US5127965A - Fe-ni alloy sheet for shadow mask and method for manufacturing same - Google Patents

Fe-ni alloy sheet for shadow mask and method for manufacturing same Download PDF

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US5127965A
US5127965A US07/723,923 US72392391A US5127965A US 5127965 A US5127965 A US 5127965A US 72392391 A US72392391 A US 72392391A US 5127965 A US5127965 A US 5127965A
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alloy sheet
rkr
roughness
kurtosis
alloy
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Tadashi Inoue
Masayuki Kinoshita
Tomoyoshi Okita
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JFE Steel Corp
JFE Engineering Corp
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NKK Corp
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Priority claimed from JP2187295A external-priority patent/JPH0762217B2/ja
Priority claimed from JP2218946A external-priority patent/JPH07116559B2/ja
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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C21D8/02—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
    • C21D8/0205—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips of ferrous alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/06—Screens for shielding; Masks interposed in the electron stream
    • H01J29/07—Shadow masks for colour television tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2229/00—Details of cathode ray tubes or electron beam tubes
    • H01J2229/07—Shadow masks
    • H01J2229/0727—Aperture plate
    • H01J2229/0733—Aperture plate characterised by the material

Definitions

  • the present invention relates to an Fe-Ni alloy sheet for a shadow mask used for a color cathode-ray tube and a method for manufacturing same.
  • the invar alloy is attracting the general attention as an alloy for a shadow mask capable of coping with problems such as a color-phase shift.
  • the invar alloy has a far smaller thermal expansion coefficient as compared with a low-carbon steel conventionally applied as a material for a shadow mask.
  • the invar alloy sheet for a shadow mask i.e., the original sheet prior to forming by etching passage holes for the electron beam (hereinafter simply referred to as the "holes") has the following problems:
  • the invar alloy sheet for a shadow mask has, during the etching-piercing, a poor adhesivity of a resist film onto the surface of the invar alloy sheet, and a lower corrosion by an etching solution as compared with a low-carbon steel sheet for a shadow mask. This tends to cause irregularities in the diameter and the shape of the holes pierced by etching, thus leading to a seriously decreased grade of the color cathode-ray tube.
  • the invar alloy Since the invar alloy has a high nickel content, it has a higher strength than a low-carbon steel. A flat mask made of the invar alloy must therefore be annealed at a higher temperature than in a flat mask made of a low-carbon steel. As a result, seizure tends to occur in a flat mask made of the invar alloy during the annealing thereof.
  • Japanese Patent Provisional Publication No. 61-39,344 discloses limitation of the center-line mean roughness (Ra) of an alloy sheet for a shadow mask within a range of from 0.1 to 0.4 ⁇ m (hereinafter referred to as the "prior art 1").
  • Japanese Patent Provisional Publication No. 62-243,780 discloses limitation of the center-line mean roughness (Ra) of an alloy sheet for a shadow mask within a range of from 0.2 to 0.7 ⁇ m, limitation of the average peak interval of the sectional curve representing the surface roughness within a standard length to up to 100 ⁇ m, and limitation of the crystal grain size to at least 8.0 as expressed by the grain size number (hereinafter referred to as the "prior art 2").
  • Japanese Patent Provisional Publication No. 62-243,781 discloses, in addition to the requirements disclosed in the above-mentioned prior art 2, limitation of Re, i.e., the ratio ⁇ 1 / ⁇ 2 of the light-passage hole diameter ( ⁇ 1 ) to the etching hole diameter ( ⁇ 2 ) to at least 0.9 (hereinafter referred to as the "prior art 3").
  • Japanese Patent Provisional Publication No. 62-243,782 discloses that the crystal texture of an alloy sheet for a shadow mask is accumulated through a strong cold rolling and a recrystallization annealing, the crystal grain size is limited to at least 8.0 as expressed by the grain size number, and the surface roughness described in the above-mentioned prior art 2 is imparted to the surface of the alloy sheet for a shadow mask by means of the cold rolling with the use of a pair of dull rolls under the reduction ratio within a range of from 3 to 15% (hereinafter referred to as the "prior art 4").
  • Japanese Patent Provisional Publication No. 62-238,003 discloses limitation of the center-line mean roughness (Ra) of an alloy sheet for a shadow mask within a range of from 0.2 to 2.0 ⁇ m, and limitation of the value of the deviation index (Rsk) in the height direction of the roughness curve to at least 0 (hereinafter referred to as the "prior art 5").
  • the above-mentioned prior art 5 has, on the other hand, a problem in that, while it is possible to prevent seizure of the flat mask made of a low-carbon steel during the annealing thereof to some extent, it is impossible to prevent seizure during annealing of the flat mask made of the invar alloy which requires a higher annealing temperature than the low-carbon steel.
  • An object of the present invention is therefore to provide an Fe-Ni alloy sheet for a shadow mask, which is excellent in etching pierceability and permits certain prevention of seizure during the annealing of the Fe-Ni alloy sheet, and a method for manufacturing same.
