ATE210337T1 - Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahl - Google Patents
Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahlInfo
- Publication number
- ATE210337T1 ATE210337T1 AT96903119T AT96903119T ATE210337T1 AT E210337 T1 ATE210337 T1 AT E210337T1 AT 96903119 T AT96903119 T AT 96903119T AT 96903119 T AT96903119 T AT 96903119T AT E210337 T1 ATE210337 T1 AT E210337T1
- Authority
- AT
- Austria
- Prior art keywords
- arc
- plasma jet
- cathode
- macroparticles
- ignition
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32633—Baffles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Carbon And Carbon Compounds (AREA)
- ing And Chemical Polishing (AREA)
- Sampling And Sample Adjustment (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Cold Cathode And The Manufacture (AREA)
- Discharge Heating (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9503305.6A GB9503305D0 (en) | 1995-02-20 | 1995-02-20 | Filtered cathodic arc source |
PCT/GB1996/000389 WO1996026531A2 (en) | 1995-02-20 | 1996-02-20 | Filtered cathodic arc source |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE210337T1 true ATE210337T1 (de) | 2001-12-15 |
Family
ID=10769900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT96903119T ATE210337T1 (de) | 1995-02-20 | 1996-02-20 | Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahl |
Country Status (8)
Country | Link |
---|---|
US (2) | US6031239A (de) |
EP (1) | EP0811236B1 (de) |
AT (1) | ATE210337T1 (de) |
AU (1) | AU4726596A (de) |
DE (1) | DE69617645D1 (de) |
GB (1) | GB9503305D0 (de) |
SG (3) | SG68679A1 (de) |
WO (1) | WO1996026531A2 (de) |
Families Citing this family (67)
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WO1998045871A1 (en) * | 1997-04-04 | 1998-10-15 | Alexander Igorevich Dodonov | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
GB9722645D0 (en) * | 1997-10-24 | 1997-12-24 | Univ Nanyang | Enhanced macroparticle filter and cathode arc source |
US7014738B2 (en) | 1997-10-24 | 2006-03-21 | Filplas Vacuum Technology Pte Ltd. | Enhanced macroparticle filter and cathode arc source |
GB9722650D0 (en) | 1997-10-24 | 1997-12-24 | Univ Nanyang | Cathode ARC source with target feeding apparatus |
US6225627B1 (en) * | 1998-03-06 | 2001-05-01 | Seiko Instruments Inc. | Focused ion beam system |
CA2256847A1 (en) * | 1998-12-22 | 2000-06-22 | Munther Kandah | Particle-free cathodic arc carbon ion source |
GB9910842D0 (en) * | 1999-05-10 | 1999-07-07 | Univ Nanyang | Composite coatings |
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US6923891B2 (en) * | 2003-01-10 | 2005-08-02 | Nanofilm Technologies International Pte Ltd. | Copper interconnects |
US20050095187A1 (en) * | 2003-11-05 | 2005-05-05 | Huan-Liang Tzeng | Insert liner for chamber entrance |
GB2410254A (en) * | 2004-01-21 | 2005-07-27 | Nanofilm Technologies Int | Method of reducing stress in coatings produced by physical vapour deposition |
GB0404436D0 (en) * | 2004-02-27 | 2004-03-31 | Nanofilm Technologies Int | Continuous arc deposition apparatus and method with multiple available targets |
