WO2000016149A1 - Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops - Google Patents

Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops Download PDF

Info

Publication number
WO2000016149A1
WO2000016149A1 PCT/DE1999/002910 DE9902910W WO0016149A1 WO 2000016149 A1 WO2000016149 A1 WO 2000016149A1 DE 9902910 W DE9902910 W DE 9902910W WO 0016149 A1 WO0016149 A1 WO 0016149A1
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
arrangement according
beam path
light
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1999/002910
Other languages
German (de)
English (en)
French (fr)
Inventor
Johann Engelhardt
Heinrich Ulrich
William C. Hay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems Heidelberg GmbH
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7880995&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2000016149(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leica Microsystems Heidelberg GmbH, Leica Microsystems CMS GmbH filed Critical Leica Microsystems Heidelberg GmbH
Priority to US09/554,083 priority Critical patent/US6785302B1/en
Priority to EP99955690A priority patent/EP1031055B1/de
Priority to JP2000570627A priority patent/JP4197395B2/ja
Priority to DE59913082T priority patent/DE59913082D1/de
Publication of WO2000016149A1 publication Critical patent/WO2000016149A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458Fluorescence microscopy
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0076Optical details of the image generation arrangements using fluorescence or luminescence
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008Details of detection or image processing, including general computer control

Definitions

  • the invention relates to an optical arrangement in the beam path of a confocal fluorescence microscope, with at least one laser light source, a device arranged in the illumination / detection beam path for separating the excitation light reflected on the object from the fluorescent light emitted by the object, a lens arranged between the device and the object and one Detector downstream of the device in the detection beam path
  • dichroic beam splitters to separate the excitation light reflected on the object from the fluorescent light emitted by the object. In the case of simultaneous multi-color application, multiple dichroic beam splitters are used accordingly.
  • the fluorescent light freed from the reflected excitation light is used - after separation by means of a beam splitter - detected by means of a special detector
  • the beam splitters used in practice are generally expensive These beam splitters are not very suitable for quantitative comparative measurements of high precision and high measurement dynamics, especially since these beam splitters are also temperature-dependent.
  • dichroic beam splitters have transmission losses of around 10% for detection
  • the entire numerical aperture is used for illumination or for scanning. This leads to an illumination focus that is very small in the lateral direction, so that longer ones
  • the present invention is based on the object of designing and developing an optical arrangement in the beam path of a confocal fluorescence microscope in such a way that an increase in the fluorescence yield can be achieved with a simple design compared to the generic arrangement with a conventional dichroic beam splitter
  • the optical arrangement according to the invention in the beam path of a confocal fluorescence microscope achieves the above object by the features of patent claim 1.
  • the optical arrangement mentioned at the outset is characterized in that the device comprises a mirror and that the mirror in the illumination / detection beam path is arranged and dimensioned in such a way that that it does not expand the dark field illumination of the object coming from the laser light source Reflected excitation beam in the lens and the fluorescent light coming from the object with a full numerical aperture - reduced by the effective cross-section of the mirror in the detection beam path - in the direction of the detector.
  • the Device comprises a mirror and that the mirror in the illumination / detection beam path is arranged and dimensioned such that it reflects the unexpanded excitation beam coming from the laser light source into the lens for dark field illumination of the object and reduces the fluorescent light coming from the object with a full numerical aperture around the effective cross section of the mirror in the detection beam path - in the direction of the detector
  • the device for separating the excitation light reflected on the object from the fluorescent light emitted by the object - instead of a conventional dichroic beam splitter - can be a mirror which is arranged in the illumination / detection beam path.
  • This mirror is here to be dimensioned in such a way - sufficiently small - that it reflects the unexpanded excitation beam coming from the laser light source into the objective and illuminates the fluorescent light coming from the object with a full numerical aperture in the direction of the detector, with the fluorescent light around the im Detection beam path effective cross-section of the mirror is reduced.
  • the main reflection of the excitation light reflected by the object is advantageously reflected out of the detection beam path at the mirror
  • the mirror is dimensioned or made small in such a way that it causes a loss of approximately 1% for the fluorescent light to be detected in the detection beam path. This enables efficient detection with a particularly high dynamic range
