WO1994029400A1 - Method of producing microchannel/microcavity structures - Google Patents

Method of producing microchannel/microcavity structures Download PDF

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Publication number
WO1994029400A1
WO1994029400A1 PCT/SE1994/000584 SE9400584W WO9429400A1 WO 1994029400 A1 WO1994029400 A1 WO 1994029400A1 SE 9400584 W SE9400584 W SE 9400584W WO 9429400 A1 WO9429400 A1 WO 9429400A1
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WO
WIPO (PCT)
Prior art keywords
materials
elements
bonding
solvent
microchannel
Prior art date
Application number
PCT/SE1994/000584
Other languages
English (en)
French (fr)
Inventor
Ove ÖHMAN
Original Assignee
Pharmacia Biotech Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pharmacia Biotech Ab filed Critical Pharmacia Biotech Ab
Priority to JP50168695A priority Critical patent/JP3515784B2/ja
Priority to DE69406020T priority patent/DE69406020T2/de
Priority to US08/564,217 priority patent/US6126765A/en
Priority to EP94919060A priority patent/EP0738306B1/en
Publication of WO1994029400A1 publication Critical patent/WO1994029400A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/48—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
    • B29C65/4895—Solvent bonding, i.e. the surfaces of the parts to be joined being treated with solvents, swelling or softening agents, without adhesives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112—Single lapped joints
    • B29C66/1122—Single lap to lap joints, i.e. overlap joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/50—General aspects of joining tubular articles; General aspects of joining long products, i.e. bars or profiled elements; General aspects of joining single elements to tubular articles, hollow articles or bars; General aspects of joining several hollow-preforms to form hollow or tubular articles
    • B29C66/51—Joining tubular articles, profiled elements or bars; Joining single elements to tubular articles, hollow articles or bars; Joining several hollow-preforms to form hollow or tubular articles
    • B29C66/53—Joining single elements to tubular articles, hollow articles or bars
    • B29C66/534—Joining single elements to open ends of tubular or hollow articles or to the ends of bars
    • B29C66/5346—Joining single elements to open ends of tubular or hollow articles or to the ends of bars said single elements being substantially flat
    • B29C66/53461—Joining single elements to open ends of tubular or hollow articles or to the ends of bars said single elements being substantially flat joining substantially flat covers and/or substantially flat bottoms to open ends of container bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/919—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges
    • B29C66/9192—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams
    • B29C66/91921—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature
    • B29C66/91931—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature in explicit relation to the fusion temperature or melting point of the material of one of the parts to be joined
    • B29C66/91935—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature in explicit relation to the fusion temperature or melting point of the material of one of the parts to be joined lower than said fusion temperature
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/12—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives
    • C08J5/124—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives using adhesives based on a macromolecular component
    • C08J5/125—Adhesives in organic diluents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/06—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving heating of the applied adhesive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/756—Microarticles, nanoarticles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/0338—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/033—Thermal bonding
    • B81C2203/036—Fusion bonding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6052—Construction of the column body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
    • Y10T156/1039—Surface deformation only of sandwich or lamina [e.g., embossed panels]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24562—Interlaminar spaces

