US20050202183A1 - Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method - Google Patents
Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method Download PDFInfo
- Publication number
- US20050202183A1 US20050202183A1 US10/514,017 US51401704A US2005202183A1 US 20050202183 A1 US20050202183 A1 US 20050202183A1 US 51401704 A US51401704 A US 51401704A US 2005202183 A1 US2005202183 A1 US 2005202183A1
- Authority
- US
- United States
- Prior art keywords
- plasma
- antenna
- supply means
- power supply
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 52
- 238000000151 deposition Methods 0.000 title claims description 59
- 238000003672 processing method Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims description 97
- 238000009877 rendering Methods 0.000 claims description 4
- 230000004907 flux Effects 0.000 abstract description 23
- 239000007789 gas Substances 0.000 description 38
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 21
- 230000000694 effects Effects 0.000 description 17
- 230000006378 damage Effects 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 13
- 239000002245 particle Substances 0.000 description 13
- 238000013021 overheating Methods 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 10
- 239000012071 phase Substances 0.000 description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052593 corundum Inorganic materials 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000004380 ashing Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
Definitions
- the plasma processing apparatus can be constituted such that lines of magnetic force heading in a direction opposite to the direction of lines of magnetic force appearing at the site of the antenna are generated at the site of the second antenna, and even when a uniform plasma is generated over a wide range within the tubular container, the magnetic flux density in the direction of the wall surface can be rendered low.
- a tubular container accommodating a substrate
- the plasma film deposition method of the present invention is a plasma film deposition method which supplies power from above a top of a ceiling surface of a tubular container to generate a plasma within the tubular container, and produces a film on a surface of a substrate by atoms and molecules excited and activated there, characterized by
- a distance from a lower surface of the antenna to the substrate is set at 190 mm or more in order to locate the substrate in a region where an electron temperature is 1 electronvolt or less.
- the plasma processing method of the present invention is a plasma processing method which supplies power from above a top of a ceiling surface of a tubular container to generate a plasma within the tubular container, and applies processing to a surface of a substrate by atoms and molecules excited and activated there, characterized by
- the substrate 6 is placed on the bearing portion 7 of the wafer support base 5 , and held (by, for example, an electrostatic chuck).
- a predetermined flow rate of the source gas is supplied through the gas supply nozzles 13 into the film deposition chamber 3
- a predetermined flow rate of the auxiliary gas is supplied through the auxiliary gas supply nozzles into the film deposition chamber 3 , with the interior of the film deposition chamber 3 being set at a predetermined pressure suitable for the conditions for film deposition.
- electric power is supplied from the high frequency power source 12 to the high frequency antenna 11 to generate a high frequency wave.
- a high frequency antenna 11 as an antenna, is the same as that in FIGS. 1 and 2 in terms of its feature, and is in the form of a flat coil.
- a high frequency power source 12 is connected to the site of the antenna 11 a
- a second high frequency power source 21 as second power supply means is connected to the site of a second antenna 11 b .
- An electric current is supplied from the second high frequency power source 21 to the site of the second antenna 11 b in a state of connection opposite to that for the site of the antenna 11 a .
- An electric current of a phase opposite to that of an electric current fed from the high frequency power source 12 to the high frequency antenna 22 is supplied from the second high frequency power source 24 to the second antenna 23 via the phase shifter 25 . Because of this feature, lines of magnetic force heading in a direction opposite to the direction of lines of magnetic force appearing at the site of the high frequency antenna 22 are generated at the site of the second antenna 23 , as in the embodiment shown in FIG. 1 .
- the lines of magnetic force passing through the wall (tubular surface) of the container 2 are merged with the lines of magnetic force heading in the opposite direction to decrease the lines of magnetic force passing through the wall (tubular surface) of the container 2 .
- the magnetic flux density in the direction of the wall surface at the position of the wall of the container 2 is lowered. This resolves the problem that the electrons and ions impinge on the wall of the container 2 , thereby causing overheating or causing the occurrence of particles by an etching action.
