US7509237B2 - Test system and test method using virtual review - Google Patents

Test system and test method using virtual review Download PDF

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Publication number
US7509237B2
US7509237B2 US11/644,637 US64463706A US7509237B2 US 7509237 B2 US7509237 B2 US 7509237B2 US 64463706 A US64463706 A US 64463706A US 7509237 B2 US7509237 B2 US 7509237B2
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defect
captured image
test device
color filter
main server
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US20070159179A1 (en
Inventor
Ho Sun Park
Moon Seong Eom
Sang Ho Nam
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LG Display Co Ltd
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LG Display Co Ltd
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Assigned to LG. PHILIPS LCD CO., LTD. reassignment LG. PHILIPS LCD CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: EOM, MOON SEONG, NAM, SANG HO, PARK, HO SUN
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers

Definitions

  • the present invention relates to a test system and a test method using a virtual review, and more specifically, to a test system and a test method using a virtual review for testing whether there is a defect on a thin film transistor substrate or a color filter substrate.
  • LCD liquid crystal display
  • a liquid crystal display typically comprises an array substrate, a color filter substrate, and a liquid crystal layer between the array substrate and the color filter substrate.
  • the array substrate comprises: gate lines and data lines, both arranged on the array substrate in horizontal and vertical directions to define pixel regions; switching elements such as thin film transistors arranged on the intersection regions of the gate lines and data lines; and pixel electrodes formed on the pixel regions.
  • the color filter substrate comprises: a color filter comprising sub-filters R, G, B to implement colors; and a black matrix to separate between the sub-filters to thereby define pixel regions and to block light transmitting the liquid crystal layer.
  • the color filter substrate can further comprise transparent common electrodes, which are arranged on the array substrate, to apply voltages to the liquid crystal layer.
  • the array substrate and color filter substrate configured as above are attached to each other by a sealant to thereby complete a liquid crystal panel.
  • the liquid crystal display can generally be manufactured through an array process, a color filter process, a cell process, and a module process.
  • the array process is a process that forms arrays of thin film transistors on a first substrate, which is a transparent insulating substrate, by repeating deposition, photolithography, and etching.
  • the color filter process is a process that forms a black matrix to block light from passing through regions other than pixel regions and to make red, green, and blue color filters (R, G, B) using dyes or pigments.
  • the cell process is a process used to form liquid crystal panel cells.
  • the first substrate which has been completed through the thin film transistor process, is attached to the second substrate, which has been completed through the color filter substrate.
  • the substrates are attached such that they have a constant gap therebetween and then liquid crystal is injected or dropped therebetween.
  • the module process is a process used to form modules by providing a circuit unit for signal processing, connecting the liquid crystal panel and circuit unit through a well-known mounting scheme, and then attaching them to a feature.
  • alignment films are disposed on each of the array substrate, formed through the array process, and the color filter substrate, formed through the color filter process. Then a rubbing process is used to provide an anchoring force or surface adhesive force to liquid crystal molecules of the liquid crystal layer, which is provided between the array substrate and color filter substrate. At this time, the alignment films can undergo washing before applying, alignment film printing, and alignment film testing, and rubbing in the above-stated order.
  • the array substrate and color filter substrate each are washed out, a spacer is provided to keep cell gaps constantly on the array substrate, and a sealing material is applied to the circumference of the color filter. Then, the array substrate and color filter substrate are pressured to be attached to each other.
  • liquid crystal is injected into each liquid crystal panel through liquid crystal inlets and the inlets are sealed to form a liquid crystal layer.
  • the array substrate and color filter substrate are tested to determine whether there are any defects. More specifically, the array substrate and color filter are examined to determine whether there is any fault on their appearances and electrical wirings. For example, the process is performed to determine the appearance of color filter protrusions, oblique line stains, rubbing strips, pin holes, short circuits or disconnections in the gate lines and data lines and the like.
  • a test system for performing the testing process comprises a group of test devices for testing whether there is a defect on the array substrate and color filter substrate and a repair system for repairing the substrates if a fault occurs on the substrates.
  • the group of test devices comprises a test device for testing whether the array substrate and color filter substrate have any defect or not, a system computer for driving the test device, and a monitor connected to the system computer.
