and comes into contact with the mounting surface 50c in the cavity 51 to be air-tightly fixed. Have been. An air vent 56a is formed between the second holding member 56 and the fixed mold 50a in order to improve the injection of the molten resin material into the cavity 51.

The gate forming body 53 is air-tightly fixed in a central hole of the fixed mold 50a. The gate cut member 54 is airtightly held in the cylindrical first holding member 55 so as to be movable rightward in the drawing. When the fixed mold 50a and the movable mold 50b are closed, the gate forming body 53 and the gate cut member 54 form a gate 53a communicating with the cavity 51. The gate 53a is composed of a horizontal columnar passage and a disk-shaped passage intersecting the horizontal columnar passage. The molten resin material to be a disk such as a compact disk is injected into the cavity 51 of the mold 50 through the gate 53a by the feeder mouth 57. This is solidified under pressure to form a disk on which the surface shape of the stamper 52 has been transferred. When the gate cutting member 54 moves to the right in the drawing, the center of the disk is punched out by the shearing action between the edge 54a of the gate cutting member 54 and the edge 50d of the hole of the fixed mold 50a. In this way, a disc such as a compact disc is manufactured.

Since the temperature of the molten resin material is usually 360 ° C., the surface temperature of the side of the stamper in contact with the molten resin is 360 ° C. On the other hand, the mounting surface of the moving-side mold 50b is 100 ° C. Moreover, it is pressed with high pressure. Therefore, the mounting surface of the stamper 52 to the movable mold 50b expands and contracts due to the action of heat and pressure. As a result, molding is repeatedly performed using the mold 50. Then, the mounting surface of the stamper 52 to the moving die 50b is damaged by friction, causing cracks, and frequent replacement of the stamper. As a result, there has been a problem that the life of the entire disk forming apparatus such as a compact disk is shortened.

In order to solve this problem, a method has been proposed in which the surface of the portion of the mold that comes into contact with the stamper is mirror-polished or coated with TiN or the like. However, sufficient improvement in wear resistance and reduction in frictional force could not be obtained.

Therefore, a method of applying a thin film of diamond-like carbon (hereinafter referred to as DLC) to the surface of the portion of the mold that comes into contact with the stamper by the CVD method (JP-A-234214, JP-A-Heisei 2) -See 22 012). This provides a certain degree of surface wear resistance and low friction.

However, when the DLC thin film is applied only to the mounting surface 50c on the mold side and the mounting surface 52a on one side of the stamper, the number of usable shots is about 20,000 times, and the effect of improving the life is insufficient.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a disk forming apparatus such as a compact disk which has a reduced manufacturing cost and a long life. Disclosure of the invention

The present invention includes a stamper that is a molding die of a disc such as a compact disc, and a mold having a mounting surface for fixing the stamper in a cavity. The present invention relates to a disk forming apparatus for forming a disk to which a surface shape of a stamper is transferred by press-fitting a resin material into the cavity. '' Further, in order to achieve the above object, the disk forming apparatus of the present invention W

Both the mounting surface on the mold side and the mounting surface on the mold side are covered with a DLC layer, and the ratio of sp ³ bonds occupied by carbon in the DLC layer is 30% or more and 85% or less. The Vickers hardness of the surface of the D1 layer is not less than 3000ks f / mm ² (29.419 X 10 ³ N / mm ² ) and not more than 9000 kgf / mm ² (88.260 X IO ³ N / mm ² ). Features.

Foreword When the ratio of sp ³ bonds to carbon atoms in the DLC layer is smaller than 30%, the surface hardness of the DLC layer is higher than 3000 kgf / mm ² (29.419 X 10 ³ N / mm ² ). Is also small, and sufficient durability cannot be obtained. On the other hand, when the ratio of sp ³ bonds exceeds 85%, the surface hardness of the DLC layer becomes larger than 9000 kgf / mm ² (88.260 x 10 ³ N / mm ² ), but the ratio of SP ² bonds decreases As a result, separation and cracking of the D1 layer is likely to occur due to an increase in internal stress.

In the disc forming apparatus of the present invention, both the mounting surface of the stamper on the side of the die and the mounting surface of the die side are covered with a DLC layer, and the sp ³ bond occupied by carbon in the DLC layer. Is 30% or more and 85% or less, so that the separation and cracking of the DLC layer hardly occurs, and the surface hardness of the DLC layer is 3000 kgf / mm ² (29.419 X 10 ³ N / mm ² ) Since it is less than 9000 kgf / mm ² (88.260 X 10 ³ N / mm ² ), the mold and stamper have sufficient durability. As a result, the life of the entire disc forming apparatus is prolonged.

