JP4190371B2 - Uneven pattern forming stamper, uneven pattern forming method, and magnetic recording medium - Google Patents

Uneven pattern forming stamper, uneven pattern forming method, and magnetic recording medium Download PDF

Info

Publication number
JP4190371B2
JP4190371B2 JP2003300796A JP2003300796A JP4190371B2 JP 4190371 B2 JP4190371 B2 JP 4190371B2 JP 2003300796 A JP2003300796 A JP 2003300796A JP 2003300796 A JP2003300796 A JP 2003300796A JP 4190371 B2 JP4190371 B2 JP 4190371B2
Authority
JP
Japan
Prior art keywords
formed
convex
pattern forming
resin layer
stamper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003300796A
Other languages
Japanese (ja)
Other versions
JP2005071487A (en
Inventor
実 藤田
充 高井
Original Assignee
Tdk株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk株式会社 filed Critical Tdk株式会社
Priority to JP2003300796A priority Critical patent/JP4190371B2/en
Publication of JP2005071487A publication Critical patent/JP2005071487A/en
Application granted granted Critical
Publication of JP4190371B2 publication Critical patent/JP4190371B2/en
Application status is Expired - Fee Related legal-status Critical
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • C03C17/002General methods for coating; Devices therefor for flat glass, e.g. float glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/40Distributing applied liquids or other fluent materials by members moving relatively to surface
    • B05D1/42Distributing applied liquids or other fluent materials by members moving relatively to surface by non-rotary members
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855Coating only part of a support with a magnetic layer

Description

  The present invention relates to a concavo-convex pattern forming stamper in which a concavo-convex pattern forming convex portion capable of forming a concavo-convex pattern on a resin layer by pressing against a resin layer on a substrate surface is formed in a predetermined annular region on the surface, and the concavo-convex pattern The present invention relates to a concavo-convex pattern forming method for forming a concavo-convex pattern using a pattern forming stamper, and a magnetic recording medium on which a data recording track is formed using the concavo-convex pattern formed according to the concavo-convex pattern forming method.

  For example, in the process of manufacturing a semiconductor element or a recording medium, as a method of forming a fine (nanometer-sized) uneven pattern on a resin layer on a substrate surface, a nanometer-sized uneven portion (convex) formed on a stamper (mold) is used. Part) is pressed against the resin layer on the substrate surface to transfer the uneven shape of the uneven part (Stephan Y. Chou, “Imprint of sub 25 nm vias and trenches in polymers ", Applied Physics Letters, (USA), November 20, 1995, Vol. 67, No. 21, pp. 3114-3116).

In this imprint method, first, a stamper having a nanometer size (minimum width of 25 nm) uneven portion formed on the surface thereof is manufactured. In this case, the uneven portion of the stamper is formed by drawing a pattern on a silicon substrate having a silicon oxide layer formed on the surface using an electron beam lithography apparatus and etching using a reactive ion etching apparatus (RIE). The Next, PMMA (polymethyl methacrylate) as a resin material is applied to the surface of a silicon substrate by a spin coating method to form a 55 nm resin layer. Next, after heating the stamper, the base material, and the resin layer so that the glass transition point of PMMA is 105 ° C. or higher (for example, 200 ° C.), the uneven portion of the stamper is formed on the resin layer at a pressure of 13.1 MPa (1900 psi). Press. Subsequently, after the stamper, the base material, and the resin layer are cooled to room temperature, the stamper is separated from the resin layer. Thereby, the uneven | corrugated shape of the uneven | corrugated | grooved part in a stamper is transcribe | transferred to a resin layer, and the uneven | corrugated pattern of nanometer size is formed.

On the other hand, as shown in FIG. 21, a concave / convex pattern is formed on the resin layer according to this imprint method, and a plurality of discrete data recording is separated magnetically by a plurality of concentric grooves using the concave / convex pattern. Are tracks (hereinafter simply referred to as “discrete tracks”) 92, 92... Formed on the track forming region 102 on the surface of the disk-shaped substrate 101 (magnetic layer 112). 91) is also known. When forming a concavo-convex pattern used for forming the discrete track 92 in the magnetic recording medium 91, as shown in FIGS. 17 and 18, the nanometer-sized convex portions 51, 51,. The formed stamper 41 is used. In this case, as shown in FIG. 19, the annular region 43 is defined to have the same size as the track forming region 102 of the disk-shaped substrate 101. When forming a concavo-convex pattern using this stamper 41, according to the above-mentioned imprint method, for example, the surface of the disk-shaped substrate 101 configured to include a glass disc 111, a magnetic layer 112, and a metal layer 113. After the resin layer 103 is formed, the convex portions 51, 51... Of the stamper 41 are pressed against the resin layer 103 as shown in FIG. Thereby, as shown in the figure and FIG. 20, a concavo-convex pattern is formed in the concavo-convex pattern forming region 104 of the resin layer 103 corresponding to the annular region 43 in the stamper 41.
Stefan Y. Stephen Y. Chou, "Imprint of sub 25 nm vias and trenches in polymers", Applied Physics Letters, (USA), November 20, 1995, Vol. 67, No. 21, p. 3114-3116