JP4373252B2 (ja) * | 2004-03-16 | 2009-11-25 | 浩史 滝川 | プラズマ生成装置 |
CH697552B1 (de) * | 2004-11-12 | 2008-11-28 | Oerlikon Trading Ag | Vakuumbehandlungsanlage. |
US20060177610A1 (en) * | 2005-02-09 | 2006-08-10 | Arrow International Limited | Sealing of Plastic Containers |
WO2006118042A1 (ja) * | 2005-04-26 | 2006-11-09 | Shimadzu Corporation | 表面波励起プラズマ発生装置および表面波励起プラズマ処理装置 |
SG130126A1 (en) * | 2005-08-08 | 2007-03-20 | Nanofilm Technologies Int | Metal coatings |
US7507972B2 (en) * | 2005-10-10 | 2009-03-24 | Owlstone Nanotech, Inc. | Compact ionization source |
US7658802B2 (en) * | 2005-11-22 | 2010-02-09 | Applied Materials, Inc. | Apparatus and a method for cleaning a dielectric film |
EP2032735A4 (de) * | 2006-06-21 | 2011-12-21 | Proteus Biomedical Inc | Implantierbare medizinische geräte mit durch kathodenbogen hergestellten strukturen |
DE102006034988B4 (de) * | 2006-07-28 | 2008-10-30 | Deutsches Elektronen-Synchrotron Desy | Ionenquelle zur Erzeugung negativ geladener Ionen |
US7963076B2 (en) * | 2006-09-11 | 2011-06-21 | Dana Innovations | Devices and methods for flangeless installations |
CN100460556C (zh) * | 2006-11-02 | 2009-02-11 | 上海交通大学 | 自由开放式线圈过滤器 |
AU2008216170B2 (en) | 2007-02-14 | 2012-07-26 | Otsuka Pharmaceutical Co., Ltd. | In-body power source having high surface area electrode |
US8158216B2 (en) * | 2007-10-31 | 2012-04-17 | Metascape Llc | Spinulose titanium nanoparticulate surfaces |
US8330127B2 (en) * | 2008-03-31 | 2012-12-11 | Varian Semiconductor Equipment Associates, Inc. | Flexible ion source |
JP4633816B2 (ja) * | 2008-03-31 | 2011-02-16 | 株式会社フェローテック | ターゲット交換式プラズマ発生装置 |
US7914603B2 (en) * | 2008-06-26 | 2011-03-29 | Mks Instruments, Inc. | Particle trap for a plasma source |
DE102008057020A1 (de) * | 2008-11-12 | 2010-05-20 | Oerlikon Trading Ag, Trübbach | Zündvorrichtung für Arc Quellen |
DE102009004158B4 (de) * | 2009-01-09 | 2023-03-30 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren und Vorrichtung zur Funktionsflächenbeschichtung |
US20100190036A1 (en) * | 2009-01-27 | 2010-07-29 | Kyriakos Komvopoulos | Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc |
JP4576467B2 (ja) * | 2009-03-31 | 2010-11-10 | 株式会社フェローテック | 絶縁体介装型プラズマ処理装置 |
JP2010287268A (ja) * | 2009-06-10 | 2010-12-24 | Fuji Electric Device Technology Co Ltd | フィルタードカソーディックアーク装置およびそれを用いて成膜したカーボン保護膜 |
JP5644085B2 (ja) | 2009-06-10 | 2014-12-24 | 富士通株式会社 | 成膜装置及び成膜方法 |
US9024273B2 (en) * | 2010-04-20 | 2015-05-05 | Varian Semiconductor Equipment Associates, Inc. | Method to generate molecular ions from ions with a smaller atomic mass |
GB201016501D0 (en) * | 2010-10-01 | 2010-11-17 | Nanofilm Technologies Internat Pte Ltd | Filter for removing macro-particles from a plasma beam |
WO2014136253A1 (ja) * | 2013-03-08 | 2014-09-12 | 株式会社島津製作所 | アークプラズマ成膜装置 |
SG11201509066UA (en) * | 2013-05-23 | 2015-12-30 | Canon Anelva Corp | Deposition apparatus |
JP6222553B2 (ja) | 2013-09-13 | 2017-11-01 | 株式会社リコー | 現像装置、プロセスカートリッジ及び画像形成装置 |