  • the mirror used here could be designed as an independent component in the context of a particularly simple embodiment, the mirror in turn being carried by a holder. In the context of such a configuration, the use of a conventional beam splitter is completely eliminated, since here only the small one is in the beam path at the appropriate point Mirror is arranged
  • the mirror could be designed as a preferably integral mirrored area of an - otherwise conventional - beam splitter, the mirror or the mirrored area being at least largely arranged or formed in the center of the beam splitter. This small - integral - mirror could Its shape is approximately round or elliptical or oval.
  • this is a mirrored area in the middle of a beam splitter which, like an isolated mirror, reflects the unexpanded excitation beam into the lens
  • the lighting takes place with an extremely small numerical aperture to favor the dynamics
  • the non-reflecting area of the beam splitter could have approximately 10% reflection and 90% transmission in the direction of the detector.
  • this could be an anti-reflection (AR) coating on the side of the beam splitter facing the detector.
  • This beam splitter does not Fluorescence light in accordance with the usual - infinite - beam path with the full numerical aperture - reduced by the fluorescence light striking the mirrored area - passing in the direction of the detector of the mirror
  • losses of only 1% can be realized, which leads to the already mentioned high dynamic
  • the non-reflecting area of the beam splitter could be designed and possibly coated in such a way that the optical properties of the non-reflecting area of the beam splitter are at least largely independent of temperature. The reproducibility of the measurement is thereby favored
  • the object could be arranged at an angle. This means that the object itself is not orthogonal to the optical one Axis is arranged, so that there is a separate beam path for the back-reflected excitation light, which is at least slightly - spatially - offset from the illuminating beam path.
  • This special beam path allows conventional light traps to be arranged without any problems in order to effectively mask out the back-reflected excitation light
  • the object can be moved in its plane in such a way that the illuminated object area always has the has the same distance from the lens.
  • the light reflected and / or scattered on the object does not return to the laser light source in accordance with the above explanations, but instead into a light trap via the special beam path insulated component - have an absorbing area for absorbing the excitation light scattered and / or reflected by the object.
  • the provision of special light traps is no longer necessary, which results in a spatial reduction in the arrangement.
  • the mirror - in the context of a round or elliptical or oval configuration - Have a specular or reflective area and an absorbent area
  • the beam splitter has, in addition to the mirrored area, an absorbing area for absorbing the excitation light scattered and / or reflected by the object.
  • the provision of a special light trap can also be omitted, so that this embodiment also has the advantage involves being able to build the arrangement with the smallest space requirement
  • Laser light sources an at least approximately the same - axial - focus position is possible.This on the one hand provides the necessary lighting tolerance in the object position along the optical axis and on the other hand ensures lighting with a high intrascene dynamic range.To avoid repetition, reference is made to the previous statements to avoid repetition
  • FIG. 1 shows a schematic representation of the basic structure of an optical arrangement according to the invention in the beam path of a confocal Fluorescence microscope
  • FIG. 2 shows a schematic representation of a beam splitter with a central mirror
  • FIG. 3 shows a schematic representation of a mirror that can be used instead of the beam splitter as a separate component
  • FIG. 4 shows a schematic illustration of a mirror with an integral reflecting and absorbing area
  • FIG. 1 shows a schematic representation of an exemplary embodiment of an optical arrangement in the beam path of a confocal
  • the device 6 comprises a mirror 13, the mirror 13 being arranged and dimensioned in the illumination / detection beam path 3, 4, 5 such that it is used for dark field illumination of the object 7, the unexpanded excitation beam coming from the laser light sources 1, 2 or that Excitation light 8 is reflected into the objective 10 and the fluorescent light 9 coming from the object 7 with a full numerical aperture - reduced by the cross section of the mirror 13 effective in the detection beam path 4, 5 in the direction of the detector 11.
  • the device 6 is designed as a beam splitter, the mirror 13
  • FIG. 3 shows an alternative embodiment of the device 6 in such a way that it is simply and simply designed as a singular mirror 13, the mirror 13 being an independent component.
  • the mirror 13 could have an overall mirrored surface as shown in FIG. 3
  • the mirror 13 is likewise designed as a separate component, the surface of the mirror 13 being subdivided into a reflecting mirror surface 17 and an absorbing surface 18. This measure makes the provision of a separate light trap for reflecting back unnecessary. it suggests 19
  • the jerk reflexes or the jerk-reflected excitation peak 19 can be made "harmless" by the sample or the object 7 is skewed, that is to say is not arranged orthogonally to the optical axis 23.
  • the reflected reflection excitation light 19 is displaced slightly to the illumination beam path 20 or to the beam path of the excitation light 8, so that the reflected reflection excitation light 19 is reflected back along its own beam path 21