- the second antenna 32 is connected to the high frequency power source 12 in a state opposite to the state of connection of the antenna 31 to the high frequency power source 12 , namely, such that the connected side and the grounded side for the second antenna 32 are opposite to those for the antenna 31 .
- the substrate is located in a region where the electron temperature is low even though the electron density is high. Since the region has a low electron temperature, device destruction due to the charging effect can be suppressed.
- plasma film deposition apparatus plasma CVD apparatus
- the high frequency source with an output of 2 kW to 15 kW (e.g., 5 kW) and a frequency of 10 MHz to 30 MHz (e.g., 13.56 MHz) is connected to the high frequency antenna 91 .
- the container 82 is provided with a carry-in/carry-out port for the substrate 86 , although the carry-in/carry-out port is not shown. Through this carry-in/carry-out port, the substrate 86 is carried from a transport chamber (not shown) into the container 82 , and carried out of the container 82 to the transport chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/797,601 US8662010B2 (en) | 2002-06-19 | 2007-05-04 | Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002178129A JP3820188B2 (ja) | 2002-06-19 | 2002-06-19 | プラズマ処理装置及びプラズマ処理方法 |
JP2002-178129 | 2002-06-19 | ||
JP2002-351250 | 2002-12-03 | ||
JP2002351250A JP4052454B2 (ja) | 2002-06-19 | 2002-12-03 | 酸化シリコン膜又は窒化シリコン膜の製造方法 |
PCT/JP2003/007650 WO2004001822A1 (fr) | 2002-06-19 | 2003-06-17 | Systeme de traitement au plasma, procede de traitement au plasma, systeme de depot de film au plasma et procede de depot de film au plasma |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/797,601 Division US8662010B2 (en) | 2002-06-19 | 2007-05-04 | Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method |
Publications (1)
Publication Number | Publication Date |
---|---|
US20050202183A1 true US20050202183A1 (en) | 2005-09-15 |
Family
ID=30002232
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/514,017 Abandoned US20050202183A1 (en) | 2002-06-19 | 2003-06-17 | Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method |
US11/797,601 Expired - Fee Related US8662010B2 (en) | 2002-06-19 | 2007-05-04 | Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/797,601 Expired - Fee Related US8662010B2 (en) | 2002-06-19 | 2007-05-04 | Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method |
Country Status (6)
Country | Link |
---|---|
US (2) | US20050202183A1 (fr) |
EP (2) | EP2224468B1 (fr) |
JP (2) | JP3820188B2 (fr) |
KR (3) | KR100820615B1 (fr) |
TW (2) | TWI276163B (fr) |
WO (1) | WO2004001822A1 (fr) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080020528A1 (en) * | 2006-07-21 | 2008-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device and method of manufacturing nonvolatile semiconductor storage device |
US20080017317A1 (en) * | 2006-07-24 | 2008-01-24 | Samsung Electronics Co., Ltd. | Substrate processing apparatus |
US8288294B2 (en) | 2008-06-30 | 2012-10-16 | Mitsubishi Heavy Industries, Ltd. | Insulating film for semiconductor device, process and apparatus for producing insulating film for semiconductor device, semiconductor device, and process for producing the semiconductor device |
US20180277340A1 (en) * | 2017-03-24 | 2018-09-27 | Yang Yang | Plasma reactor with electron beam of secondary electrons |
US20190252153A1 (en) * | 2018-02-14 | 2019-08-15 | Research & Business Foundation Sungkyunkwan University | Apparatus for generating plasma and apparatus for treating substrate having the same |
US10453676B2 (en) | 2014-12-25 | 2019-10-22 | Kokusai Electric Corporation | Semiconductor device manufacturing method and recording medium |
