WO2000045196A2 - Verfahren und vorrichtung zur optischen untersuchung von strukturierten oberflächen von objekten - Google Patents
Verfahren und vorrichtung zur optischen untersuchung von strukturierten oberflächen von objekten Download PDFInfo
- Publication number
- WO2000045196A2 WO2000045196A2 PCT/DE2000/000256 DE0000256W WO0045196A2 WO 2000045196 A2 WO2000045196 A2 WO 2000045196A2 DE 0000256 W DE0000256 W DE 0000256W WO 0045196 A2 WO0045196 A2 WO 0045196A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- illuminating
- illumination
- filter
- lighting
- observation
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/12—Condensers affording bright-field illumination
- G02B21/125—Condensers affording bright-field illumination affording both dark- and bright-field illumination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
Definitions
- the invention relates to a method for the optical examination of structured surfaces of objects, in particular wafers and / or masks, with an observation beam path, the central axis of which is directed perpendicular to the surface of the object, with an illuminating beam, the central beam of which falls perpendicularly onto the surface of the object and with an illuminating beam, the central beam of which falls obliquely onto the surface of the object, the image of the surface of the object being observed and / or detected in the observation beam path, according to the preamble of claim 1 and a device for carrying out this method, according to the preamble of the claim 6.
- defects on the structured ones can, for example, be dust grains, small air pockets in the resist, resist residues on the wafers, breakouts on edges, etc.
- the investigation is e.g. realized with an optical device and lighting in which the central beam of the illuminating beam hits the surface of the object perpendicularly.
- Inspection arrangement is realized, for example, 'rule in a microscope with a Koehler brightfield illumination arrangement.
- Illumination devices for a microscope are known, in which it is optionally possible to switch from brightfield to darkfield illumination.
- a light source, adjustable diaphragms, a ring diaphragm with a center stop that can be swiveled in and out and a lens with a ring mirror surrounding the lens are provided in the illumination beam path.
- the ring cover is transparent and the middle stop is opaque.
- a switch is made from bright field to dark field lighting.
- the illuminating light is now no longer directed onto the object through the lens, but only onto the object via the ring mirror.
- the center beams of the illuminating beam bundle no longer hit the surface of the Object, but meet at an angle.
- Both microscopes are each equipped with a common observation beam path for brightfield or darkfield illumination.
- a combined bright field-dark field incident light illuminating device for a microscope in which the switch from bright field to dark field illumination takes place via an insertable center stop. Furthermore, an annular optical element with individual lens rim surfaces arranged next to one another is provided here in the dark field beam path. These lens rim surfaces can have a different spectral transmission. However, no simultaneous brightfield darkfield illumination is provided in this lighting device. Here, too, it remains open what particular advantages result from such colored lighting.
- An optimized inspection procedure for the optical examination of structured surfaces of objects with a microscope with a combined brightfield-darkfield illumination applies both illumination procedures one after the other.
- the resulting manual switching of the lighting conditions does not result in just one doubled recording or inspection time for the object, but also an additional manual operation of the center stop on the microscope.
- This object is achieved in the method in that at least one of the two illuminating beams is provided with an identifier and the surface of the object with both
- Illuminating beams are simultaneously applied and the images generated by the different illuminating beams are separated from one another in the observation beam path and fed to observation and / or evaluation.
- an optical device with a filter device and / or detector device arranged in the observation beam path and an illumination device for the simultaneous generation of bright field and dark field illumination are provided, the bright field and / or the dark field illumination beam bundle a device for identifying the illuminating beam is assigned.
- the object is illuminated simultaneously with a bright field and a dark field illumination beam. At least one of the two beams is coded using color, polarization or modulation.
- the separation of the illumination beams reflected by the object takes place in the common observation beam path a corresponding filter device and / or a corresponding detector device instead.