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
PCT/DE1999/002910 1998-09-15 1999-09-13 Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops Ceased WO2000016149A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US09/554,083 US6785302B1 (en) 1998-09-15 1999-09-13 Optical system in the ray path of a confocal fluorescence microscope
EP99955690A EP1031055B1 (de) 1998-09-15 1999-09-13 Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops
JP2000570627A JP4197395B2 (ja) 1998-09-15 1999-09-13 共焦点蛍光顕微鏡のビーム路における光学装置
DE59913082T DE59913082D1 (de) 1998-09-15 1999-09-13 Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19842153.2 1998-09-15
DE19842153A DE19842153C2 (de) 1998-09-15 1998-09-15 Fluoreszenzmikroskop

Publications (1)

Publication Number Publication Date
WO2000016149A1 true WO2000016149A1 (de) 2000-03-23

Family

ID=7880995

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1999/002910 Ceased WO2000016149A1 (de) 1998-09-15 1999-09-13 Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops

Country Status (5)

Country Link
US (1) US6785302B1 (https=)
EP (1) EP1031055B1 (https=)
JP (1) JP4197395B2 (https=)
DE (2) DE19842153C2 (https=)
WO (1) WO2000016149A1 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055283A (ja) * 2000-06-17 2002-02-20 Leica Microsystems Heidelberg Gmbh マルチバンド照明型走査顕微鏡およびその光学要素
FR2869686A1 (fr) * 2003-12-11 2005-11-04 Flowgene Sa Detecteur de lumiere a chambre elliptique
EP1299708A4 (en) * 2000-06-15 2006-03-15 Packard Instrument Co Inc UNIVERSAL MICROPLATE ANALYZER
EP1430278A4 (en) * 2001-08-29 2007-07-25 Becton Dickinson Co HIGH-SPEED ANALYSIS SYSTEM
EP1353209B2 (de) 1999-05-19 2014-11-26 Carl Zeiss Microscopy GmbH Optische Anordnung zur Unterdrückung von Falschlicht

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1157268B1 (en) * 1999-02-26 2007-11-21 Perkinelmer Life Sciences, Inc. Imaging system for an optical scanner
US6355934B1 (en) 1999-02-26 2002-03-12 Packard Biochip Technologies Imaging system for an optical scanner
FR2813121A1 (fr) * 2000-08-21 2002-02-22 Claude Weisbuch Dispositif perfectionne de support d'elements chromophores
US6826424B1 (en) * 2000-12-19 2004-11-30 Haishan Zeng Methods and apparatus for fluorescence and reflectance imaging and spectroscopy and for contemporaneous measurements of electromagnetic radiation with multiple measuring devices
DE10143481A1 (de) * 2001-09-05 2003-03-20 Europ Lab Molekularbiolog Mikroskop
DE10144062B4 (de) * 2001-09-07 2010-05-27 Leica Microsystems Ag Mikroskop mit einer Beleuchtungseinspiegelung
US6888148B2 (en) * 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
DE10327987A1 (de) * 2003-06-21 2005-01-20 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Konfokales optisches System
DE10332073A1 (de) * 2003-07-11 2005-02-10 Carl Zeiss Jena Gmbh Anordnung zur optischen Erfassung von in einer Probe angeregter und / oder rückgestreuter Lichtstrahlung mit Doppelobjektivanordnung
FR2860606B1 (fr) * 2003-10-07 2006-01-21 Thales Sa Convertisseur multimode-monomode, en particulier pour source laser a fibre amplificatrice multimode
DE102004038321B4 (de) 2003-11-21 2022-05-25 Leica Microsystems Cms Gmbh Lichtfalle
DE102006056429B3 (de) * 2006-11-28 2008-02-14 Leica Microsystems Cms Gmbh Lasermikroskop mit räumlich trennendem Strahlteiler
DE102007024074B4 (de) 2007-05-22 2022-09-15 Leica Microsystems Cms Gmbh Mikroskop
JP6058977B2 (ja) * 2012-11-15 2017-01-11 シャープ株式会社 蛍光検出装置
WO2015005073A1 (ja) * 2013-07-11 2015-01-15 株式会社島津製作所 ラマン分光分析装置
EP3542710A1 (de) * 2018-03-23 2019-09-25 JenLab GmbH Multimodales bildgebungssystem und verfahren zur nicht-invasiven untersuchung eines untersuchungsobjekts