  • a keyboard and a mouse are added to the system computer to operate the system computer.
  • a review monitor is added to the group of test devices, through which an operator can see whether there is a defect on the substrates.
  • a test system comprises: a test device for taking an image of a defect on an array substrate or color filter substrate to acquire a captured image and providing examination information related to the defect.
  • a main server is used to construct the examination information from the test device as a database and then transmit them to a review host.
  • a review host determines whether there is a defect on the array substrate or color filter substrate based on the examination information from the main server to yield a determination result. The determination result is resent to the main server.
  • the examination information related to the defect may comprise an ID of the array substrate or color filter substrate, IDs of a plurality of panels provided on the array substrate or color filter substrate, number of the defect according to detected order, an image file capturing the defect, and number of the test device having detected the defect.
  • the determination result may comprise a case where the defect is required to be repaired, a case where the state of defect is good, a case where the state of defect is not good, and a case where the state of defect is difficult to determine.
  • a test method comprises: taking an image of a defect on an array substrate or color filter substrate to acquire a captured image and providing examination information related to the defect from a test device; constructing the examination information from the test device as a database by a main server and then transmitting them; and determining whether there is a defect on the array substrate or color filter substrate based on the examination information from the main server to yield a determination result and resending the determination result to the main server.
  • FIG. 1 is a view of illustrating a construction of a test system using a virtual review according to a first embodiment of the present invention.
  • FIG. 2 is a flow chart of illustrating an operation of a test method using a virtual review according to the first embodiment of the present invention.
  • FIG. 3 is a view of illustrating another construction of a test system using a virtual review according to a second embodiment of the present invention.
  • FIG. 4 is a flow chart of illustrating another operation of a test method using a virtual review according to the second embodiment of the present invention.
  • FIG. 5 is a signal flow diagram of the test system using the virtual review according to the second embodiment of the present invention.
  • FIG. 6 a is a photograph of captured image of illustrating a defect created according to the second embodiment of the present invention
  • FIG. 6B is a photograph of captured image of illustrating a state after ADR.
  • FIG. 1 is a view of illustrating a construction of a test system using a virtual review according to a first embodiment of the present invention.
  • signal flows shown as dotted lines represent having transmitted information
  • signal flows shown as solid lines represent signals of actually driving test devices.
  • a test system 100 comprises a test device 110 , a reexamination host (MPC: 120 ), a main server (RCS: 130 ), a review host (RPC: 140 ), and a quality management host (QPC: 150 ).
  • the test device 110 , review host 140 , and quality management host 150 each are connected to the main server 130 over a network, and the reexamination host 120 and test device 110 can be connected to each other over a separate network.
  • the hosts 120 , 140 , 150 can be implemented using personal computers, i.e. PCs.
  • the test device 110 comprises a vision unit mounted with a camera for detecting patterns shown on a panel and a computer system for analyzing signals inputted to the camera.
  • the camera performs scanning on the panel in a horizontal direction to collect a pattern for test appearing on the array substrate or color filter substrate and to transfer the pattern to the computer system.
  • the ability of detecting a defect is improved by performing the scanning, with the camera declined by a prescribed angle (e.g. 0° ⁇ 70°, 80° ⁇ 100°, 110° ⁇ 160°), so that a defect detected differently according to viewing angle is complemented.
  • the limitation to test through an operator's eyes can be complemented by providing a vision device such as a camera to the test device, and thus work efficiency can be improved, which can in turn raise the productivity.
  • test device 110 performs auto defect repair (ADR) against a defect according to a first embodiment.
  • ADR auto defect repair
  • the main server 130 receives an image file of defect captured by the test device 110 , a panel ID of the array substrate and color filter substrate, an ID of a glass substrate, numbers of the defect, number of the device, etc. and makes them a database, and then sends this information to the review host 140 .
  • An auxiliary server i.e. a sub-server 131 can be provided in addition to the main server 130 to operate for unexpected emergencies. That is, the sub-server 131 can supplant the main server 130 in case of breakdown of the main server 130 .
  • the review host 140 serves to review the state of defect using the captured image of defect, and determines the state of defect to thereby yield a determination value.
  • the yielded determination value is transmitted to the main server 130 and stored at a database.
  • the database may be implemented within the main server 130 or outside and independent of the main server 130 .
