WO1997028370A1 - Equipement et procede de commande de turbomachines - Google Patents

Equipement et procede de commande de turbomachines Download PDF

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Publication number
WO1997028370A1
WO1997028370A1 PCT/JP1996/000760 JP9600760W WO9728370A1 WO 1997028370 A1 WO1997028370 A1 WO 1997028370A1 JP 9600760 W JP9600760 W JP 9600760W WO 9728370 A1 WO9728370 A1 WO 9728370A1
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WO
WIPO (PCT)
Prior art keywords
inverter
parallel
inverters
turbomachine
speed
Prior art date
Application number
PCT/JP1996/000760
Other languages
English (en)
Japanese (ja)
Inventor
Kouiti Satou
Takayuki Oshiga
Hiroshi Fujii
Jun Ohta
Hiroshi Onoh
Original Assignee
Hitachi, Ltd.
Hitachi Techno Engineering Co., Ltd.
Hitachi Keiyo Engineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd., Hitachi Techno Engineering Co., Ltd., Hitachi Keiyo Engineering Co., Ltd. filed Critical Hitachi, Ltd.
Priority to KR1019980705923A priority Critical patent/KR100290496B1/ko
Priority to JP52747697A priority patent/JP3758191B2/ja
Publication of WO1997028370A1 publication Critical patent/WO1997028370A1/fr

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0066Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/02Stopping of pumps, or operating valves, on occurrence of unwanted conditions
    • F04D15/029Stopping of pumps, or operating valves, on occurrence of unwanted conditions for pumps operating in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00Function
    • F05D2260/84Redundancy

