WO1986006159A1 - Instrument de mesure optique - Google Patents

Instrument de mesure optique Download PDF

Info

Publication number
WO1986006159A1
WO1986006159A1 PCT/JP1986/000175 JP8600175W WO8606159A1 WO 1986006159 A1 WO1986006159 A1 WO 1986006159A1 JP 8600175 W JP8600175 W JP 8600175W WO 8606159 A1 WO8606159 A1 WO 8606159A1
Authority
WO
WIPO (PCT)
Prior art keywords
lens
scanning beam
parallel
parallel scanning
variable
Prior art date
Application number
PCT/JP1986/000175
Other languages
English (en)
Japanese (ja)
Inventor
Yoshiharu Kuwabara
Taizo Nakamura
Original Assignee
Mitutoyo Mfg. Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Mfg. Co., Ltd. filed Critical Mitutoyo Mfg. Co., Ltd.
Publication of WO1986006159A1 publication Critical patent/WO1986006159A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Definitions

  • the present invention relates to an optical measuring device, and more particularly to an improvement in an optical measuring device that measures a dimension of an object to be measured using a parallel scanning beam.
  • a rotary scanning beam (laser beam) is converted by a lens into a parallel scanning beam passing through the f-lens and the condensing lens, and the lens and the f-lens are collected.
  • An object to be measured is placed between the optical lenses, and the object to be measured is determined based on the length of time of the dark or bright portion generated by the parallel scanning beam being interrupted by the object to be measured.
  • the laser beam 12 reflected by the fixed mirror 14 is converted into a rotating scanning beam 17 by a polygon rotating mirror 16, and the scanning beam 17 is converted to a rotating scanning beam 17.
  • the beam 17 is converted into a parallel scanning beam 20 by a lens 18, and the f0 lens 18 and the focusing lens 22 are converted by the parallel scanning beam 20.
  • the object 24 placed between them is scanned at high speed, and the object to be measured is determined by the length of time of the dark or bright part generated by the object to be measured 24 at that time. It measures the dimension in the scanning direction (Y-direction) of the sample 24. In other words, the brightness of the parallel scanning beam 20 is equal to that of the focusing lens 2.
  • the change is detected as a change in the output voltage of the light receiving element 26 at the focal position 2, and the signal from the light receiving element 26 is input to the pre-amplifier 28, where it is amplified.
  • This gate circuit 32 includes a lock pulse oscillator 3.
  • the gate circuit corresponds to m when it corresponds to the scanning direction dimension (for example, outer diameter) of the DUT 24 from the gate circuit.
  • the clock V pulse P is input to the counting circuit 36.
  • the counting circuit 36 counts the clock pulse P and counts it on the digital display 38.
  • a signal is output and the digital display 38 digitally indicates the outer diameter of the DUT 24 in the scanning direction, that is, the BU qd polygon mirror.
  • One 16 is synchronously driven by the output of a frequency divider circuit 40 for dividing the output of the above-mentioned high-frequency pulse oscillator 34 to generate a drive signal, and the output of the amplifier 42.
  • ⁇ 3 ⁇ 4S 3 ⁇ 4 It is rotated periodically with the clock pulse CP of 34 outputs to maintain the measurement accuracy.
  • Such a high-intensity scanning laser length measuring machine is used for moving objects. It is widely used because it can measure the length and thickness of hot objects without contact and with high accuracy.
  • a parallel scanning via at a position where the object 24 is scanned is used. It is conceivable to make the beam diameter of the beam 20 as small as possible.
  • the optical system in the optical measuring device is fixed: for example, the cut position of the measured object in the optical axis direction with respect to the f0 lens is one. It has been determined righteously
  • the light-emitting device and the light-receiving device in the optical measuring device can be separated from each other, so that the range of application as a system can be expanded. Is that the relative position of the object to be measured on the optical axis changes due to the optical positional relationship between the light emitter and the light receiver, so that it is impossible to maintain the uniformity of the measurement accuracy. Problems arise.
  • the beam is converted into a parallel light beam by the fS lens. Therefore, the beam is a diverging beam before entering the fS lens.
  • the beam from the light source is incident on the reflecting surface of the polygon rotating mirror so that the beam diameter is minimized.
  • the beam should be a parallel beam at the exit of the f0 lens. Becomes difficult.
  • the present invention has been made in view of the above-described conventional problems, and has been described in the art.
  • the object to be measured or the light-emitting device and the light-receiving device are allowed to be displaced from each other.
  • the diameter of the parallel scanning beam at the object scanning position can be kept small. It is an object of the present invention to provide an optical measuring device capable of maintaining measurement accuracy.
  • the present invention relates to a polygonal rotary mirror that reflects an incident beam from a beam generator and forms a rotary scan beam, and the rotary scan beam as a parallel scan beam.
  • that f lenses, and the parallel scanning bi chromatography beam generating apparatus comprising, passing through the object to be measured: the above have a light-receiving element that detect light and dark parallel run ⁇ bi chromatography beam, the parallel scanning bi over agenesis A part of the parallel scanning beam is blocked by an object to be measured arranged between the device and the light receiving element, and the darkness is generated.
  • the polygon generator rotates the polygon rotation from the beam generator.
  • the above purpose is achieved by interposing a variable lens system having a base point on the optical path between the mirrors.
  • the optical measuring device focuses the parallel scanning beam after scanning the object to be measured on the zoline between the f0 lens and the light receiving element.