  However, the conventional stamper 41 has the following problems. That is, in this stamper 41, as shown in FIG. 19, the convex portions 51, 51... Are formed only in the annular region 43 defined to be the same size as the track forming region 102. Accordingly, as shown in FIGS. 17 to 19, the outer region 44 and the inner region 45 where the convex portions 51 are not formed exist on the outer side and the inner side of the annular region 43, respectively. . Specifically, since the convex portion 51 is not formed in the outer region 44 and the inner region 45, when the stamper 41 is pressed against the resin layer 103, the outer peripheral portion 104 b in the concave / convex pattern forming region 104 of the resin layer 103 and The pressure concentrates on the inner peripheral portion 104c (both see FIG. 20). For this reason, as shown in FIG. 20, the depth (the height of the convex portion) of the concave portions formed in the outer peripheral portion 104b and the inner peripheral portion 104c of the concave / convex pattern forming region 104 is the central portion 104a of the concave / convex pattern forming region 104. As a result of being deeper than the depth of the concave portion formed in (and higher than the height of the convex portion), there is a problem that the depth of each concave portion becomes non-uniform. In addition, the pressure concentrates on the outer peripheral portion 104b and the inner peripheral portion 104c in the concave / convex pattern forming region 104, so that the concave / convex pattern on the outer peripheral portion 104b and the inner peripheral portion 104c is deformed, and the stamper 41 is separated from the resin layer 103. At this time, there is a problem that the uneven pattern (resin material) in the outer peripheral portion 104b and the inner peripheral portion 104c adheres to the convex portion 51 of the stamper 41 and peels off. Therefore, in the magnetic recording medium 91 manufactured using this concavo-convex pattern, the height of the discrete track 92 (the depth of the groove separating the discrete track 92) is not uniform, the outer periphery of the track forming region 102 and Since the discrete track 92 in the inner peripheral portion is deformed or missing, there is a problem that a recording error may occur when data is recorded.

  The present invention has been made in view of such problems, and provides a concavo-convex pattern forming stamper and a concavo-convex pattern forming method capable of uniforming the depth of the concavo-convex pattern in the concavo-convex pattern and preventing deformation and peeling of the concavo-convex pattern. The main purpose is to do. It is another object of the present invention to provide a magnetic recording medium that can prevent the occurrence of a recording error.

In order to achieve the above object, the concavo-convex pattern forming stamper according to the present invention has a concavo-convex pattern forming convex portion that can form a concavo- convex pattern on the resin layer by pressing against the resin layer on the surface of the substrate . Formed in an annular region, a pressure dispersion convex portion that can disperse the pressure at the time of pressing against the resin layer is formed in an outer region located outside the annular region , the pressure dispersion convex portion, wherein is formed so that its width increases in accordance with a different pitch, and toward the outside from the convex pattern forming convex part.

  In this case, it is preferable that the annular area is defined to have substantially the same size as the track forming area of the magnetic recording medium.

Further, it is preferable to form formed in the inner area located inside the dispersible pressure distribution protrusions pressure during pressing against the annular region with respect to the resin layer.

Furthermore, it is preferable that the pressure distribution convex portion in the inner region is formed in the same shape or substantially the same shape as the convex / concave pattern forming convex portion.

  Moreover, the uneven | corrugated pattern formation method which concerns on this invention forms a resin layer in the base-material surface, and presses the said uneven | corrugated pattern formation convex part in the said uneven | corrugated pattern formation stamper on the said resin layer by pressing the said resin layer. An uneven pattern is formed.

  In the magnetic recording medium according to the present invention, a data recording track is formed using the concavo-convex pattern formed according to the concavo-convex pattern forming method.

According to the concavo-convex pattern forming stamper and the concavo-convex pattern forming method according to the present invention, in the outer region located outside the annular region, the pressure dispersion convex portion whose width increases toward the outer side is formed. When the concave / convex pattern forming stamper is pressed against the resin layer, the pressure applied to the resin layer via the concave / convex pattern forming stamper corresponds to the region corresponding to the annular region of the concave / convex pattern forming stamper in the resin layer and the outer region. Since the pressure can be applied almost uniformly to the entire region of the resin layer where the concave / convex pattern is to be formed, the concave portion (which has a substantially uniform depth in the region where the concave / convex pattern is to be formed) A convex portion having a substantially uniform height) can be formed. Further, since concentration of pressure on the outer peripheral portion of the region where the concavo-convex pattern is to be formed can be prevented, it is possible to reliably prevent the concavo-convex pattern from being peeled when the concavo-convex pattern is deformed or the concavo-convex pattern forming stamper is separated from this region. it can.

Further, according to the concavo-convex pattern forming stamper and the concavo-convex pattern forming method according to the present invention, the pressure dispersion convex portions are formed in both the outer region and the inner region, so that the resin layer is pressed against the resin layer. Since the applied pressure can be distributed to both the part corresponding to the outer region and the part corresponding to the inner region of the stamper for forming the concavo-convex pattern in the resin layer, the pressure distribution convex portion is provided only in one of the outer region and the inner region. Compared with the structure to form, as a result of being able to apply a pressure more uniformly to the whole area | region which should form an uneven | corrugated pattern, the recessed part of a more uniform depth can be formed.

Further, according to the concavo-convex pattern forming stamper and convex pattern forming method according to the present invention, by forming on the inner side region of pressure variance protrusions in the same shape or substantially the same shape as the uneven pattern forming convex part, uneven When manufacturing a pattern forming stamper, the convex / concave pattern forming convex part and the pressure dispersion convex part can be formed by continuous processing under the same processing conditions, so that the processing time can be shortened, resulting in the concave / convex pattern. The manufacturing cost of the forming stamper can be reduced.

  In addition, according to the magnetic recording medium of the present invention, since the data recording track is formed using the concavo-convex pattern formed according to the concavo-convex pattern forming method, the depth of the concave portion (the height of the convex portion) in the concavo-convex pattern. ) Can be formed almost uniformly, so that a data recording track having a substantially uniform height (depth of a groove separating the tracks) can be formed. In addition, since the uneven pattern is not deformed or peeled off, a data recording track without deformation or missing can be formed. Therefore, it is possible to reliably prevent the occurrence of a recording error during recording.

  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a concavo-convex pattern forming stamper, a concavo-convex pattern forming method, and a magnetic recording medium according to the present invention will be described below with reference to the accompanying drawings.