Also, the present invention was made using the law of nature described in Bowden et al., Norimune Soda, “Friction and Lubrication of Solids,” 1970, pp. 100-101.

The natural laws are as follows.

In general, when solids are in contact with each other, if the contact area is A, the frictional force F is expressed as F = A X s. Where s is the shear stress acting on the contact. To reduce the friction force, it is obviously necessary to make A and s as small as possible,

1) Combination of hard material and soft material: This combination has a small shear stress s However, the soft material deforms due to the load at the time of contact, and the contact area A increases. '

2) Hard material-hard material combination: In this combination, the contact area A does not increase due to the load at the time of contact, but the shear stress s increases.

3) Combination of hard material-soft thin film-hard material (corresponding to the case where hard materials are brought into contact with each other by coating a soft thin film on the surface of the hard material): This combination is based on the contact area A and the shear stress s. Are both smaller. This is because the shear stress s becomes the shear stress of the soft thin film, and at the same time, the load at the time of contact is supported by a hard material, so there is almost no deformation, and the contact surface remains small even for large loads. . As a result, the frictional force F = A X s decreases. From the above, the present invention has considered the thin film coating of the mold-side mounting surface and the stamper-side mounting surface so as to be a combination of the above 3).

Therefore, in the disk forming apparatus of the present invention, both the mounting surface on the mold on the stamper side and the mounting surface on the mold side are covered with the DLC layer, and the mounting surface on the stamper side and the die side Either one or both of the DLC layers formed on the mounting surface of the above is further coated with a polyfluorohydrocarbon layer.

It is desirable that the hardness of the polyfluorohydrocarbon layer is lower than the hardness of the DLC layer and the mounting surface of the stamper or the mold that is not covered by the DLC layer.

According to the disk forming apparatus of the present invention having the above configuration, a soft polyfluorohydrocarbon layer is laminated on one or both of the hard DLC layers covering the stamper one-side mounting surface and the mold-side mounting surface. Therefore, the frictional force at the portion where the mounting surface on one side of the stamper and the mounting surface on the mold side contact each other is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended. Still further, in the disk forming apparatus of the present invention, one of the mounting surface on the mold on one side of the stamper and the mounting surface on the mold side is covered with a DLC layer, and the other of the one is polyfluorocarbonized. It is characterized by being covered with a hydrogen layer.

The hardness of the polyfluorocarbon hydrocarbon layer is desirably lower than the hardness of the stamper or the mold mounting surface on which the polyfluorocarbon hydrocarbon layer is covered, and the DLC layer. According to the disk forming apparatus of the present invention having the above-described configuration, one of the mounting surface of the stamper on the side of the die and the mounting surface of the die side is covered with the DLC layer of the guest, and The other is covered with a soft polyfluorohydrocarbon layer, and the other is harder than the polyfluorohydrocarbon layer. Therefore, the frictional force at the portion where the stamper-side mounting surface and the mold-side mounting surface are in contact with each other is reduced. It becomes smaller. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended.

Further, in the disk forming apparatus of the present invention, the mounting surface on the mold side is covered with a DLC layer, and the DLC layer formed on the mounting surface on the mold side further comprises a polyfluorocarbon layer. Characterized by being coated with

The hardness of the polyfluorohydrocarbon layer is preferably lower than the hardness of the DLC layer and the hardness of the mounting surface on the stamper side.

According to the disk forming apparatus of the present invention having the above configuration, a soft polyfluorohydrocarbon layer is laminated on a hard DLC layer covering the mold-side mounting surface, and the mounting surface on the stamper side is relatively thin. Since it is harder than the polyfluorohydrocarbon layer, the frictional force at the contact portion between the stamper-side mounting surface and the mold-side mounting surface is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended. In the disk forming apparatus of the present invention, the mounting surface of the stamper on one side of the mold is covered with a DLC layer, and the DLC layer formed on the mounting surface of the stamper is further provided with a DLC layer. It is characterized by being covered with a polyfluorinated hydrocarbon layer.

The hardness of the polyfluorohydrocarbon layer is desirably lower than the hardness of the DLC layer and the hardness of the mounting surface on the mold side. ;

According to the disk forming apparatus of the present invention having the above configuration, the soft polyfluorinated hydrocarbon layer is laminated on the hard DLC layer covering the mounting surface on one side of the stamper, and the mounting surface on the mold side is relatively small. Since it is harder than the polyfluorohydrocarbon layer, the frictional force at the contact portion between the stamper-side mounting surface and the mold-side mounting surface is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disk forming apparatus is extended.