  • an Fe-Ni alloy sheet for a shadow mask which consists essentially of:
  • nickel from 34 to 38 wt. %
  • silicon from 0.01 to 0.15 wt. %
  • manganese from 0.01 to 1.00 wt. %
  • the balance being iron and incidental impurities
  • said alloy sheet having a surface roughness which satisfies all the following formulae (1) to (3);
  • Ra center-line mean roughness
  • Rkr Kurtosis which is a sharpness index in the height direction of the roughness curve
  • Said surface roughness of said alloy sheet may further satisfy at least one of the following formulae (4) to (7):
  • Ra(C) center-line mean roughness of said alloy sheet in the crosswise direction to the rolling direction
  • Rkr(C) kurtosis of said alloy sheet in the crosswise direction to the rolling direction; ##EQU6## where, Sm: average peak interval of the sectional curve,
  • Ra(L) center-line mean roughness of said alloy sheet in the rolling direction
  • Ra(C) center-line mean roughness of said alloy sheet in the crosswise direction to the rolling direction
  • R ⁇ a average angle of inclination of the roughness curve
  • a method for manufacturing an Fe-Ni alloy sheet for a shadow mask which comprises the steps of:
  • nickel from 34 to 38 wt. %
  • the balance being iron and incidental impurities
  • Ra center-line mean roughness
  • Rkr kurtosis which is a sharpness index in the height direction of the roughness curve
  • a method for manufacturing an Fe-Ni alloy sheet for a shadow mask which comprises the steps of:
  • nickel from 34 to 38 wt. %
  • the balance being iron and incidental impurities
  • Ra center-line mean roughness
  • Rkr kurtosis which is a sharpness index in the height direction of the roughness curve
  • Ra(C) center-line mean roughness of said alloy sheet in the crosswise direction to the rolling direction
  • Rkr(C) kurtosis of said alloy sheet in the crosswise direction to the rolling direction; ##EQU12## where, Sm: average peak interval of the sectional curve,
  • Ra(L) center-line mean roughness of said alloy sheet in the rolling direction
  • Ra(C) center-line mean roughness of said alloy sheet in the crosswise direction to the rolling direction
  • R ⁇ a average angle of inclination of the roughness curve
  • Said final rolling may be a cold rolling or a temper rolling.
  • FIG. 1 is a part of the CaO-Al 2 O 3 -MgO ternary diagram illustrating the region of the chemical composition of non-metallic inclusions contained in the Fe-Ni alloy sheet for a shadow mask of the present invention, which shows the region of the chemical composition of the non-metallic inclusions, entanglement of which into the Fe-Ni alloy sheet is not desirable;
  • FIG. 2 is a graph illustrating the relationship between the center-line mean roughness (Ra) and the kurtosis (Rkr) of an Fe-Ni alloy sheet for a shadow mask, containing from 0.01 to 0.15 wt. % silicon and 0.0025 wt. % sulfur and having a silicon segregation rate of up to 10%, which relationship exerts an important effect on etching pierceability and seizure during the annealing of the flat mask made of the Fe-Ni alloy sheet;
  • Ra center-line mean roughness
  • Rkr kurtosis
  • FIG. 3 is a graph illustrating the relationship between the sulfur content and the annealing temperature of an Fe-Ni alloy sheet for a shadow mask having a chemical composition, a silicon segregation rate, a center-line mean roughness (Ra), a kurtosis (Rkr) and an average angle of inclination (R ⁇ a) of the roughness curve, all within the scope of the present invention, which relationship exerts an important effect on seizure of a flat mask made of the Fe-Ni alloy sheet during annealing thereof;
  • FIG. 4 is a graph illustrating the relationship between the sulfur content and the kurtosis (Rkr) of an Fe-Ni alloy sheet for a shadow mask, which relationship exerts an important effect on the critical annealing temperature of the Fe-Ni alloy sheet, at which seizure of the Fe-Ni alloy sheet does not occur during the annealing thereof;
  • FIG. 5 is the CaO-Al 2 O 3 -MgO ternary phase diagram illustrating the chemical composition of non-metallic inclusions contained in each of the alloys A to E used in the Examples of the present invention.
  • the present invention was made on the basis of the above-mentioned findings. Now, the Fe-Ni alloy sheet for a shadow mask of the present invention is described further in detail.
  • the chemical composition of the Fe-Ni alloy sheet for a shadow mask of the present invention is limited within the above-mentioned ranges for the following reasons.
  • the Fe-Ni alloy sheet for a shadow mask is required to have the upper limit of about 2.0 ⁇ 10 -6 /°C. of an average thermal expansion coefficient in a temperature region of from 30° to 100° C. in order to prevent the occurrence of a color-phase shift.
  • This thermal expansion coefficient depends upon the nickel content in the alloy sheet.
  • the nickel content which satisfies the above-mentioned condition of the average thermal expansion coefficient is within a range of from 34 to 38 wt. %.
  • the nickel content should therefore be limited within a range of from 34 to 38 wt. %.
  • Silicon is an element effective for the prevention of seizure of a flat mask made from the Fe-Ni alloy sheet for a shadow mask during the annealing of the flat mask.
  • a silicon content of under 0.01 wt. % however, an oxide film effective for preventing seizure of the flat mask is not formed on the surface of the flat mask.
  • a silicon content of over 0.15 wt. % on the other hand, pierceability of the Fe-Ni alloy sheet is deteriorated.
  • the silicon content should therefore be limited within a range of from 0.01 to 0.15 wt. %.
  • Manganese has a function of improving deoxidation and hot workability of the Fe-Ni alloy sheet for a shadow mask. With a manganese content of under 0.01 wt. %, however, a desired effect as described above is not available. A manganese content of over 1.00 wt. % leads, on the other hand, to a higher thermal expansion of the Fe-Ni alloy sheet, coefficient, which is not desirable in terms of a color-phase shift of the shadow mask. The manganese content should therefore be limited within a range of from 0.01 to 1.00 wt. %.
  • the following method is conceivable; heating an alloy ingot or a continuously cast alloy slab to a temperature of 1,200° C. for 20 hours, then subjecting same to a primary slabbing at a sectional reduction rate of from 20 to 60%, then, heating the thus rolled slab to a temperature of 1,200° C. for 20 hours, then subjecting same to a secondary slabbing at a sectional reduction rate of from 30 to 50%, and slowly cooling same.
  • the Fe-Ni alloy sheet for a shadow mask of the present invention is not limited to that manufactured through the process as described above alone, but may be one manufactured by the process known as a strip casting which comprises manufacturing an alloy sheet directly from a molten alloy, or one manufactured by applying a slight reduction in hot to the alloy sheet manufactured by the strip casting.