- the preparation can be viewed in the dark field at a flat angle of incidence, e.g. with red light and at the same time illuminated within the aperture cone of the lens with the remaining, visible color spectrum green / blue. Since the light is mixed again in the colors in the common observation beam path, there is a separation by colors in the observation beam path, e.g. B. by dichroic division and subsequent imaging on separate black and white CCD cameras.
- the two beam paths are separated using a PC-based processing of the RGB channels.
- the lighting device for the simultaneous generation of the bright field and dark field lighting has a common light source or at least two light sources that are separate from one another.
- the surface of the object in the bright field is illuminated with normal white light and the obliquely incident illuminating rays of the dark field are realized by a single light source positioned laterally on the object and emitting red light.
- the two images are then separated in the observation beam path by means of a filter and / or detector device.
- the device for identifying the illuminating beam can have, for example, a color filter, a polarization filter, a modulation filter or a dichroic divider. However, it is also provided that colored light sources or light sources with a monochrome or monochrome emission characteristic are used.
- the associated filter device can be, for example, with a color filter, a Polarization filter, a demodulation filter or a dichroic divider.
- the detector device can also be designed such that at least one CCD element is present, which is designed, for example, as a black / white or color camera.
- a CCD element which is designed, for example, as a black / white or color camera.
- an additional filter device can be dispensed with when separating into a brightfield and a darkfield image, since the R, G, B channels can be read out separately.
- the detector device is electrically / electronically connected to a computer device.
- the computer device has several computers working in parallel for the simultaneous acquisition and / or evaluation of the images.
- the computers working in parallel different processing stages of image acquisition, image analysis or inspection, error analysis, error classification and metrology (structure width measurement) can be carried out simultaneously.
- the parallel processing reduces the inspection time for a single object accordingly.
- the optical device can be designed as a microscope.
- a Koehler 'sche lighting assembly is provided.
- Illumination arrangement can be designed as incident light and / or transmitted light illumination device.
- a plurality of differently coded dark field beam paths can also be provided.
- the differently coded dark field beam paths can also illuminate the object with different angles.
- Fig. 4 a color filter of the filter device
- FIG. 1 shows an illuminating device of a microscope 1 in incident light, with an illuminating beam path 4 and an observation beam path 6.
- a bright field illuminating beam 2 and a dark field illuminating beam 3 are shown in the illuminating beam path 4.
- Both beams 2, 3 are guided over an illumination lens 9, an aperture diaphragm plane AP with a controllable aperture diaphragm, a light field diaphragm plane LF with a controllable field diaphragm and a condenser lens 1Q.
- the dark-field illuminating beam 3 is passed over a dark-field ring lens 47.
- This identification device 11 is designed such that the two beams 2, 3 receive a different identification.
- the identification device 11 is included a color filter or a polarization filter or a modulation filter or a dichroic divider.
- the dark field and / or bright field illumination beams can already be identified at the location of the aperture diaphragm plane AP if the aperture diaphragm is e.g. is made of colored glass and / or a thin-film color filter.
- a splitter mirror 12 is arranged in the further course of the illumination beam path 4.
- the divider mirror 12 has an outer, fully mirrored ring 20 for deflecting the dark field beam 3 and an inner, partially transparent circle 21 for deflecting the bright field beam 2 and for transmitting the observation beam 5.
- the deflected bright field illumination beam 2 is guided over an objective lens system 14 of a dark field objective 13 and illuminates the surface of an object 16.
- the central beam of the bright field beam 2 strikes the surface of the object 16 perpendicularly.
- the axis of the center beam 40 of the bright field beam 2 and the axis of the center beam 42 of the observation beam 5 have the same orientation.
- the dark field beam 3 deflected by the divider mirror 12 is guided past the objective lens system 14 of the dark field lens 13 and strikes the ring mirror 15 provided in the lens housing 15. From there, the dark field beam 3 is deflected onto the object 16.