The disk forming apparatus of the present invention is characterized in that, in addition to any one of the features described above, the surface roughness of the (!) IX layer is 0.6 or less. According to the disk forming apparatus of the present invention having the above configuration, the surface roughness of the DLC layer is as small as 0.6 win or less and the surface is smooth, so that the shear stress s is reduced, and the stamper side mounting surface and the metal The frictional force at the point of contact with the mold side mounting surface is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disk forming apparatus is extended.

As a method for reducing the surface roughness of the DLC layer to a desired value, there is oxygen irradiation. When the DLC layer is formed by a sputtering apparatus, the surface of the DLC layer can be irradiated with oxygen by using the function attached to the sputtering apparatus. Can be reduced.

Further, the disk forming apparatus of the present invention is characterized in that the sp ³ the ratio of binding is 85% or less than 30% the Vickers hardness of the surface of the diamond-like car carbon layer ^{3000kgf / mm 2 (29. 419 x} lO 3 N / mm 2),. Or 9000 kgf / mrn ² (88.260 X lO ³ N / mm ² ) or less.If the ratio of sp ³ bonds to carbon atoms in the DLC layer is less than 30%, the surface hardness of the DLC layer becomes It is smaller than 3000 kgf / nrai ² (29. 419 x 10 ³ N / mm ² ), and sufficient durability cannot be obtained. On the other hand, when the sp ³ bond ratio exceeds 85%, the surface hardness of the DLC layer becomes larger than 9000 kgf / mm ² (88.260 X 10 ³ N / mm ² ), but the sp ² bond ratio decreases. As a result, the internal stress increases, so that the separation and cracking of the DLC layer tends to occur.

According to the disk forming apparatus of the present invention, both the mounting surface of the stamper on the side of the die and the mounting surface of the die side are covered with a DLC layer, and sp ³ occupied by carbon in the DLC layer. Since the bonding ratio is 30% or more and 85% or less, separation and cracking of the DLC layer are unlikely to occur, and the surface hardness of the DLC layer is 3000 kgf / 删² (29.419 X 10 ³ N / mm ² ) Since it is not less than 9000 kgf / mm ² (88.260 × 10 ³ N / mm ² ), the mold and the stamper have the effect of having sufficient durability. As a result, the life of the entire disc forming apparatus is prolonged.In any of the above-described disc forming apparatuses of the present invention, various diamond thin film techniques may be used for the method of forming the DLC layer in the present invention. However, according to the arc sputtering method, it is possible to easily form a DLC layer having the characteristics of the present invention.

In addition, when forming the polyfluorohydrocarbon layer, a magnetron sputtering apparatus can be used for the method of forming the polyfluorohydrocarbon layer, which reduces the manufacturing cost of the disk forming apparatus of the present invention. Can be suppressed. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a diagram showing a first embodiment of the present invention.

FIG. 2 is a diagram showing a second or third embodiment of the present invention. FIG. 3 is a diagram schematically showing a sputtering apparatus used in the present invention.

FIG. 4 is a graph showing a phenomenon of reduction in surface roughness due to oxygen irradiation used in the present invention.

FIG. 5 is a diagram showing Table 1 showing combinations of layers covering respective mounting surfaces of a die and a stamper provided in a disk forming apparatus such as a compact disk of the present invention. 'FIG. 6 is a diagram showing Table 2 showing the results of measuring the life by the number of serviceable shots of the stamper of the disk forming apparatus. '

FIG. 7 is a cross-sectional view showing a main part around a die of a disk forming apparatus such as a compact disk. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

The structure of the entire apparatus of the present invention is the same as that of the disk forming apparatus shown in FIG. 7, and the difference from FIG. 7 lies in the mounting portion of the stamper 52 to the mold 50. FIG. 1 shows an enlarged view of a part of the mounting portion of the stamper 52 to the mold 50 in the disk forming apparatus of the present invention as a first embodiment, and FIG. 2 as a second or third embodiment.

[First Embodiment]

In FIG. 1, both the mounting surface 50c of the moving mold 50b and the mounting surface 52a of the stamper 52 are covered with the DLC layers 1 and 2. And the DL The ratio of sp ³ bonds occupied by carbon in the layer C is 85% or less than 30% Bidzukasu hardness of the surface of the DLC layer is 3000 kgf / Yuzuru ^{^{2 (29. 419 x lO 3 N}} / mm 2) or more 9000. kgf / Awake ² (88.260 X 10 ³ N / mra ² ) or less. The surface roughness of the DLC layer is 0.6 rn or less.