  • the variable lens system is provided with a converging lens for causing the parallel scanning beam having passed through the f0 lens to move between the f0 lens and the converging lens. The above purpose is achieved by changing the focal point so that the beam diameter is minimized at an arbitrary position between them.
  • the present invention is such that the focal point of the parallel scanning beam having passed through the variable lens system through the f5 lens is changed so that the beam becomes a parallel light beam. This achieves the above objectives.
  • a variable lens system having a focal point is interposed on the optical path between the beam generator and the polygon rotating mirror.
  • the position (beam waist) where the parallel scanning beam is detected by the f5 lens along the optical axis continuously the direction of the optical axis of the object to be measured is changed.
  • the object to be measured can always be scanned at the beam waist section in response to a change in the dimension of the light source or a deviation on the optical axis of the light receiving device and the light emitting device. ing .
  • the parallel scanning beam is used as a parallel light beam, the optical distance between the beam generator and the polygon mirror must be shifted by a variable lens system.
  • the parallel scanning beam can be always maintained in a parallel light beam.
  • FIG. 1 is a side view showing an essential part of an embodiment of an optical measuring apparatus according to the present invention
  • FIG. 2 is a peripheral plan view
  • FIG. 3 is a parallel scanning beam as a parallel light beam.
  • FIG. 2 and FIG. 4 are plan views showing the embodiment of the present invention
  • FIG. 4 is a block diagram showing a conventional optical measuring device
  • FIG. 5 is a front view of the periphery.
  • This embodiment uses an optical measuring device similar to that shown in FIG.
  • a variable lens system 46 having a focal point is interposed on the optical path between the square rotating mirrors 16.
  • This variable lens system 46 has a variable focal length, and reflects the laser beam emitted from the laser tube 10 through the reflection of the polygon rotating mirror 16. By adjusting the beam diameter of the laser beam when the laser beam is incident on the surface, the parallel scanning beam can be adjusted. The beam waste position of the lens 20 can be continuously changed with respect to the lens 18.
  • the limit of the beam waist position of the parallel scanning beam 20 by the variable lens system 46 in the direction away from the lens 18 is infinite, that is, the fS lens 1
  • the parallel scanning beam 20 that has passed through 8 is taken up to a range where it becomes a parallel ray.
  • variable lens system 46 is designed so that the focal length can be changed by rotating and driving the lens barrel 46A.
  • Reference numerals 14 A and 14 B in the figure indicate fixed mirrors disposed before and after the variable lens system 46.
  • the beam of the parallel scanning beam 20 that has passed through the f0 lens 18 is obtained.
  • the position of the waist section Bw can be varied along the optical axis with respect to the f0 lens 18 so that the position on the optical axis of the object 24 can be measured.
  • Dimensional change or light source side including laser tube-10, polygonal rotating mirror 16 and lens 18 etc., converging lens 22 and light receiving side Adjust the position of the beam waist section Bw of the parallel scanning beam 20 along the optical axis in response to the change in the positional relationship on the optical axis including the element 26 on the optical receiver side.
  • the beam waste portion Bw can always scan the measurement position of the DUT 24, thereby maintaining high measurement accuracy. Wear .
  • the parallel scanning beam 20 passes through the f ⁇ lens 18.
  • the focal length of the variable lens system 46 is adjusted so that the laser tube 10 and the polygonal beam can be adjusted.
  • the parallel scanning beam 20 can always be kept in a parallel light beam.
  • variable lens system 46 has its focal length variable by rotating the lens barrel 46A, but the present invention is not limited to this. Without being limited to this, the variable lens system 46 itself may be made to advance and retreat along the optical axis.
  • the present invention is configured as described above, by adjusting the beam waste portion of the parallel scanning beam to a position where the object to be measured is always scanned, the object to be measured can be obtained. High measurement accuracy can be maintained while allowing changes in the dimension of the measured object along the optical axis or relative positional changes along the optical axis of the emitter and receiver. It is useful as a thing.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Un instrument optique possède un générateur de faisceau de balayage parallèle comprenant un miroir rotatif polygonal adapté pour réfléchir un faisceau incident provenant d'un générateur de faisceau et obtenir un faisceau de balayage rotatif, et une lentille f adaptée pour transformer le faisceau de balayage rotatif en un faisceau de balayage parallèle, et un élément de réception de lumière pour détecter la luminosité et l'obscurité du faisceau de balayage parallèle passant par un objet à mesurer, et qui est adapté pour détecter la durée pendant laquelle une portion est sombre ou claire lorsqu'une partie du faisceau de balayage parallèle est interceptée par l'objet à mesurer lequel est disposé entre le générateur de faisceau de balayage parallèle et l'élément de réception de lumière, et par conséquent déterminer la mesure de l'objet par rapport à la direction de balayage; un système à lentille variable ayant un foyer sur un chemin optique entre le générateur de faisceau et le miroir rotatif polygonal est monté sur le même chemin optique.
PCT/JP1986/000175 1985-04-09 1986-04-09 Instrument de mesure optique WO1986006159A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60/075187 1985-04-09
JP7518785A JPS61234306A (ja) 1985-04-09 1985-04-09 光学式測定装置