  First, configurations of the coating apparatus 1 and the transfer apparatus 2 will be described with reference to the drawings.

  A coating apparatus 1 shown in FIG. 1 is an apparatus that forms a resin layer 63 (see FIG. 2) by coating a resin material on the surface of a disk-shaped substrate 61 (see FIG. 2) according to the uneven pattern forming method according to the present invention. The motor 11, the turntable 12, the discharge mechanism 13, and the control unit 14 are provided. The motor 11 rotates the turntable 12 according to a control signal from the control unit 14. The turntable 12 is configured to be able to place a disk-shaped substrate 61 and is rotated by the motor 11. In accordance with a control signal from the control unit 14, the discharge mechanism 13 is formed of a resin material (on the outer peripheral side of the disk-like base material 61 placed on the turntable 12 (a part on the outer peripheral side slightly from the hole formed in the center)). As an example, a polystyrene copolymer) is discharged. The control unit 14 controls the rotation of the motor 11 and the discharge of the resin material by the discharge mechanism 13 so that the resin layer 63 has a predetermined thickness (for example, 65 nm (nanometer)). Here, the disk-shaped substrate 61 described above is a substrate for the magnetic recording medium 3 shown in FIG. 15, and is configured to include, for example, a glass disc 71 as shown in FIG. On the surface of the plate 71, a magnetic layer 72 and a metal layer 73 are formed in advance. In this case, as shown in FIG. 15, a plurality of concentric discrete tracks (corresponding to data recording tracks in the present invention) 4, 4,... Separated from each other at a predetermined arrangement pitch (for example, 150 nm) are discs. The magnetic recording medium 3 is manufactured by being formed in the track forming region 62 of the substrate 61 (magnetic layer 72). In practice, an orientation layer, a soft magnetic layer, an underlayer, and the like are formed between the circular plate 71 and the magnetic layer 72. However, in order to facilitate understanding of the present invention, the illustration and explanation thereof are provided. Is omitted.

  The transfer apparatus 2 is an apparatus for forming a concavo-convex pattern on the resin layer 63 formed on the surface of the disk-shaped substrate 61 according to the concavo-convex pattern forming method according to the present invention, and as shown in FIG. A press mechanism 22, a control unit 23, and a stamper 24 are provided. The heating stage 21 is configured to be able to place the disk-shaped substrate 61 on which the resin layer 63 is formed, and heats the resin layer 63 and the disk-shaped substrate 61 in accordance with a control signal from the control unit 23. The press mechanism 22 is configured to be capable of fixing the stamper 24 and presses (presses down) the stamper 24 toward the heating stage 21 in accordance with a control signal from the control unit 23. In this case, the press mechanism 22 has a heating function for heating the fixed stamper 24. The control unit 23 controls heating by the heating stage 21 and heating and pressing by the press mechanism 22.

  The stamper 24 corresponds to the concavo-convex pattern forming stamper according to the present invention, and, as shown in FIG. The stamper 24 is defined to have an outer diameter L1 of, for example, 22.0 mm, which is slightly larger than the outer diameter of the disk-shaped substrate 61. Further, a central hole 29 (a hole through which a fixing jig for fixing to the press mechanism 22 is inserted) having a diameter L2 of, for example, 6.0 mm is formed at the center of the stamper 24. An annular region 26, an outer region 27, and an inner region 28 are defined on the surface of the stamper 24. In this case, as shown in FIG. 5, convex portions 31, 31... For forming a concavo-convex pattern in the resin layer 63 are formed in the annular region 26. The convex portions 31, 31,... Correspond to the convex and concave pattern forming convex portions in the present invention, and are formed concentrically with a constant pitch (for example, 150 nm) with the center of the stamper 24 as the center. Further, as shown in FIG. 10, the annular region 26 is defined to have almost the same size as the track forming region 62 in the disk-shaped base 61. Specifically, as shown in FIG. 4, the annular region 26 is defined as an annular region having an inner diameter L3 of, for example, 8.0 mm and an outer diameter L4 of, for example, 18.0 mm. In order to facilitate understanding of the present invention, in FIG. 4, the areas 26 to 28 are illustrated at a ratio different from the actual ratio of the areas 26 to 28. Further, in FIG. 5, the convex portion 31 and a convex portion 32 described later are shown exaggerated from the actual size.

  As shown in FIG. 4, the outer region 27 is a region located outside the annular region 26 on the surface of the stamper 24, and the width L <b> 5 is defined as, for example, an annular region of 2.0 mm. As shown in FIG. 5, in the outer region 27, a plurality of convex portions (pressure dispersion convex portions) 32, 32... Having the same shape as the convex portion 31 are concentric and at the same pitch as the convex portion 31. Is formed. As shown in FIG. 4, the inner region 28 is a region located inside the annular region 26 on the surface of the stamper 24, and the width L <b> 6 is defined as an annular region having a thickness of, for example, 1.0 mm. Further, as shown in FIG. 5, a plurality of convex portions 32, 32... (Only one of them is shown in the figure) is concentric and also has a convex portion 31 in the inner region 28. And the same pitch. In this case, the convex portions 32 formed in the outer region 27 and the inner region 28 are added to the resin layer 63 via the stamper 24 when the stamper 24 is pressed to the resin layer 63 by the press mechanism 22 as described later. By dispersing the pressure in the uneven pattern forming region 64, the outer peripheral portion 65, and the inner peripheral portion 66 (see FIG. 11) in the resin layer 63 corresponding to the annular region 26, the outer region 27, and the inner region 28 of the stamper 24, respectively. The pressure applied to the concave / convex pattern forming region 64 has a function of making the pressure almost uniform.