  • the quality management host 150 determines whether the defect was successfully repaired based on information of image capturing repaired region. If the defect was repaired successfully, then a subsequent array substrate or color filter substrate undergoes the test for determining whether it has any defect or not.
  • the reexamination host 120 serves to reexamine the state of defect in the case where the review host 140 has determined that it is difficult to determine the state of defect. While the review host 140 performs a review and a determination based on captured image of defect, the reexamination host 120 carries them out based on real-time an image taken by the camera of the test device 110 in real time.
  • each host 120 , 140 , 150 is installed at remote sites to control the test device 110 from the remote sites.
  • FIG. 2 is a flow chart of illustrating an operation of a test method using a virtual review according to the first embodiment of the present invention.
  • the test device 110 determines whether a defect on the array substrate or color filter substrate exists. If any defect is detected on the array substrate or color filter substrate, then the test device captures an image of the detected defect (S 201 ).
  • the test device 110 sends defect information, for example, information including a glass substrate identification GLS ID, a panel identification PNL ID, a defect serial number, etc. and information including a defect image file and the device number for each of the detected defect to the main server 130 (S 202 ).
  • the GLS ID which is information of a glass substrate for the array substrate or color filter substrate, refers to an ID of the glass substrate, e.g. such as “7AA5D017510”
  • the PNL ID which is information provided on the glass substrate
  • the defect serial number refers to a number assigned sequentially to each defect in the case where a plurality of defects exist on one glass substrate.
  • the main server 130 stores the defect information and the information such as an image file, a device number, etc. transmitted from the test device 110 at the database, and then sends them to the review host 140 sequentially (S 203 ).
  • the review host 140 performs a review and a determination based on the captured image of defect (S 204 ). That is, an operator opens the captured image file of defect to review the defect and determine the state of the defect.
  • various determination values can be acquired as a result of the determination by the operator, and these determination values are transmitted to the main server 130 .
  • the below table 1 shows these determination values.
  • the determination value “Q” means the magnification adjustment of the camera is required for the review and determination because it is difficult to determine the state of defect by the captured image file.
  • the determination values “A” means it is difficult to determine the state of defect only by the captured image file since the auto focus of the camera doesn't work appropriately.
  • the determination value “M” means it is impossible to determine the state of defect by the review host 140 due to poor metallicity.
  • the determination value “G” means the state of defect is good since the array substrate or color filter substrate has no defect thereon or, if any, too little defect to be considered to be crucial, and the determination value “P” means the defect of the panel are needed to repair.
  • the determination values “Q”, “A”, and “M” which mean it is difficult to determine the state of defect represent the cases where the review host 140 has an difficulty in determining the state of defect.
  • the reexamination host 120 performs a reexamination on the defect (S 206 ). While the review host 140 performs a review and a determination based on captured image of defect, the reexamination host 120 carries out the review and determination based on real-time an image of the array substrate or color filter substrate taken by the camera of the test device 110 in real time.
  • a multi-access ratio of the reexamination host 120 and test device 110 may be approximately 3 to 8.
  • step S 207 it is determined in the step S 207 whether the determination value is “G” which means ‘good’, and if the determination value is “G”, then the array substrate and color filter substrate are determined to be good and subsequent processes are carried out (S 208 ).
  • the main server 130 sends information related to the defect, and sends information that the determination value is “P”, to the test device 110 at which corresponding defect is detected. If the test device 110 receives the information that the determination value is “P” from the main server 130 , the test device 110 repairs the corresponding defect automatically and captures an image of the repaired region (S 210 ). At this time, the captured image of repaired region is transmitted to the main server 130 .
  • the main server 130 stores the captured image of repaired region transmitted from the test device 110 at the database and then resends them to the quality management host 150 .
  • the quality management host 150 determines whether the defect was repaired successfully, i.e. whether ADR (Auto defect repair) was successful or not, using the captured image of repaired region transmitted from the server 130 (S 211 ).
  • step S 208 continues and subsequently the next array substrate or color filter substrate may undergo the test to determine whether a defect exists or not.
  • test device 110 returns this process to the step S 210 of repairing defect.
  • the array substrate or color filter substrate is determined to have a defect and subsequent processes are performed (S 212 ).