US10544505B2 (en) | 2017-03-24 | 2020-01-28 | Applied Materials, Inc. | Deposition or treatment of diamond-like carbon in a plasma reactor |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408734B (zh) * | 2005-04-28 | 2013-09-11 | Semiconductor Energy Lab | 半導體裝置及其製造方法 |
JP5162108B2 (ja) * | 2005-10-28 | 2013-03-13 | 日新電機株式会社 | プラズマ生成方法及び装置並びにプラズマ処理装置 |
US7972471B2 (en) * | 2007-06-29 | 2011-07-05 | Lam Research Corporation | Inductively coupled dual zone processing chamber with single planar antenna |
JP5723130B2 (ja) * | 2010-09-28 | 2015-05-27 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP5800532B2 (ja) * | 2011-03-03 | 2015-10-28 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US10541183B2 (en) | 2012-07-19 | 2020-01-21 | Texas Instruments Incorporated | Spectral reflectometry window heater |
JP6232953B2 (ja) * | 2013-11-11 | 2017-11-22 | 富士通セミコンダクター株式会社 | 半導体装置の製造装置および半導体装置の製造方法 |
CN205741208U (zh) * | 2015-09-16 | 2016-11-30 | 应用材料公司 | 用于改进的等离子体处理腔室的系统和设备 |
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US20030232513A1 (en) * | 2002-06-12 | 2003-12-18 | Kraus Philip Allan | Plasma method and apparatus for processing a substrate |
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2002
- 2002-06-19 JP JP2002178129A patent/JP3820188B2/ja not_active Expired - Fee Related
- 2002-12-03 JP JP2002351250A patent/JP4052454B2/ja not_active Expired - Fee Related
-
2003
- 2003-06-17 US US10/514,017 patent/US20050202183A1/en not_active Abandoned
- 2003-06-17 KR KR1020077026433A patent/KR100820615B1/ko not_active IP Right Cessation
- 2003-06-17 KR KR1020067012843A patent/KR100806550B1/ko not_active IP Right Cessation
- 2003-06-17 EP EP10166701.2A patent/EP2224468B1/fr not_active Expired - Fee Related
- 2003-06-17 EP EP03760870A patent/EP1515362B1/fr not_active Expired - Fee Related
- 2003-06-17 KR KR1020047020686A patent/KR100661781B1/ko not_active IP Right Cessation
- 2003-06-17 WO PCT/JP2003/007650 patent/WO2004001822A1/fr active Application Filing
- 2003-06-18 TW TW092116541A patent/TWI276163B/zh not_active IP Right Cessation
- 2003-06-18 TW TW095110611A patent/TW200625417A/zh not_active IP Right Cessation
-
2007
- 2007-05-04 US US11/797,601 patent/US8662010B2/en not_active Expired - Fee Related
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080020528A1 (en) * | 2006-07-21 | 2008-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device and method of manufacturing nonvolatile semiconductor storage device |
US8895388B2 (en) * | 2006-07-21 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device and a non-volatile semiconductor storage device including the formation of an insulating layer using a plasma treatment |
US20080017317A1 (en) * | 2006-07-24 | 2008-01-24 | Samsung Electronics Co., Ltd. | Substrate processing apparatus |
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Also Published As
Publication number | Publication date |
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TW200415710A (en) | 2004-08-16 |
JP2004022935A (ja) | 2004-01-22 |
TWI276163B (en) | 2007-03-11 |
TW200625417A (en) | 2006-07-16 |
JP4052454B2 (ja) | 2008-02-27 |
KR20060084067A (ko) | 2006-07-21 |
TWI305375B (fr) | 2009-01-11 |
JP3820188B2 (ja) | 2006-09-13 |
EP1515362B1 (fr) | 2012-07-04 |
EP1515362A4 (fr) | 2009-07-15 |
US20070224364A1 (en) | 2007-09-27 |
KR100806550B1 (ko) | 2008-02-27 |
EP2224468A1 (fr) | 2010-09-01 |
WO2004001822A1 (fr) | 2003-12-31 |
KR20070116184A (ko) | 2007-12-06 |
JP2004186402A (ja) | 2004-07-02 |
KR100820615B1 (ko) | 2008-04-08 |
KR20050012818A (ko) | 2005-02-02 |
KR100661781B1 (ko) | 2006-12-28 |
EP2224468B1 (fr) | 2013-08-14 |
EP1515362A1 (fr) | 2005-03-16 |
US8662010B2 (en) | 2014-03-04 |
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