  Here, as an example, the stamper 24 is manufactured by a dry etching method using an uneven pattern as a mask. Specifically, as shown in FIG. 6, a resin material is applied to the surface of a disk-shaped substrate 25 made of silicon carbide to form a resin layer 25a. Next, a pattern obtained by inverting the shape of the protrusions 31 and 32 is drawn on the resin layer 25a using, for example, an electron beam lithography apparatus. Next, development processing is performed on the resin layer 25a. Thereby, as shown in FIG. 7, the uneven | corrugated pattern of the shape which reversed the shape of the convex parts 31 and 32 is formed in the resin layer 25a. Next, as shown in FIG. 8, a nickel layer 25b is formed on the bottom surface of the concave portion (surface of the base material 25) and the front end surface of the convex portion by vapor deposition. Next, the nickel layer 25b formed on the tip surface of the convex portion by the lift-off process is removed together with the resin material. Thereby, as shown in FIG. 9, a nickel pattern is formed on the surface of the base material 25 by the nickel layer 25b. Next, dry etching is performed using the nickel pattern as a mask. As a result, as shown by a broken line in the drawing, a portion of the base material 25 where the nickel pattern is not formed is scraped off, and the stamper 24 in which the convex portions 31 and 32 are formed as shown in FIG. 5 is completed. .

  Next, the process of forming a concavo-convex pattern according to the concavo-convex pattern forming method according to the present invention will be described with reference to the drawings.

  First, the disk-shaped substrate 61 is placed on the turntable 12 and the coating apparatus 1 starts processing. In response to this, the control unit 14 outputs a control signal to the motor 11 and the discharge mechanism 13. At this time, the motor 11 rotates the turntable 12 by, for example, five rotations at a low speed in accordance with the control signal, and the discharge mechanism 13 has a predetermined amount according to the control signal (an amount necessary for forming the resin layer 63 to a thickness of 65 nm). The resin material (in this case, polystyrene copolymer) is discharged to the center of the disk-shaped substrate 61. Next, the control unit 14 outputs a control signal for rotating the turntable 12 at a high speed for a predetermined time to the motor 11. In response to this, the motor 11 rotates the turntable 12 at a high speed. At this time, the disk-shaped substrate 61 rotates at a high speed according to the rotation of the turntable 12, and the discharged resin material is stretched with a uniform thickness in the outer circumferential direction of the disk-shaped substrate 61 by centrifugal force. It is done. As a result, as shown in FIG. 2, a resin layer 63 having a thickness of 65 nm is formed on the surface of the disk-shaped substrate 61 (metal layer 73).

Next, the stamper 24 is attached to the press mechanism 22. Next, the disk-shaped substrate 61 on which the resin layer 63 is formed is placed on the heating stage 21 and the transfer device 2 starts processing. In response to this, the control unit 23 outputs a control signal instructing heating to the heating stage 21 and the press mechanism 22. At this time, the heating stage 21 heats the resin layer 63 and the disk-shaped substrate 61 according to the control signal, and the press mechanism 22 heats the stamper 24 according to the control signal. Next, the control unit 23 monitors, for example, an output signal of a temperature sensor (not shown), so that the temperature of the resin layer 63, the disk-shaped substrate 61, and the stamper 24 is, for example, 170 ° C. above the glass transition point of the resin material. When it is confirmed that the pressure has reached, a control signal for instructing pressing is output to the pressing mechanism 22. In response to this, the press mechanism 22 presses the stamper 24 with a pressure of, for example, 80 kgf / cm 2 .

  At this time, as shown in FIG. 10, the convex portions 31, 31... And the convex portions 32, 32... Of the stamper 24 are pressed against the resin layer 63 to deform the resin material constituting the resin layer 63. It is done. In this case, as shown in the figure, since the convex portions 32 are formed in the outer region 27 and the inner region 28, the pressure by the pressing mechanism 22 is applied to the concave / convex pattern forming region 64, the outer peripheral portion 65, and the inner peripheral portion of the resin layer 63. Dispersed in the unit 66 (see FIG. 11). For this reason, a substantially constant pressure is applied to the entire concave / convex pattern forming region 64. Subsequently, the control unit 23 outputs a control signal instructing the press mechanism 22 to stop pressing, and outputs a control signal instructing the heating stage 21 and the press mechanism 22 to stop heating. In response to this, the heating stage 21 stops heating, and the press mechanism 22 stops pressing and heating. Next, the resin layer 63, the disk-shaped substrate 61, and the stamper 24 are left until the temperature drops to 35 ° C., for example. In this case, a method of forcibly lowering the temperature by providing a cooling mechanism can also be adopted. Next, the stamper 24 is separated from the resin layer 63. As a result, as shown in FIG. 11, the shape of the convex portion 31 is transferred to the concave / convex pattern forming region 64 in the resin layer 63 to form a concave / convex pattern. In this case, since a substantially constant pressure was applied to the entire area of the concavo-convex pattern forming region 64 during pressing, as shown in the figure, the concavo-convex pattern forming region 64 of the resin layer 63 has a concave portion having a substantially uniform depth. (Protrusions having a substantially uniform height) are formed. Further, since the pressure is not concentrated on the outer peripheral portion 64b and the inner peripheral portion 64c of the concave / convex pattern forming region 64, the concave / convex pattern is peeled off when the outer peripheral portion 64b and the inner peripheral portion 64c are deformed or the stamper 24 is separated. Is reliably prevented.