Publications (1)

Publication Number Publication Date
WO1986006159A1 true WO1986006159A1 (fr) 1986-10-23

Family

ID=13568942

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1986/000175 WO1986006159A1 (fr) 1985-04-09 1986-04-09 Instrument de mesure optique

Country Status (2)

Country Link
JP (1) JPS61234306A (fr)
WO (1) WO1986006159A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2667148A2 (fr) 2012-05-25 2013-11-27 Polska Spólka Inzynierska DigiLab sp. z o.o. Procédé et dispositif de mesure de dimension linéaire d'un objet

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105006A (ja) * 1990-08-24 1992-04-07 Tokyo Seimitsu Co Ltd 非接触測定装置
NL1036323A1 (nl) * 2007-12-27 2009-06-30 Asml Holding Nv Folded optical encoder and applications for same.

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540459A (en) * 1978-09-14 1980-03-21 Fujitsu Ltd Focus adjusting method of optical system
JPS58111705A (ja) * 1981-12-25 1983-07-02 Mitsutoyo Mfg Co Ltd 光学式測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540459A (en) * 1978-09-14 1980-03-21 Fujitsu Ltd Focus adjusting method of optical system
JPS58111705A (ja) * 1981-12-25 1983-07-02 Mitsutoyo Mfg Co Ltd 光学式測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2667148A2 (fr) 2012-05-25 2013-11-27 Polska Spólka Inzynierska DigiLab sp. z o.o. Procédé et dispositif de mesure de dimension linéaire d'un objet

Also Published As

Publication number Publication date
JPS61234306A (ja) 1986-10-18

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