- the center beam 41 of the dark field beam 3 strikes the surface of the object 16 obliquely. Since the cross section of the dark field beam 3 is ring-shaped, all center beams 41 from the ring strike the surface of the object 16 obliquely.
- the observation beam 5 emanating from the object 16 is guided in the observation beam path 6 via the objective lens system 14, the splitter mirror 12 and the tube lens 17 and strikes a filter 38 and / or detector device 18.
- this detector device 18 is designed as a CCD color camera 19.
- the detector device 18 is electrically connected to a computer device 25.
- the two illuminating beam bundles 2, 3 are guided in the illuminating beam path 4 via the identification device 11.
- This can be formed, for example, from a combined color filter with a blue inner circle for the bright field beam 2 and a red ring surrounding the blue circle for the dark field lighting beam 3 (cf. FIG. 4).
- the two beams are given a different identifier and, accordingly, coded and simultaneously hit the object 16.
- the two colored beams are mixed.
- the two images are electronically separated via the detector device 18 with the color camera 19 and the computer device 25.
- the filter device 38 can be omitted.
- the bright field image of the object 16 is generated by reading out the blue color component and the dark field image of the object 16 is generated by reading out the red color component. These two images are then processed in parallel with the computer device 25 for error analysis, error classification and structure measurement.
- the identification device is not limited to a combined red and blue filter. Any type of identifier can be used for the illumination beams if a corresponding decoding device in the form of a filter and / or detector device is available.
- the identification device 11 shown in FIG. 1 is not tied to a specific location within the illumination beam path 4.
- the identification device 11 can also be provided in the area of the aperture diaphragm AP, in the area of the interface S1 or as a dichroic layer on the partially transparent mirror 12 or the ring mirror 15 of the dark field objective 13.
- the invention is also not limited to a single light source 7.
- An illumination device with two or more light sources can also be arranged at the interface S1, for example.
- FIG. 2 shows such an illumination device with two light sources 26 and 27.
- the light source 26 is assigned a diaphragm 29 for generating the dark field beam 3, the illumination light being reflected into the illumination beam path 4 via an additional splitter mirror 30.
- the light source 27 is assigned a diaphragm 29 with an opaque center stop 37 for generating the bright field beam 3, the illuminating light being introduced into the illuminating beam path 4 via the central part of the additional splitter mirror 30.
- the identification device 11 can also be part of the two diaphragms 28 and 29 and can also replace one or both diaphragms. Provision can also be made to design the additional divider mirror 30 as a identification device and, for example, to use a dichroic layer on the divider mirror.
- FIG. 3 shows an exemplary embodiment of a filter device 38 and a downstream detector device 18 with two black-and-white cameras 32 and 33, with a further splitter mirror 31, which can also be designed here as a dichroic mirror. Via the common interface S2, the
- the filter device 38 is equipped in accordance with the identification device 11 with a color filter, a polarization filter, a demodulation filter or a dichroic divider.
- both illumination beam paths are coded using an identification device, for example using red and blue light.
- an identification device for example using red and blue light.
- the individual dark-field and / or the bright-field illumination beam bundle can be provided with both a color and a polarization identifier, for example.
- a chopper or the like it is also conceivable to use a chopper or the like to design the dark field and / or the bright field illumination beam with frequency modulation.
- FIG. 4 shows an exemplary embodiment of the identification device with a combined color filter 34, which is equipped with a blue inner circle 35 for the bright-field beam and with an outer red ring 36 for the dark-field beam.
- the filter 34 can also have other combinations of modulator and / or color filter and / or polarization filter.
- FIG. 5 shows an illumination device of the microscope according to FIG. 1.
- the illumination device with the light source 7 integrated in the microscope 1 is designed as a normal bright-field illumination device.
- a bright field objective 22 is also used here.
- the bright field beam runs analogously to the described bright field beam of FIG. 1.
- the dark field beam 3 is generated here by two light sources 23 and 24 arranged externally on the microscope stand (not shown).