The DLC layers 1 and 2 that cover both the mounting surface 52a on the stamper 52 side and the mounting surface 50c of the moving mold 50b as described above are provided by the arc sputtering device 4 shown in FIG. 3 and the magnet not shown. A film can be easily formed by a sputtering method using an opening sputtering apparatus. '' 5 is a vacuum deposition chamber, 6 is a gas inlet, 7 is a sample holder, 8 is a 1st target table, 9 is a 2nd target table, and 10 is a sputtering power supply for a 2nd target. (DC 35Y, 55 to 180A), 11 is a turntable, 12 is a pulse sputtering power source for the first target, and 13 is a power source for ionizing gas (DC 61V, 0.5A or less). The above-mentioned evening table 11 rotates in the direction of the arrow around the point 0 while sputtering is performed. The method of forming the DLC layers 1 and 2 using the above-mentioned sputtering apparatus 4 will be described. You.

For example, when a DLC layer is applied to the mounting surface 52a on the side of the stamper 52 used as a molding matrix, the stamper 52 is placed on the sample holder 7 in the vacuum film forming chamber 5. The solid carbon as the target material on the first target base 8 is fixed. One or more transition metal elements selected from the group consisting of titanium, tantalum, tungsten, molybdenum, and niobium are fixed as target materials on the second target table 9.

A gas selected from the group consisting of helium, neon, argon, and nitrogen is introduced from the gas inlet 6 into the vacuum film forming chamber 5, and the surface of the stamper 52 is ion-washed. Here, in order to remarkably increase the adhesion of the DLC layer in the subsequent DLC layer film forming step, the metal on the second target table 9 is used as an evening gate to perform a transition of the transition metal element. Is preferably formed. The pulse frequency of the pulse sputtering power supply 12 for the first target is set to 0.1 to 5 Hz, and the pulsed arc sputtering is performed using the solid carbon on the first target table 8 as a target.

In the case of a stamper, if the pulse frequency is higher than 5, the temperature of the DLC layer formed by pulse index notching will be over 100 ° C, and warpage will occur.

When the ratio of sp ³ bonds to carbon atoms in the DLC layer is less than 30%, the surface hardness of the DLC layer is less than 3000 kgf / ram ² (29.419 x 10 ³ N / job ² ). Poor, insufficient durability. On the other hand, when the ratio of sp ³ bonds of the DLC layer is more than 85%, the surface hardness of the DLC layer is 9000 kgf /顧^{^{2 (88. 260 x lO 3 N}} / mm

² ), but the ratio of sp ² bonds in the DLC layer decreases. As a result, the internal stress of the DLC layer increases, so that the separation and cracking of the DLC layer is likely to occur.Therefore, the ratio of sp ³ bonds in the carbon of the DLC layer is set to 30% or more and 85% or less. The surface hardness is 3000 kgf / mm ² (29.419 x lO

³ N / mra ² ) or more and 9000 kgf / 贿² (88. 260 x 10 ³ N / mm ² ) or less;

Further, it is preferable to irradiate the surface of the DLC layer with oxygen from the gas inlet 6 in the vacuum film forming chamber 5. This oxygen irradiation greatly reduces the surface roughness of the DLC layer to 0.6 m or less. The surface of the DLC layer becomes smoother, the shear stress s is reduced, and the frictional force is significantly reduced, so that the life of the mold and the stamper in contact therewith can be prolonged. . The process of forming the DLC layer and irradiating oxygen is repeated until the thickness of the DLC layer reaches a desired value in the range of 0.5 to 2.0 urn. 'When a DLC thin film is formed on the surface of the mounting surface 50c on the side of the moving die 50b, the same process as described above can be performed. In this case, the pulse frequency of the first target pulse sputtering power supply 12 is set in the range of 10 to 30 Hz. The process of forming the DLC layer and irradiating oxygen is repeated until the thickness of the DLC layer reaches a desired value in the range of 0.5 to 2.0 m.