Definitions

  • the present invention relates to the production of microchannel and microcavity systems, and more particularly to an improved method of bonding plane layers together in such production.
  • Microchannel or microcavity structures are used in inter alia chemical analytical techniques, such as electrophoresis and chromatography.
  • a channel and/or cavity system is defined between two plane material layers, the recesses which correspond to the channels and cavities, respectively, being formed in one or both of the opposed layer surfaces.
  • the layers are usually bonded together by gluing.
  • the two layers consist of thermoplastic material, they may be fused together by the application of heat.
  • the object of the present invention is to overcome this problem by providing a method which permits convenient bonding together of the material layers substantially without affecting the channel or cavity system.
  • thermoplastic which surfaces when brought together define a channel and/or cavity system between them, there is applied to one or, preferably, both element surfaces a thin layer of another, preferably also thermoplastic, material dissolved in a solvent which does not dissolve the material of the two element surfaces.
  • This dissolved material should, on one hand, be capable of being fused with the material(s) of the two surfaces on which it has been coated, and, on the other hand, melt at a lower temperature than the melting temperature of the element surface material or materials.
  • the two surfaces are brought together, e.g. by rolling, whereupon the assembly is heated to a temperature that melts the intermediate (preferably thermoplastic) material but not the material of the element surfaces for effecting joining of the two element surfaces.
  • the applied solution layer should, of course, have a very small thickness in relation to the width and depth of the channels and icrocavities, respectively, which width and depth may be of the order of magnitude of 50 to 100 ⁇ , for example.
  • thermoplastic material When a thermoplastic material is used for the two material surfaces, this thermoplastic material is suitably closely related to the thermoplastic material responsible for the bonding of the channel/cavity structure.
  • thermoplastic material for the present purpose may be mentioned fluoroelastomers.
  • Figs. 1A to 1C show different substeps in the manufacture of a microfluidic structure
  • Fig. 2 is a cross-section of the final product.
  • Fig. 1A shows a plate 1 provided with an open channel system (not shown) , which plate together with an identical plate 2 without the channel system is intended to define a microchannel system between the two plates.
  • a thin layer 3 of a, preferably closely related, thermoplastic material e.g. a modified fluoroelastomer with a lower melting point, is first spun onto both plate surfaces. Then the solvent is baked off at an increased temperature (e.g. 135 °C) , as is illustrated in Fig. IB. The two plates treated in this way are then rolled together, as indicated in Fig.
  • microchannel structure is shown in Fig. 2.
  • the two plates 1, 2, which are held together by the material layer 3, define a channel system 4 between them.
  • the following specific Example, which describes the production of a microchannel structure, illustrates the method of the invention further.
  • EXAMPLE A polymer structure with closed straight channels having a height of 50 ⁇ m, a width of 250 ⁇ m and a length of about 80 mm was produced in the following manner.
  • a silicon mould having a surface relief structure corresponding to the desired channel geometry was manufactured in per se known manner.
  • the surface of a silicon plate was first oxidized at about 1100 °C to form an oxide layer of 8000 A thickness.
  • a photoresist layer was spun onto the oxide layer and was stabilized by baking in an oven.
  • a mask corresponding to the desired channel pattern was then placed on the plate surface, and the surface parts not covered by the mask were exposed to light. The exposed photoresist parts were then removed by developing solution to bare the oxide layer, and the remaining photoresist was hard-baked.
  • the bared oxide was then etched with hydrofluoric acid/ammonium fluoride to expose the silicon (the backside of the plate being protected by resistant tape) , whereupon the photoresist mask was removed by acetone.
  • the oxide-free silicon surfaces were then etched with potassium hydroxide solution for a sufficient time to produce the desired etch depth.
  • the resulting surface exhibited the desired channel pattern.
  • the silicon mould obtained was then pressed against a 2 mm thick film of Hostaflon TFB 7100 (refractive index about 1.36) at about 160 °C and 20 kp/cm 2 . (Hostaflon is a thermoplastic fluoroelastomer sold by Hoechst AG, Germany) .
  • the resulting channel structure was bonded to a base layer in the form of a plane plate of the same material by spinning a thin layer of Hostaflon TFB X-7200 (having a lower melting point than that of Hostaflon TFB 7100) dissolved in propylmethylketone onto the base layer and the channel structure, which were then allowed to dry at 130 °C for 10 minutes.
  • the channel structure and the base layer were then immediately rolled together, and the obtained sandwich was baked at about 140 °C for 10 minutes.
  • the polymer structure produced in this way exhibited intact closed channels.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
PCT/SE1994/000584 1993-06-15 1994-06-14 Method of producing microchannel/microcavity structures WO1994029400A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP50168695A JP3515784B2 (ja) 1993-06-15 1994-06-14 マイクロチャンネル／マイクロキャビティ構造体を製造する方法
DE69406020T DE69406020T2 (de) 1993-06-15 1994-06-14 Verfahren zur herstellung von strukturen mit mikrokanälen/mikrohohlräumen
US08/564,217 US6126765A (en) 1993-06-15 1994-06-14 Method of producing microchannel/microcavity structures
EP94919060A EP0738306B1 (en) 1993-06-15 1994-06-14 Method of producing microchannel/microcavity structures

