US20120315113A1 - Substrate holder, substrate transfer apparatus, and substrate processing apparatus - Google Patents

Substrate holder, substrate transfer apparatus, and substrate processing apparatus Download PDF

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Publication number
US20120315113A1
US20120315113A1 US13/577,019 US201113577019A US2012315113A1 US 20120315113 A1 US20120315113 A1 US 20120315113A1 US 201113577019 A US201113577019 A US 201113577019A US 2012315113 A1 US2012315113 A1 US 2012315113A1
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United States
Prior art keywords
substrate
transfer
substrate holder
semiconductor wafer
main body
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Abandoned
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US13/577,019
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English (en)
Inventor
Tsutomu Hiroki
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of US20120315113A1 publication Critical patent/US20120315113A1/en
Abandoned legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a substrate holder for holding a target substrate on a transfer arm, and a single type substrate transfer apparatus and single type substrate processing apparatus using the substrate holder.
  • a manufacture line of a semiconductor device or flat panel display employs a single type process for processing target substrates (semiconductor wafers, glass substrates, etc.) one by one.
  • target substrates semiconductor wafers, glass substrates, etc.
  • a multi single type inline process system where a plurality of process units are integrally arranged along or around a transfer path of a transfer system is being widely used.
  • Such a transfer system for a single type process unit or for a multi single type inline process system uses a single type substrate transfer apparatus which holds substrates one by one, and carries the substrates into or out of each process unit one by one.
  • a type of substrate transfer apparatus is configured as a transfer robot, and includes one or several transfer arms capable of holding substrates to face upward one by one and performing rotating motion, elevating movement, and advancing and retreating movement.
  • the transfer arm of such a substrate transfer apparatus includes a substrate holding portion (holder or holding mechanism) that prevents a substrate from being misaligned or from falling during transfer.
  • a substrate holding portion holder or holding mechanism
  • a rear surface friction method, a taper pad method, a dropping method, or a vacuum adhesion method is used.
  • a plurality of holding pads having a plate or block shape are discretely attached to a top surface or holding surface of the transfer arm. Then, the substrate is placed on the holding pad to face upward, and is held by using a frictional force between a rear surface of the substrate and a pad surface (for example, refer to FIG. 8 and descriptions thereof in Patent Reference 1). Elastomer, ceramic, or the like is used as a material of such a holding pad.
  • a plurality of holding pads having a tapered side surface are discretely attached to a holding surface of the transfer arm at predetermined intervals such as to surround the substrate. Then, a periphery portion of the substrate is fastened to the tapered side surface of the holding pads such that the substrate is held facing upward (for example, refer to FIG. 4 and descriptions thereof in Patent Reference 1).
  • the substrate is dropped along the tapered side surface from a location higher than a top surface of the holding pad, above the holding surface of the transfer arm, and thus the substrate is held in line-contact to a location on the tapered side surface where gravity of the substrate and a reaction from the holding pad are balanced.
  • a pick portion of the transfer arm is formed as a fork slightly larger than an outline shape of the substrate along the outline shape of the substrate, and a plurality of claw portions protruding from and extending inward the fork to surround the substrate at predetermined intervals adhere to the fork. Then, the substrate is dropped down to a bottom surface (holding surface) of the claw portions along an inclined surface formed on an inner side of the claw portions, so as to hold the substrate facing upward in surface-contact at the bottom surface of the claw portion (for example, refer to FIG. 4 and descriptions thereof in Patent Reference 2).
  • a plurality of suction holes are provided on a holding surface of the transfer arm, a rear surface of the substrate is placed on the suction holes, and a vacuum suction apparatus connected to the suction holes through an air passage performs vacuum suction, thereby fixing the substrate to the transfer arm at the suction holes (for example, refer to FIG. 3 and descriptions thereof in Patent Reference 2).
  • Patent Reference 1 Japanese Laid-Open Patent Publication No. 2000-3951
  • Patent Reference 2 Japanese Laid-Open Patent Publication No. 2002-64057
  • a substrate transfer technology is important in increasing production efficiency, and a transfer speed of a substrate transfer apparatus is making steady progress.
  • an operation of a transfer arm which holds a substrate is speeding up by not only including a slide movement and an elevating movement, but also a rotating motion. Meanwhile, it is easy for a leading end portion of the transfer arm to tilt forward due to gravity of the substrate, according to an increased size of the substrate.
  • a substrate holding force is essentially weak, and thus the substrate may slide and fall from the transfer arm.
  • the coefficient of friction i.e., a holding force, varies according to a rear surface state of the substrate, and it is difficult to hold the substrate when the substrate is bent.
  • the substrate may be placed on the pad or claw portion and easily tilt askew.
  • the substrate tilts askew on the transfer arm it is easy for the substrate to fall, and even if the substrate does not fall, it is difficult to detect the location of the substrate on the transfer arm by using an optical sensor.
  • the taper pad method requires the suitable coefficient of friction between the tapered side surface of the holding pad and the substrate, and thus often uses elastomer as the material of the holding pad.
  • elastomer as the material of the holding pad.
  • transfer of the substrate under a high temperature process such as chemical vapor deposition (CVD)
  • CVD chemical vapor deposition
  • a heat resistant temperature of elastomer is low (about 300° C.)
  • ceramic is used as a material of the holding pad.
  • the rear surface friction method when a contact type holding pad is made of ceramic, the substrate easily slides, and thus stable holding is difficult.