According to the disk molding apparatus of the present invention having the above structure, both the mounting surface of the stamper on one side of the die and the mounting surface of the die side are covered with a DLC layer. Since the ratio of sp ³ bonds occupying is 30% or more and 85% or less, separation and cracking of the DLC layer are less likely to occur, and the surface hardness of the DLC layer is 3000 kgf / fuji ² (29.419 x 10 ³ N / mm ² ) or more and 9000 kgf / customer ² (88, 260 X 10 ³ N / mm ² ) or less, the mold and the stamper have sufficient durability. As a result, the life of the entire disc forming apparatus is prolonged. In addition, when irradiated with oxygen, the surface roughness of the DLC layer is as small as 0.6 x ra or less, and the surface is smooth, so that the shear stress s is small, and the mounting surface on one side of the stamper and the mold side This has the effect of reducing the frictional force at the contact portion with the mounting surface. As a result, the durability of the stamper and the mold is further improved, and the life of the entire disc forming apparatus is further extended. '

[Second embodiment]

In the second embodiment, in FIG. 2, both the mounting surface 50c of the moving mold 50b and the mounting surface 52a on the stamper 52 side are covered with the DLC layers 1 and 2. The DLC layer formed on the mounting surface 52a on the side of the stamper 52 is covered with the fluorinated hydrocarbon layer 3. The thickness of the DLC layer is in the range of 0.5 to 3.0 m, and the thickness of the polyfluorohydrocarbon layer '3 is in the range of 1.0 ^ ra The ratio of sp ³ bonds occupied by carbon in the DLC layer is 30% or more and 85% or less, and the hardness of the surface of the DLC layer is 3000 kgf / mm ² (29.41 9 × 10 ³ N / mm ² ) or more and 9000 kgf / mm ² (88.260 × 10 ³ N / mra ² ) or less. Further, the surface roughness of the DLC layer is preferably 0.6 μm or less.

A method of forming the DLC layers 1 and 2 on the mounting surface of the moving mold 50b and the stamper 52 and the polyfluorohydrocarbon layer on the DLC layer 2 of the stamper 52 in the second embodiment will be described. . As in the first embodiment, a film is formed using the sputtering apparatus 4.

The formation of the DLC layers 1 and 2 on the mounting surface 50c of the movable mold 50b and the mounting surface 52a of the stamper 52 is performed by the same method as described in the first embodiment.

Next, the stamper 52 whose mounting surface 52a is covered with the DLC layer 2 is placed in a magnetron sputtering apparatus. Polyfluorohydrocarbon is used as a target material for magnetron sputtering.

Argon gas is introduced into the magnetron sputtering apparatus so that the pressure is in the range of 0.3 to 1.0 Pa.

The high frequency voltage of the sputtering power source for evening get was set to 4 kV and the frequency was set to 13.56 MHz, and magnetron sputtering was performed using polyfluorohydrocarbon as a target. A polyfluorinated hydrocarbon layer is laminated on the DLC layer covering the mounting surface.

[Third embodiment]

In the third embodiment, in FIG. 2, both the mounting surface 50c of the moving die 50b and the mounting surface 52a of the stamper 52 are covered with the DLC layers 1 and 2, and the mounting of the moving die 50b is performed. DLC layer deposited on surface 50c This is a form covered with a hydrocarbon layer. The thickness of the DLC layer is in the range of Q.5 to 3.0 jum, and the thickness of the polyfluorinated hydrocarbon layer 3 is in the range of 1 or less.

The ratio of sp ³ bonds occupied by carbon in the DLC layer is not less than 30 ° and not more than 85 °, and the hardness of the surface of the DLC layer is 3000 kgf7 sq. ² (29.41 9 × 10 ³ N / mm ² ) It is preferably at least 9000 kgf / mra ² (88.260 × 10 ³ N / mm ² ). Further, the surface roughness of the DLC layer is preferably not more than 0.6. '' The method of forming the DLC layer 2 and the polyfluorohydrocarbon layer 3 on the mounting surface of the moving mold 50b and the stamper 52 in the third embodiment is the same as the method described in the second embodiment. Done in a way.

The disk forming apparatus according to the present invention described in the second and third embodiments is characterized in that one of the hard DLC layer covering the one-side mounting surface of the stamper and the hard DLC layer covering the mounting surface on the mold side is provided with a soft polyfide hydrocarbon layer. Are laminated, so that the frictional force at the portion where the mounting surface on one side of the stamper and the mounting surface on the mold side contact each other is reduced. As a result, the durability of the stamper and the mold is improved, and the life of the entire disc forming apparatus is extended.