Definitions

  • the present invention relates to a plurality of inverters for driving a plurality of turbomachines and an application device thereof.
  • the water supply and air flow are proportional to the operating speed
  • the water supply pressure and wind pressure are proportional to the square of the operating speed
  • their outputs are proportional to the cube of the operating speed.
  • turbo machines are driven by a plurality of inverters to control the speed and the number of operating units, the water supply, air flow, water supply pressure and wind pressure can be controlled relatively easily and efficiently according to the load fluctuation. . For this reason, speed control using inverters is expected to become more and more popular in the future.
  • Fig. 1 is a block diagram of the water supply system, where 1 is a water distribution pipe, 2-1, 2 and 2 are distribution pipe branches, 3-1, 3-2, 3-3 and 3-4 are gate valves, 4-1, 4-1 is a pump, 5-1, 5-2 is a motor, 6-1, 6-2 is a check valve, 7 is a water supply pipe, 8 is a pressure tank with an air reservoir inside, Reference numerals 9 and 10 denote pressure sensors for detecting the pressures on the pump suction side and the pump discharge side, respectively, and emit electric signals corresponding to the pressures of the detecting portions.
  • the FS 1 and FS 2 are flow switches, which are turned on when the amount of water is less than QS shown in FIGS. 2 and 3 described later.
  • the CNU is a control device.
  • the power circuits and relay circuits R and RV consist of inverters INV 1 and INV 2 that drive the motors 5-1 and 5-2 at variable speeds, and earth leakage breakers ELB 1 and ELB 2 that protect against electric leakage. It consists of a controller CU.
  • the relay circuit R includes a transformer TR, a stabilized power supply Z, relays 52 X 1 and 52 X 2, and an interface I ZO between the relay TR and the controller CU.
  • the controller CU is an arithmetic processing unit CPU (hereinafter abbreviated as CPU), an AZD converter for converting signals (analog amount) from the pressure sensors 9 and 10 into digital signals, and an inverter INV. 1, a DZA converter for commanding the speed command signals Nl, N2 desired by the water supply system to INV2, a power supply terminal E for supplying power to the controller CU, and a relay 52x1, described above. Equipped with an output port PIO-1 to transmit signal S4 to interface IZ ⁇ for driving 5 2 X2. Similarly, the input port PI ⁇ -2 for reading the set value set by the setting means C to operate according to the operating characteristics of the pump shown in Figs.
  • FIG. 2 is an operation characteristic diagram when one pump is operated alone or two pumps are alternately operated by the above-described water supply device.
  • Figure 2 shows the water volume Q.
  • Curve A shows the curves B, C, and D as well as the Q-.H performance curve c when the pump is driven by the inverter at the operating speed N3, that is, 100% operating speed.
  • Curve F is a pipeline resistance curve.For example, when the amount of water used changes from the amount of water Q 1 to the amount of water Q 0, if water is supplied at a pressure along the curve F on the discharge side of the pump, the end faucet is The water supply system shows that the desired pressure is obtained.
  • the above-mentioned inverters I NV 1 and INV 2 determine the conditions under which the motor rotates under acceleration / deceleration time, V / F (output voltage and output frequency characteristics, etc.). Set externally by 2. That is, the water supply device operates the pump on the curve F along O 3 ⁇ ⁇ O 2 ⁇ O 1 —O 0.
  • Fig. 1 when the earth leakage and the breakers ELB1 and ELB2 are turned on and the control power circuit breaker CB is turned on, the power supply of the control unit CU is established, and the CPU is stored in the memory M in advance.
  • Initial setting is performed based on the program, setting information is read from setting means C, and the inverter, earth leakage, and breaker status (no failure) are read from input port PIO-3, and furthermore. Read the signals of the pressure sensors 9 and 10 via the AZD converter.
  • a pipeline resistance curve F is stored in advance, and the feedwater pressure is changed along the resistance curve F in response to a change in the operating speed when the load condition changes. .
  • the operation preparation is completed.
  • the CPU cancels the currently output energizing signal of the relay 52 x 1 and the speed command signal N 1 to the inverter INV.1. This stops pump 4-1.
  • a signal of relay 52 2 ⁇ 2 and operation speed ⁇ 2 is issued, and the other inverter INV 2 and motor 5 — 2, is driven, and pumps 4-2 are operated. Thereafter, similarly, the switching control is performed and the alternate operation is performed.
  • FIG. 3 is a characteristic diagram when two pumps are operated in parallel, and those indicated by the same reference numerals as those in FIG. 2 have the same meaning. That is, as shown in FIG. 2, two pumps are operated alternately, and when the amount of water used further increases, the pumps 411 and 412 are simultaneously operated. When the amount of water used exceeds Q3, the operation speed ⁇ 3 is the maximum speed, so the water supply capacity is insufficient, and the water supply pressure drops to HL. This causes the CPU to emit both the relay 52 x 1 and 52 x 2 signals and the speeds N 1 and N 2. In this way, the inverters INV 1 and INV 2 and the motors 5-1 and 5-2 operate simultaneously, and the pumps 41 and 4-2 operate in parallel. After operation, control based on the signal of the pressure sensor 10 is performed so that the feedwater pressure is on the curve F.