  • the vacuum adsorption method does not cause any problem in terms of a substrate holding force, but is practically disadvantageous since a structure of the transfer arm and equipment of the substrate transfer apparatus are complicated and highly priced. Also, the vacuum adsorption method has a limitation in use since it does not function in a vacuum transfer apparatus which operates under decompression. Further, particles are easily adhered.
  • the present invention provides a substrate holder which is simply adhered to a transfer body, such as a transfer arm, at a low price without any special work, is not affected by a rear surface state or bending of a substrate, and is capable of stably holding the substrate at a proper position, even when a location of the substrate is somewhat misaligned on a holding surface of the transfer body, and a single type substrate transfer apparatus and substrate processing apparatus using the substrate holder.
  • a substrate holder which is attached to a holding surface of a transfer body for transferring a target substrate, and holds the substrate by contacting a periphery portion of the substrate
  • the substrate holder including: a pad main body which has a plate or block shape and is fixed to the holding surface of the transfer body; and a plurality of protruding portions which extend from the pad main body and are elastically transformable, wherein some of the plurality of protruding portions hold a rear surface of the substrate, and others of the protruding portions hold a side surface of the substrate.
  • a substrate holder which is attached to a holding surface of a transfer body for transferring a target substrate by placing the target substrate to face upward, and holds the substrate by contacting a periphery portion of the substrate
  • the substrate holder including: a pad main body which has a plate or block shape and is fixed to a holding surface of the transfer body; and a plurality of protruding portions which extend upward from a top surface of the pad main body, and are elastically transformable, wherein some of the plurality of protruding portions hold the substrate mainly in a direction perpendicular to a plate surface of the substrate by contacting a rear surface of the substrate, and others of the protruding portions hold the substrate mainly in a direction parallel to the plate surface of the substrate by contacting a side surface of the substrate.
  • the protruding portions hiding beneath the substrate hold the rear surface of the substrate, and some of protruding portions exposed near the periphery portion of the substrate hold side surface of the substrate.
  • a substrate transfer apparatus which transfers a target substrate
  • the substrate transfer apparatus including: a transfer base portion which is configured to be moveable inside a chamber under atmospheric pressure or decompression; a transfer arm which is configured to be loaded on the transfer base portion and to support the substrate by placing the substrate on the transfer arm; an arm driving portion for moving the transfer arm on the transfer base portion in a predetermined direction; and a substrate holding portion which is attached to the transfer arm to hold the substrate, and including the substrate holder above.
  • a substrate processing apparatus including: a single type process unit which performs a predetermined process on a target substrate under atmospheric pressure or decompression; and a substrate transfer mechanism which includes a transfer arm to which the substrate holder above is attached, places the substrate on the transfer arm, and transfers the substrate to carry the substrate into or out of the process unit.
  • a substrate holder of the present invention can be simply attached to a transfer body, such as a transfer arm, at a low price without any special work, is not affected by a rear surface state or bending of a substrate, and can stably hold the substrate at a proper position even when a location of the substrate is somewhat misaligned on a holding surface of the transfer body.
  • a substrate transfer apparatus of the present invention can arbitrarily and freely select an arm position, an arm moving trajectory, and a transfer speed while holding and transferring a substrate to a transfer arm without being limited by a substrate holding portion, thereby improving transfer capability.
  • a substrate processing apparatus of the present invention can improve transfer efficiency, thereby improving throughput.
  • FIG. 1 is a plan view showing a structure of a substrate processing apparatus according to an embodiment of the present invention
  • FIG. 3 is a perspective view schematically showing an external structure of a substrate holder according to a first embodiment
  • FIG. 4 is a side view schematically showing an operation of the substrate holder
  • FIGS. 5A and 5B are side views schematically showing an operation of the substrate holder
  • FIG. 6 is a side view schematically showing an operation of the substrate holder
  • FIG. 7 is a perspective view schematically showing an external structure of a substrate holder according to a modified example of the first embodiment
  • FIG. 8 is a plan view schematically showing an external structure of a substrate holder according to a second embodiment
  • FIG. 9 is a perspective view showing a structure of a protruding portion of the substrate holder.
  • FIG. 10 is a partially cross-sectioned side view schematically showing a structure of the substrate holder
  • FIG. 11 is a side view schematically showing an operation of the substrate holder
  • FIG. 12 is a side view schematically showing an operation of the substrate holder
  • FIG. 13 is a view (side view and partially magnified cross-sectional view) showing a structure of a substrate holder according to a first modified example of the second embodiment
  • FIG. 14 is a plan view schematically showing an external structure of a substrate holder according to a second modified example of the second embodiment
  • FIG. 15 is a magnified plan view showing the external structure of the substrate holder according to the second modified example.
  • FIG. 16 is a view (side view and partially magnified cross-sectional view) showing the structure of the substrate holder according to the second modified example.
  • FIG. 17 is a plan view showing an example of adhering a substrate holder according to an embodiment to a transfer arm for transferring a rectangular substrate for FPD.
  • FIGS. 1 and 2 show a structure of a substrate processing apparatus, according to an embodiment of the present invention.
  • the substrate processing apparatus is configured as a cluster tool type vacuum processing apparatus, which is a type of a multi single type inline process system.