Further, the ratio of sp ³ bonds occupied by carbon of the DLC layer of 85% or less than 30¾, the Pitsuka Ichisu hardness of the surface of the DLC layer 3000 kgf / Yuzuru ^{^{2 (29. 419 X '10 3}} N / ram ² ) or more and 9000 kgf / mm ² (88.260 X 10 ³ N / mm ² ) or less, the separation and cracking of DLC hardly occur, and the mold and stamper must have sufficient durability. Becomes As a result, the life of the entire disc forming apparatus is further extended.

In addition, when the oxygen irradiation was performed, the surface roughness of the DLC layer was as small as 0.6 m or less, and the surface was smooth, so that the shear stress s was reduced. Frictional force at the point of contact with It has the effect of becoming. As a result, the durability of the stamper and the mold is further improved, and the life of the entire disc molding apparatus is further extended.

Next, Table 1 shows combinations of layers covering the mounting surfaces 50c and 52a of the die and the stamper provided in the disk forming apparatus such as the compact disk of the present invention as Table 1.

The fourth and fifth embodiments are embodiments in which the manufacturing cost is minimized when manufacturing the disk forming apparatus of the present invention. It is desirable that the hardness of the polyfluorinated hydrocarbon layer is lower than the hardness of a mounting surface of a stamper or a mold covered with the polyfluorohydrocarbon layer.

The sixth embodiment is a form in which the life of the disk forming apparatus can be extended to the longest.

The seventh embodiment is a form of a disk forming apparatus that can obtain sufficient durability even by using a conventionally used stamper. The hardness of the polyfluorocarbon layer is preferably lower than the hardness of the DLC layer and the hardness of the mounting surface on the stamper side which has been conventionally used.

A soft polyfluorinated hydrocarbon layer is laminated and coated on the hard DLC layer that covers the mold side mounting surface. Since the mounting surface on one side is relatively harder than the hydrocarbon layer, even in the case of a conventionally used stamper, the friction in the contact portion between the mounting surface on the stamper side and the mounting surface on the mold side. The force is reduced. As a result, it is possible to have sufficient durability as compared with the conventional disk forming apparatus.

The eighth embodiment is a form of a disk forming apparatus that can obtain sufficient durability even using a conventionally used mold. The hardness of the polyfluorocarbon layer is preferably lower than the hardness of the DLC layer and the hardness of the mounting surface on the mold side which has been conventionally used.

The mounting surface on the-side is the hard film of the DLC layer and the soft film of the Since the mounting surface on the mold side is relatively harder than the polyfluorohydrocarbon layer, the mold used in the related art is a stano, one-side mounting. The frictional force at the contact point between the surface and the mold side mounting surface is reduced. As a result, it is possible to have sufficient durability as compared with the conventional disk forming apparatus.

[Example 1]

(Creation of mold with DLC layer)

A mold is placed on the sample holder 17 installed in the vacuum film formation chamber 5 in Fig. 3, and after exhausting the inside of the vacuum film formation chamber 5, argon ions are introduced from the gas inlet 6 to the surface of the mold. Was subjected to ion washing. Next, titanium was placed on the second evening platform 9 and carbon was placed on the first evening platform 8. First, the sputtering power source 10 for the second target was turned on, and a titanium layer was formed. Next, pulse sputtering was performed with the pulse frequency of the pulse sputtering power source 12 for the first evening set to 20 Hz. Finally, oxygen irradiation was performed from the gas inlet 6 to smooth the surface. This pulsed padding and oxygen irradiation process was repeated twice.

As a result of measuring the Raman spectrum of the obtained DLC layer, the sp ³ bond content of carbon was 75%. The surface had a Pickers hardness of 8000 kgf / mm ² (78.453 × 10 ³ N / drawing ² ).

(Create stamper with DLC layer)

A CD copying stamper was placed on a sample holder 7 installed in a vacuum film forming chamber 5, and a pulse frequency of a sputtering power supply was set to 2 Hz, and a film was formed in the same manner as described above.

As a result of measuring the Raman spectrum of the obtained DLC layer, the sp ³ bond content of carbon was 70%. In addition, the surface had a hardness of 6500 kgf / mm ² (63.743 × 10 ³ N / ram ² ). A compact disk was manufactured by a disk forming apparatus equipped with the above-mentioned mold and stamper. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.

[Example 2]

(Preparation of Mold Having DLC Layer) 'A DLC layer was formed on the mold-side mounting surface in the same manner as in Example 1.

(Preparation of glass with polyfluorocarbon layer)

Magnet mouth Susuno ,. A stamper is placed in the cutter, and polytetrafluoroethylene (Teflon, du Pont) is one of polyfluorocarbons under the conditions of high-frequency voltage of 4 kV, frequency of 13.65 MHz, and argon pressure of 0.8 Pa. Was used as a target to shine and shoot. A porous fluorocarbon layer was formed on the mounting surface on the sumper side without pores.