  • Japanese Patent Publication No. Hei 5—2 3 1 3 3 2 can be referred to as a well-known example.
  • the conventional main control for controlling two inverters by controlling the inverters on the upper ranks Equipment needed.
  • the above-described conventional technology has the following problems. That is, (1) In the conventional system, there is a problem that even if the two inverters are normal, if the main control device stops operating due to an abnormality, the system goes down and water is cut off. (2) When the system is configured with dual inverters, each has its own control function, so even if one unit goes down due to a failure, the other unit can perform the backup operation. However, it is difficult to convey each other's control status because they have individual control functions. For alternate and parallel operation of inverters. It is necessary to detect and to issue an operation command. In addition, there are many interlock signals, and the control port has a complicated system. Disclosure of the invention
  • the present invention has been made in view of the above points, and has as its object the purpose of eliminating the need for external peripheral devices, facilitating signal exchange, realizing small size, light weight, and low cost.
  • the goal is to obtain a dual inverter and its application equipment.
  • the present invention provides two turbo machines, two inverters each for driving the turbo machine, and a plurality of sensors for detecting a load state of the turbo machine.
  • the turbomachine driving device for controlling the speed of the turbomachine the inverters are connected to each other by four kinds of connection signals indicating an operation state, and the signals of the plurality of sensors are connected to the two inverters.
  • an inverter set in advance as a priority machine is started, and the priority machine is started. Is the parallel operation start condition
  • the inverter driving the priority unit issues a start request to the inactive inverter to start the inactive inverter.
  • the gearbox was operated with the inverter so that the discharge pressure was controlled at the discharge-side maximum target pressure during single-unit operation, and the priority units were started in parallel.
  • FIG. 1 is a configuration diagram of a conventional turbomachine driving device.
  • FIG. 2 is an operation characteristic diagram when the pump is operated independently or alternately.
  • FIG. 3 is an operation characteristic diagram when two pumps are operated in parallel.
  • FIG. 4 is an overall configuration diagram of a system illustrating a water supply device as a turbomachine according to the present invention.
  • FIG. 5 shows the details of the terminals of the dual inverter according to the present invention and the explanation of the connection signals.
  • FIG. 6 is a time chart showing the procedure of power-on processing of the apparatus shown in FIG. 4 according to the present invention.
  • FIG. 7 is a time chart showing a method of controlling the parallel operation of the apparatus shown in FIG. 4 according to the present invention.
  • FIG. 8 is a flowchart for realizing the processing of FIGS. 6 and 7 according to the present invention.
  • BEST MODE FOR CARRYING OUT THE INVENTION The outline of the embodiment of the present invention is as follows.
  • the ZO port as it is.
  • the complicated interaction signals between the inverters are simplified, and the mutual Are connected by the smallest signal, preferably two outputs and two input signals, to send and receive signals to and from each other.
  • these inverters are set in advance by the setting unit to set the driving force of the inverter or the operation pattern of the load, and to set the priority machine to which of the inverters is operated first. . In this way, alternate and parallel operation, retry in case of abnormality, and backup operation are performed.
  • the earth leakage breaker protects the short circuit of the main circuit and the earth leakage of the secondary side, and cuts off the main circuit.
  • the inverter drives the turbomachine and is composed of a double system.
  • the signals from the pressure sensor for detecting the load condition, the means for detecting the underload condition, and the pressure sensor on the suction side are taken in parallel and directly at the same level.
  • Each inverter incorporates a software program for operating the microcomputer, describing the control method and procedure in advance, and operates according to input signals from sensors and the like. At the beginning of use, when a short circuit or a breaker is turned on, the power for both inverters is established, and the one that is externally set as the priority unit in advance waits for operation. If the pressure sensor that detects the load condition detects the preset starting pressure, the inverter that is on standby will start.
  • the sensor that detects the underload condition detects this, and when the preset stop condition is established, the inverter stops, and the inactive inverter can be operated by the stop signal of the preceding machine. Start and stop as described above. Further, if the pressure sensor for detecting the load state detects a preset parallel operation pressure state, the operating inverter is in contact with the inactive inverter. And outputs a parallel operation request signal, and the inverter that is at rest operates in parallel from the operable state. In addition, in the event of a short circuit, trip of the breaker, or trip of the inverter, this condition is transmitted to each other by the signal line connecting the two inverters. Operation, and the abnormal side generates an internal signal and retries.