  In addition, the uneven | corrugated pattern formed according to said uneven | corrugated pattern formation method using the stamper 24 was observed with the scanning electron microscope. In addition, under the same conditions as in this concavo-convex pattern forming method, the concavo-convex pattern formed using a stamper (noted with the above-described conventional stamper 41) having no convex portions formed in the outer region and the inner region was observed with a scanning electron microscope. . As a result, in the concavo-convex pattern formed using the stamper 24, concave portions (protrusions having substantially uniform height) having a substantially uniform depth were formed in the concavo-convex pattern forming region 64. In addition, deformation and peeling of the concavo-convex pattern could not be confirmed in the outer peripheral portion 64b and the inner peripheral portion 64c of the concavo-convex pattern forming region 64. On the other hand, in the concavo-convex pattern formed using the stamper 41, the concave portions in the outer peripheral portion and the inner peripheral portion of the concavo-convex pattern forming region are formed deeper than the concave portion in the central portion. Moreover, the deformation | transformation and peeling of the uneven | corrugated pattern were confirmed in the outer peripheral part and inner peripheral part of an uneven | corrugated pattern formation area. From the above results, by forming the convex portions 32 in the outer region 27 and the inner region 28 of the stamper 24, it is possible to form a concave / convex pattern in which the depth of the concave portion (the height of the convex portion) is substantially uniform and there is no deformation or peeling. Is clear.

  Next, a process for manufacturing the magnetic recording medium 3 by forming the discrete track 4 on the disk-shaped substrate 61 (magnetic layer 72) using the uneven pattern formed on the resin layer 63 will be described.

  First, the resin material remaining in the recesses of the uneven pattern in the resin layer 63 is removed by oxygen plasma treatment. Next, an etching process using a metal etching gas is performed using the uneven pattern (convex portion) as a mask. At this time, as shown in FIG. 12, the metal layer 73 on the bottom surface in the concave portion of the concave-convex pattern is removed. Subsequently, using the remaining metal layer 73 as a mask, an etching process using a magnetic material gas is performed. Thereby, as shown in FIG. 13, the portion of the magnetic layer 72 from which the metal layer 73 has been removed is scraped off. Next, the remaining metal pattern is removed by performing an etching process using a metal etching gas. As a result, as shown in FIG. 14, grooves having the same pitch as the arrangement pitch of the protrusions 31 in the stamper 24 are formed in the track forming region 62 of the magnetic layer 72 (disk-like base material 61), and are separated from each other by the grooves. The magnetic layer 72 thus formed, that is, the discrete track 4 is formed. Next, a surface finishing process is performed. In this surface finishing treatment, first, for example, silicon oxide is filled in the groove, and then the surface is flattened by using a CMP apparatus (chemical mechanical polishing). Next, a protective film is formed on the flattened surface by, for example, DLC (Diamond Like Carbon), and finally a lubricant is applied. Thereby, as shown in FIG. 15, the magnetic recording medium 3 is completed. In this case, since the depth of the concave portion (the height of the convex portion) in the concave / convex pattern of the resin layer 63 is substantially uniform, the height of the discrete track 4 (depth of the groove separating the tracks) is also substantially uniform. . In addition, since no deformation or separation occurs in the outer peripheral portion 64b and the inner peripheral portion 64c of the concavo-convex pattern forming region 64, the discrete track 4 without deformation or omission is formed. Therefore, a good magnetic recording medium 3 in which no recording error occurs is manufactured.

  As described above, according to the uneven pattern forming method and the stamper 24, the protrusions 32 are formed on the outer region 27 and the inner region 28 located on the outer side and the inner side of the annular region 26, respectively. When pressed against the layer 63, the pressure can be dispersed in the concave / convex pattern forming region 64, the outer peripheral portion 65 and the inner peripheral portion 66 of the resin layer 63. As a result of being able to apply a certain pressure, it is possible to form a concave portion (a convex portion having a substantially uniform height) having a substantially uniform depth in the concave / convex pattern forming region 64. Moreover, since concentration of pressure on the outer peripheral portion 64b and the inner peripheral portion 64c of the concave / convex pattern forming region 64 can be reliably prevented, deformation and peeling of the concave / convex pattern on the outer peripheral portion 64b and the inner peripheral portion 64c can be reliably prevented. .

  Moreover, according to this uneven | corrugated pattern formation method and the stamper 24, since the convex part 32 was formed in both the outer side area | region 27 and the inner side area | region 28, the pressure added when pressing on the resin layer 63 is applied to the outer peripheral part 65 and inner peripheral part. Since it can be dispersed in both of the portions 66, the pressure is applied more uniformly to the concavo-convex pattern forming region 64 as compared with the method using the stamper in which the convex portion 32 is formed only in one of the outer region 27 and the inner region 28. As a result, the depth of the recess can be made more uniform.

  Furthermore, according to this method for forming an uneven pattern and the stamper 24, when forming an uneven pattern for forming the protrusions 31, 32 by forming the protrusions 32 in the same shape and pitch as the protrusions 31. In addition, for example, a pattern can be continuously drawn on the resin layer 25a under the same conditions using an electron beam lithography apparatus. Therefore, since the time required for manufacturing the stamper 24 can be shortened, the manufacturing cost of the stamper 24 can be reduced.

  Further, according to the magnetic recording medium 3, the discrete track 4 is formed using the concave / convex pattern formed on the resin layer 63 by the above-described concave / convex pattern forming method, so that the depth of the concave portion (the convex portion of the convex portion) is formed. Since the height) is substantially uniform, the discrete track 4 having a substantially uniform height (depth of the groove separating the tracks) can be formed. In addition, since no deformation or separation occurs in the outer peripheral portion 64b and the inner peripheral portion 64c of the concave / convex pattern forming region 64 in the concave / convex pattern of the resin layer 63, the discrete track 4 without deformation or omission can be formed. Therefore, it is possible to reliably prevent the occurrence of a recording error during recording.

  In addition, this invention is not limited to said structure. For example, although the configuration example in which the stamper 24 in which the convex portion 32 is formed in both the outer region 27 and the inner region 28 is described above, a stamper in which the convex portion 32 is formed only in the outer region 27 can also be employed.