  • the process for reducing the silicon segregation rate through heating and soaking in the above-mentioned case of slabbing can be simplified to some extent.
  • the chemical composition of non-metallic inclusions contained in the Fe-Ni alloy sheet having the above-mentioned chemical composition to a chemical composition outside the region surrounded by a pentagon formed by connecting points 1, 2, 3, 4 and 5 in the Al 2 O 3 -CaO-MgO ternary phase diagram shown in FIG. 1.
  • the non-metallic inclusions in the Fe-Ni alloy sheet for a shadow mask become mainly comprised spherical non-metallic inclusions smaller than 3 ⁇ m, and thus the amount of linear non-metallic inclusions having malleability in the rolling direction becomes very slight. As a result, this inhibits the formation of pits on the hole surface, caused by non-metallic inclusions during the etching-piercing, and minimizes the problem of contamination of the etching solution caused by the entanglement of the non-metallic inclusions into the etching solution.
  • the center-line mean roughness (Ra) is a surface roughness of the Fe-Ni alloy sheet, as expressed by the following formula: ##EQU14## where, L: measuring length, and
  • the kurtosis (Rkr) is a sharpness index in the height direction of the roughness curve, as expressed by the following formula: ##EQU15## where, ##EQU16## quarternary moment of the amplitude distribution curve.
  • FIG. 2 is a graph illustrating the relationship between the center-line mean roughness (Ra) and the kurtosis (Rkr) of an Fe-Ni alloy sheet for a shadow mask, containing from 0.01 to 0.15 wt. % silicon and 0.0025 wt. % sulfur and having a silicon segregation rate of up to 10%, which relationship exerts an important effect on etching pierceability and seizure during the annealing of the flat mask made of the Fe-Ni alloy sheet.
  • Ra center-line mean roughness
  • Rkr kurtosis
  • a value of the center-line mean roughness (Ra) of under 0.3 ⁇ m results in occurrence of seizure during the annealing of the flat mask over the entire surface thereof and in a poor adhesivity of a photo mask onto the surface of the flat mask during the etching-piercing.
  • a value of the center-line mean roughness (Ra) of over 0.8 ⁇ m leads, on the other hand, to a lower etching pierceability of the flat mask.
  • the value of the center-line mean roughness (Ra) should therefore satisfy the following formula (1):
  • the center-line mean roughness (Ra) and the kurtosis (Rkr) should therefore satisfy the following formula (3): ##EQU18##
  • an average peak interval (Sm), which is a parameter representing the surface roughness of the Fe-Ni alloy sheet is necessary to limit the value of an average peak interval (Sm), which is a parameter representing the surface roughness of the Fe-Ni alloy sheet, within an appropriate range.
  • the average peak interval (Sm) is a surface roughness of a sectional curve, as expressed by the following formula: ##EQU19## where, Sm 1 , Sm 2 : peak interval, and
  • n number of peaks.
  • the values of the surface roughness in two directions of the Fe-Ni alloy sheet should satisfy the following formula (5): ##EQU20## where, Ra(L): center-line mean roughness of the alloy sheet in the rolling direction,
  • Ra(C) center-line mean roughness of the alloy sheet in the crosswise direction to the rolling direction
  • Rkr(C) kurtosis of the alloy sheet in the crosswise direction to the rolling direction.
  • the average peak interval (Sm) of the Fe-Ni alloy sheet is causing the average peak interval (Sm) of the Fe-Ni alloy sheet to satisfy the above-mentioned formula (4), and causing the center-line mean roughness (Ra) and the kurtosis (Rkr) in the two directions of the Fe-Ni alloy sheet to satisfy the above-mentioned formula (5).
  • the average peak interval (Sm) in two directions of the Fe-Ni alloy sheet should satisfy the following formula (6), in addition to satisfying the above-mentioned formulae (4) and (5):
  • Sm(C) average peak interval of the alloy sheet in the crosswise direction to the rolling direction.
  • effective measures include optimalization of the average angle of inclination (R ⁇ a) of the roughness curve of the Fe-Ni alloy sheet and reduction of the sulfur (S) content.
  • FIG. 3 is graph illustrating the relationship between the sulfur content and the annealing temperature of an Fe-Ni alloy sheet for a shadow mask having a chemical composition, a silicon segregation rate, a center-line mean roughness (Ra), a kurtosis (Rkr) and an average angle of inclination (R ⁇ a) of the roughness curve, all within the scope of the present invention, in the case where 30 flat masks made of the Fe-Ni alloy sheet are piled up and annealed, which relationship exerts an important effect on seizure of the flat mask during annealing thereof.
  • the mark " ⁇ " indicates non-occurrence of seizure of the flat mask; the mark “ ⁇ ” indicates occurrence of seizure on part of the surface of the flat mask; and the mark “x” indicates occurrence of seizure over the entire surface of the flat mask.
  • the Fe-Ni alloy sheet for a shadow mask of the present invention is manufactured by preparing a material sheet having the chemical composition and the silicon segregation rate described above, and imparting a prescribed surface roughness mentioned above to the both surfaces of the material sheet by mean of a pair of dull rolls during the final rolling, i.e., during the final cold rolling or the final temper rolling.
  • the above-mentioned dull roll can be obtained by imparting a prescribed surface roughness to a roll not as yet surface-worked by means of the electrospark working or the laser working, or more preferably, the shot blast method.
  • steel grits having a particle size within a range of from #120 (JIS symbol: G120) to #240 (JIS symbol: G240) and a hardness (Hv) within a range of from 400 to 950 as the shots and to set a relatively low shooting energy of the steel grits onto the roll surface for the #120 steel grits, and a relatively high shooting energy for the #240 steel grits.
  • a material roll for the dull roll should preferably be made of SKH (JIS symbol: G4403) and have a hardness (Hs) of from 85 to 95, a diameter of from 100 to 125 mm, and a center-line mean roughness of up to 0.1 ⁇ m.
  • Hs hardness
  • a plurality of dull rolls are manufactured from the respective material rolls by the shot blast method. These plurality of dull rolls have different values of the surface roughness, these values of the surface roughness varying within the following ranges the center-line mean roughness (Ra) of from 0.4 to 1.5 ⁇ m, the kurtosis (Rkr) of from 3 to 12, and as required, the average peak interval (Sm) of from 40 to 200 ⁇ m.
  • the above-mentioned dull rolls are incorporated into a final cold rolling mill or a final temper rolling mill, and a prescribed surface roughness is imparted to the surface of the material sheet of the Fe-Ni alloy sheet.
  • the sheet is passed through the dull rolls at least twice, with a reduction ratio of at least 10% per one pass.
  • a rolling oil having a viscosity within a range of from 7 to 8 CST at a temperature within a range of from 10° to 50° C. is used, and this rolling oil is supplied onto the surfaces of the dull rolls under a pressure within a range of
  • the supply amount of the rolling oil is limited to the above-mentioned range because, with a supply amount of the rolling oil of under 0.1 kg/cm 2 , a prescribed surface roughness is not imparted to the surface of the material sheet, and with a supply amount of the rolling oil of over 0.5 kg/cm 2 , irregularities are caused in the surface roughness imparted to the material sheet.
  • Preferable rolling conditions by the dull rolls include a rolling speed within a range of from 30 to 200 m/minute, a tension of the material sheet within a range of from 15 to 45 kg/mm 2 on the downstream side of the dull rolls, a tension of the materials sheet within a range of from 10 to 40 kg/mm 2 on the upstream side of the dull rolls, and a reduction force per unit sheet width within a range of from 0.15 to 0.25 tons/mm.
  • the tension of the material sheet during the rolling thereof by the dull rolls is set within the ranges as described above because this enables to increase flatness of the Fe-Ni alloy sheet for a shadow mask.
  • the prescribed surface roughness is imparted to the material sheet as described above.
  • the material sheet Prior to imparting the prescribed surface roughness to the material sheet, the material sheet may be subjected to an intermediate annealing to decrease hardness of the material sheet, or to a stress relieving annealing to remove a residual stress in the material sheet after imparting the prescribed surface roughness to the material sheet.
  • the above-mentioned intermediate annealing and stress relieving annealing are applied in a continuous annealing furnace for soft steel having a gaseous atmosphere with a hydrogen concentration of from 5 to 15% and a dew point of from -10° to -30° C., or in a bright annealing furnace having a gaseous atmosphere with a hydrogen concentration of from 15 to 100% and a dew point of from -20 to -60° C.
  • Ingots each weighing seven tons were prepared by the ladle refining, which comprised alloys A to E, respectively, each having the chemical composition as shown in Table 1 and containing non-metallic inclusions having the chemical composition as shown in Table 2.
  • FIG. 5 is the CaO-Al 2 O 3 -MgO ternary phase diagram illustrating the chemical compositions of non-metallic inclusions contained in each of the alloys A to E.
  • the ladle used in the ladle refining of the above-mentioned ingots comprised an MgO--CaO refractory containing up to 40 wt. % CaO, and the molten slag used was a CaO-Al 2 O 3 -MgO slag having a ratio of (CaO)/ ⁇ (CaO)+(Al 2 O 3 ) ⁇ of at least 0.45, and containing up to 25 wt. % MgO, up to 15 wt. % SiO 2 , and up to 3 wt. % oxide of a metal having an oxygen affinity lower than that of silicon.
  • each of the thus prepared ingots was acarfed, heated at a temperature of 1,200° C. for 20 hours, and subjected to a primary slabbing at a sectional reduction rate of 60% to prepare a slab. Then, each of the thus prepared slabs was heated at a temperature of 1,200° C. for 20 hours, subjected to a secondary slabbing at a sectional reduction rate of 45%, and slowly cooled to prepare a finished slab. From each of the thus prepared finished slabs comprising the alloys A to E, Fe-Ni alloy sheets for a shadow mask Nos. 1 to 10 as shown in Table 3 were manufactured, respectively, in accordance with a method described later: The alloy sheets Nos.
  • the alloy sheet No. 7 was manufactured from the slab comprising the alloy B; the alloy sheet No. 8 was manufactured from the slab comprising the alloy C; the alloy sheet No. 9 was manufactured from the slab comprising the alloy D; and the alloy sheet No. 10 was manufactured from the slab comprising the alloy E.
  • the finished slab comprising the alloy A, from which the alloy sheet No. 2 was manufactured was prepared, unlike the above-mentioned preparation of the finished slabs A to D, by heating the ingot at a temperature of 1,200° C. for 15 hours, subjecting the ingot to a primary slabbing at a sectional reduction rate of 78%, and slow cooling.
  • each of the slabs was scarfed, and an anti-oxidation agent was applied onto the surface of the slab. Then, the slab was heated to a temperature of 1,100° C. and hot-rolled to prepare a hot coil under the hot-rolling conditions including a total reduction ratio at a temperature of at least 1,000° C. of 82%, a total reduction ratio at a temperature of at least 850° C. of 98%, and a coiling temperature of the hot coil of from 550° to 750° C.
  • Each of the thus prepared hot coils was descaled, and subjected to repeated cycles of a cold rolling and an annealing to prepare a material sheet for the Fe-Ni alloy sheet for a shadow mask. Then, upon the final temper rolling, a surface roughness as shown in Table 3 was imparted by means of the dull rolls described later, which were incorporated in the temper rolling mill, to the both surfaces of the material sheet, thereby manufacturing each of the Fe-Ni alloy sheets Nos. 1 to 10 for a shadow mask having a thickness of 0.25 mm.