  • step S 205 can be changed in their order.
  • step S 207 can be changed in their order.
  • FIG. 3 is a view of illustrating another construction of a test system using a virtual review according to a second embodiment of the present invention.
  • a test system 300 using a virtual review comprises a test device 310 , a reexamination host (MPC: 320 ), a main server (RCS: 330 ), a first review host (RPC: 340 ), a quality management host (QPC: 350 ), a second review host 360 , and an alarm host (ALPC: 370 ).
  • MPC reexamination host
  • RCS main server
  • QPC quality management host
  • APC alarm host
  • the test device 310 , the first and second review hosts 340 and 360 , and quality management host 350 each are connected to the main server 330 over a network, and the reexamination host 320 and test device 310 can be connected to each other over a separate network.
  • the hosts 320 , 340 , 350 , 360 , and 370 can be implemented using personal computers, i.e. PCs.
  • test system 300 using a virtual review according to the second embodiment of the present invention has the same components as the test system 100 using a virtual review according to the first embodiment of the present system except that the test system 300 further comprises the second review host 360 and alarm host 370 . Therefore, the same descriptions as the test system 100 will be omitted and only differences from the test system 100 will be described hereinafter.
  • the test device 310 performs auto defect repair (ADR) on defects according to the second embodiment of the present invention.
  • ADR auto defect repair
  • the main server 330 receives an image file of defect captured by the test device 310 , a panel ID, an ID of a glass substrate, numbers of the defect, number of the device, etc. and constructs a database, and then sends this information to the review host 340 .
  • An auxiliary server i.e. a sub-server 330 can be provided to operate for unexpected emergencies besides the main server 331 .
  • the first review host 340 serves to review the state of defect using the captured image of defect, and determines the state of defect to thereby yield a determined value.
  • the yielded determination value is transmitted to the main server 330 and stored at a database.
  • the second review host 360 determines whether the defect was successfully repaired based on information of an image capturing repaired region.
  • the functions performed by the quality management host 150 in the first embodiment can be carried out by the second review host 360 in the second embodiment.
  • the reexamination host 320 serves to reexamine the state of defect in the case where the first review host 340 has determined that it is difficult to determine the state of defect. While the first review host 340 performs a review and a determination based on captured image of defect, the reexamination host 320 carries out them based on real-time an image taken by the camera of the test device 310 in real time.
  • the alarm host 370 serves to monitor the state of the test device 310 and call an operator when a mode is changed to other one.
  • FIG. 4 is a flow chart of illustrating an operation of a test method using a virtual review according to the second embodiment of the present invention.
  • test device 310 determines whether a defect exists on the array substrate or the color filter substrate. If any defect is detected on the array substrate or color filter substrate, then the test device 310 captures an image of the detected defect (S 401 ).
  • the test device 310 sends defect information including a GLS ID, a PNL ID, a defect serial number, etc. and information including a defect image file and the device number for each of the detected defect to the main server 330 (S 402 ).
  • the main server 330 stores the defect information and the information such as the captured image file, device number, etc. transmitted from the test device 310 at the database, and then sends them sequentially to the first review host 340 (S 403 ).
  • the review host 340 performs a review and a determination of a defect code based on the captured image file of defect (S 404 ). That is, an operator opens the captured image file of the defect to review the defect and determine the state of the defect, and the determination value is transmitted to the main server 330 .
  • step S 405 it is determined in step S 405 whether it is possible or not to evaluate the defect on the array substrate or color filter.
  • the reexamination host 320 performs a reexamination of the defect (S 406 ).
  • the reexamination host 320 carries out, in real time, the review and determination based on a real-time image of the array substrate or color filter substrate taken by the camera of the test device 310 .
  • step S 407 it is determined in the step S 407 whether the determination value is “G”, which means ‘good’. If the determination value is “G”, then the array substrate and color filter substrate are determined to be good and subsequent processes are carried out (S 408 ).
  • the main server 330 sends information related to the defect and information that the determination value is “P” to the test device 310 .
  • test device 310 If the test device 310 receives the information that the determination value is “P” from the main server 330 , then the test device 310 repairs the corresponding defect automatically and captures an image of the repaired region (S 410 ).
  • the captured image of the repaired region is transmitted to the main server 330 .