- An identification device 11 is assigned to both light sources 23, 24.
- the observation beam path 6 is analogous to that already described
- the light source for the dark field beam does not have to be integrated in the optical device. It is also sufficient to carry out the method according to the invention if only a single, externally arranged light source 23 or 24 is provided for the dark field illumination beam 3.
- FIG. 6 shows a combined aperture diaphragm 43 with a circular passage 44 for the bright field illumination and with an annular passage 45 for the dark field illumination. Webs 46 are provided for holding the opaque part between the two passages 44, 45. Both passages 44, 45 can have a glass or plastic color filter.
- This combined aperture diaphragm can be arranged in the plane AP (FIGS. 1 and 5).
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00908950A EP1073917A2 (de) | 1999-01-29 | 2000-01-27 | Verfahren und vorrichtung zur optischen untersuchung von strukturierten oberflächen von objekten |
US09/647,497 US6633375B1 (en) | 1999-01-29 | 2000-01-27 | Method and device for optically examining structured surfaces of objects |
KR1020007010364A KR20010042027A (ko) | 1999-01-29 | 2000-01-27 | 물체의 구조화된 표면 광학검사 방법 및 장치 |
JP2000596395A JP2002535687A (ja) | 1999-01-29 | 2000-01-27 | 物体のパタン加工表面を光学的に検査する方法および装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19903486.9 | 1999-01-29 | ||
DE19903486A DE19903486C2 (de) | 1999-01-29 | 1999-01-29 | Verfahren und Vorrichtung zur optischen Untersuchung von strukturierten Oberflächen von Objekten |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2000045196A2 true WO2000045196A2 (de) | 2000-08-03 |
WO2000045196A3 WO2000045196A3 (de) | 2000-11-30 |
Family
ID=7895744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2000/000256 WO2000045196A2 (de) | 1999-01-29 | 2000-01-27 | Verfahren und vorrichtung zur optischen untersuchung von strukturierten oberflächen von objekten |
Country Status (7)
Country | Link |
---|---|
US (1) | US6633375B1 (de) |
EP (1) | EP1073917A2 (de) |
JP (1) | JP2002535687A (de) |
KR (1) | KR20010042027A (de) |
DE (1) | DE19903486C2 (de) |
TW (1) | TW440708B (de) |
WO (1) | WO2000045196A2 (de) |
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- 2000-01-27 KR KR1020007010364A patent/KR20010042027A/ko not_active Application Discontinuation
- 2000-01-27 JP JP2000596395A patent/JP2002535687A/ja not_active Withdrawn
- 2000-01-27 EP EP00908950A patent/EP1073917A2/de not_active Withdrawn
- 2000-01-27 WO PCT/DE2000/000256 patent/WO2000045196A2/de not_active Application Discontinuation
- 2000-01-27 US US09/647,497 patent/US6633375B1/en not_active Expired - Lifetime
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EP2120071A1 (de) * | 2007-02-13 | 2009-11-18 | Nikon-Trimble Co., Ltd. | Lichtteilungselement und distanzmesser |
EP2120071A4 (de) * | 2007-02-13 | 2012-10-03 | Nikon Trimble Co Ltd | Lichtteilungselement und distanzmesser |
JP2016024195A (ja) * | 2014-07-17 | 2016-02-08 | オルボテック リミテッド | テレセントリック明視野および環状暗視野のシームレス融合型照明 |
Also Published As
Publication number | Publication date |
---|---|
DE19903486C2 (de) | 2003-03-06 |
JP2002535687A (ja) | 2002-10-22 |
DE19903486A1 (de) | 2000-08-03 |
KR20010042027A (ko) | 2001-05-25 |
US6633375B1 (en) | 2003-10-14 |
WO2000045196A3 (de) | 2000-11-30 |
EP1073917A2 (de) | 2001-02-07 |
TW440708B (en) | 2001-06-16 |
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