  Further, the configuration example in which the convex portions 32 are formed in the entire area of the outer area 27 and the entire area of the inner area 28 has been described above. However, as shown in FIG. 16, for example, the outer peripheral side (or inner peripheral side) edge of the annular area 26 It is also possible to employ a stamper 81 in which a portion where the convex portion 32 is not formed is provided for a predetermined width. Even in this configuration, when the stamper 81 is pressed against the resin layer 63, the pressure can be distributed to the concave / convex pattern forming region 64, the outer peripheral portion 65, and the inner peripheral portion 66 of the resin layer 63. An uneven pattern having a substantially uniform depth can be formed. Further, since the area for forming the convex portion 32 can be reduced, the processing area can be reduced by that much when the stamper 81 is manufactured. Therefore, as a result of reducing the processing cost of the stamper 81, the manufacturing cost of the magnetic recording medium 3 can also be reduced.

In addition, the stamper 24 in which the convex portions 31, 31... Are formed concentrically in the annular region 26 has been described as an example, but the present invention can also be applied to a stamper in which the convex portions are formed in a spiral shape. In this case, a concentric convex portion 32 can be formed in one or both of the outer region 27 and the inner region 28, and a spiral convex portion is replaced with the outer region 27 and the concentric convex portion 32. It can also be formed in either or both of the inner regions 28. In addition, this spiral convex portion can be formed in one of the outer region 27 and the inner region 28, and the concentric convex portion can be formed in either one. Moreover, although the example which forms the convex part 32 of the same shape and the same pitch as the convex part 31 in the outer side area | region 27 and the inner side area | region 28 was demonstrated, this invention is not limited to this, The convex part of another shape is formed. You can also. Further, the protrusions 32 ( corresponding to the pressure dispersion protrusions in the present invention) 32 can be formed at a different pitch from the protrusions 31. In this case, for example, convex portions whose width increases toward the outside can be formed in the outer region 27 and the inner region 28.

1 is a block diagram illustrating a configuration of a coating apparatus 1. FIG. It is sectional drawing of the disk-shaped base material 61 in which the resin layer 63 was formed. 2 is a block diagram showing a configuration of a transfer device 2. FIG. 3 is a plan view of a stamper 24. FIG. 3 is a cross-sectional view of a stamper 24. FIG. It is sectional drawing of the base material 25 in which the resin layer 25a was formed. It is sectional drawing of the base material 25 which formed the uneven | corrugated pattern in the resin layer 25a. It is sectional drawing of the base material 25 in which the nickel layer 25b was formed. It is sectional drawing of the base material 25 of the state which performed the lift-off process. 6 is a cross-sectional view of a state in which a stamper 24 is pressed against a resin layer 63. FIG. 6 is a cross-sectional view of a disk-shaped substrate 61 in which a concavo-convex pattern is formed on a resin layer 63. FIG. 6 is a cross-sectional view of the disk-shaped substrate 61 in a state in which the metal layer 73 is removed from the bottom surface portion of the concave portion in the concave-convex pattern formed on the resin layer 63. FIG. 5 is a cross-sectional view of a disk-shaped substrate 61 in a state where an etching process is performed on a magnetic layer 72. 4 is a cross-sectional view of a disk-shaped substrate 61 in a state where a discrete track 4 is formed on a magnetic layer 72. FIG. 2 is a cross-sectional view of a magnetic recording medium 3. FIG. 3 is a cross-sectional view of a stamper 81. FIG. It is a top view of the conventional stamper 41. FIG. 4 is a cross-sectional view of a stamper 41. FIG. 3 is a cross-sectional view of a state in which a stamper 41 is pressed against a resin layer 103. FIG. FIG. 3 is a cross-sectional view of a disk-shaped substrate 101 in which an uneven pattern is formed on a resin layer 103 with a stamper 41. 6 is a cross-sectional view of a conventional magnetic recording medium 91. FIG.

Explanation of symbols

Reference Signs List 3 Magnetic recording medium 4 Discrete track 24, 81 Stamper 26 Annular region 27 Outer region 28 Inner region 31, 32 Convex portion 61 Disc-shaped substrate 63 Resin layer

Claims (6)

  1. Convex / concave pattern forming convex portions capable of forming a concave / convex pattern on the resin layer by pressing against the resin layer on the substrate surface are formed in a predetermined annular region on the surface,
    A pressure distribution convex portion that can disperse the pressure at the time of pressing against the resin layer is formed in an outer region located outside the annular region, and the pressure distribution convex portion is formed on the convex / concave pattern forming convex portion. uneven pattern forming stamper is formed so that its width increases in accordance with a different pitch, and toward the outside from the parts.
  2.   2. The concave / convex pattern forming stamper according to claim 1, wherein the annular region is defined to have substantially the same size as a track forming region of the magnetic recording medium.
  3. Convex pattern formed stamper according to claim 1 or 2, wherein are made form the inner region located inwardly relative convexity dispersible pressure distribution is the annular area of pressure during pressing against the resin layer .
  4. 4. The concave / convex pattern forming stamper according to claim 3, wherein the pressure distribution convex portion in the inner region is formed in the same shape or substantially the same shape as the convex / concave pattern forming convex portion.
  5.   A resin layer is formed on the surface of the substrate, and the uneven pattern is formed on the resin layer by pressing the uneven pattern forming convex portion in the uneven pattern forming stamper according to claim 1 against the resin layer. An uneven pattern forming method to be formed.
  6.   A magnetic recording medium on which a data recording track is formed using the concavo-convex pattern formed according to the concavo-convex pattern forming method according to claim 5.
JP2003300796A 2003-08-26 2003-08-26 Uneven pattern forming stamper, uneven pattern forming method, and magnetic recording medium Expired - Fee Related JP4190371B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003300796A JP4190371B2 (en) 2003-08-26 2003-08-26 Uneven pattern forming stamper, uneven pattern forming method, and magnetic recording medium