JP6632790B2 (ja) | 2014-02-10 | 2020-01-22 | 株式会社リコー | 現像装置及び画像形成装置 |
WO2015132830A1 (ja) * | 2014-03-04 | 2015-09-11 | キヤノンアネルバ株式会社 | 真空処理装置及び真空処理方法 |
JP6126302B2 (ja) | 2014-03-18 | 2017-05-10 | キヤノンアネルバ株式会社 | 成膜装置 |
MY183150A (en) | 2014-03-25 | 2021-02-16 | Fuji Electric Malaysia Sdn Bhd | Protective layer for a magnetic recording medium, and a method of manufacturing the same |
EP2947516A1 (de) | 2014-05-22 | 2015-11-25 | Ricoh Company, Ltd. | Entwicklungsvorrichtung und bilderzeugungsvorrichtung und prozesskartusche damit |
JP6347414B2 (ja) * | 2014-11-04 | 2018-06-27 | 日新イオン機器株式会社 | 質量分析電磁石 |
JP6059195B2 (ja) * | 2014-11-06 | 2017-01-11 | キヤノンアネルバ株式会社 | 成膜装置 |
KR101616855B1 (ko) * | 2014-11-11 | 2016-04-29 | 한국기계연구원 | 플라즈마 덕트부를 포함하는 진공 아크 증착 장치 |
KR101639630B1 (ko) * | 2014-12-11 | 2016-07-15 | 한국기계연구원 | 플라즈마 덕트부를 포함하는 진공 아크 증착 장치 |
SG11201709951VA (en) | 2015-06-24 | 2018-01-30 | Canon Anelva Corp | Vacuum arc deposition apparatus and deposition method |
WO2017196622A2 (en) | 2016-05-11 | 2017-11-16 | Veeco Instruments Inc. | Ion beam materials processing system with grid short clearing system for gridded ion beam source |
SG10201705059TA (en) | 2016-06-24 | 2018-01-30 | Veeco Instr Inc | Enhanced cathodic arc source for arc plasma deposition |
EP3263737B1 (de) * | 2016-06-29 | 2019-06-12 | Oerlikon Surface Solutions AG, Pfäffikon | Vakuumbeschichtungskammer und verfahren zur makropartikelfilterierung während lichtbogenkathodenverdampfung |
CN111542645B (zh) | 2017-12-27 | 2022-07-26 | 佳能安内华股份有限公司 | 成膜方法及成膜装置 |
EP3900013B1 (de) | 2018-12-20 | 2023-11-15 | Oerlikon Surface Solutions AG, Pfäffikon | Bogenentladungszündvorrichtung |
WO2020187743A1 (en) | 2019-03-15 | 2020-09-24 | Nanofilm Technologies International Pte Ltd | Improved cathode arc source |
CN113903650A (zh) | 2020-06-19 | 2022-01-07 | 纳峰真空镀膜(上海)有限公司 | 改进的阴极电弧源过滤管 |
CN111741582A (zh) * | 2020-07-02 | 2020-10-02 | 安徽纯源镀膜科技有限公司 | 用于等离子体传送的传输通道装置及镀膜设备 |
CN113073296B (zh) * | 2021-03-19 | 2023-01-20 | 安徽纯源镀膜科技有限公司 | 一种采用磁流体密封处理的用于真空镀膜的敲击装置 |
CN113061850A (zh) * | 2021-03-19 | 2021-07-02 | 安徽纯源镀膜科技有限公司 | 一种用于pic镀膜设备的敲击杆装置 |
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US3916034A (en) * | 1971-05-21 | 1975-10-28 | Hitachi Ltd | Method of transporting substances in a plasma stream to and depositing it on a target |
US4434038A (en) * | 1980-09-15 | 1984-02-28 | Vac-Tec Systems, Inc. | Sputtering method and apparatus utilizing improved ion source |
DE3204135A1 (de) * | 1982-02-06 | 1983-08-18 | Honeywell Gmbh, 6050 Offenbach | Vorrichtung zur simulation des freien ausblicks mittels eines optischen geraetes |
US4551810B1 (en) * | 1982-07-28 | 1995-09-05 | Technology Inc Const | Method and apparatus for designing duct work for producing patterns for conduit sections in the designated duct work |
US4588955A (en) * | 1983-06-01 | 1986-05-13 | The United States Of America As Represented By The United States Department Of Energy | Transverse field focused system |
US4785220A (en) * | 1985-01-30 | 1988-11-15 | Brown Ian G | Multi-cathode metal vapor arc ion source |