  • the main server 330 stores the captured image of repaired region transmitted from the test device 310 at the database and then resends them to the second review host 360 (S 4110 ).
  • the second review host 360 determines whether the defect was repaired successfully, i.e. whether ADR (Auto defect repair) was successful or not, using the captured image of the repaired region transmitted from the server 330 (S 412 ).
  • step S 408 continues and subsequently the next array substrate or color filter substrate may undergo the test to determine whether a defect exists or not.
  • test device 310 In the case where the defect still exists in spite of the defect having been repaired, i.e., the ADR is not determined to be successful, then the test device 310 returns this process to the step of repairing the defect S 410 .
  • the array substrate or color filter substrate is determined to have a defect and subsequent processes are performed (S 413 ).
  • step S 405 the order of step S 405 , step S 407 , and step S 409 can be changed.
  • FIG. 5 is a signal flow diagram of the test system using the virtual review according to the second embodiment of the present invention, and describes the operations of each component more specifically.
  • the test device 310 first loads a glass substrate (S 501 ), takes an image of the defect on the array substrate or color filter substrate (S 502 ), and then sends the examination information of the defect to the main server 330 (S 503 ).
  • the main server 330 resends the examination information to the first review host 340 adequately taking into account the amount of load (S 504 ).
  • the first review host 340 confirms the image of defect (S 505 ), reviews a pattern map, and then inputs a determination value of the defect code (S 506 ). Then, the determination value is transmitted to the main server 330 (S 507 ).
  • the main server 330 resends the determination value to the test device 310 (S 508 ), and in the case where the determination value is “P” which means to be repaired, the test device 310 starts to perform ADR (S 509 ). Then, the test device 310 sends the result of ADR to the main server 330 (S 510 ).
  • the main server 330 resends the result of ADR to the second review host 360 adequately taking into account the amount of load (S 511 ). Accordingly, the second review host 360 confirms the result of ADR, determines whether the ADR was successfully performed, and then inputs the determination value (S 512 ).
  • the second review host 360 sends the determination value on whether the ADR was successfully performed to the main server 330 (S 513 ), and the main server 330 resends the determination value to the test device 310 (S 514 ).
  • test device 310 switches to a manual mode in the case where it is determined to be impossible for the main server 330 to determine whether there is a defect on the array substrate or color filter substrate (S 515 ).
  • test device 310 When switching to the manual mode, the test device 310 informs the main server 330 of the mode change (S 516 ), and the main server 330 transfers the mode change to the alarm host 370 (S 517 ).
  • the alarm host 370 calls the operator of the reexamination host 320 , which is a manually operated PC, corresponding to the mode change (S 518 ). Accordingly, the operator manually repairs the defect on the array substrate or color filter substrate with the reexamination host 320 controlling the test device directly, which allows the test device 310 to manually repair the defect whose code is referred to as ‘impossible to determine’ (S 520 ).
  • the substrate having the repaired defect is unloaded, then the next substrate is loaded, and then the steps S 502 to S 520 are repeated for the next substrate.
  • FIG. 6A is a captured image illustrating a defect created according to the second embodiment of the present invention
  • FIG. 6B is a captured image illustrating a state after ADR.
  • the test device 310 captures an image of a defect
  • the captured image is transmitted to the first review host 340 via the main server 330 , and the first review host 340 reviews the captured image and determines its defect codes.
  • test device 310 performs ADR and then sends the result of the ADR, i.e. the captured image, to the second review host 360 via the main server 330 .
  • FIG. 6B shows a state where the defect is eliminated from the captured image.
  • the present invention allows one operator to perform review and determination based on image of defect on substrates captured by a plurality of test devices differently from the prior art in which one operator can control only one test device, thus allowing the test device to be driven efficiently and the number of operators to be reduced. As a consequence, work time for test can be substantially shortened.

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CN111208365A (zh) * 2020-01-06 2020-05-29 平高集团有限公司 一种pcs测试系统

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KR102028977B1 (ko) * 2013-01-31 2019-10-07 엘지디스플레이 주식회사 영상 표시장치의 검사 시스템 및 방법
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CN103278714B (zh) * 2013-05-15 2015-10-28 江苏大学 一种混合制程的虚拟测量方法与系统
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