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003300796A JP4190371B2 (en) 2003-08-26 2003-08-26 Uneven pattern forming stamper, uneven pattern forming method, and magnetic recording medium
US10/923,728 US7296514B2 (en) 2003-08-26 2004-08-24 Convex/concave pattern-forming stamp, convex/concave pattern-forming method and magnetic recording medium
CN 200410068543 CN1300775C (en) 2003-08-26 2004-08-26 Convex/concave pattern-forming stamp, convex/concave pattern-forming method and magnetic recording medium

Publications (2)

Publication Number Publication Date
JP2005071487A JP2005071487A (en) 2005-03-17
JP4190371B2 true JP4190371B2 (en) 2008-12-03

Family

ID=34213849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003300796A Expired - Fee Related JP4190371B2 (en) 2003-08-26 2003-08-26 Uneven pattern forming stamper, uneven pattern forming method, and magnetic recording medium

Country Status (3)

Country Link
US (1) US7296514B2 (en)
JP (1) JP4190371B2 (en)
CN (1) CN1300775C (en)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK1626276T3 (en) * 2003-05-19 2019-07-29 Toray Industries Carries with selective binding substance fixed on there
JP2005044390A (en) * 2003-07-22 2005-02-17 Tdk Corp Manufacturing method of magnetic recording medium, stamper for magnetic recording medium, and intermediate for magnetic recording medium
JP4601980B2 (en) * 2004-03-25 2010-12-22 Tdk株式会社 Information recording medium
JP4058425B2 (en) * 2004-06-10 2008-03-12 Tdk株式会社 Stamper, imprint method, and information recording medium manufacturing method
JP4487848B2 (en) * 2004-09-01 2010-06-23 Tdk株式会社 Information recording medium, recording / reproducing apparatus, and stamper
JP2006099930A (en) * 2004-09-01 2006-04-13 Tdk Corp Information recording medium, recording/reproducing apparatus, and stamper
JP4077437B2 (en) * 2004-09-16 2008-04-16 Tdk株式会社 Information recording medium and recording / reproducing apparatus
JP4197689B2 (en) * 2004-09-24 2008-12-17 Tdk株式会社 Information recording medium, recording / reproducing apparatus, and stamper
JP4519668B2 (en) * 2005-01-31 2010-08-04 株式会社東芝 Patterned magnetic recording medium, stamper for producing patterned magnetic recording medium, method for manufacturing patterned magnetic recording medium, and magnetic recording / reproducing apparatus
JP3918003B2 (en) * 2005-03-10 2007-05-23 Tdk株式会社 Magnetic recording medium, recording / reproducing apparatus, and stamper
JP4649262B2 (en) * 2005-04-19 2011-03-09 株式会社東芝 Method for manufacturing magnetic recording medium
JP4552743B2 (en) * 2005-04-28 2010-09-29 Tdk株式会社 Information recording medium, recording / reproducing apparatus, and stamper
US7771852B2 (en) * 2005-06-09 2010-08-10 Hitachi Global Storage Technologies Netherlands B.V. Magnetic recording disk with patterned nondata islands of alternating polarity
JP5103712B2 (en) * 2005-06-16 2012-12-19 富士通株式会社 Method for producing nanohole structure
JP2007035164A (en) * 2005-07-27 2007-02-08 Showa Denko Kk Uneven pattern substrate, its manufacturing method, magnetic recording medium, and magnetic recording device
JP5266615B2 (en) * 2006-01-18 2013-08-21 Tdk株式会社 Stamper, uneven pattern forming method, and information recording medium manufacturing method
JP2007261252A (en) * 2006-02-28 2007-10-11 Tdk Corp Protruded pattern forming method and information recording medium manufacturing method
JP4585476B2 (en) 2006-03-16 2010-11-24 株式会社東芝 Patterned medium and magnetic recording apparatus
JP4675812B2 (en) * 2006-03-30 2011-04-27 株式会社東芝 Magnetic recording medium, magnetic recording apparatus, and method of manufacturing magnetic recording medium
WO2007136734A1 (en) * 2006-05-18 2007-11-29 Southwall Technologies, Inc. Fabrication of conductive micro traces using a deform and selective removal process
JP2007317310A (en) * 2006-05-26 2007-12-06 Tdk Corp Information medium
JP4602452B2 (en) * 2006-12-13 2010-12-22 パイオニア株式会社 Transfer mold for recording medium production, recording medium manufacturing method, and recording medium
JP2008282512A (en) * 2007-05-14 2008-11-20 Toshiba Corp Magnetic recording medium and magnetic recording/reproducing device
CN100468528C (en) 2007-06-26 2009-03-11 西安交通大学 Method for producing pattern magnetic-recording medium with continuous inverse-impression direct transfer
JP5473266B2 (en) 2007-08-03 2014-04-16 キヤノン株式会社 Imprint method, substrate processing method, and semiconductor device manufacturing method by substrate processing method
JP5053007B2 (en) 2007-09-13 2012-10-17 富士フイルム株式会社 Imprint mold structure, imprint method using the imprint mold structure, and magnetic recording medium
JP4382843B2 (en) * 2007-09-26 2009-12-16 株式会社東芝 Magnetic recording medium and method for manufacturing the same
JP2009154407A (en) * 2007-12-27 2009-07-16 Tdk Corp Peeling apparatus, peeling method, and information recording medium manufacturing method
JP2009163783A (en) * 2007-12-28 2009-07-23 Tdk Corp Information recording medium, recording and reproducing device, and stamper
JP2009176352A (en) * 2008-01-23 2009-08-06 Showa Denko Kk Method of manufacturing magnetic recording medium, and magnetic recording and reproducing device
JP5187144B2 (en) * 2008-11-07 2013-04-24 コニカミノルタアドバンストレイヤー株式会社 Manufacturing method of substrate for information recording medium
JP2010250869A (en) * 2009-04-10 2010-11-04 Toshiba Corp Magnetic recording medium and magnetic recording and reproducing device
JP4823346B2 (en) 2009-09-24 2011-11-24 株式会社東芝 Template and pattern forming method
JP5284423B2 (en) * 2011-06-29 2013-09-11 株式会社東芝 Template and pattern forming method
TWI480178B (en) * 2012-06-01 2015-04-11