  • the cluster tool type vacuum processing apparatus is provided in a clean room, and arranges six vacuum process chambers PC 1 , PC 2 , PC 3 , PC 4 , PC 5 , and PC 6 , and two load lock chambers LLC a and LLC b in a cluster shape around a vacuum platform (vacuum transfer chamber) PH having a hexagonal shape, wherein a pair of sides extending in an apparatus depth direction is about twice longer than other sides.
  • two process chambers PC 1 and PC 2 are connected to a first long side through gate valves GV 1 and GV 2
  • process chambers PC 3 and PC 4 are respectively connected to first and second short sides through gate valves GV 3 and GV 4
  • two process chambers PC 5 and PC 6 are connected to a second long side through gate valves GV 5 and GV 6
  • the load lock chambers LLC a and LLC b are respectively connected to third and fourth short sides through gate valves GV a and GV b .
  • Each of the process chambers PC 1 through PC 6 is connected to an exclusive vacuum exhaust apparatus (not shown), and thus the interior of each chamber is always maintained in a decompressed state at a variable pressure.
  • a target object for example, a semiconductor wafer W
  • a required single type process for example, a vacuum film forming process, such as CVD, atomic layer deposition (ALD), or sputter, a thermal process, a cleaning process of a semiconductor wafer surface, or a dry etching process, is performed by using a predetermined power (process gas, high frequency, or the like).
  • the platform PH is connected to an exclusive vacuum exhaust apparatus (not shown), and thus the interior of the platform PH is always maintained in a decompressed state generally at a constant pressure.
  • Each of the load lock chambers LLC a and LLC b is connected to an exclusive vacuum exhaust apparatus (not shown) through an opening/closing valve, and thus the interior of each chamber may be frequently switched between an atmospheric pressure state and a vacuum state.
  • the load lock chambers LLC a and LLC b are connected to a loader transfer chamber LM under an atmospheric pressure respectively through gate valves GV c and GV d , from an opposite side viewed from the platform PH.
  • a delivery stand 18 on which the semiconductor wafer W under retention is placed is provided at a center portion in each of the load lock chambers LLC a and LLC b .
  • a load port LP and a location adjusting mechanism ORT are provided adjacent to the loader transfer chamber LM.
  • the load port LP is used for inserting and discharging of a wafer cassette CR capable of accommodating, for example, twenty five semiconductor wafers W in one batch, between an external transfer vehicle.
  • the wafer cassette CR is configured as a front open unified pod (FOUP), a standard mechanical interface (SMIF) box, or the like.
  • the location adjusting mechanism ORT is used to adjust a notch of the semiconductor wafer W or an orientation flat to a predetermined location or direction.
  • a single type atmosphere transfer robot (substrate transfer apparatus) 20 provided in the loader transfer chamber LM includes a pair of stretchable transfer arms 22 and 24 vertically overlapping in two stages, is capable of elevating and rotating as well as moving in a horizontal direction on a linear guide 28 of a linear motor 26 , and transfers the semiconductor wafer W one by one (or in a batch unit) by moving among the load port LP, the location adjusting mechanism ORT, and the load lock chambers LLC a and LLC b .
  • the atmosphere transfer robot 20 carries the semiconductor wafer W into the loader transfer chamber LM while each LP door 25 provided on a front surface of the wafer cassette CR is opened.
  • the linear guide 28 includes, for example, a magnet made of a permanent magnet, a driving magnetic coil, and a scale head, and controls a linear movement of the atmosphere transfer robot 20 according to a command from a controller 30 .
  • the atmosphere transfer robot 20 in the loader transfer chamber LM takes out one semiconductor wafer W from the wafer cassette CR on the load port LP, performs location adjustment by transferring the semiconductor wafer W to the location adjusting mechanism ORT, and then transfers the semiconductor wafer W to any one (for example, the load lock chamber LLC a ) of the load lock chambers LLC a and LLC b .
  • the load lock chamber LLC a at a transfer place receives the semiconductor wafer W in an atmospheric pressure state, is vacuum-sucked after receiving the semiconductor wafer W, and transfers the semiconductor wafer W to the vacuum transfer robot 16 of the platform PH in a decompression state.
  • the vacuum transfer robot 16 carries the semiconductor wafer W taken out from the load lock chamber LLC a into a first process chamber (for example, the process chamber PC 1 ), by using one of the transfer arms 12 and 14 .
  • a first process chamber for example, the process chamber PC 1
  • a single type process of a first operation is performed under predetermined process conditions (gas, pressure, power, time, etc), according to a predetermined recipe.
  • the vacuum transfer robot 16 carries the semiconductor wafer W out of the process chamber PC 1 , and then carries the carried out semiconductor wafer W into a following second process chamber (for example, the process chamber PC 2 ). Also in the second process chamber PC 2 , a single type process of a second operation is performed under predetermined process conditions according to a predetermined recipe.
  • the vacuum transfer robot 16 carries the semiconductor wafer W out of the second process chamber PC 2 , and carries the carried out semiconductor wafer W into a third process chamber (for example, the process chamber PC 3 ) if there is a following operation, and transfers the carried out semiconductor wafer to one of the load lock chambers LLC a and LLC b if there is no following operation.
  • a process is performed in a process chamber (for example, the process chamber PC 5 ) after the third one, the semiconductor wafer W is carried into a process chamber (for example, the process chamber PC 6 ) at a following stage if there is a following operation, and is returned back to one of the load lock chambers LLC a and LLC b if there is no following operation.
  • the vacuum transfer robot 16 of the platform PH may be configured to perform a pick and place operation, where the pair of transfer arms 12 and 14 access each of the process chambers PC 1 through PC 6 or each of the load lock chambers LLC a and LLC b around the vacuum transfer robot 16 , and are alternatively used to initially carry the semiconductor wafer W out of the module and then to carry another semiconductor wafer W into the module by replacing the semiconductor wafer W.
  • the atmosphere transfer robot 20 in the loader transfer chamber LM takes out the semiconductor wafer W from the load lock chamber LLC b in an atmospheric pressure state, and returns the semiconductor wafer W back to the corresponding wafer cassette CR.
  • heating or cooling process may be performed under a desired atmosphere on the semiconductor wafer W in the load lock chamber LLC a and LLC b .
  • the cluster tool type vacuum processing apparatus is capable of continuously performing a series of vacuum processes inline on the semiconductor wafer W by sequentially transferring one semiconductor wafer W to a plurality of process chambers through the platform PH under decompression, and specifically in a vacuum film forming process, is capable of depositing desired thin films inline by continuously performing different film forming processes in a plurality of process chambers.
  • a pair of guide rails 32 and a transfer screw 36 of a ball thread mechanism 34 are built parallel to each other in a length direction of the platform PH inside the platform PH, and the vacuum transfer robot 16 is capable of sliding on the guide rail 32 according to a straight driving of the ball thread mechanism 34 .
  • the transfer screw 36 is combined to a motor 38 .
  • the vacuum transfer robot 16 includes a transfer base portion 40 performing a slide operation, and an arm stretch driving portion 42 that moves pick portions 12 a and 14 a of the transfer arms 12 and 14 back and forth in a straight line or advances and retreats the pick portions 12 a and 14 a , in a direction parallel to a rotating radius.
  • the arm stretch driving portion 42 stretches the transfer arms 12 and 14 formed of horizontal multi-joint robot, thereby performing a carry in and out or pick and place operation of the semiconductor wafer W as described above. Operations of each of the arm stretch driving portion 42 , a rotating driving portion and an elevating driving portion in the transfer base portion 40 , and the ball thread mechanism 34 (motor 38 ) are controlled by the controller 30 .
  • Each of the transfer arms 12 and 14 of the vacuum transfer robot 16 attaches a substrate holder (not shown in FIG. 1 ) of the present invention to it for stably holding the semiconductor wafer W, so that a rotating motion, an elevating movement, or an advancing and retreating movement is arbitrarily performed at a high speed while the semiconductor wafer W is placed facing upward.
  • a plurality of (four in the shown example) substrate holders 50 according to the present invention are discretely attached to predetermined places, i.e., base portions and leading end portions of the pick portions 12 a and 14 a having a fork shape, so as to hold the periphery portion of the semiconductor wafer W at suitable intervals.
  • the vacuum transfer robot 16 by attaching the substrate holder 50 of the present invention described below to each of the transfer arms 12 and 14 , it is possible to arbitrarily and freely select an arm position, an arm moving trajectory, and a transfer speed when each of the transfer arms 12 and 14 holds and transfers the semiconductor wafer W without being restricted by a substrate holding portion, thereby improving transfer capability.
  • FIG. 3 shows an external structure of the substrate holder 50 according to a first embodiment of the present invention.
  • FIGS. 4 through 6 show operations of the substrate holder 50 .
  • the substrate holder 50 in the present embodiment includes a pad main body 52 fixed to the holding surface of the transfer arm 12 ( 14 ) via screw or adhesion, and a plurality of (preferably many or countless) grass shaped (specifically like a straight hair type artificial lawn) protruding portions 54 .
  • the substrate holders 50 are provided at predetermined places of the transfer arm 12 ( 14 ) such that some of the grass shaped protruding portions 54 on the pad main body 52 hide beneath the semiconductor wafer W and others of the grass shaped protruding portion 54 are exposed outside the semiconductor wafer W when the substrate holders 50 hold the periphery portion of the semiconductor wafer W.
  • the pad main body 52 of the substrate holder 50 has a piece of plate shape (for example, a circular plate shape) or a block shape (for example, a cylindrical shape). A top surface of the pad main body 52 may be parallel to the holding surface of the transfer arm 12 ( 14 ).
  • a material of the pad main body 52 may be a metal or ceramic, but alternatively, a resin, such as Teflon (registered mark) or PEEK (brand name), may be suitably used.
  • the grass shaped protruding portion 54 of the substrate holder 50 includes a base 54 a fixed to the top surface of the pad main body 52 , and a contact portion or free end 54 b extending upward askew from the base 54 a and capable of being elastically transformed or displaced according to external force or external energy (gravity, pressure, thermal energy, or the like from the semiconductor wafer W).
  • the protruding portion 54 may be integrally molded with the pad main body 52 .
  • the contact portion 54 b of the protruding portion 54 may be long and thin like a leaf of grass and have a leading end portion in a tapered shape.
  • the leading end portion may tilt askew (preferably at an angle from 30° to 60°) with respect to a direction crossing the holding surface of the transfer arm 12 ( 14 ) at right angles when the contact portion 54 b does not contact the semiconductor wafer W, and may face inward of the outline of the semiconductor wafer W when the contact portion 54 b contacts the semiconductor wafer W.
  • the protruding portions 54 may have suitable rigidity and elastic modulus since the protruding portions 54 are individually elastically transformable with respect to external force. Specifically, as an elastic function of the protruding portion 54 , the protruding portion 54 may be easily bent (small elastic modulus) with respect to force F V in a vertical direction from the top as shown in FIG. 5A , while the protruding portion 54 may be difficult to be bent (high elastic modulus) with respect to a force F H in a horizontal direction from the side as shown in FIG. 5B .
  • the protruding portion 54 may have a thin leading portion to be easily bent with respect to the force F V in the vertical direction, and may have a thick base to be bent with difficulty with respect to the force F H in the horizontal direction.
  • a material of the protruding portion 54 may be a rubber-shaped elastic body capable of elastic transformation in an arbitrary direction, and specifically be fluoro rubber having excellent thermal resistance and chemical resistance.
  • resin capable of elastic transformation in a predetermined direction according to a shape for example, Teflon (registered mark) or PEEK, may be suitably used.
  • the semiconductor wafer W on the transfer arm 12 ( 14 ) when the semiconductor wafer W on the transfer arm 12 ( 14 ) is placed on the substrate holder 50 at the periphery portion, the semiconductor wafer W sinks by a suitable depth on the grass shaped protruding portion 54 as shown in FIG. 4 .
  • each contact portion 54 b contacts a rear surface W B of the semiconductor wafer W, and holds the semiconductor wafer W mainly in the length direction, i.e., in a direction perpendicular to the plate surface of the semiconductor wafer W (or the holding surfaces of the transfer arms 12 and 14 ), resistively to force (gravity) in the length direction from the semiconductor wafer W as the contact portion 54 b bends downward as shown in FIG. 5A .
  • the number of protruding portions 54 contacting the rear surface W B of the semiconductor wafer W is relatively high, and thus a contact area is large, holding force in the width direction by contact friction is somewhat obtained.
  • a rounding work is generally performed on the periphery portion of the semiconductor wafer W, and thus as shown in FIG. 4 , some of the grass shaped protruding portions 54 may contact an peripheral round incline W R .
  • the grass shaped protruding portion 54 contacting the peripheral round incline W R of the semiconductor wafer W as such is located in the middle between the protruding portion 54 contacting the rear surface W B of the semiconductor wafer W and the protruding portion 54 contacting the side surface W S of the semiconductor wafer W, and holds the semiconductor wafer W in directions perpendicular and parallel to the plate surface of the semiconductor wafer W by taking a middle elastic transformation position.
  • the peripheral round incline W R of the semiconductor wafer W has a surface for both wafer side surface and wafer rear surface.
  • the substrate holder 50 of the present embodiment includes the pad main body 52 fixed to the holding surface of the transfer arm 12 ( 14 ), and the plurality of grass shaped protruding portion 54 provided on the top surface of the pad main body 52 , where some of the grass shaped protruding portions 54 on the pad main body 52 hide beneath the semiconductor wafer W and others of the grass shaped protruding portions 54 are exposed outside the semiconductor wafer W, while holding the periphery portion of the semiconductor wafer W.
  • the protruding portions 54 hiding beneath the semiconductor wafer W contact the rear surface W B of the semiconductor wafer W and are transformed or displaced relatively largely downward by using a relatively small elastic modulus, so that the protruding portions 54 hold the semiconductor wafer W mainly in the length direction by sinking the semiconductor wafer W to a suitable depth via gravity. Also, some of the protruding portions 54 exposed near the periphery portion of the semiconductor wafer W contact the side surface W S of the semiconductor wafer W and are transformed a little to the width direction by using a high elastic modulus, thereby holding the semiconductor wafer W mainly in the width direction.
  • some of the protruding portions 54 that do not directly contact the side surface W S of the semiconductor wafer W support the protruding portions 54 contacting the side surface W S of the semiconductor wafer W from the back, and thus the number of the protruding portions 54 holding mainly the semiconductor wafer W in the width direction is never small. Thicknesses, heights, shapes, arrangement density, and elastic forces of the grass shaped protruding portions 54 , a weight of the semiconductor wafer W, etc. may be set as parameters so as to arbitrarily adjust wafer holding force from each of the length and width directions.
  • the substrate holder 50 of the present embodiment stably and definitely holds the semiconductor wafer W facing upward on the transfer arm 12 ( 14 ) according to the above structures and operations.
  • the substrate holder 50 elastically displaces the protruding portions 54 hiding beneath the semiconductor wafer W downward to sink the semiconductor wafer W in a horizontal position, even when a location of the semiconductor wafer W placed on the transfer arm 12 ( 14 ) is somewhat misaligned, the semiconductor wafer W does not tilt and is held by the substrate holder 50 in the horizontal position as long as the periphery portion of the semiconductor wafer W is placed on some of the grass shaped protruding portions 54 of each substrate holder 50 .
  • the protruding portions 54 mainly affect (contact) the side surface W S of the semiconductor wafer W to hold the semiconductor wafer W by elastic force, the coefficient of friction between the semiconductor wafer W and the protruding portion 54 is not important, and thus materials and shapes of the protruding portions 54 may be freely selected.
  • each grass shaped protruding portion 54 holds the semiconductor wafer W in the length direction by being transformed in the same direction when hiding beneath the semiconductor wafer W, and holds the semiconductor wafer W in the width direction without being transformed so much when contacting the wafer side surface from outside the semiconductor wafer W. Accordingly, even when a loading location of the semiconductor wafer W is somewhat misaligned, each grass shaped protruding portion 54 may flexibly deal with the misalignment.
  • the periphery portion of the semiconductor wafer W is sunken by a suitable depth via a self-weight on each substrate holder 50 , even if the semiconductor wafer W is bent, the semiconductor wafer W is stably and definitely held as if there is no bending.
  • the substrate holder 50 can definitely stably hold the semiconductor wafer W.
  • a transfer arm of a vacuum transfer apparatus is long and is easily tilted forward by a self-weight when the transfer arm is stretched while transferring a substrate to a process chamber, and thus it is a conventional problem that the substrate is easily misaligned on the arm.
  • the substrate holder 50 since the substrate holder 50 has sufficiently high holding force even in the width direction with respect to the semiconductor wafer W on the transfer arm 12 ( 14 ), location misalignment of the semiconductor wafer W can be prevented even when the transfer arm 12 ( 14 ) is tilted forward.
  • the semiconductor wafer W is not tilted or misaligned on the transfer arm 12 ( 14 ). Accordingly, the semiconductor wafer W does not slide and fall, and precision and reliability of detecting the location of the semiconductor wafer W on the transfer arm 12 ( 14 ) by using an optical sensor are also improved.
  • the substrate holder 50 since the substrate holder 50 only contacts the periphery portion of the semiconductor wafer W, even when a rear surface state of the semiconductor wafer W is changed according to a process performed in a process chamber PC, the wafer holding force of the substrate holder 50 is not affected at all.
  • the substrate holder 50 is detachable or freely and simply replaceable as a holding pad at a predetermined place of the holding surface of the transfer arm 12 ( 14 ), and is attached thereto at a low price.
  • a special process is not required in the transfer arm 12 ( 14 ), and a special control apparatus for turning on or off substrate holding is not necessary at all.
  • an outer protruding portion 54 on which the semiconductor wafer W is not placed on the substrate holder 50 may be configured to be thick (strong) so as to definitely prevent misalignment of the semiconductor wafer W during transfer.
  • the protruding portion 54 of the substrate holder 50 has a shape similar to straight hair type artificial lawn, but may alternatively have a shape similar to another artificial lawn.
  • the protruding portion 54 may have a small thin piece shape, and for example, as shown in FIG. 7 , a protruding portion 56 having a scale shape may be suitably employed.
  • the scale shaped protruding portion 56 extends upward and askew from the top surface of the pad main body 52 , and is elastically displaced according to an external force, i.e., gravity or pressure from the semiconductor wafer W, and thus may have the same operation as the grass shaped protruding portion 54 described above in holding the semiconductor wafer W.
  • some of the protruding portions 56 exposed near the periphery portion of the semiconductor wafer W contact the side surface W S or the peripheral round incline W R of the semiconductor wafer W to be elastically displaced a little in the width direction with a high elastic modulus, thereby holding the semiconductor wafer W mainly in the width direction by preventing the semiconductor wafer W from being misaligned to sideways.
  • Sizes, heights, arrangement density, and elastic forces of the scale shaped protruding portions 56 , the weight of the semiconductor wafer W, etc. are set as parameters so as to arbitrarily adjust the wafer holding force in each of the length and width directions.
  • the substrate holder 50 includes a pad main body 60 detachably fixed to the holding surface of the transfer arm 12 ( 14 ) by using, for example, a bolt 58 ( FIG. 8 ), and a plurality of (preferably many) protruding portions 62 standing and provided close together at uniform density or pitches on a top surface of the pad main body 60 , where each protruding portion 62 includes a spring member formed of a metal material, as shown in FIGS. 8 through 10 .
  • a volute spring is used as the spring member, where a cap 66 integrally covers a top portion of the volute spring 64 ( FIG. 9 ).
  • the volute spring 64 is provided on the top surface of the pad main body 60 to extend in a direction perpendicular to the holding surface of the transfer arm 12 ( 14 ), and a base portion of the volute spring 64 is buried in and fixed to the pad main body 60 ( FIG. 10 ).
  • the pad main body 60 may have the same shape and be formed of the same material as the pad main body 52 of the first embodiment.
  • the cap 66 may have a long container portion covering not only the top portion of the volute spring 64 but also a middle portion of the volute spring 64 , and for example, a resin, such as Teflon (registered mark) or PEEK, may be suitably used as a material.
  • the volute spring 64 may have a small size where an entire length is less than or equal to 1 cm, and may be any one of a product on the market and a custom-ordered product.
  • protruding portions 62 hiding beneath the semiconductor wafer W from among the spring-adhered protruding portions 62 on the pad main body 60 contact the rear surface W B of the semiconductor wafer W at a apex portion of the cap 66 , and hold the semiconductor wafer mainly in the length direction, i.e., in the direction perpendicular to the plate surface of the semiconductor wafer W (or the holding surfaces of the transfer arms 12 and 14 ) resistively to force (weight) in the length direction from the semiconductor wafer W as the volute spring 64 is compressed and transformed in an axis direction.
  • some of the protruding portion 62 exposed near the periphery portion of the semiconductor wafer W from among the spring-adhered protruding portion 62 on the pad main body 60 contact the side surface W S or the peripheral round incline W R of the semiconductor wafer W at a portion lower than the apex portion of the cap 66 , and hold the semiconductor wafer W mainly in the direction parallel to the plate surface of the semiconductor wafer resistively to force (pressure) facing sideways from the semiconductor wafer W.
  • the volute spring 64 is scarcely (or a little) compressed and transformed ( FIG. 11 ).
  • the spring-adhered protruding portion 62 where a head portion of the cap 66 contacts the peripheral round incline W R of the semiconductor wafer W receives a weight in the axis direction, the volute spring 64 is a little compressed and transformed ( FIG. 12 ).
  • the substrate holder 50 includes the pad main body 60 fixed to the holding surface of the transfer arm 12 ( 14 ), and the plurality of spring-adhered protruding portions 62 standing and provided close together on the top surface of the pad main body 60 , where some of the spring-adhered protruding portions 62 on the pad main body 60 hide beneath the semiconductor wafer W and others of the spring-adhered protruding portions 62 are exposed outside the semiconductor wafer W while holding the periphery portion of the semiconductor wafer W.
  • the spring-adhered protruding portion 62 hiding beneath the semiconductor wafer W contacts the rear surface W B of the semiconductor wafer W, and the volute spring 64 is compressed and transformed in the axis direction, thereby sinking the semiconductor wafer W by a suitable depth via gravity so as to hold the semiconductor wafer W mainly in the length direction. Also, some of the spring-adhered protruding portions 62 exposed near the periphery portion of the semiconductor wafer W contact the side surface W S or the peripheral round incline W R of the semiconductor wafer W, and the volute spring 64 is compressed and transformed scarcely or a little in the axis direction, and thus the semiconductor wafer W is held mainly in the width direction.
  • Diameters, heights, cap shapes, arrangement density, and spring coefficients of the spring-adhered protruding portions 62 , the weight of the semiconductor wafer W, etc. may be set as parameters to arbitrarily adjust the wafer holding force in each of the length and width directions.
  • the weight thereof is 130 g.
  • a moving speed of the transfer arm 12 ( 14 ) is 0.5 m/sec and stops at 1 second
  • acceleration at the stop is 0.5 m/sec 2
  • the number of protruding portions 62 resisting against the force in the width direction with respect to two substrate holders 50 in an arm front portion is, for example, 20, a load per one is about 3 gm/sec 2 . Accordingly, the strength of the protruding portion 62 may be designed such as to endure the load of about 3 gm/sec 2 in the width direction.
  • the sunken amount of the semiconductor wafer W may be less than or equal to the thickness thereof (for example, 0.8 mm).
  • the number of protruding portions 62 receiving the weight of the semiconductor wafer W in the example of FIG. 2 , the number of protruding portions 62 receiving the weight of the semiconductor wafer W with respect to the four substrate holders 50 at arm front and rear portions
  • an elastic characteristic of the protruding portion 62 may be designed such that the protruding portion 62 is definitely transformed or displaced downward by the sunken amount less than or equal to 0.8 mm with respect to the load of about 0.5 g.
  • the strength in the width direction and the elastic characteristic in the length direction with respect to the protruding portion 62 described above are equally applied to the protruding portion 54 according to the first embodiment.
  • the substrate holder 50 of the second embodiment is capable of showing the same operation as the substrate holder of the first embodiment, is detachably and simply attached to the transfer arm 12 ( 14 ) at a low price without any special work, is not affected by the rear surface state or bending of the semiconductor wafer W, and stably holds the substrate at a proper position even if a holding location of the semiconductor wafer W on the holding surface of the transfer arm 12 ( 14 ) is somewhat misaligned.
  • the substrate holder 50 of the second embodiment since elastic displacement of the protruding portion 62 is performed by a spring made of a metal material, the substrate holder 50 has high advantages in realization, stability, and durability of substrate holding.
  • the substrate holder 50 of the second embodiment is formed of metal or ceramic
  • the substrate holder 50 has advantages of maintaining a holding force of a substrate while having high thermal resistance.
  • the substrate holder 50 may be formed of a softer material than a semiconductor wafer, for example, thermal resistant plastic.
  • the protruding portions 62 of the substrate holder 50 may be grounded. Accordingly, a spark may be prevented from being generated between the semiconductor wafer W charged after a plasma process, and an element in the processing apparatus.
  • the spring of the protruding portion 62 is not limited to the volute spring, and for example, as shown in FIG. 13 , a compressed coil spring 68 may also be used.
  • the compressed coil spring 68 is accommodated in a counterbore hole 70 formed in the length direction on the top surface of the pad main body 60 , and elastically transforms in the length direction with respect to weight or pressure applied form the semiconductor wafer W, i.e., in the direction perpendicular to the holding surface of the transfer arm 12 ( 14 ).
  • a bottom of the compressed coil spring 68 is fixed to a bottom of the counterbore hole 70 , and the cap 66 having a cylindrical shape covers a top portion of the compressed coil spring 68 .
  • An inner wall of the counterbore hole 70 includes a container shape guide portion for guiding the cap 66 in the length direction, and a stopper for defining an uppermost location of a shoulder portion 66 a (further, the apex portion) of the cap 66 .
  • FIG. 14 shows an external structure of the substrate holder 50 in the second modified example
  • FIG. 15 is a magnified view thereof.
  • the substrate holder 50 in the second modified example also includes the pad main body 60 detachably fixed to the top surface of the transfer arm 12 ( 14 ), for example, by using the bolt 58 , and the plurality of (preferably many) protruding portions 62 capable of being elastically displaced and accommodated in the counterbore hole 70 on the top surface of the pad main body 60 , where each protruding portion 62 includes the spring member.
  • a main difference from the first modified example is that the number of protruding portions 62 is largely reduced and an arrangement pattern of the protruding portions 62 are intently considered.
  • the total number of protruding portions 62 provided on a top surface of the pad main body 60 is reduced to, for example, less than or equal to 10, and arrangement density is reduced, thereby reducing spring power of the protruding portion 62 receiving the weight of the semiconductor wafer W. Accordingly, the semiconductor wafer W can be further definitely sunken.
  • the sunken amount D may be equal to the thickness T of the semiconductor wafer W.
  • the plurality of protruding portions 62 are arranged at regular intervals on a V-shaped line, where a peak in an axial symmetric to a straight line N passing through a center point O of the holding surface of the entire arm (or the center point at a reference wafer holding location) and a center of the pad main body 60 faces the center point O, and a V pattern is provided in a plurality of rows (two rows in the shown example) along the straight line N.
  • the pad main body 60 is attached in a recess portion 72 formed on the top surface of the transfer arm 12 ( 14 ), and accordingly, the transfer arm 12 ( 14 ) including the substrate holder 50 is thinned.
  • a chamfering operation or an R operation 66 b may be suitably performed on the apex portion of the cap 66 of the protruding portion 62 as shown in FIG.
  • a structure with rotatably burying a rigid ball in the apex portion of the cap 66 such that only a top portion thereof is exposed (ball joint) may be employed.
  • the protruding portions 62 that are sunken after the semiconductor wafer W is placed thereon may not be completely sunken in the pad main body 60 (i.e., the apex portion of the cap 66 may stick up a little).
  • side clearance in the counterbore hole 70 of the pad main body 60 may be suitably increased.
  • a metal is preferable in terms of durability
  • resin specifically, Teflon (registered trademark) or PEEK (brand name)
  • ceramic silicon carbide or alumina
  • quartz is preferable in terms of thermal resistance
  • a ceramic spring or a carbon spring is used so as to form all parts or elements of the substrate holder 50 from a ceramic or carbon material.
  • the substrate holder 50 of the above embodiment may be applied to the transfer arms 22 and 24 of the single type atmosphere transfer robot (substrate transfer robot) 20 provided in the loader transfer chamber LM.
  • a target substrate in the present invention is not limited to a semiconductor wafer, and may be any one of various substrates for FPD (specifically organic EL and liquid crystal panel), a photo mask, a print substrate, etc. Accordingly, for example, as shown in FIG. 17 , the substrate holder 50 of the above embodiment may be attached to a transfer arm 74 of a substrate transfer apparatus for FPD.
  • FPD organic EL and liquid crystal panel
  • the transfer arm 74 of FIG. 17 includes a pair of outer support portion 78 and a pair of inner support portion 80 extending forward in parallel from an arm body 76 .
  • a claw portion 78 a protruding inward to hold a periphery portion on right and left sides of a rectangular substrate G for FPD is formed at a leading end of the outer support portion 78 that is relatively short, where the substrate holder 50 is attached to a top surface of the claw portion 78 a .
  • leading end portion 80 a of the inner support portion 80 that is relatively long sticks out a little than a front periphery portion of the rectangular substrate G, and thus the substrate holder 50 is also attached to the leading end portion 80 a .
  • a base portion 80 b of the inner support portion 80 sticks out a little than a rear periphery portion of the rectangular substrate G, and thus the substrate holder 50 is also attached to the base portion 80 b .
  • rectangular or circular openings 82 provided in places on the arm body 76 are holes for a light weight.
  • the substrate transfer apparatus for FPD can arbitrarily and freely select an arm position, an arm moving trajectory, and a transfer speed when the transfer arm 74 holds and transfers the rectangular substrate G, without being restricted by the substrate holding portion, and thus transfer capability can be improved. Also, since the transfer capability of the substrate transfer apparatus is improved, throughput of the substrate processing apparatus for FPD or the multi single type inline process system is improved.
  • substrate holders attached to a transfer arm do not all have to be the substrate holder of the present invention, and a conventional substrate holder and the substrate holder of the present invention may be used together. Accordingly, for example, in the transfer arm 12 ( 14 ) of FIG. 2 or the transfer arm 74 of FIG. 17 , only a substrate holder attached to an arm leading end portion that easily tilts forward may be the substrate holder of the present invention, and conventional, for example, tapered pad type substrate holders may be used for other substrate holders.
  • the substrate holder of the present invention is not limited to the transfer arm of the substrate transfer apparatus, and may be applied to a arbitrary transfer body or moving body transferring or moving a substrate or plate shaped body by holding the substrate or plate shaped body.
  • the substrate or plate shaped body held by the substrate holder of the present invention on the transfer body or moving body is not limited to a horizontal position or a position facing upward, and may have a position where a main or target surface faces downward or a largely tilted position, or extremely, may have a vertical position.

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TWI412101B (zh) 2013-10-11
KR101259862B1 (ko) 2013-05-02
JPWO2011096208A1 (ja) 2013-06-10
JP5258981B2 (ja) 2013-08-07
US20140093336A1 (en) 2014-04-03
CN102741995A (zh) 2012-10-17
KR20120096599A (ko) 2012-08-30

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