A compact disk was manufactured by the disk forming apparatus equipped with the mold and the stamper. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2. '

[Example 3]

(Creation of mold with DLC layer)

In the same manner as in Example 1, a DLC layer was formed on the mounting surface on the mold side.

(Preparation of a stamper having a DLC layer and a polyfluorohydrocarbon layer) A stamper having a DLC layer formed by the same method as in Example 1 was placed in a magnetron sputtering apparatus, and a high-frequency voltage of 4 kV and a frequency of 13.65 MHz were used. Magnetron irradiation was performed using a target of polytetrafluoroethylene (Teflon, trade name of du Pont), which is one of polyfluorohydrocarbons, under an argon pressure of 0.8 Fa. Has a polyfluorocarbon layer on the surface. A DLC coated stamper was obtained. Its surface hardness was 50 kgf / thigh ² (490 N / mm ² ). '

The compact disk was manufactured by a disk forming device equipped with a mold and a stamper. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.

[Example 4]

(Creation of a mold having a DLC layer and a polyfluorohydrocarbon layer), a mold having a DLC layer formed by the same method as in Example 1 was placed in a magnet opening sputtering apparatus, and a high-frequency voltage of 4 kV and a frequency of 13. Polytetrafluoroethylene (Teflon, trade name of du Pont), one of polyfluorocarbons, was irradiated with magnetron under the conditions of 13.65 MHz and an argon pressure of 0.8 Pa. A DLC-coated mold having a hydrogen fluoride layer on the surface was obtained. Its surface hardness was 30 kgf / fan ² (294 N / 瞧² ).

(Create stamper with DLC layer)

A DLC layer was formed on the mounting surface on the stamper side in the same manner as in Example 1.

As a result of measuring the Raman spectrum of the obtained DLC layer, the sp ³ bond content of carbon was 70%. Further, the surface thereof had a hardness of 6500 kgf / mm ² (63.743 × 10 ³ N / mm ² ).

A compact disk was manufactured by a disk forming apparatus equipped with the above-mentioned mold and stamper. The life was measured by the number of durable shots on the stamper of the disk forming apparatus. The results are shown in Table 6 in Table 2.

[Example 5]

(Preparation of mold with DLC layer and polyfluorocarbon layer)

The mold having the DLC layer formed in the same manner as in Example 1 was It is placed in a net mouth sprinkling device, and under the conditions of a high-frequency voltage of 4 kV, a frequency of 65 MHz, and an argon pressure of 0 δ Pa, polytetrafluoroethylene (Teflon, trade name of du Pont) ) Was used as a target for magnetron irradiation. A DLC-coated mold having a polyfluorohydrocarbon layer on the surface was obtained. Its surface hardness was 30 kgf / mm ² (294 N / 瞧² ).

(Preparation of Stamper Having DLC Layer and Polyfluorohydrocarbon Layer) A DLC-coated stamper having a polyfluorohydrocarbon layer on the surface was obtained in the same manner as in Example 3. Its surface hardness was 50 kgf / customer ² (490 N / ram ² ).

A compact disk was manufactured by a disk forming apparatus equipped with the above-mentioned mold and stamper. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.

[Comparative Example 1]

Compact discs were manufactured on conventional disc forming equipment where neither the mold nor the stamper had a DLC layer or a polyfluorocarbon layer. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.

[Comparative Example 2]

A conventional mold with a DLC layer generated only by the CVD method on the mounting surface on the mold side, and a conventional stamper without the DLC layer also having a polyfluorohydrocarbon layer '' Was manufactured. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.

[Comparative Example 3]

Conventional method in which a DLC layer is generated only on the-side mounting surface by CVD Compact discs were manufactured using a stamper and a conventional disk forming device equipped with a conventional mold that had neither a DLC layer nor a hydrogen fluoride layer. The life was measured by the number of durable shots of the stamper of the disk forming device. The results are shown in Table 6 in Table 2.ヽ

[Comparative Example 4]

A DLC layer was formed only on the mounting surface on the mold side and only on the mounting surface on the stamper side by the CVD method. A compact disk was manufactured by a conventional disk forming apparatus equipped with these conventional dies and stampers. The service life was measured by the number of serviceable shots of the stamper of the disk forming apparatus. The results are shown in Table 6 in Table 2.

As is clear from Table 2, according to the present invention, 1.5 million shots or more are possible, and it is found that the life is extended as compared with the comparative example.

[Example 6]

Although the surface roughness of the DLC layer depends on the surface roughness of the substrate (mold or stamper) to be coated, the surface roughness of the DLC layer can be reduced by irradiation with oxygen. FIG. 4 shows the results of irradiation with oxygen ions having an energy of 0.1 to 10 keV when the thickness of the DLC layer is about 2 in.

When the surface roughness of the DLC layer is reduced to a range of 0.6 urn or less, even if both the mounting surface on the mold side and the mounting surface on the stamper side are covered with the hard DLC layer, the friction is increased. The force is sufficiently reduced and the durability is improved. Industrial applicability

INDUSTRIAL APPLICABILITY The present invention is suitable as a compact disk device, a magneto-optical disk, an optical disk, a laser disk, etc., which has a reduced production cost and a long service life.

Claims

The scope of the claims

1. A molten resin material that includes a stamper, which is a molding die of a disc such as a compact disc, and a mold having a mounting surface for fixing the stamper in a cavity, and is a disc such as a compact disc. The stamper surface 开 ^! In a disk forming apparatus for forming a disk on which a dog is transferred,

Both the mounting surface to the mold on the one side of the stamper and the mounting surface on the mold side are covered with a diamond-like carbon layer,

The ratio of sp ³ bonds occupied by carbon in the diamond-like carbon layer is 30% or more and 85% or less,

The Vickers hardness of the surface of the diamond-like layer is 3000 kg f / mm ² (29.419 × 10 ³ N / mm ² ) or more 9000 kgf / mm ² (88.260 x lO ³ N / mm ² ) The following is a disk forming apparatus.

2. A molten resin material that becomes a disc such as a compact disc, including a stamper that is a mold for molding a disc such as a compact disc, and a mold that has a mounting surface for fixing the stamper in the cavity. Is press-fitted into the cavity to form a disc on which a stunner, "one surface control dog," is transferred. A mounting surface of the stamper on one side and a mounting surface on the mold side Both sides are covered with a diamond-like layer

One or both of the diamond-like carbon layer formed on the mounting surface on the side of the stamper and the mounting surface on the side of the mold are further covered with a polyfluorinated hydrocarbon layer. apparatus.

3. A molten resin material that is provided with a stamper, which is a molding die of a disk such as a compact disk, and a mold having a mounting surface for fixing the stamper in a cavity, and which becomes a disk such as a compact disk. As the material is pressed into the fri cavity, the surface of the glass is 开 ^! In a disk forming apparatus for forming a disk on which a dog is transferred,

Either one of the mounting surface to the mold on the one side of the stamper and the mounting surface on the mold side is covered with a diamond-like carbon layer,

A disk forming apparatus, wherein the one is covered with a polyfluorohydrocarbon layer on the other.

4. Stamper which is a molding die for disks such as compact disks

And a mold having a mounting surface for fixing the stamper in the cavity, and a molten resin material serving as a disk such as a compact disk is pressed into the cavity to form a surface of the stamper. In a disk forming apparatus for forming a disk having a transferred shape,

The mounting surface on the mold side is covered with a diamond-like carbon layer, and the diamond-like carbon layer formed on the mounting surface on the mold side is further covered with a polyfluorohydrocarbon layer. Disk

5. A stamper, which is a molding die for a disc such as a compact disc, and a mold having a mounting surface for fixing the stamper in a cavity, wherein the molten resin material serving as a disc such as a compact disc is formed in the cavity. In a disk forming apparatus for forming a disk onto which the surface shape of the stamper has been transferred by being pressed into the inside,

The mounting surface of the stanno on one side of the mold is covered with a diamond-like layer.

A disk-like component, wherein the diamond-like carbon layer formed on the mounting surface on one side of the stamper is further covered with a polyhydrocarbon layer.

6. The surface roughness of the diamond-like carbon layer is 0.6 / ni or less. 6. The disk forming apparatus according to claim 1, wherein the disk forming apparatus has the following range. -

7. The diamond-like force. The ratio of sp ³ bonds occupied by carbon in the carbon layer is 30% or more and 85% or less, and the diamond-like carbon layer has a surface hardness of 3000kgf. ^{/ mm 2 (29. 419 X lO} 3 N / mm 2) or more ^{9000 kgf / nim 2 (88. 260} X IO 3 N / rara 2) following either a disk molding apparatus according to claims 2 to 6 .