DE3672819D1 (de) * | 1985-09-30 | 1990-08-23 | Union Carbide Corp | Vorrichtung und verfahren zum beschichten in einer vakuumkammer durch lichtbogendampfniederschlag. |
JPS62272437A (ja) * | 1986-05-21 | 1987-11-26 | Mitsubishi Electric Corp | イオン注入装置用質量分析装置 |
DE8703520U1 (de) * | 1987-02-03 | 1987-10-01 | Balzers Hochvakuum GmbH, 65205 Wiesbaden | Von einem Begrenzungsring mit elektrisch leitender Oberfläche umgebene Kathode für eine Lichtbogenentladung |
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US5279723A (en) * | 1992-07-30 | 1994-01-18 | As Represented By The United States Department Of Energy | Filtered cathodic arc source |
US5441624A (en) * | 1992-08-25 | 1995-08-15 | Northeastern University | Triggered vacuum anodic arc |
US5580429A (en) * | 1992-08-25 | 1996-12-03 | Northeastern University | Method for the deposition and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation |
US5476691A (en) * | 1994-01-21 | 1995-12-19 | International Business Machines, Inc. | Surface treatment of magnetic recording heads |
AU1563995A (en) * | 1994-01-21 | 1995-08-08 | Regents Of The University Of California, The | Surface treatment of ceramic articles |
US5480527A (en) * | 1994-04-25 | 1996-01-02 | Vapor Technologies, Inc. | Rectangular vacuum-arc plasma source |
US5554853A (en) * | 1995-03-10 | 1996-09-10 | Krytek Corporation | Producing ion beams suitable for ion implantation and improved ion implantation apparatus and techniques |
US5554857A (en) * | 1995-10-19 | 1996-09-10 | Eaton Corporation | Method and apparatus for ion beam formation in an ion implanter |
US5858477A (en) * | 1996-12-10 | 1999-01-12 | Akashic Memories Corporation | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
-
1995
- 1995-02-20 GB GBGB9503305.6A patent/GB9503305D0/en active Pending
-
1996
- 1996-02-20 SG SG1998003142A patent/SG68679A1/en unknown
- 1996-02-20 AU AU47265/96A patent/AU4726596A/en not_active Abandoned
- 1996-02-20 SG SG1998003143A patent/SG68680A1/en unknown
- 1996-02-20 AT AT96903119T patent/ATE210337T1/de not_active IP Right Cessation
- 1996-02-20 US US08/894,420 patent/US6031239A/en not_active Expired - Lifetime
- 1996-02-20 EP EP96903119A patent/EP0811236B1/de not_active Expired - Lifetime
- 1996-02-20 SG SG1998003140A patent/SG68678A1/en unknown
- 1996-02-20 DE DE69617645T patent/DE69617645D1/de not_active Expired - Lifetime
- 1996-02-20 WO PCT/GB1996/000389 patent/WO1996026531A2/en active IP Right Grant
-
1999
- 1999-11-05 US US09/435,096 patent/US6319369B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0811236B1 (de) | 2001-12-05 |
SG68678A1 (en) | 2000-05-23 |
AU4726596A (en) | 1996-09-11 |
WO1996026531A2 (en) | 1996-08-29 |
US6319369B1 (en) | 2001-11-20 |
DE69617645D1 (de) | 2002-01-17 |
GB9503305D0 (en) | 1995-04-12 |
SG68680A1 (en) | 2000-05-23 |
SG68679A1 (en) | 2000-05-23 |
WO1996026531A3 (en) | 1996-12-12 |
US6031239A (en) | 2000-02-29 |
EP0811236A2 (de) | 1997-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |