US3743584A - Acid bright copper plating bath - Google Patents

Acid bright copper plating bath Download PDF

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Publication number
US3743584A
US3743584A US00149335A US3743584DA US3743584A US 3743584 A US3743584 A US 3743584A US 00149335 A US00149335 A US 00149335A US 3743584D A US3743584D A US 3743584DA US 3743584 A US3743584 A US 3743584A
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US
United States
Prior art keywords
acid
liter
copper
compounds
electrolyte
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00149335A
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English (en)
Inventor
H Todt
W Clauss
W Dahms
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer Pharma AG
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Schering AG
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Publication date
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Publication of US3743584A publication Critical patent/US3743584A/en
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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D241/00Heterocyclic compounds containing 1,4-diazine or hydrogenated 1,4-diazine rings
    • C07D241/36Heterocyclic compounds containing 1,4-diazine or hydrogenated 1,4-diazine rings condensed with carbocyclic rings or ring systems
    • C07D241/38Heterocyclic compounds containing 1,4-diazine or hydrogenated 1,4-diazine rings condensed with carbocyclic rings or ring systems with only hydrogen or carbon atoms directly attached to the ring nitrogen atoms
    • C07D241/46Phenazines
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/0683Polycondensates containing six-membered rings, condensed with other rings, with nitrogen atoms as the only ring hetero atoms
    • C08G73/0694Polycondensates containing six-membered rings, condensed with other rings, with nitrogen atoms as the only ring hetero atoms with only two nitrogen atoms in the ring, e.g. polyquinoxalines

Definitions

  • the invention relates to new polymeric phenazonium compounds, methods for their production, as well as their use in acid electrolytes for the deposition of bright, leveling copper coatings.
  • an acid copper electrolyte which is characterized by a content of at least one compound of the general formula wherein R R,, R R R R R R and R, are identical or different and represent hydrogen, a low alkyl or possibly substituted aryl, and R and R represent moreover monomeric or polymeric phenazonium radicals, A is an acid radical, and n an integer from 2 to 100, preferably from 4 to 20.
  • An aryl radical may be, for example, phenyl, which may be substituted by methyl, ethyl, methoxy or ethoxy, etc.
  • acid radicals there enter into consideration, for example, those of hydro-chloric acid (Cl'), sulfuric acid (HSOf), nitric acid (NO and acetic acid (Cl-[,coo), etc. a
  • the radicals R and R may signify moreover, for example phenazonium radicals of the parent substance.
  • the quantities in which the identified compounds must be added to the copper baths in order to obtain a clear improvement of the copper deposition are surprisingly very small and amount to about 0.0005 to 0.1 g/liter, preferably 0.0005 to 0.03 g/liter.
  • Table l contains examples for substances according to the invention and data on the preferred concentrations in the electrolyte.
  • the linkage points of the radicals are not fully clarified.
  • the linkage may take place, besides through the 3-position of the phenazonium radical, also through the disadvantages of the known acid copper baths and S-and the 7-position.
  • the invention therefore, further relates to a method for the production of the compounds identified above.
  • A is an acid radical, from which then the desired reaction products are formed by diazotizing in acid solution and subsequent boiling down of the resulting diazonium salts.
  • the diazotizing of the amino compounds is effected in sulfuric acid, hydrochloric acid, or acetic acid solution. These acids then form the above-mentioned acid radical A.
  • diazotizing agents that are suitable are sodium nitrite or nitrosylsulfuric acid, etc.
  • the so-called boiling down of the formed diazonium salts may take place at temperatures of about 5 to C, preferably about 10 to 25 C.
  • reaction products precipitate from the acid reaction solution or can be precipitated therefrom by neutralization with bases, e.g., ammonia, soda or potash lye. Isolation is then effected by common methods.
  • bases e.g., ammonia, soda or potash lye.
  • Copper sulfate CuSo 5 H,O -260 g/liter Sulfuric'acid l-l SO 20-85 g/liter instead of copper sulfate, at least in part, other copper salts may be used.
  • the sulfuric acid may be replaced partly or wholly by fluoroboric acid, phosphoric acid and/or other suitable acids.
  • the electrolyte may be chloride-free, or this being usually advantageous for improving the luster and the leveling, it may contain chlorides, such as, alkali chlorides or hydrochloric acid, in quantities of 0.001 to 0.2 g/liter.
  • the normally crystallinedull precipitate turns out bright in a wide current density range.
  • the cathodic current density may be increased by about 50 percent without the formation of flaws, in particular budding, in the range of high current densities. To attain a certain layer thickness, therefore, the time of exposure may be reduced accordingly and in a unit of given size more merchandise can be put through.
  • the substances according to the invention are also particularly suited for depositing haze-free and highbrighteners coatings in conjunction with other common luster-formers and/or wetting agents. Electrolytes containing the substances of Table I show also excellent ageing. Even after a current passage of 200-400 Ah/ltr and more, the copper coatings turn out just as highly lustrous, leveling and ductile as in a fresh batch of electrolyte. No harmful decomposition products of these substances are formed that would require purification, for example, with active carbon.
  • Organic thio compounds with water solubilizing groups 0.0005-0.2 g/liter, preferably0.0l-0.l g/liter.
  • Table II below contains examples of oxygencontaining, high-molecular compounds and their preferred concentrations.
  • Table III contains examples of organic thio compounds with water-colubilizing groups and their preferred concentrations.
  • the applicable cathodic current density is increased up to 50 percent
  • the leveling effect i.e., the reduction of roughness of the ground material, is increased (measured at a layer thickness of 24 microns) from 40-50 percent to about 70-80 percent.
  • the concentration ratios of the individual compounds in the copper electrolyte may vary within wide limits. It has proved favorable to have a weight ratio of the substances, listed by way of example in Tables I, II and Ill, of about I l 2 to about I 200 20.
  • EXAMPLE 2 To a copper bath of the composition 200 g/liter copper sulfate (CuSO, 5 H 0) 60 g/liter sulfuric acid, concentrated 0.05 g/liter sodium chloride there are added as brighteners 0.6 g/liter polypropylene glycol and 0.02 g/liter sodium 3-mercaptopropane-l sulfonate.
  • CuSO copper sulfate
  • 5 H 0 sulfuric acid
  • concentrated 0.05 g/liter sodium chloride there are added as brighteners 0.6 g/liter polypropylene glycol and 0.02 g/liter sodium 3-mercaptopropane-l sulfonate.
  • an acid electrolyte for the deposition of bright copper coatings comprising (a) an oxygen containing high molecular weight compound selected from the group consisting of polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, stearic acid polyglycol ester, oleic acid polycol ester, and nonylphenol polyglycol ester; (b) an organic thio compound selected from the group consisting of sodium salt of N N-diethyl-dithiocarbamic acid (sulfopropyl ester), sodium mercaptobenzothiazol-S-propanesulfonate, sodium S-mercapto-propane-l-sulfonate, bis-(S-sodium sulfopropyl)-disulfide, disodium salt of thiophosphoric acidacid-O-ethyl-bis-(sulfopropyl) ester, trisodium salt of thiophosphoric acid-tri-(sulfo
  • An electrolyte according to claim 2 characterized in that it additionally contains oxygen-containing, highmolecular compounds and organic thio compounds with water-solubilizing groups.
  • Electrolyte according to claim 3 characterized in that it contains the oxygen-containing, high-molecular compounds in quantities of 0.01 to 20.0 g/liter, preferably 0.02 to 8.0 g/liter and the organic thio compounds with water-solubilizlng groups in quantities of 0.0005 to 0.2 g/liter, preferably 0.01 to 0.1 g/liter.
  • An electrolyte for the deposition of bright copper coatings comprising at least one compound of the wherein R through R, are individually selected from the group-consisting of hydrogen, lower alkyl, aryl, and substituted aryl, R and R being additionally a monomeric or polymeric phenazonium radical; A is an acid radical; and n is an integer from 2 to 100.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Paints Or Removers (AREA)
  • Detergent Compositions (AREA)
US00149335A 1970-06-06 1971-06-02 Acid bright copper plating bath Expired - Lifetime US3743584A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2039831A DE2039831C3 (de) 1970-06-06 1970-06-06 Saures Bad zur galvanischen Abscheidung glänzender Kupferüberzüge
DE2028803A DE2028803C3 (de) 1970-06-06 1970-06-06 Polymere Phenazoniumverbindungen

Publications (1)

Publication Number Publication Date
US3743584A true US3743584A (en) 1973-07-03

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US00149335A Expired - Lifetime US3743584A (en) 1970-06-06 1971-06-02 Acid bright copper plating bath

Country Status (8)

Country Link
US (1) US3743584A (de)
AT (1) AT302764B (de)
CA (1) CA961494A (de)
CH (1) CH556347A (de)
DE (2) DE2039831C3 (de)
FR (1) FR2095876A5 (de)
GB (1) GB1357442A (de)
NL (1) NL173277C (de)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50104143A (de) * 1974-01-23 1975-08-16
US4376685A (en) * 1981-06-24 1983-03-15 M&T Chemicals Inc. Acid copper electroplating baths containing brightening and leveling additives
US4786746A (en) * 1987-09-18 1988-11-22 Pennsylvania Research Corporation Copper electroplating solutions and methods of making and using them
US4948474A (en) * 1987-09-18 1990-08-14 Pennsylvania Research Corporation Copper electroplating solutions and methods
US5433840A (en) * 1991-08-07 1995-07-18 Atotech Deutschland Gmbh Acid bath for the galvanic deposition of copper, and the use of such a bath
US5730854A (en) * 1996-05-30 1998-03-24 Enthone-Omi, Inc. Alkoxylated dimercaptans as copper additives and de-polarizing additives
US5849171A (en) * 1990-10-13 1998-12-15 Atotech Deutschland Gmbh Acid bath for copper plating and process with the use of this combination
EP1054080A2 (de) * 1999-05-17 2000-11-22 Shipley Company LLC Elektrolytische Kupferplattierungslösungen
US20040231995A1 (en) * 2003-05-23 2004-11-25 Kenji Murao Printed circuit boards and the methods of their production
WO2005049584A1 (en) * 2003-11-19 2005-06-02 Atotech Deutschland Gmbh Acidic bath for electrolytically depositing a copper deposit containing halogenated or pseudohalogenated monomeric phenazinium compounds
US20080142370A1 (en) * 2003-08-08 2008-06-19 Wolfgang Dahms Aqueous, Acidic Solution and Method for Electrolytically Depositing Copper Coatings as Well as Use of Said Solution
CN101899687A (zh) * 2010-08-03 2010-12-01 济南德锡科技有限公司 单剂染料型光亮酸性镀铜添加剂及其制备方法和应用
WO2012040417A1 (en) 2010-09-24 2012-03-29 Macdermid Acumen, Inc. Improved method of producing polymeric phenazonium compounds
US8735580B2 (en) 2010-09-24 2014-05-27 Andrew M. Krol Method of producing polymeric phenazonium compounds
US20150030873A1 (en) * 2013-07-23 2015-01-29 Chang Chun Petrochemical Co., Ltd. Electrolytic copper foil

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU559896B2 (en) * 1983-06-10 1987-03-26 Omi International Corp. Electrolytic copper depositing processes
DE4032864A1 (de) * 1990-10-13 1992-04-16 Schering Ag Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination
DE19758121C2 (de) * 1997-12-17 2000-04-06 Atotech Deutschland Gmbh Wäßriges Bad und Verfahren zum elektrolytischen Abscheiden von Kupferschichten
DE10261852B3 (de) 2002-12-20 2004-06-03 Atotech Deutschland Gmbh Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad
DE102005011708B3 (de) 2005-03-11 2007-03-01 Atotech Deutschland Gmbh Polyvinylammoniumverbindung und Verfahren zu deren Herstellung sowie diese Verbindung enthaltende saure Lösung und Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages
EP3483307B1 (de) 2017-11-09 2020-04-01 ATOTECH Deutschland GmbH Plattierungszusammensetzungen zur abscheiden zur elektrolytischen kupferabscheidung, deren verwendung und verfahren zur elektrolytischen abscheidung einer kupfer- oder kupferlegierungsschicht auf mindestens einer oberfläche eines substrats

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2707167A (en) * 1952-05-26 1955-04-26 Udylite Corp Electrodeposition of copper from an acid bath
US2707166A (en) * 1952-05-26 1955-04-26 Udylite Corp Electrodeposition of copper from an acid bath
US3267010A (en) * 1962-04-16 1966-08-16 Udylite Corp Electrodeposition of copper from acidic baths
US3328273A (en) * 1966-08-15 1967-06-27 Udylite Corp Electro-deposition of copper from acidic baths
US3502551A (en) * 1966-08-20 1970-03-24 Schering Ag Acid electrolyte for the deposition of bright,levelling copper coatings

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2707167A (en) * 1952-05-26 1955-04-26 Udylite Corp Electrodeposition of copper from an acid bath
US2707166A (en) * 1952-05-26 1955-04-26 Udylite Corp Electrodeposition of copper from an acid bath
US3267010A (en) * 1962-04-16 1966-08-16 Udylite Corp Electrodeposition of copper from acidic baths
US3328273A (en) * 1966-08-15 1967-06-27 Udylite Corp Electro-deposition of copper from acidic baths
US3502551A (en) * 1966-08-20 1970-03-24 Schering Ag Acid electrolyte for the deposition of bright,levelling copper coatings

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50104143A (de) * 1974-01-23 1975-08-16
US4376685A (en) * 1981-06-24 1983-03-15 M&T Chemicals Inc. Acid copper electroplating baths containing brightening and leveling additives
US4786746A (en) * 1987-09-18 1988-11-22 Pennsylvania Research Corporation Copper electroplating solutions and methods of making and using them
US4948474A (en) * 1987-09-18 1990-08-14 Pennsylvania Research Corporation Copper electroplating solutions and methods
US5849171A (en) * 1990-10-13 1998-12-15 Atotech Deutschland Gmbh Acid bath for copper plating and process with the use of this combination
US5433840A (en) * 1991-08-07 1995-07-18 Atotech Deutschland Gmbh Acid bath for the galvanic deposition of copper, and the use of such a bath
US5730854A (en) * 1996-05-30 1998-03-24 Enthone-Omi, Inc. Alkoxylated dimercaptans as copper additives and de-polarizing additives
EP1054080A2 (de) * 1999-05-17 2000-11-22 Shipley Company LLC Elektrolytische Kupferplattierungslösungen
EP1054080A3 (de) * 1999-05-17 2004-03-03 Shipley Company LLC Elektrolytische Kupferplattierungslösungen
US20040231995A1 (en) * 2003-05-23 2004-11-25 Kenji Murao Printed circuit boards and the methods of their production
US20080142370A1 (en) * 2003-08-08 2008-06-19 Wolfgang Dahms Aqueous, Acidic Solution and Method for Electrolytically Depositing Copper Coatings as Well as Use of Said Solution
WO2005049584A1 (en) * 2003-11-19 2005-06-02 Atotech Deutschland Gmbh Acidic bath for electrolytically depositing a copper deposit containing halogenated or pseudohalogenated monomeric phenazinium compounds
US20070108062A1 (en) * 2003-11-19 2007-05-17 Atotech Deutschland Gmbh Acidic bath for electrolytically depositing a copper deposit containing halogenated or pseudohalogenated monomeric phenazinium compounds
US7786303B2 (en) 2003-11-19 2010-08-31 Atotech Deutschland Gmbh Acidic bath for electrolytically depositing a copper deposit containing halogenated or pseudohalogenated monomeric phenazinium compounds
CN1882550B (zh) * 2003-11-19 2012-04-18 埃托特克德国有限公司 用于电解沉积铜沉积物的含有卤化或拟卤化的单体吩嗪鎓化合物的酸浴
CN101899687A (zh) * 2010-08-03 2010-12-01 济南德锡科技有限公司 单剂染料型光亮酸性镀铜添加剂及其制备方法和应用
WO2012040417A1 (en) 2010-09-24 2012-03-29 Macdermid Acumen, Inc. Improved method of producing polymeric phenazonium compounds
CN103270081A (zh) * 2010-09-24 2013-08-28 麦克德米德尖端有限公司 生产聚合的二甲基苯基吡唑酮鎓化合物的改良方法
US8691987B2 (en) 2010-09-24 2014-04-08 Andrew M. Krol Method of producing polymeric phenazonium compounds
US8735580B2 (en) 2010-09-24 2014-05-27 Andrew M. Krol Method of producing polymeric phenazonium compounds
CN103270081B (zh) * 2010-09-24 2014-12-03 麦克德米德尖端有限公司 生产聚合的二甲基苯基吡唑酮鎓化合物的改良方法
US20150030873A1 (en) * 2013-07-23 2015-01-29 Chang Chun Petrochemical Co., Ltd. Electrolytic copper foil
US9209485B2 (en) * 2013-07-23 2015-12-08 Chang Chun Petrochemical Co. Ltd. Electrolytic copper foil

Also Published As

Publication number Publication date
DE2039831C3 (de) 1979-09-06
CA961494A (en) 1975-01-21
NL7107804A (de) 1971-12-08
DE2028803A1 (de) 1971-12-16
DE2028803B2 (de) 1979-11-29
CH556347A (de) 1974-11-29
DE2039831A1 (de) 1972-01-05
NL173277B (nl) 1983-08-01
FR2095876A5 (de) 1972-02-11
AT302764B (de) 1972-10-25
NL173277C (nl) 1984-01-02
GB1357442A (en) 1974-06-19
DE2039831B2 (de) 1979-01-04
DE2028803C3 (de) 1980-08-14

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