SG54129A1 - Apparatus for and method of maintaining a clean window in a laser - Google Patents

Apparatus for and method of maintaining a clean window in a laser

Info

Publication number
SG54129A1
SG54129A1 SG1996001610A SG1996001610A SG54129A1 SG 54129 A1 SG54129 A1 SG 54129A1 SG 1996001610 A SG1996001610 A SG 1996001610A SG 1996001610 A SG1996001610 A SG 1996001610A SG 54129 A1 SG54129 A1 SG 54129A1
Authority
SG
Singapore
Prior art keywords
laser
maintaining
clean window
clean
window
Prior art date
Application number
SG1996001610A
Other languages
English (en)
Inventor
Robert P Akins
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of SG54129A1 publication Critical patent/SG54129A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
SG1996001610A 1992-11-12 1993-10-25 Apparatus for and method of maintaining a clean window in a laser SG54129A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/975,385 US5359620A (en) 1992-11-12 1992-11-12 Apparatus for, and method of, maintaining a clean window in a laser

Publications (1)

Publication Number Publication Date
SG54129A1 true SG54129A1 (en) 1998-11-16

Family

ID=25522974

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996001610A SG54129A1 (en) 1992-11-12 1993-10-25 Apparatus for and method of maintaining a clean window in a laser

Country Status (7)

Country Link
US (1) US5359620A (fr)
EP (1) EP0669047B1 (fr)
JP (1) JP3103595B2 (fr)
CA (1) CA2149215C (fr)
DE (1) DE69323211T2 (fr)
SG (1) SG54129A1 (fr)
WO (1) WO1994011931A1 (fr)

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US6973112B2 (en) 2003-07-31 2005-12-06 Visx, Incorporated Passive gas flow management and filtration device for use in an excimer or transverse discharge laser
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US6894785B2 (en) * 2003-09-30 2005-05-17 Cymer, Inc. Gas discharge MOPA laser spectral analysis module
US7277464B2 (en) * 2003-12-18 2007-10-02 Cymer, Inc. Method and apparatus for controlling the output of a gas discharge laser system
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JP5499432B2 (ja) * 2007-10-05 2014-05-21 ソニー株式会社 撮像装置
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US7720120B2 (en) * 2008-10-21 2010-05-18 Cymer, Inc. Method and apparatus for laser control in a two chamber gas discharge laser
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JP5687488B2 (ja) 2010-02-22 2015-03-18 ギガフォトン株式会社 極端紫外光生成装置
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CN102769246A (zh) * 2012-08-01 2012-11-07 山东能源机械集团大族再制造有限公司 一种二氧化碳激光器
US9341752B2 (en) 2012-11-07 2016-05-17 Asml Netherlands B.V. Viewport protector for an extreme ultraviolet light source
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CN105226484A (zh) * 2015-11-11 2016-01-06 成都微深科技有限公司 一种具有漏粒子收集装置的二氧化碳激光器
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Also Published As

Publication number Publication date
CA2149215C (fr) 2003-03-11
US5359620A (en) 1994-10-25
JP3103595B2 (ja) 2000-10-30
CA2149215A1 (fr) 1994-05-26
EP0669047B1 (fr) 1999-01-20
JPH08505005A (ja) 1996-05-28
DE69323211T2 (de) 1999-05-27
DE69323211D1 (de) 1999-03-04
EP0669047A1 (fr) 1995-08-30
WO1994011931A1 (fr) 1994-05-26

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