  • non-metallic inclusions contained in each of the alloys A to E had a melting point of at least 1,600° C., and mainly comprised spherical inclusions having a thickness of up to 3 ⁇ m. This inhibited the formation of pits on the hole surface caused by non-metallic inclusions during the etching-piercing of the Fe-Ni alloy sheet, and almost minimized the problem of contamination of the etching solution caused by the entanglement of linear inclusions into the etching solution.
  • the above-mentioned distribution of the non-metallic inclusions was evaluated by the following method: Enlarging the section of the alloy sheet along the rolling direction to 800 magnifications through a microscope, and measuring a thickness in the sheet thickness direction and a length in the rolling direction of all non-metallic inclusions within the field of vision. The measured sections had a total area of 60 mm 2 . The values of thickness of the spherical inclusions and the linear inclusions in the sheet thickness direction were classified by size to evaluate the above-mentioned distribution in terms of the number of inclusions per mm 2 .
  • the spherical inclusions are those having a ratio of length to thickness of inclusions of up to 3, i.e., (length/thickness) ⁇ 3, and the linear inclusions are those having a ratio of length to thickness of inclusions of over 3, i.e., (length/thickness)>3.
  • the dull roll was manufactured as follows: Steel grits having a particle size of #120 (JIS symbol: G120) and a hardness (Hv) of from 400 to 950 were shot by the shot blast method onto the surfaces of a material roll with a smooth surface made of SKH (JIS symbol: G4403) and having a hardness (Hs) of 90 and a diameter of 120 mm, thereby manufacturing, from the respective material rolls, a plurality of dull rolls having a surface roughness including a center-line mean roughness (Ra) of from 0.30 to 1.20 ⁇ m and a kurtosis (Rkr) of from 3 to 12.
  • Ra center-line mean roughness
  • Rkr kurtosis
  • the reduction ratio for the first pass of the alloy sheet was set at 18.6%, the reduction ratio for the second pass, at 12.3%, and the total reduction ratio, at 28.6%.
  • a rolling oil having a viscosity of 7.5 CST was employed with a supply amount of rolling oil of 0.4 kg/cm 2 .
  • the other rolling conditions included a rolling speed of 100 m/minute, a tension of the alloy sheet of 20 kg/mm 2 on the downstream side of the dull rolls, a tension of the alloy sheet of 15 kg/mm 2 on the upstream side of the dull rolls, and a reduction force per unit sheet width of 0.20 tons/mm.
  • the silicon segregation rate in the surface portion of the Fe-Ni alloy sheets was investigated by means of a mapping analyzer based on the EPMA (abbreviation of Electron Probe Micro Analyzer).
  • a flat mask was manufactured by forming holes etching-piercing on each of the alloy sheets Nos. 1 to 10 through the etching-piercing to investigate etching pierceability, and the surfaces of the holes formed by the etching-piercing were observed by means of a scanning type electron microscope to investigate the presence of pits on the hole surfaces. Contamination of the etching solution was evaluated from the amount of residual slag in the etching solution after the etching-piercing. Then, 30 flat masks were piled up and annealed at a temperature of 900° C. to investigate the occurrence of seizure of the flat masks. The results are shown in Table 3.
  • the mark " ⁇ " represents the case where the diameter and the shape of the hole formed by the etching-piercing show slight irregularities, with however no practical difficulty, and etching pierceability is excellent; the mark “ ⁇ ” represents the case where irregularities are produced in the hole diameter and the hole shape; and the mark “x” represents the case where serious irregularities are produced in the hole diameter and the hole shape.
  • the mark “ ⁇ ” represents non-occurrence of seizure of the flat mask
  • the mark “ ⁇ ” represents the occurrence of seizure of the flat mask on part of surface thereof
  • the mark “x” represents the occurrence of seizure of the flat mask over the entire surface thereof.
  • the alloy sheets Nos. 1, 7 and 10 have a silicon content, a silicon segregation rate, and a surface roughness, all within the scope of the present invention.
  • alloy sheets Nos. 1, 7 and 10 are therefore excellent in etching pierceability and no seizure of the flat mask is produced during the annealing thereof.
  • the silicon segregation rate is large outside the scope of the present invention for the alloy sheet No. 2; the silicon content is small outside the scope of the present invention for the alloy sheet No. 8; and the silicon content is large outside the scope of the present invention for the alloy sheet No. 9.
  • the alloy sheet No. 2 has therefore a slightly poor etching pierceability, with occurrence of seizure of the flat mask on part of the surface thereof; the alloy sheet No. 8, while being excellent in etching pierceability, suffers from seizure of the flat mask over the entire surface thereof; and the alloy sheet No. 9 has a low etching pierceability, with no occurrence of seizure of the flat mask.
  • the center-line mean roughness (Ra) is large outside the scope of the present invention for the alloy sheet No. 3; the value of "(Ra)+1/15(Rkr)-0.6" is outside the scope of the present invention for the alloy sheet No. 4; the kurtosis (Rkr) is small outside the scope of the present invention for the alloy sheet No. 5; and the kurtosis (Rkr) is large outside the scope of the present invention for the alloy sheet No. 6.
  • the alloy sheet No. 3 is therefore has a low etching pierceability, with no occurrence of seizure of the flat mask; the alloy sheets Nos. 4 and 5, while being excellent in etching pierceability, suffer from seizure of the flat mask over the entire surface thereof; and the alloy sheet No. 6 has a slightly poor etching pierceability, with occurrence of seizure of the flat mask on part of the surface thereof.
  • a material sheet for the Fe-Ni alloy sheet for a shadow mask was prepared by repeating a cycle comprising a cold rolling and an annealing in the same manner as in Example 1 with the use of the respective hot coil from which the alloy sheets Nos. 1, 7 and 10 were prepared in Example 1. Then, upon the final temper rolling, a surface roughness as shown in Table 4 was imparted to the both surfaces of the thus prepared material sheet by means of the dull rolls described later, which were incorporated in the temper rolling mill, thereby manufacturing each of the Fe-Ni alloy sheets Nos. 11 to 22 for a shadow mask having a thickness of 0.25 mm. More specifically, the alloy sheets Nos. 11 to 15 were manufactured from the hot coil for the alloy sheet No. 1; the alloy sheets Nos. 16 to 21 were manufactured from the hot coil for the alloy sheet No. 7; and the alloy sheet No. 22 was manufactured from the hot coil for the alloy sheet No. 10.
