WO1994011931B1 - Appareil et procede permettant de maintenir propre une fenetre de laser - Google Patents

Appareil et procede permettant de maintenir propre une fenetre de laser

Info

Publication number
WO1994011931B1
WO1994011931B1 PCT/US1993/010191 US9310191W WO9411931B1 WO 1994011931 B1 WO1994011931 B1 WO 1994011931B1 US 9310191 W US9310191 W US 9310191W WO 9411931 B1 WO9411931 B1 WO 9411931B1
Authority
WO
WIPO (PCT)
Prior art keywords
cavity
optical element
gases
debris
movement
Prior art date
Application number
PCT/US1993/010191
Other languages
English (en)
Other versions
WO1994011931A1 (fr
Filing date
Publication date
Priority claimed from US07/975,385 external-priority patent/US5359620A/en
Application filed filed Critical
Priority to EP93924408A priority Critical patent/EP0669047B1/fr
Priority to CA002149215A priority patent/CA2149215C/fr
Priority to JP06512106A priority patent/JP3103595B2/ja
Priority to DE69323211T priority patent/DE69323211T2/de
Publication of WO1994011931A1 publication Critical patent/WO1994011931A1/fr
Publication of WO1994011931B1 publication Critical patent/WO1994011931B1/fr

Links

Abstract

Dans une cavité de laser, un premier gaz est ionisé par une décharge électrique envoyée dans cette cavité pour contribuer à produire un rayonnement énergétique. Des débris (particulaires) sont produits pendant la formation de ce rayonnement énergétique. Le rayonnement et les débris se déplacent vers un élément optique, placé dans la cavité, qui peut être une fenêtre ou un miroir. Les débris tendent à se déposer partout dans la cavité, y compris sur l'élément optique qu'ils viennent ainsi souiller, ce qui nuit à l'efficacité du fonctionnement du laser. On envoie un gaz propre dans la cavité, au travers d'un passage (54) éloigné de l'élément optique (56). Ce gaz propre pénètre dans la cavité par un orifice (65) plus éloigné de l'élément optique que le passage. Le flux du premier gaz au travers de l'orifice crée un effet venturi sur le gaz propre, faisant en sorte que ce dernier s'éloigne de l'élément optique. Ce gaz propre empêche ainsi le premier gaz et les débris de se diriger vers l'élément optique. Des déflecteurs (62), placés dans la cavité entre le passage et l'orifice, provoquent des irrégularités de mouvement pour le premier gaz allant de l'orifice à l'élément optique, ce qui contribue encore à empêcher le déplacement des débris vers l'élément optique. Des déflecteurs (68), placés dans la cavité entre le passage et l'élément optique, préviennent aussi le mouvement de tout gaz vers l'élément optique. Un écran relié (66) électriquement à la terre, situé dans le passage éloigné, attire tous les ions présents dans le gaz propre.
PCT/US1993/010191 1992-11-12 1993-10-25 Appareil et procede permettant de maintenir propre une fenetre de laser WO1994011931A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP93924408A EP0669047B1 (fr) 1992-11-12 1993-10-25 Appareil et procede permettant de maintenir propre une fenetre de laser
CA002149215A CA2149215C (fr) 1992-11-12 1993-10-25 Appareil et methode servant a garder propre une fenetre de laser
JP06512106A JP3103595B2 (ja) 1992-11-12 1993-10-25 レーザのクリーンウィンドウ維持装置及びその方法
DE69323211T DE69323211T2 (de) 1992-11-12 1993-10-25 Verfahren und Vorrichtung zum Aufrechterhalten eines sauberen Laserfensters

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/975,385 US5359620A (en) 1992-11-12 1992-11-12 Apparatus for, and method of, maintaining a clean window in a laser
US975,385 1992-11-12

Publications (2)

Publication Number Publication Date
WO1994011931A1 WO1994011931A1 (fr) 1994-05-26
WO1994011931B1 true WO1994011931B1 (fr) 1994-08-04

Family

ID=25522974

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1993/010191 WO1994011931A1 (fr) 1992-11-12 1993-10-25 Appareil et procede permettant de maintenir propre une fenetre de laser

Country Status (7)

Country Link
US (1) US5359620A (fr)
EP (1) EP0669047B1 (fr)
JP (1) JP3103595B2 (fr)
CA (1) CA2149215C (fr)
DE (1) DE69323211T2 (fr)
SG (1) SG54129A1 (fr)
WO (1) WO1994011931A1 (fr)

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