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196749A (en) 1988-01-30 1989-08-08 Hoya Corp Manufacture of substrate for optical information recording medium
JP3230313B2 (en) 1993-01-14 2001-11-19 株式会社ニコン Manufacturing method of patterning a workpiece according to a reactive ion etching
KR100230244B1 (en) * 1995-01-24 1999-11-15 윤종용 Manufacturing method of multilayer optical recording medium and device using it
US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
EP0872331A1 (en) * 1997-04-16 1998-10-21 Matsushita Electric Industrial Co., Ltd. Stamper protecting layer for optical disk molding apparatus, optical disk molding apparatus and optical disk molding method using the stamper protecting layer
JPH10302256A (en) * 1997-04-25 1998-11-13 Sony Corp Molding die for disc substrate and production thereof
JPH10308020A (en) * 1997-05-06 1998-11-17 Sony Corp Mold for molding substrate for disk and its production
JP2000331333A (en) * 1999-05-21 2000-11-30 Sony Corp Metallic mold for forming disk substrate, manufacture of the same and manufacture of disk substrate
JP2001250217A (en) 2000-03-07 2001-09-14 Hitachi Maxell Ltd Information recording medium and its manufacturing method
JP3999436B2 (en) * 2000-03-10 2007-10-31 富士フイルム株式会社 Master carrier for magnetic transfer
JP2001312844A (en) * 2000-04-28 2001-11-09 Aitakku Kk Device for molding disk such as compact disk
US6482742B1 (en) 2000-07-18 2002-11-19 Stephen Y. Chou Fluid pressure imprint lithography
JP3638513B2 (en) 2000-09-25 2005-04-13 株式会社東芝 Transfer apparatus and transfer method
JP3638514B2 (en) 2000-09-27 2005-04-13 株式会社東芝 Transfer device, transfer cartridge, and transfer method
US6787071B2 (en) * 2001-06-11 2004-09-07 General Electric Company Method and apparatus for producing data storage media
JP2002373411A (en) 2001-06-15 2002-12-26 Fuji Photo Film Co Ltd Magnetic recording medium and drive apparatus thereof
JP2003006944A (en) 2001-06-22 2003-01-10 Hitachi Ltd Master disk of optical disk, optical disk substrate and method for producing the same
JP2003091887A (en) * 2001-09-20 2003-03-28 Tdk Corp Method of manufacturing multilayered optical recording medium and apparatus for manufacturing multilayered optical recording medium
JP3850718B2 (en) 2001-11-22 2006-11-29 株式会社東芝 Processing method
JP2003203333A (en) * 2002-01-07 2003-07-18 Fuji Electric Co Ltd Method for manufacturing substrate for magnetic recording medium, method for manufacturing member for manufacturing the substrate, and member for manufacturing the substrate
JP4087119B2 (en) 2002-01-21 2008-05-21 シャープ株式会社 Optical disk substrate, optical disk stamper, optical disk, and optical disk master manufacturing method

Also Published As

Publication number Publication date
JP2005071487A (en) 2005-03-17
US20050045583A1 (en) 2005-03-03
US7296514B2 (en) 2007-11-20
CN1591588A (en) 2005-03-09
CN1300775C (en) 2007-02-14

Similar Documents

Publication Publication Date Title
US5679065A (en) Wafer carrier having carrier ring adapted for uniform chemical-mechanical planarization of semiconductor wafers
US7192529B2 (en) Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern
JP3889386B2 (en) Imprint apparatus and imprint method
US20050167867A1 (en) Method and apparatus for making a stamper for patterning CDs and DVDs
US6333089B1 (en) Substrate for information recording disk, mold and stamper for injection molding substrate, and method for making stamper, and information recording disk
US7150844B2 (en) Dry passivation process for stamper/imprinter family making for patterned recording media
US6949199B1 (en) Heat-transfer-stamp process for thermal imprint lithography
US7448860B2 (en) Surface modified stamper for imprint lithography
JP2005116022A (en) Method and apparatus for manufacturing magnetic recording medium, imprint stamper, and manufacturing method therefor
JP4460987B2 (en) Electron beam drawing method and magnetic recording medium manufacturing method
US20040090610A1 (en) Microfabrication of pattern imprinting
US7717696B2 (en) Apparatus for double-sided imprint lithography
JP4338688B2 (en) Manufacturing method of optical information recording medium
JP4467611B2 (en) Optical imprint method
US6207247B1 (en) Method for manufacturing a molding tool used for sustrate molding
CN100474401C (en) Production process and production system of magnetic recording medium
JP2008162101A (en) Manufacturing method of molded structure body
US8333583B2 (en) Methods and apparatus for rapid imprint lithography
US5427599A (en) System for stamping an optical storage disk
WO1986006198A1 (en) Process for fabricating optical recording disk
EP1211040B1 (en) Stamper, method and injection molding apparatus for molding an optical disk
US20060130767A1 (en) Purged vacuum chuck with proximity pins
US6814897B2 (en) Method for manufacturing a molding tool used for substrate molding
CN100476956C (en) Stamper, method of manufacturing same, and method of manufacturing magnetic recording media by using the stamper
KR100248442B1 (en) Process for producing optical disks

Legal Events

Date Code Title Description
A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20050323

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050323

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20050518

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050531

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050727

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060131

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20060302

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060331

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20060502

A912 Removal of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20060901

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080916

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110926

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees