US20170256440A1 - Soi substrate and manufacturing method thereof - Google Patents

Soi substrate and manufacturing method thereof Download PDF

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Publication number
US20170256440A1
US20170256440A1 US15/258,899 US201615258899A US2017256440A1 US 20170256440 A1 US20170256440 A1 US 20170256440A1 US 201615258899 A US201615258899 A US 201615258899A US 2017256440 A1 US2017256440 A1 US 2017256440A1
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wafer
insulating layer
deuterium
hydrogen
semiconductor substrate
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Deyuan Xiao
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Zing Semiconductor Corp
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Zing Semiconductor Corp
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Priority to US15/415,609 priority Critical patent/US10014210B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H—ELECTRICITY
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H—ELECTRICITY
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26533—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically inactive species in silicon to make buried insulating layers
    • H—ELECTRICITY
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/3115—Doping the insulating layers
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
    • H—ELECTRICITY
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    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
    • H—ELECTRICITY
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
    • H—ELECTRICITY
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
    • H—ELECTRICITY
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/207—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds further characterised by the doping material
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/22—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIBVI compounds
    • H01L29/227—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIBVI compounds further characterised by the doping material

Definitions

  • the present invention relates to a semiconductor substrate and a method for manufacturing the semiconductor substrate, and particularly relates to a silicon on insulator substrate and a method for manufacturing the silicon on insulator substrate.
  • SOI silicon on insulator
  • a method for manufacturing a semiconductor device such as U.S. Pat. No. 5,374,564, which provides a method for doping hydrogen ions into a silicon wafer, and forming an ion doped layer at a pre-determined depth of the silicon wafer. Then the silicon wafer doped by hydrogen ions is coupled with another silicon wafer, and a silicon oxide film is formed between the two silicon wafers. Then the two silicon wafers are separated at the ion doped layer by a heat treatment, whereby a monocrystalline silicon film can be formed on the ion doped layer.
  • U.S. Pat. No. 5,872,387 provides a method for annealing a substrate growth, a gate oxide layer at a deuterium atmosphere, whereby dangling bonds between the gate oxide and the substrate can be removed.
  • this method should be proceeding at a very high deuterium pressure, so that a cost for manufacturing a semiconductor device is increased.
  • An object of the present invention application is to provide a silicon on insulator substrate and a method thereof, wherein the SOI substrate has an advantage of reducing the parasitic capacitance between a drain and a substrate, and the cost for manufacturing the SOI substrate can be reduced.
  • the present invention application provides a method for manufacturing a SOI substrate, and the method comprising: providing a first semiconductor substrate; growing a first insulating layer on a top surface of the first semiconductor substrate for forming a first wafer; irradiating the first semiconductor substrate via a ion beam for forming a deuterium and hydrogen co-doping layer to a pre-determined depth from a top surface of the first insulating layer; providing a second substrate; growing a second insulating layer on a top surface of the second semiconductor substrate for forming a second wafer; bonding the first wafer with the second wafer in a face to face manner; annealing the first wafer and second wafer; separating a part of the first wafer from the second wafer; forming a deuterium and hydrogen co-doping semiconductor layer on the second wafer.
  • the present invention application further provides a SOI substrate comprising: a semiconductor substrate; an insulating layer grown on a top surface of the semiconductor substrate; and a deuterium and hydrogen co-doping semiconductor layer grown on the insulating layer.
  • FIG. 1 is a flowchart of a method for manufacturing a silicon on insulator substrate according to one embodiment of the present invention.
  • FIGS. 2A-2H are cross-sectional views of a process for manufacturing a silicon on insulator substrate.
  • FIG. 1 provides a method for manufacturing a silicon on insulator substrate according to one embodiment of this invention, and the manufacture method comprises:
  • Step 102 (S 102 ): growing a first insulating layer on a bottom surface of the first semiconductor substrate for forming a first wafer;
  • Step 103 Deuterium and hydrogen being used for source gases, and irradiating the first semiconductor substrate via a deuterium and hydrogen ions co-beam for forming a deuterium and hydrogen co-doping layer to a pre-determined depth from a top surface of the first insulating layer;
  • Step 104 (S 104 ): providing a second semiconductor substrate
  • Step 105 (S 105 ): growing a second insulating layer on a top surface of the second semiconductor substrate for forming a second wafer;
  • Step 106 bonding the first wafer with the second wafer in a face to face manner
  • Step 107 annealing the first wafer and the second wafer
  • Step 108 (S 108 ): separating a part of the first wafer from the second wafer.
  • Step 109 (S 109 ): forming a deuterium and hydrogen co-doping semiconductor layer on the second wafer;
  • FIGS. 2A-2G provide cross-sectional views of a process for manufacturing a silicon on insulator substrate.
  • a first semiconductor substrate 100 is provided, wherein the material of the first semiconductor substrate 100 may be Group IV, SiGe, III-V group compound, Group III -Nitrogen compound, or II-VI group compound.
  • the material of the first semiconductor substrate 100 is single crystal silicon.
  • the material of the first semiconductor substrate 100 is SiGe, and the weight percent of germanium is between 5% ⁇ 90%.
  • a first insulating layer 104 is grown on a top surface 102 of the first semiconductor substrate 100 for forming a first wafer 106 , wherein the material of the first insulating layer 104 may include silicon dioxide, silicon nitride, or aluminum nitride. In one embodiment, the material of the first insulating layer is silicon dioxide and the thickness of the first insulating layer 104 may be between 0.1 nm and 500 nm.
  • hydrogen and deuterium can be processed by an electric field for producing a hydrogen plasma and a deuterium plasma, and a hydrogen ion and deuterium ion co-beam may be generated through taking hydrogen ions of a hydrogen plasma and deuterium ions of a deuterium plasma.
  • the first wafer 106 is illuminated by a hydrogen and deuterium ions co-beam 108 for implanting a deuterium and hydrogen co-doping layer 112 at a pre-determined depth H from a top surface 110 of the first insulating layer 110 .
  • the pre-determined depth H may be controlled by an accelerated energy of the hydrogen and deuterium ions co-beam 108 and an incident angle of the hydrogen and deuterium ions co-beam 108 , wherein the accelerated energy of the hydrogen and deuterium ions co-beam 108 may be controlled by an accelerated voltage and a doped concentration.
  • the pre-determined depth H is between 0.1 ⁇ m and 5 ⁇ m
  • an accelerated voltage of the hydrogen and deuterium ions co-beam 108 is between 1 keV and 200 keV
  • a doping dosage of the hydrogen and deuterium ions co-beam 108 is between 10 16 ions/cm 2 and 2 ⁇ 10 17 ions/cm 2 .
  • a second semiconductor substrate 200 is provided, wherein the material of the second semiconductor substrate 200 may include IV group element, silicon-germanium (SiGe), III-V group compound, III group-nitrogen compound, or II-VI group compound.
  • the material of the second semiconductor substrate 200 is single crystal silicon.
  • a second insulating layer 204 is grown on a top surface 202 of the second semiconductor substrate 200 for forming a second wafer 206 , wherein the material of the second insulating layer 204 may include silicon dioxide, silicon nitride, or aluminum nitride. In one embodiment, the material of the second insulating layer 204 is silicon dioxide and the thickness of the second insulating layer 204 may be between 0.05 nm and 10 nm.
  • the first wafer 106 is bonded with the second wafer 206 face to face.
  • the first wafer 106 is bonded with second wafer 206 through hydrophilic bonding process, wherein the first wafer 106 is bonded with second wafer 206 at a temperature between 200 degrees centigrade and 400 degrees centigrade.
  • the detail steps of hydrophilic bonding process further comprises the steps of: wetting the first insulating layer 104 and the second insulating layer 204 ; contacting the wetted first insulating layer 104 with the wetted second insulating layer 204 ; and pressing the first insulating layer 104 and the second insulating layer 204 for closely bonding the first insulating layer 104 with the second insulating layer 204 .
  • the first wafer 106 and the second wafer 206 are annealed, and the annealing process comprises the steps of: heating the first wafer 106 and the second wafer 206 to a temperature between 600 degrees centigrade and 900 degrees centigrade; cooling the first wafer 106 and the second wafer 206 to a temperature between 400 degrees centigrade and 600 degrees centigrade, wherein time for cooling the first wafer 106 and the second wafer 206 is between 30 minutes and 120 minutes.
  • the deuterium and hydrogen co-doping layer 112 are transferred to a plurality of deuterium and hydrogen co-doping bubbles 300 .
  • the next step is referred to FIG. 2H , a part of the first wafer 106 is separated from the second wafer 206 for forming a deuterium and hydrogen co-doping semiconductor layer 400 , wherein the deuterium and hydrogen co-doping semiconductor layer 400 is bonded with the first insulating layer 104 and a thickness of the deuterium and hydrogen co-doping semiconductor layer 400 is between 50 ⁇ and 50000 ⁇ , and the deuterium and hydrogen co-doping bubbles 300 are in the deuterium and hydrogen co-doping semiconductor layer 400 .
  • the separated part of the first wafer 106 may further be proceeded with chemical-mechanical polishing (CMP) and cleaned, so that the separated part of the first wafer 106 may be reused for economizing on cost.
  • CMP chemical-mechanical polishing
  • the second wafer 106 bonded with the deuterium and hydrogen co-doping semiconductor layer 400 may further be heated to 10000 degrees centigrade, and time for heating the second wafer 106 is between 30 minutes and 8 hours.
  • This invention provides a SOI substrate for manufacturing a semiconductor device.
  • the SOI substrate can reduce a parasitic capacitance between a drain and a source of the semiconductor device, deuterium atoms (or deuterium ions) doped in the SOI substrate may be diffused into an interface between a gate oxide and the SOI substrate after growing the gate oxide on the SOI substrate, and deuterium atoms (or deuterium ions) are covalently bonded to semiconductor atoms for eliminating the dangling bond and increasing the resilience of the semiconductor device to hot carrier effects.
  • the method for manufacturing the SOI substrate doesn't need a very high deuterium pressure, and the cost for manufacturing the SOI substrate can be reduced substantially.

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US15/258,899 2016-03-03 2016-09-07 Soi substrate and manufacturing method thereof Abandoned US20170256440A1 (en)

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CN112864006A (zh) * 2021-01-11 2021-05-28 中国科学院上海微系统与信息技术研究所 一种半导体衬底的制备方法

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CN107154378B (zh) 2016-03-03 2020-11-20 上海新昇半导体科技有限公司 绝缘层上顶层硅衬底及其制造方法

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FR2681472B1 (fr) * 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
US5872387A (en) 1996-01-16 1999-02-16 The Board Of Trustees Of The University Of Illinois Deuterium-treated semiconductor devices
US5882987A (en) * 1997-08-26 1999-03-16 International Business Machines Corporation Smart-cut process for the production of thin semiconductor material films
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US20170256616A1 (en) 2017-09-07
TW201732867A (zh) 2017-09-16
US10014210B2 (en) 2018-07-03
TWI592987B (zh) 2017-07-21
CN107154378B (zh) 2020-11-20
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