  • this condition is indicated by an error code on the panel display of the inverter, and a signal is issued externally.
  • the display unit displays pressure, current, voltage, and frequency values.
  • FIG. 4 is an overall configuration diagram showing an embodiment in which the present invention is applied to a water supply device.
  • the components denoted by the same reference numerals as those in FIG. 1 cited in the description of the prior art are the same as those in FIG. .
  • control device CNU is provided with a ground fault and a breaker ELB1, ELB2, inverters NV1, NV2, and noise filters ZCL0, ZCL1, ZCL2.
  • the relay circuit R and the control unit (both hardware and software) CU shown in Fig. 1 are incorporated in the inverters INV1 and INV2 described above.
  • the inverters INV 1 and INV 2 output the electric leakage and the trip signal AL of the breakers ELB 1 and ELB 2 to the external terminal of the control panel via the signal lines S 1 and S 2. Output as a signal.
  • the signal lines S9 and S10 are signals for outputting a fault of the inverters I NV1 and I NV2 to a central monitoring panel or the like.
  • Figure 5 and Table 1 show the details of the interlocking signal S3 for the inverters INV1 and INV2.
  • Table 1 is a symbol table showing the output state and the control state of the interlocking signal of the dual inverter according to the present invention.
  • the interface signals of inverter 1 and inverter 2 each have two outputs and two inputs. By turning on and off these 2-bit signals, four types of states can be set. You can let the other person know.
  • state A is a state in which D 01 and DO 2 are both ON and oneself. If the pump is running ahead, the "parallel start request" signal is shown.
  • a pump stop condition is detected, and inverter 1 stops and outputs B state to C state.
  • the inverter 2 outputs the C state from the D state.
  • Inverter 1 shifts from independent operation to alternate and parallel operation because inverter 2 is in the C-down state and alternate or parallel operation is possible.
  • the pump start condition is detected. At this time, the start condition is satisfied at the same time because both Invert 1 and Inverter 2 are receiving the same sensor signal, but since Inverter 1 is set as the priority device, Inverter 1 starts first and state C Outputs B from Inverter 2 is already connected to C when power is turned on.
  • inverter 2 stops running because inverter 1 operates first and outputs state B. By delaying the timing in this way, simultaneous activation is prevented. After time 5, the preceding aircraft and the next engine arrived, so stop at time 6, start condition is satisfied at time 7, and inverter 2 operates. Thereafter, the alternate operation is performed in the same manner. If a fault occurs in inverter 1 at time 10, the state of inverter 1 changes from B to D.
  • the stopped inverter 2 judges that the inverter 1 has failed because the state of the inverter 1 has changed from B to D, and starts the operation because the start condition has been detected, and changes the state from C to B.
  • the parallel operation will be described using the time chart in FIG. At time 1 in the same figure, in the same state as time 4 in FIG. 6, if a start condition is detected at time 2 in the same figure, as in time 5 in FIG.
  • Inverter 1 which is set to starts operation first. If the parallel start condition is satisfied in Hidaka 3, the inverter 1 outputs a “parallel start request” A to the inverter 2 if the inverter 2 is in the state C in which the inverter 2 can automatically operate. Inverter 2 starts operation after confirming that inverter 1 has output status A. At this time, the inverter 2 outputs B from the state C and gradually increases the speed to the set speed (preferably the MAX speed). Inverter 1 keeps the discharge pressure constant by setting O 3 (point of the maximum target pressure on the first discharge side) of the F curve in FIG. Perform gear shifting operation as required. At time 4, inverter 2 reaches the set speed. Outputs "Parallel constant speed state" from B to A.
  • the speed change operation based on the constant control of the estimated end pressure according to the change of the water amount at the target value on the O3 to O5 of the F curve in FIG. I do.
  • inverter 1 detects the parallel release condition at time 5
  • pump 4-1 is stopped and the status is output from A to C.
  • Inverter 2 confirms that inverter 1 is in the C state, and changes the estimated end pressure from the constant speed operation to the target value on the 0 to 03 of the F curve in Fig. 3 according to the change in water flow.
  • the shift operation is performed based on the constant control.
  • the priority device is determined in advance by the external terminal of the inverter.
  • the priority unit is forcibly set as the preceding unit and the non-priority unit is set as the next unit.
  • the state becomes a standby state until the start condition is satisfied, and when the start condition is satisfied, the processing shifts to 804, where the processing is performed by setting the preceding or next engine.
  • the turbomachine is constituted by two turbomachines and two inverters for driving the turbomachines one by one.
  • These inverters are provided with a microcomputer, a status display unit and a control constant setting unit.