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744663A (en) * 1984-12-14 1988-05-17 Nippon Kogaku K.K. Pattern position detection apparatus using laser beam
JPH03269405A (ja) * 1990-03-19 1991-12-02 Fujitsu Ltd 蛍光顕微鏡
US5210765A (en) * 1991-03-25 1993-05-11 Birkbeck College Laser microscopy
EP0801301A2 (en) * 1996-04-10 1997-10-15 Kyoto Dai-ichi Kagaku Co., Ltd. Optical measuring method for mevalonic acid
JPH1096862A (ja) * 1996-09-20 1998-04-14 Bunshi Bio Photonics Kenkyusho:Kk 落射蛍光顕微鏡装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3742806A1 (de) * 1987-12-17 1989-07-13 Zeiss Carl Fa Verfahren und vorrichtung zur erzeugung von fluoreszenzbildern
GB9014263D0 (en) * 1990-06-27 1990-08-15 Dixon Arthur E Apparatus and method for spatially- and spectrally- resolvedmeasurements
US5127730A (en) * 1990-08-10 1992-07-07 Regents Of The University Of Minnesota Multi-color laser scanning confocal imaging system
USH1344H (en) * 1990-10-09 1994-08-02 The United States Of America As Represented By The Secretary Of The Army Portable automatic sensor for toxic gases
CH685650A5 (de) * 1991-07-20 1995-08-31 Tencor Instruments Einrichtung für Oberflächeninspektionen.
JP3102938B2 (ja) * 1991-12-30 2000-10-23 シスメックス株式会社 粒子画像分析装置
DE4243144B4 (de) * 1992-12-19 2008-08-21 BRUKER OPTICS, Inc., Billerica Objektiv für ein FT-Raman-Mikroskop
JP3144513B2 (ja) * 1993-06-17 2001-03-12 富士写真フイルム株式会社 蛍光顕微鏡
DE4343076C2 (de) * 1993-12-16 1997-04-03 Phototherm Dr Petry Gmbh Vorrichtung zum photothermischen Prüfen einer Oberfläche eines insbesondere bewegten Gegenstandes
US5734498A (en) * 1994-05-09 1998-03-31 The Regents Of The University Of California Illuminator elements for conventional light microscopes
JP3537205B2 (ja) * 1995-02-02 2004-06-14 オリンパス株式会社 顕微鏡装置
JP3269405B2 (ja) 1996-10-08 2002-03-25 株式会社東京精密 数値制御工作機械の自動測定装置
JPH10142507A (ja) * 1996-11-11 1998-05-29 Olympus Optical Co Ltd レーザ走査顕微鏡
JPH1198372A (ja) * 1997-09-18 1999-04-09 Olympus Optical Co Ltd 色調整方法
US6445491B2 (en) * 1999-01-29 2002-09-03 Irma America, Inc. Method and apparatus for optical sectioning and imaging using time-gated parametric image amplification