  • the dull rolls had different values of surface roughness from each other, which included a center-line mean roughness (Ra) of from 0.45 to 1.00 ⁇ m and a kurtosis (Rkr) of from 3 to 12.
  • Ra center-line mean roughness
  • Rkr kurtosis
  • the manufacturing conditions of the dull rolls and the rolling conditions of the material sheet for the Fe-Ni alloy sheet by the dull rolls were the same as those in Example 1.
  • the alloy sheets Nos. 11 and 22 have a silicon content, a silicon segregation rate and a surface roughness all within the scope of the present invention.
  • the alloy sheet No. 11 has a sulfur content of 0.0005 wt. % and the alloy sheet No. 22 has a sulfur content of 0.0006 wt. %.
  • alloy sheets Nos. 11 and 22 are therefore excellent in etching pierceability, with no occurrence of seizure of the flat mask even at an annealing temperature of 950° C.
  • the alloy sheet No. 21 has in contrast a silicon content, a silicon segregation rate and a surface roughness all within the scope of the present invention, but has a sulfur content of 0.0025 wt. % larger than in the alloy sheets Nos. 11 and 22.
  • the alloy sheet No. 21 is therefore excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof at an annealing temperature of 950° C.
  • the alloy sheet No. 15 while having the center-line mean roughness (Ra) and the kurtosis (Rkr) in two directions are large outside the scope of the present invention, with the other conditions within the scope of the present invention, is excellent in etching pierceability, and shows no occurrence of seizure of the flat mask at an annealing temperature of 900° C.
  • the alloy sheet No. 14 in contrast, having a center-line mean roughness (Ra) and a kurtosis (Rkr) in two directions similar to those of the alloy sheet No. 15, is excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof at an annealing temperature of 950° C., which is higher than that in the alloy sheet No. 15.
  • the alloy sheet No. 12 in which the values of center-line mean roughness (Ra) in two directions are large outside the scope of the present invention, but all the other conditions are within the scope of the present invention, is excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof because of the high annealing temperature of 950° C.
  • the alloy sheet No. 13 in which the values of kurtosis (Rkr) in two directions are large outside the scope of the present invention, but all the other conditions are within the scope of the present invention, is excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof because of the high annealing temperature of 950° C., as in the alloy sheet No. 12.
  • the average angle of inclination (R ⁇ a) of the roughness curve is small outside the scope of the present invention, but the other conditions are within the scope of the present invention.
  • the average angle of inclination (R ⁇ a) of the roughness curve is large outside the scope of the present invention, but the other conditions are within the scope of the present invention.
  • the alloy sheet No. 20 in which all the conditions including the average angle of inclination (R ⁇ a) of the roughness curve are within the scope of the present invention, shows no seizure of the flat mask even at an annealing temperature of 900° C.
  • a material sheet for the Fe-Ni alloy sheet for a shadow mask was prepared by repeating a cycle comprising a cold rolling and an annealing in the same manner as in Example 1 with the use of the respective hot coil from which the alloy sheets Nos. 1, 2 and 7 to 10 were prepared in Example 1. Then, upon the final temper rolling, a surface roughness as shown in Table 5 was imparted to the both surfaces of the thus prepared material sheet by means of the dull rolls described later, which were incorporated in the temper rolling mill, thereby manufacturing each of the Fe-Ni alloy sheets Nos. 23 to 35 for a shadow mask having a thickness of 0.25 mm. More specifically, the alloy sheets Nos. 23 and 25 to 31 were manufactured from the hot coil for the alloy sheet No. 1; the alloy sheet No.
  • the alloy sheet No. 24 was manufactured from the hot coil for the alloy sheet No. 2; the alloy sheet No. 32 was manufactured from the hot coil for the alloy sheet No. 7; the alloy sheet No. 33 was manufactured from the hot coil for the alloy sheet No. 8; the alloy sheet No. 34 was manufactured from the hot coil for the alloy sheet No. 9; and the alloy sheet No. 35 was manufactured from the hot coil for the alloy sheet No. 10.
  • the dull rolls had different values of surface roughness from each other, which included a center-line mean roughness (Ra) of from 0.30 to 1.20 ⁇ m, a kurtosis (Rkr) of from 3 to 12, and an average peak interval (Sm) of from 30 to 210 ⁇ m of the sectional curve.
  • Ra center-line mean roughness
  • Rkr kurtosis
  • Sm average peak interval
  • the manufacturing conditions of the dull rolls and the rolling conditions of the material sheet for the Fe-Ni alloy sheet by the dull rolls were the same as those in Example 1.
  • the silicon segregation rate of each of the alloy sheets Nos. 23 to 35 was investigated in the same manner as in Example 1. Then, a flat mask was manufactured by forming holes on each of the alloy sheets Nos. 23 to 35 through the etching-piercing to investigate etching pierceability in the same manner as in Example 1. Then, 30 flat masks were piled up and annealed at a temperature of 900° C. to investigate the occurrence of seizure of the flat masks during the annealing thereof. The results are shown in Table 5.
  • the alloy sheets Nos. 23, 31, 32 and 35 have a silicon content, a silicon segregation rate, and a surface roughness all within the scope of the present invention.
  • alloy sheets Nos. 23, 31, 32 and 35 are therefore excellent in etching pierceability, and have no seizure of the flat mask during the annealing thereof.
  • the alloy sheets Nos. 31, 32 and 35 which have the values of average peak interval in two directions within the scope of the present invention, are particularly excellent in etching pierceability.
  • the alloy sheets Nos. 24, 33 and 34 in contrast, have a surface roughness within the scope of the present invention.
  • the alloy sheet No. 24 has a large silicon segregation rate outside the scope of the present invention
  • the alloy sheet No. 33 has a small silicon content outside the scope of the present invention
  • the alloy sheet No. 34 has a large silicon content outside the scope of the present invention.
  • the alloy sheet No. 24 is slightly poor in etching pierceability with the occurrence of seizure of the flat mask on part of the surface thereof; the alloy sheet No. 33, while being very excellent in etching pierceability, suffers from the occurrence of seizure of the flat mask over the entire surface thereof; and the alloy sheet No. 34 has a very poor etching pierceability, with however no occurrence of seizure of the flat mask.
  • the alloy sheets Nos. 25 to 28 have a silicon content and a silicon segregation rate within the scope of the present invention.
  • the alloy sheet No. 25 has a large center-line mean roughness (Ra) outside the scope of the present invention
  • the alloy sheet No. 26 has a value of "(Ra)+1/15(Rkr)-0.6" outside the scope of the present invention
  • the alloy sheet No. 27 has a small kurtosis (Rkr) outside the scope of the present invention
  • the alloy sheet No. 28 has a large kurtosis (Rkr) outside the scope of the present invention.
  • the alloy sheet No. 25 has a low etching pierceability with no occurrence of seizure of the flat mask; the alloy sheets Nos. 26 and 27, while being very excellent in etching pierceability, suffer from occurrence of seizure of the flat mask over the entire surface thereof; and the alloy sheet No. 28 has a slightly poor etching pierceability with the occurrence of seizure of the flat mask on part of the surface thereof.
  • a material sheet for the Fe-Ni alloy sheet for a shadow mask was prepared by repeating a cycle comprising a cold rolling and an annealing in the same manner as in Example 1 with the use of the respective hot coil from which the alloy sheets No. 1, 7 and 10 were prepared in Example 1. Then, upon the final temper rolling, a surface roughness as shown in Table 6 was imparted to the both surfaces of the thus prepared material sheet by means of the dull rolls described later, which were incorporated into the temper rolling mill, thereby manufacturing each of the Fe-Ni alloy sheets Nos. 36 to 47 for a shadow mask having a thickness of 0.25 mm. More specifically, the alloy sheets Nos. 36 to 40 were manufactured from the hot coil for the alloy sheet No. 1; the alloy sheets Nos. 41 to 46 were manufactured from the hot coil for the alloy sheet No. 7; and the alloy sheet No. 47 was manufactured from the hot coil for the alloy sheet No. 10.
  • the dull rolls had different values of surface roughness from each other, which included a center-line mean roughness (Ra) of from 0.45 to 1.00 ⁇ m, a kurtosis (Rkr) of from 3 to 12, and an average peak interval (Sm) of from 40 to 200 ⁇ m of the sectional curve.
  • Ra center-line mean roughness
  • Rkr kurtosis
  • Sm average peak interval
  • the manufacturing conditions of the dull rolls and the rolling conditions of the material sheet for the Fe-Ni alloy sheet by the dull rolls were the same as those in Example 1.
  • the alloy sheets Nos. 36 and 47 have a silicon content, a silicon segregation rate and a surface roughness all within the scope of the present invention.
  • the alloy sheet No. 36 has a sulfur content of 0.0005 wt. % and the alloy sheet No. 47 has a sulfur content of 0.0006 wt. %.
  • alloy sheets Nos. 36 and 47 are therefore very excellent in etching pierceability, with no occurrence of seizure of the flat mask even at an annealing temperature of 950° C.
  • the alloy sheet No. 46 has in contrast a silicon content, a silicon segregation rate and a surface roughness all within the scope of the present invention, but has a sulfur content of 0.0025 wt. %, which is larger than those in the alloy sheets Nos. 36 and 47.
  • the alloy sheet No. 46 is therefore very excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof at an annealing temperature of 950° C.
  • seizure of the flat mask can be prevented by reducing the sulfur content if a high annealing temperature of the flat mask is to be maintained.
  • the alloy sheet No. 40 in which the center-line mean roughness (Ra) and the kurtosis (Rkr) in two directions are large outside the scope of the present invention and the other conditions are within the scope of the present invention, is very excellent in etching pierceability and shows no occurrence of seizure of the flat mask at an annealing temperature of 900° C.
  • the alloy sheet No. 39 shows occurrence of seizure of the flat mask on part of the surface thereof at an annealing temperature of 950° C. higher than that in the alloy sheet No. 40.
  • the alloy sheet No. 37 in which the values of center-line mean roughness (Ra) in two directions are large outside the scope of the present invention, but all the other conditions are within the scope of the present invention, is very excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof because of the high annealing temperature of 950° C.
  • the alloy sheet No. 38 in which the values of kurtosis (Rkr) in two directions are large outside the scope of the present invention, but all the other conditions are within the scope of the present invention, is excellent in etching pierceability with however the occurrence of seizure of the flat mask on part of the surface thereof because of the high annealing temperature of 950° C. as in the alloy sheet No. 37.
  • the average angle of inclination (R ⁇ a) of the roughness curve is small outside the scope of the present invention, but all the other conditions are within the scope of the present invention.
  • the average angle of inclination (R ⁇ a) of the roughness curve is large outside the scope of the present invention, but all the other conditions are within the scope of the present invention.
  • the alloy sheet No. 45 in contrast, in which all the conditions including the average angle of inclination (R ⁇ a) of the roughness curve are within the scope of the present invention, shows no seizure of the flat mask even at an annealing temperature of 900° C.
  • the critical annealing temperature at which seizure of the flat mask does not occur can be increased by maintaining the average angle of inclination (R ⁇ a) of the roughness curve within the scope of the present invention.
  • an Fe-Ni alloy sheet for a shadow mask which is excellent in etching pierceability and permits certain prevention of seizure during the annealing of the Fe-Ni alloy sheet, by limiting the silicon content, the silicon segregation rate and the surface roughness within appropriate ranges, thus providing industrially useful effects.

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JP2187295A JPH0762217B2 (ja) 1990-07-17 1990-07-17 シャドウマスク用Ｆｅ―Ｎｉ合金薄板およびその製造方法
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US5501749A (en) * 1992-01-24 1996-03-26 Nkk Corporation Method for producing a thin Fe-Ni alloy for shadow mask thereof
US5562783A (en) * 1992-01-24 1996-10-08 Nkk Corporation Alloy sheet for shadow mask
US5605582A (en) * 1992-01-24 1997-02-25 Nkk Corporation Alloy sheet having high etching performance
US5620535A (en) * 1992-01-24 1997-04-15 Nkk Corporation Alloy sheet for shadow mask
GB2332650A (en) * 1997-11-13 1999-06-30 Dainippon Printing Co Ltd Etching photoresist patterned metal substrate with specific surface roughness
WO2000077269A1 (fr) * 1999-06-10 2000-12-21 Nippon Yakin Kogyo Co., Ltd. Materiau a base de fe-ni pour masque perfor
WO2002042508A1 (fr) * 2000-11-21 2002-05-30 Nippon Yakin Kogyo Co., Ltd. Materiau en alliage nickel-fer destine a un masque perfore parfaitement adapte a la gravure
CN109715834A (zh) * 2016-09-15 2019-05-03 日立金属株式会社 金属掩模用原材料及其制造方法

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DE69425189T2 (de) * 1993-05-28 2001-03-22 Nippon Kokan Kk Bleche aus Eisen-Nickel Legierung für Schattenmaske
JPH09143625A (ja) * 1995-11-27 1997-06-03 Nikko Kinzoku Kk シャドウマスク用Ｆｅ−Ｎｉ系合金素材
JP2000123754A (ja) * 1998-10-20 2000-04-28 Dainippon Printing Co Ltd シャドウマスクおよびシャドウマスク用基材

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US5456771A (en) * 1992-01-24 1995-10-10 Nkk Corporation Thin Fe-Ni alloy sheet for shadow mask
US5501749A (en) * 1992-01-24 1996-03-26 Nkk Corporation Method for producing a thin Fe-Ni alloy for shadow mask thereof
US5503693A (en) * 1992-01-24 1996-04-02 Nkk Corporation Method for producing a thin Fe-Ni alloy for shadow mask
US5520755A (en) * 1992-01-24 1996-05-28 Nkk Corporation Method for manufacturing thin Fe--Ni alloy sheet for shadow mask
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US5605582A (en) * 1992-01-24 1997-02-25 Nkk Corporation Alloy sheet having high etching performance
US5605581A (en) * 1992-01-24 1997-02-25 Nkk Corporation Thin Fe-Ni alloy sheet for shadow mask and method for manufacturing thereof
US5620535A (en) * 1992-01-24 1997-04-15 Nkk Corporation Alloy sheet for shadow mask
US5628841A (en) * 1992-01-24 1997-05-13 Nkk Corporation Thin Fe-Ni alloy sheet for shadow mask
US5637161A (en) * 1992-01-24 1997-06-10 Nkk Corporation Method of producing an alloy sheet for a shadow mask
US5453138A (en) * 1992-02-28 1995-09-26 Nkk Corporation Alloy sheet
GB2332650A (en) * 1997-11-13 1999-06-30 Dainippon Printing Co Ltd Etching photoresist patterned metal substrate with specific surface roughness
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GB2332650B (en) * 1997-11-13 2002-01-09 Dainippon Printing Co Ltd Etching substrate material,etching process,and article obtained by etching
US6620554B1 (en) 1997-11-13 2003-09-16 Dai Nippon Printing Co., Ltd. Etching substrate material, etching process, and article obtained by etching
EP1225240A4 (de) * 1999-06-10 2006-08-30 Nippon Yakin Kogyo Co Ltd Material auf fe-ni-basis für lochmaske
EP1225240A1 (de) * 1999-06-10 2002-07-24 Nippon Yakin kogyo Co., Ltd. Material auf fe-ni-basis für lochmaske
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WO2000077269A1 (fr) * 1999-06-10 2000-12-21 Nippon Yakin Kogyo Co., Ltd. Materiau a base de fe-ni pour masque perfor
EP1352981A1 (de) * 2000-11-21 2003-10-15 Nippon Yakin kogyo Co., Ltd. Eisen-nickel-legierung für schattenmasken mit hervorragender eignung für das ätzen
US20040037732A1 (en) * 2000-11-21 2004-02-26 Natsuki Shiga Iron-nickel alloy material for shadow mask with excellent suitability for etching
EP1352981A4 (de) * 2000-11-21 2005-12-21 Nippon Yakin Kogyo Co Ltd Eisen-nickel-legierung für schattenmasken mit hervorragender eignung für das ätzen
US7014721B2 (en) 2000-11-21 2006-03-21 Nippon Yakin Kogyo Co., Ltd. Iron-nickel alloy material for shadow mask with excellent suitability for etching
WO2002042508A1 (fr) * 2000-11-21 2002-05-30 Nippon Yakin Kogyo Co., Ltd. Materiau en alliage nickel-fer destine a un masque perfore parfaitement adapte a la gravure
CN109715834A (zh) * 2016-09-15 2019-05-03 日立金属株式会社 金属掩模用原材料及其制造方法
EP3514249A4 (de) * 2016-09-15 2020-02-12 Hitachi Metals, Ltd. Metallmaskenmaterial und verfahren zur herstellung davon

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KR920002815A (ko) 1992-02-28
DE4123567C2 (de) 1995-11-23
KR930009412B1 (ko) 1993-10-04
FR2664908A1 (fr) 1992-01-24

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