  • the control constant setting unit is set in advance so as to operate based on the load state by receiving a signal of a sensor group for detecting a load state of the turbo machine, and the operation state and the failure state are mutually performed.
  • the two inverters take control of each other while performing constant control of the estimated terminal pressure.
  • a "parallel start request” signal is provided in the system, and when the preceding machine detects a parallel operation start condition, the parallel start request signal is output to the inactive inverter to start the inactive inverter and the inactive inverter Starts up Output the "autonomous driving” signal, gradually increase the speed with the preset acceleration, and reach the predetermined constant speed (preferably the maximum speed), and send the "parallel constant speed status" signal to the preceding machine.
  • the preceding machine controls the speed change operation so that the target pressure on the first discharge side becomes constant until the inverters started in parallel change from “automatic operation” to "parallel constant speed state".
  • the preceding unit performs speed change operation so that the estimated terminal pressure is controlled constant along the target pressure on the discharge side of the second unit.
  • the parallel release control during the parallel operation, the next engine is operating at a constant speed, so the preceding engine, which is shifting at a constant estimated terminal pressure, has its own rotation speed and load side pressure.
  • a preset parallel release condition can be detected, and the parallel release condition Monitors the pressure when the machine reaches the minimum speed, stops the preceding machine when it reaches the stop pressure, outputs it to the next engine, and receives the "automatic standby" signal for the next engine operating at constant speed Is set in advance from constant speed operation. Since the variable speed operation is performed so that the estimated terminal pressure is kept constant along the target discharge pressure of the first unit, even if it is a dual inverter, the parallel operation can be started with only the preceding inverter. Stop conditions can now be detected.
  • the preceding machine In the control of the transient state during parallel start, when the preceding machine detects the parallel operation start condition, it issues a start request to the inactive inverter and starts the inactive inverter, and the preceding machine starts parallel operation.
  • the inverter that has started the parallel operation at the maximum target pressure on the discharge side of the first unit performs constant-speed control until the inverter reaches the parallel constant-speed state.
  • the gearshift operation is performed so that the estimated terminal pressure is kept constant.
  • the signal that connects the two inverters includes the one that is stopped due to a failure, and this signal is represented by the same state as the state that is output when the inverter is turned off. It is now possible to jump over a fault without separately taking in the trip signal of the earth leakage breaker.
  • a mode switch is provided to connect the manual and automatic signals to the external input terminals of the two inverters.
  • DI 5 is turned on and DI 6 is turned off, and the "automatic” By turning DI5 OFF and DI6 ON, “manual” and by turning both DI5 and DI6 OFF or ON, “OFF” It is now possible to make the control state of Invark the same.
  • a program for operating the inverter according to the load operation pattern is installed in the inverter in advance, and based on the program, the inverter is set to operate by the setting unit of the inverter.
  • the load state detection means detects the starting pressure
  • the inverter set as the priority machine starts
  • the underload detection means detects the underload state of underload and stops when the stop condition is established. Therefore, it is possible to perform alternate operation or alternate / parallel operation without the need for an external communication circuit and complicated arrangement logic when connecting two inverters. It is compact, lightweight and low cost. In addition, reliability is improved because the number of parts is reduced.
  • short-circuits and short-circuits in the main circuit are monitored by the ground fault circuit breaker, and other fault conditions on the load side are monitored by the inverter itself due to changes in the partial state of the inverter. Switching operation at the time of abnormality can be reliably performed. Furthermore, since the priority timing unit can be set externally by an inverter and the start timing is shifted, the operation order is not disturbed (for example, when power is restored).
  • the failure state can be detected reliably.
  • the pressure sensor for detecting the load condition and the pressure sensor for detecting the suction side pressure can be shared by two inverters, it is simple and inexpensive. Industrial applicability
  • two inverters can be used with minimum signal integration.
  • Turbo machine drive unit and its application equipment that can be operated in a coordinated manner by exchanging signals between them, so that external control devices are not required, and simple, compact, lightweight and low cost can be achieved. Can be obtained.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Non-Positive-Displacement Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)