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9302051A SE501380C2 (sv) 1993-06-15 1993-06-15 Sätt att tillverka mikrokanal/mikrokavitetsstrukturer
SE9302051-9 1993-06-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/625,022 Division US6620478B1 (en) 1993-06-15 2000-07-25 Circular disk containing microchannel/microcavity structures

Publications (1)

Publication Number Publication Date
WO1994029400A1 true WO1994029400A1 (en) 1994-12-22

Family

ID=20390280

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE1994/000584 WO1994029400A1 (en) 1993-06-15 1994-06-14 Method of producing microchannel/microcavity structures

Country Status (7)

Country Link
US (2) US6126765A (ja)
EP (1) EP0738306B1 (ja)
JP (2) JP3515784B2 (ja)
DE (1) DE69406020T2 (ja)
ES (1) ES2109706T3 (ja)
SE (1) SE501380C2 (ja)
WO (1) WO1994029400A1 (ja)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2734663A1 (fr) * 1995-04-20 1996-11-29 Daimler Benz Ag Structure composite pour composants electroniques et son procede de fabrication
WO1999025783A1 (de) * 1997-11-14 1999-05-27 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Verfahren zum verbinden von mikrostrukturierten werkstücken aus kunststoff sowie nach diesem verfahren erhaltenes bauteil
WO1999051422A1 (de) * 1998-04-07 1999-10-14 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Klebstoff-freie verbindungen von polymerbauteilen zur erzeugung von geschlossenen mikro- und nanokanalstrukturen
US6033628A (en) * 1994-10-19 2000-03-07 Agilent Technologies, Inc. Miniaturized planar columns for use in a liquid phase separation apparatus
US6054034A (en) * 1990-02-28 2000-04-25 Aclara Biosciences, Inc. Acrylic microchannels and their use in electrophoretic applications
EP1015878A1 (en) * 1997-04-04 2000-07-05 Aclara BioSciences, Inc. Methods for fabricating enclosed microchannel structures
WO2000077509A1 (de) * 1999-06-16 2000-12-21 Merck Patent Gmbh Miniaturisiertes analysensystem
WO2001021384A1 (de) * 1999-09-23 2001-03-29 Aclara Biosciences, Inc. Verfahren zum fremdstofffreien verbinden von zwei werkstücken aus kunststoff
US6485625B1 (en) * 1995-05-09 2002-11-26 Curagen Corporation Apparatus and method for the generation, separation, detection, and recognition of biopolymer fragments
US6555067B1 (en) * 1998-05-06 2003-04-29 Caliper Technologies Corp. Polymeric structures incorporating microscale fluidic elements
US6627159B1 (en) 2000-06-28 2003-09-30 3M Innovative Properties Company Centrifugal filling of sample processing devices
WO2004022314A1 (de) * 2002-08-16 2004-03-18 Forschungszentrum Karlsruhe Gmbh Verfahren zum verbinden von fügepartnern
US6734401B2 (en) 2000-06-28 2004-05-11 3M Innovative Properties Company Enhanced sample processing devices, systems and methods
FR2846906A1 (fr) * 2002-11-08 2004-05-14 Commissariat Energie Atomique Procede de realisation d'un composant comportant un micro-joint et composant realise par ce procede
US6827906B1 (en) 1997-10-15 2004-12-07 Aclara Biosciences, Inc. Continuous form microstructure assay array
US7238255B2 (en) 2001-12-31 2007-07-03 Gyros Patent Ab Microfluidic device and its manufacture
US7431889B2 (en) 2003-01-30 2008-10-07 Gyros Patent Ab Inner walls of microfluidic devices
US7553393B2 (en) 2000-01-30 2009-06-30 Gyros Ab Method for covering a microfluidic assembly
US7566503B2 (en) 2005-06-17 2009-07-28 Richell Corporation Bonded structure
US7604706B2 (en) * 2001-03-30 2009-10-20 Minolta Co., Ltd. Method for producing resin-molded substrate and method for producing reversible image display medium
US7754474B2 (en) 2005-07-05 2010-07-13 3M Innovative Properties Company Sample processing device compression systems and methods
US7763210B2 (en) 2005-07-05 2010-07-27 3M Innovative Properties Company Compliant microfluidic sample processing disks
US7767937B2 (en) 2005-07-05 2010-08-03 3M Innovative Properties Company Modular sample processing kits and modules
US7939018B2 (en) 2000-06-28 2011-05-10 3M Innovative Properties Company Multi-format sample processing devices and systems
US8834792B2 (en) 2009-11-13 2014-09-16 3M Innovative Properties Company Systems for processing sample processing devices
US8931331B2 (en) 2011-05-18 2015-01-13 3M Innovative Properties Company Systems and methods for volumetric metering on a sample processing device
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Families Citing this family (77)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9808836D0 (en) * 1998-04-27 1998-06-24 Amersham Pharm Biotech Uk Ltd Microfabricated apparatus for cell based assays
GB9809943D0 (en) * 1998-05-08 1998-07-08 Amersham Pharm Biotech Ab Microfluidic device
US7261859B2 (en) * 1998-12-30 2007-08-28 Gyros Ab Microanalysis device
US6503359B2 (en) * 1999-03-05 2003-01-07 Burstein Technologies, Inc. Monomolecular adhesion methods for manufacturing microfabricated multilaminate devices
SE9901100D0 (sv) 1999-03-24 1999-03-24 Amersham Pharm Biotech Ab Surface and tis manufacture and uses
SE9904802D0 (sv) * 1999-12-23 1999-12-23 Amersham Pharm Biotech Ab Microfluidic surfaces
SE0001790D0 (sv) * 2000-05-12 2000-05-12 Aamic Ab Hydrophobic barrier
WO2002041004A2 (en) * 2000-11-16 2002-05-23 Burstein Technologies, Inc. Optical biodiscs with reflective layers
US7087203B2 (en) * 2000-11-17 2006-08-08 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-disc
US7026131B2 (en) * 2000-11-17 2006-04-11 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-discs
SE0004296D0 (sv) * 2000-11-23 2000-11-23 Gyros Ab Device and method for the controlled heating in micro channel systems
US6653625B2 (en) * 2001-03-19 2003-11-25 Gyros Ab Microfluidic system (MS)
US7429354B2 (en) 2001-03-19 2008-09-30 Gyros Patent Ab Structural units that define fluidic functions
CA2441206A1 (en) 2001-03-19 2002-09-26 Gyros Ab Characterization of reaction variables
DE10134040B4 (de) * 2001-07-12 2006-07-13 Forschungszentrum Karlsruhe Gmbh Verfahren zur Herstellung von mikrofluidischen Hohlstrukturen aus Kunststoff
US6825127B2 (en) 2001-07-24 2004-11-30 Zarlink Semiconductor Inc. Micro-fluidic devices
US6919058B2 (en) * 2001-08-28 2005-07-19 Gyros Ab Retaining microfluidic microcavity and other microfluidic structures
US20050214442A1 (en) * 2001-11-27 2005-09-29 Anders Larsson Surface and its manufacture and uses
US7221783B2 (en) * 2001-12-31 2007-05-22 Gyros Patent Ab Method and arrangement for reducing noise
JP4500544B2 (ja) * 2001-12-31 2010-07-14 ユィロス・パテント・アクチボラグ ミクロ流体装置及びその製造
WO2003065355A2 (en) * 2002-01-31 2003-08-07 Burstein Technologies, Inc. Bio-safety features for optical analysis disc and disc system including same
JP4554216B2 (ja) * 2002-03-31 2010-09-29 ユィロス・パテント・アクチボラグ 効率的なマイクロ流体デバイス
US6955738B2 (en) * 2002-04-09 2005-10-18 Gyros Ab Microfluidic devices with new inner surfaces
WO2003093834A1 (fr) * 2002-04-30 2003-11-13 Arkray, Inc. Instrument d'analyse
US20050277195A1 (en) * 2002-04-30 2005-12-15 Gyros Ab Integrated microfluidic device (ea)
WO2003102559A1 (en) * 2002-05-31 2003-12-11 Gyros Ab Detector arrangement based on surface plasmon resonance
US20050042770A1 (en) * 2003-05-23 2005-02-24 Gyros Ab Fluidic functions based on non-wettable surfaces
US7199498B2 (en) * 2003-06-02 2007-04-03 Ambient Systems, Inc. Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same
JP2007500351A (ja) * 2003-07-25 2007-01-11 長岡実業株式会社 バイオディスクを有するサンプル調製用流体回路及びそれに関連した方法
DE20321146U1 (de) * 2003-08-25 2006-03-09 Technische Universität Braunschweig Carolo-Wilhelmina Mikrosystembauelement
US20050046848A1 (en) * 2003-08-26 2005-03-03 Blueshift Biotechnologies, Inc. Time dependent fluorescence measurements
US7776272B2 (en) * 2003-10-03 2010-08-17 Gyros Patent Ab Liquid router
JP4492120B2 (ja) * 2003-12-26 2010-06-30 富士ゼロックス株式会社 マイクロリアクターチップの作製方法
US20090010819A1 (en) * 2004-01-17 2009-01-08 Gyros Patent Ab Versatile flow path
US8592219B2 (en) * 2005-01-17 2013-11-26 Gyros Patent Ab Protecting agent
WO2005081801A2 (en) * 2004-02-09 2005-09-09 Blueshift Biotechnologies, Inc. Methods and apparatus for scanning small sample volumes
JP4353417B2 (ja) 2004-04-14 2009-10-28 日立マクセル株式会社 反応装置
EP1774024A4 (en) 2004-07-02 2012-04-04 Blueshift Biotechnologies Inc EXPLORATION OF FLUOROPHORIC MICRO ENVIRONMENTS
US7527585B2 (en) * 2004-07-21 2009-05-05 Illinois Tool Works Inc. Methods of making reclosable packages for vacuum, pressure and/or liquid containment
CA2631476C (en) * 2004-12-10 2012-06-19 Simon Fraser University Microfluidic microarray assemblies and methods of manufacturing and using same
WO2006075965A1 (en) * 2005-01-17 2006-07-20 Gyros Patent Ab A method for detecting an at least bivalent analyte using two affinity reactants
JP2006258508A (ja) * 2005-03-15 2006-09-28 Sumitomo Bakelite Co Ltd プラスチック部材の接合方法、及びその方法を使用して製造されたバイオチップ及びマイクロ分析チップ
US7512959B2 (en) * 2005-05-09 2009-03-31 Searete Llc Rotation responsive disk activation and deactivation mechanisms
US7668068B2 (en) * 2005-06-09 2010-02-23 Searete Llc Rotation responsive disk activation and deactivation mechanisms
US7748012B2 (en) * 2005-05-09 2010-06-29 Searete Llc Method of manufacturing a limited use data storing device
US8462605B2 (en) 2005-05-09 2013-06-11 The Invention Science Fund I, Llc Method of manufacturing a limited use data storing device
US7596073B2 (en) * 2005-05-09 2009-09-29 Searete Llc Method and system for fluid mediated disk activation and deactivation
US8121016B2 (en) 2005-05-09 2012-02-21 The Invention Science Fund I, Llc Rotation responsive disk activation and deactivation mechanisms
US7770028B2 (en) * 2005-09-09 2010-08-03 Invention Science Fund 1, Llc Limited use data storing device
US8218262B2 (en) 2005-05-09 2012-07-10 The Invention Science Fund I, Llc Method of manufacturing a limited use data storing device including structured data and primary and secondary read-support information
US7519980B2 (en) * 2005-05-09 2009-04-14 Searete Llc Fluid mediated disk activation and deactivation mechanisms
US7916592B2 (en) 2005-05-09 2011-03-29 The Invention Science Fund I, Llc Fluid mediated disk activation and deactivation mechanisms
US7565596B2 (en) * 2005-09-09 2009-07-21 Searete Llc Data recovery systems
US7694316B2 (en) * 2005-05-09 2010-04-06 The Invention Science Fund I, Llc Fluid mediated disk activation and deactivation mechanisms
US7907486B2 (en) 2006-06-20 2011-03-15 The Invention Science Fund I, Llc Rotation responsive disk activation and deactivation mechanisms
US8159925B2 (en) 2005-08-05 2012-04-17 The Invention Science Fund I, Llc Limited use memory device with associated information
US7668069B2 (en) * 2005-05-09 2010-02-23 Searete Llc Limited use memory device with associated information
US8099608B2 (en) 2005-05-09 2012-01-17 The Invention Science Fund I, Llc Limited use data storing device
US8140745B2 (en) 2005-09-09 2012-03-20 The Invention Science Fund I, Llc Data retrieval methods
US9396752B2 (en) 2005-08-05 2016-07-19 Searete Llc Memory device activation and deactivation
US8220014B2 (en) 2005-05-09 2012-07-10 The Invention Science Fund I, Llc Modifiable memory devices having limited expected lifetime
US7916615B2 (en) 2005-06-09 2011-03-29 The Invention Science Fund I, Llc Method and system for rotational control of data storage devices
JP2007136292A (ja) * 2005-11-15 2007-06-07 National Institute Of Advanced Industrial & Technology マイクロチャネル構造体の製造方法、マイクロチャネル構造体、およびマイクロリアクタ
KR100763907B1 (ko) * 2005-12-26 2007-10-05 삼성전자주식회사 미세유동 장치의 제조방법 및 그에 의하여 제조되는미세유동 장치
US8264928B2 (en) 2006-06-19 2012-09-11 The Invention Science Fund I, Llc Method and system for fluid mediated disk activation and deactivation
US8432777B2 (en) * 2006-06-19 2013-04-30 The Invention Science Fund I, Llc Method and system for fluid mediated disk activation and deactivation
US20080138248A1 (en) * 2006-12-11 2008-06-12 Institut Curie Method for improving the bonding properties of microstructured substrates, and devices prepared with this method
EP2135069A4 (en) * 2007-03-02 2011-03-09 Univ Laval SERIES SIPHON VALVES FOR FLUID OR MICRO-FLUIDIC DEVICES
US7799656B2 (en) 2007-03-15 2010-09-21 Dalsa Semiconductor Inc. Microchannels for BioMEMS devices
JP2008292253A (ja) * 2007-05-23 2008-12-04 Richell Corp 微細流路溝構造体
US7927904B2 (en) 2009-01-05 2011-04-19 Dalsa Semiconductor Inc. Method of making BIOMEMS devices
DE102010002991A1 (de) * 2010-03-18 2011-09-22 Robert Bosch Gmbh Verfahren zur Herstellung einer mikrofluidischen Vorrichtung
KR101992503B1 (ko) 2011-05-18 2019-06-24 디아소린 에스.피.에이. 샘플 처리 장치에서 선택된 부피의 물질의 존재를 검출하기 위한 시스템 및 방법
TWI456196B (zh) 2012-04-24 2014-10-11 Ind Tech Res Inst 檢體免疫分析檢測裝置
WO2014139751A1 (en) * 2013-03-14 2014-09-18 Sony Corporation Microfluidic device
DE102014224381A1 (de) * 2014-11-28 2016-06-02 Zf Friedrichshafen Ag Druckmittel-Schaltventil
JP2016107251A (ja) * 2014-12-10 2016-06-20 株式会社エンプラス 流体取扱装置および流体取扱装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4128964A1 (de) * 1991-08-29 1993-03-04 Fotochem Werke Gmbh Verfahren und material zur erzeugung definiert begrenzter klebeflaechen zum verbinden von bauteilen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475867A (en) * 1966-12-20 1969-11-04 Monsanto Co Processing of semiconductor wafers
US3594263A (en) * 1967-03-27 1971-07-20 Millipore Corp Laminated sheet for electrophoresis
US3538744A (en) 1967-11-09 1970-11-10 Phillips Petroleum Co Chromatography apparatus
EP0376611A3 (en) 1988-12-30 1992-07-22 The Board Of Trustees Of The Leland Stanford Junior University Electrophoretic system
US5160702A (en) 1989-01-17 1992-11-03 Molecular Devices Corporation Analyzer with improved rotor structure
US4957582A (en) * 1989-03-16 1990-09-18 Eastman Kodak Company Capillary transport zone coated with adhesive
WO1993019827A1 (en) 1992-04-02 1993-10-14 Abaxis, Inc. Analytical rotor with dye mixing chamber

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4128964A1 (de) * 1991-08-29 1993-03-04 Fotochem Werke Gmbh Verfahren und material zur erzeugung definiert begrenzter klebeflaechen zum verbinden von bauteilen

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6054034A (en) * 1990-02-28 2000-04-25 Aclara Biosciences, Inc. Acrylic microchannels and their use in electrophoretic applications
US6176962B1 (en) 1990-02-28 2001-01-23 Aclara Biosciences, Inc. Methods for fabricating enclosed microchannel structures
US6033628A (en) * 1994-10-19 2000-03-07 Agilent Technologies, Inc. Miniaturized planar columns for use in a liquid phase separation apparatus
FR2734663A1 (fr) * 1995-04-20 1996-11-29 Daimler Benz Ag Structure composite pour composants electroniques et son procede de fabrication
US6485625B1 (en) * 1995-05-09 2002-11-26 Curagen Corporation Apparatus and method for the generation, separation, detection, and recognition of biopolymer fragments
EP1015878A1 (en) * 1997-04-04 2000-07-05 Aclara BioSciences, Inc. Methods for fabricating enclosed microchannel structures
EP1015878B1 (en) * 1997-04-04 2010-06-09 Monogram Biosciences, Inc. Methods for fabricating enclosed microchannel structures
US6827906B1 (en) 1997-10-15 2004-12-07 Aclara Biosciences, Inc. Continuous form microstructure assay array
WO1999025783A1 (de) * 1997-11-14 1999-05-27 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Verfahren zum verbinden von mikrostrukturierten werkstücken aus kunststoff sowie nach diesem verfahren erhaltenes bauteil
WO1999051422A1 (de) * 1998-04-07 1999-10-14 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Klebstoff-freie verbindungen von polymerbauteilen zur erzeugung von geschlossenen mikro- und nanokanalstrukturen
US7138032B2 (en) 1998-05-06 2006-11-21 Caliper Life Sciences, Inc. Methods of fabricating polymeric structures incorporating microscale fluidic elements
US6555067B1 (en) * 1998-05-06 2003-04-29 Caliper Technologies Corp. Polymeric structures incorporating microscale fluidic elements
WO2000077509A1 (de) * 1999-06-16 2000-12-21 Merck Patent Gmbh Miniaturisiertes analysensystem
WO2001021384A1 (de) * 1999-09-23 2001-03-29 Aclara Biosciences, Inc. Verfahren zum fremdstofffreien verbinden von zwei werkstücken aus kunststoff
US6838156B1 (en) 1999-09-23 2005-01-04 Aclara Biosciences, Inc. Method for linking two plastic work pieces without using foreign matter
US7553393B2 (en) 2000-01-30 2009-06-30 Gyros Ab Method for covering a microfluidic assembly
US6987253B2 (en) 2000-06-28 2006-01-17 3M Innovative Properties Company Enhanced sample processing devices, systems and methods
US6814935B2 (en) 2000-06-28 2004-11-09 3M Innovative Properties Company Sample processing devices and carriers
US6627159B1 (en) 2000-06-28 2003-09-30 3M Innovative Properties Company Centrifugal filling of sample processing devices
US7595200B2 (en) 2000-06-28 2009-09-29 3M Innovative Properties Company Sample processing devices and carriers
US7939018B2 (en) 2000-06-28 2011-05-10 3M Innovative Properties Company Multi-format sample processing devices and systems
US7026168B2 (en) 2000-06-28 2006-04-11 3M Innovative Properties Company Sample processing devices
US6734401B2 (en) 2000-06-28 2004-05-11 3M Innovative Properties Company Enhanced sample processing devices, systems and methods
US7164107B2 (en) 2000-06-28 2007-01-16 3M Innovative Properties Company Enhanced sample processing devices, systems and methods
US7445752B2 (en) 2000-06-28 2008-11-04 3M Innovative Properties Company Sample processing devices and carriers
US7435933B2 (en) 2000-06-28 2008-10-14 3M Innovative Properties Company Enhanced sample processing devices, systems and methods
US7604706B2 (en) * 2001-03-30 2009-10-20 Minolta Co., Ltd. Method for producing resin-molded substrate and method for producing reversible image display medium
US7238255B2 (en) 2001-12-31 2007-07-03 Gyros Patent Ab Microfluidic device and its manufacture
WO2004022314A1 (de) * 2002-08-16 2004-03-18 Forschungszentrum Karlsruhe Gmbh Verfahren zum verbinden von fügepartnern
FR2846906A1 (fr) * 2002-11-08 2004-05-14 Commissariat Energie Atomique Procede de realisation d'un composant comportant un micro-joint et composant realise par ce procede
WO2004043849A2 (fr) * 2002-11-08 2004-05-27 Commissariat A L'energie Atomique Procede de realisation d'un composant comportant un micro-joint et composant realise par ce procede
WO2004043849A3 (fr) * 2002-11-08 2004-07-08 Commissariat Energie Atomique Procede de realisation d'un composant comportant un micro-joint et composant realise par ce procede
US7431889B2 (en) 2003-01-30 2008-10-07 Gyros Patent Ab Inner walls of microfluidic devices
US7566503B2 (en) 2005-06-17 2009-07-28 Richell Corporation Bonded structure
US7897245B2 (en) 2005-06-17 2011-03-01 Richell Corporation Bonded structure
US7763210B2 (en) 2005-07-05 2010-07-27 3M Innovative Properties Company Compliant microfluidic sample processing disks
US7767937B2 (en) 2005-07-05 2010-08-03 3M Innovative Properties Company Modular sample processing kits and modules
US7754474B2 (en) 2005-07-05 2010-07-13 3M Innovative Properties Company Sample processing device compression systems and methods
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DE69406020D1 (de) 1997-11-06
JPH09502795A (ja) 1997-03-18
JP3688281B2 (ja) 2005-08-24
EP0738306B1 (en) 1997-10-01
SE501380C2 (sv) 1995-01-30
DE69406020T2 (de) 1998-02-26
EP0738306A1 (en) 1996-10-23
US6126765A (en) 2000-10-03
JP2004138621A (ja) 2004-05-13
SE9302051D0 (sv) 1993-06-15
SE9302051L (sv) 1994-12-16
JP3515784B2 (ja) 2004-04-05
US6620478B1 (en) 2003-09-16
ES2109706T3 (es) 1998-01-16

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