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744663A (en) * 1984-12-14 1988-05-17 Nippon Kogaku K.K. Pattern position detection apparatus using laser beam
JPH03269405A (ja) * 1990-03-19 1991-12-02 Fujitsu Ltd 蛍光顕微鏡
US5210765A (en) * 1991-03-25 1993-05-11 Birkbeck College Laser microscopy
EP0801301A2 (en) * 1996-04-10 1997-10-15 Kyoto Dai-ichi Kagaku Co., Ltd. Optical measuring method for mevalonic acid
JPH1096862A (ja) * 1996-09-20 1998-04-14 Bunshi Bio Photonics Kenkyusho:Kk 落射蛍光顕微鏡装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Week 199825, Derwent World Patents Index; AN 1998-281319, XP002131265 *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 085 (P - 1319) 28 February 1992 (1992-02-28) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 09 31 July 1998 (1998-07-31) *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1353209B2 (de) 1999-05-19 2014-11-26 Carl Zeiss Microscopy GmbH Optische Anordnung zur Unterdrückung von Falschlicht
EP1299708A4 (en) * 2000-06-15 2006-03-15 Packard Instrument Co Inc UNIVERSAL MICROPLATE ANALYZER
JP2002055283A (ja) * 2000-06-17 2002-02-20 Leica Microsystems Heidelberg Gmbh マルチバンド照明型走査顕微鏡およびその光学要素
EP1430278A4 (en) * 2001-08-29 2007-07-25 Becton Dickinson Co HIGH-SPEED ANALYSIS SYSTEM
FR2869686A1 (fr) * 2003-12-11 2005-11-04 Flowgene Sa Detecteur de lumiere a chambre elliptique

Also Published As

Publication number Publication date
US6785302B1 (en) 2004-08-31
EP1031055B1 (de) 2006-01-25
JP2002525651A (ja) 2002-08-13
DE59913082D1 (de) 2006-04-13
EP1031055A1 (de) 2000-08-30
JP4197395B2 (ja) 2008-12-17
DE19842153C2 (de) 2003-07-31
DE19842153A1 (de) 2000-03-16

Similar Documents

Publication Publication Date Title
EP1031055B1 (de) Optische anordnung im strahlengang eines konfokalen fluoreszenzmikroskops
DE102012019472A1 (de) Optische Filtervorrichtung, insbesondere für Mikroskope
DE20012378U1 (de) Anordnung zur spektral empfindlichen Auf- und Durchlichtbeleuchtung
DE19942998B4 (de) Mikroskop zur Auf- und Durchlichtmikroskopie
EP2045643A1 (de) Anordnung zum Untersuchen mikroskopischer Präparate mit einem Scanmikroskop und Beleuchtungseinrichtung für ein Scanmikroskop
EP1660924A1 (de) Rastermikroskop
DE102019118600A1 (de) Phosphor-Lichtquelle für CLS oder Multipoint
DE2323593C3 (de) Laser-Doppler-Anemometer
DE19710143A1 (de) Hadamard-Spektrometer
DE10004233A1 (de) Mikroskop-Aufbau
EP3084502B1 (de) Mehrfarben-scanning-mikroskop
EP3333611B1 (de) Optisches gerät mit mindestens einem spektral selektiven bauelement
DE102004032953B4 (de) Optische Vorrichtung und Rastermikroskop mit einer fokussierenden Optik
WO2024012878A1 (de) Vorrichtung zur chromatisch konfokalen messung von abständen
DE10021379A1 (de) Optische Messanordnung insbesondere zur Schichtdickenmessung
EP1698929B1 (de) Objektiv und Mikroskop
EP2784564A1 (de) Lichtmikroskop und Verfahren zum Untersuchen einer mikroskopischen Probe
DE10045837A1 (de) Mikroskop
DE102012012981B3 (de) Optische Anordnung zur Laserbearbeitung einer Werkstückoberfläche sowie Verfahren zur Überwachung des Bearbeitungsprozesses
WO2007121864A1 (de) Laser-scanning-mikroskop mit hauptstrahlteiler zur räumlichen trennung von beleuchtungs- und detektionsstrahlung
DE102022210354A1 (de) Messverfahren der EUV-Reflektometrie und EUV-Reflektometer
DE4130698C2 (de) Beleuchtungsvorrichtung für ein Mikroskop
DE10202466B4 (de) Objektträger für die Fluoreszenzmikroskopie
EP1049952B1 (de) Anordnung zur optischen abtastung eines objekts
DE102006011277A1 (de) Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskopierverfahren

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

WWE Wipo information: entry into national phase

Ref document number: 1999955690

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 09554083

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWP Wipo information: published in national office

Ref document number: 1999955690

Country of ref document: EP

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)

Free format text: (EXCEPT AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CO, CR, CU, CZ, DE, DK, DM, DZ,EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW, AP (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW), EA (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM), OA (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG))

WWG Wipo information: grant in national office

Ref document number: 1999955690

Country of ref document: EP