Abstract

La présente invention concerne un équipement de commande de turbomachines, qui utilise un double système inverseur, et un procédé de commande correspondant, sans unité de commande principale servant à commander les deux inverseurs, et avec lequel il n'est pas nécessaire d'avoir une unité de communication extérieure pour émettre des signaux représentatifs des conditions de fonctionnement respectives des inverseurs, l'échange de ces signaux étant fait simplement. Les dimensions, le poids, le coût de fabrication et le nombre de pièces de l'équipement sont réduits. Un premier et un deuxième disjoncteur différentiel (ELB1 et ELB2), des inverseurs (INV1 et INV2), des pompes (4-1 et 4-2) et des moteurs (5-1 et 5-2) constituent un système complet double d'eau alimentaire. Les inverseurs (INV1 et INV2) sont reliés par des lignes de signaux (S3) et conçus pour échanger des signaux représentatifs de leurs conditions de fonctionnement et de panne respectives, et des demandes concernant le fonctionnement des systèmes associés. A partir de capteurs détectant les conditions de charge, des lignes de signaux (S4 et S5) transmettant les signaux respectifs de débits sont reliées directement aux inverseurs, et les lignes (S6 et S7) de transmission des signaux de pression sont reliées en commun.
PCT/JP1996/000760 1996-01-31 1996-03-22 Equipement et procede de commande de turbomachines WO1997028370A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019980705923A KR100290496B1 (ko) 1996-01-31 1996-03-22 터보기계구동장치및그제어방법
JP52747697A JP3758191B2 (ja) 1996-01-31 1996-03-22 ターボ機械駆動装置及びその制御方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8/15013 1996-01-31
JP1501396 1996-01-31

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WO1997028370A1 true WO1997028370A1 (fr) 1997-08-07

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JP (2) JP3758191B2 (fr)
KR (1) KR100290496B1 (fr)
CN (1) CN1168899C (fr)
WO (1) WO1997028370A1 (fr)

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CN103075319A (zh) * 2011-10-25 2013-05-01 株式会社日立产机系统 供水装置和供水装置的运转方法
TWI727729B (zh) * 2020-03-30 2021-05-11 普新氣體股份有限公司 壓力控制設備

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JP5210147B2 (ja) 2008-01-24 2013-06-12 株式会社荏原製作所 給水装置
KR100900409B1 (ko) 2009-01-30 2009-06-02 주식회사 두크 손실량 추정을 이용한 교대운전 기능을 가지는 멀티 인버터를 구비한 부스터 펌프 시스템
CN103899559B (zh) * 2012-12-27 2016-04-20 北京谊安医疗系统股份有限公司 一种高性能呼吸机涡轮控制器
KR101408675B1 (ko) 2014-03-20 2014-06-18 주식회사 두크 개별인버터 부스터 펌프 시스템 및 이의 유량 추정을 이용한 최적효율운전제어방법
CN104373158B (zh) * 2014-05-30 2017-01-04 门冉 一种锅炉驱动的汽轮机组的控制方法
US9937990B2 (en) 2014-08-01 2018-04-10 Circor Pumps North America, Llc Intelligent sea water cooling system

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Cited By (5)

* Cited by examiner, † Cited by third party
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JP2005351267A (ja) * 2004-05-10 2005-12-22 Ebara Corp 給水装置
JP2011017348A (ja) * 2004-09-22 2011-01-27 Ebara Corp 給水装置
CN103075319A (zh) * 2011-10-25 2013-05-01 株式会社日立产机系统 供水装置和供水装置的运转方法
CN103075319B (zh) * 2011-10-25 2016-11-09 株式会社日立产机系统 供水装置和供水装置的运转方法
TWI727729B (zh) * 2020-03-30 2021-05-11 普新氣體股份有限公司 壓力控制設備

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JP3758191B2 (ja) 2006-03-22
JP2010065703A (ja) 2010-03-25
CN1168899C (zh) 2004-09-29
JP5286238B2 (ja) 2013-09-11
KR100290496B1 (ko) 2001-11-15
CN1215452A (zh) 1999-04-28

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