US20050106043A1 - Vacuum pump provided with vibration damper - Google Patents

Vacuum pump provided with vibration damper Download PDF

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Publication number
US20050106043A1
US20050106043A1 US10/984,153 US98415304A US2005106043A1 US 20050106043 A1 US20050106043 A1 US 20050106043A1 US 98415304 A US98415304 A US 98415304A US 2005106043 A1 US2005106043 A1 US 2005106043A1
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US
United States
Prior art keywords
vacuum pump
pump assembly
actuators
piezoelectric
vibration damper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/984,153
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English (en)
Inventor
Fausto Casaro
Alberto Leva
Luigi Piroddi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
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Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Assigned to VARIAN S.P.A. reassignment VARIAN S.P.A. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CASARO, FAUSTO, LEVA, ALBERTO, PIRODDI, LUIGI
Publication of US20050106043A1 publication Critical patent/US20050106043A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means

Definitions

  • the present invention relates to a vacuum pump, which is provided with a vibration damper.
  • the present invention relates to a turbomolecular vacuum pump provided with a damper attenuating the propagation of vibrations induced by the rotation of the pump rotor to an external unit to which the pump is connected.
  • the external unit may be a chamber in which it is desired to create vacuum conditions.
  • turbomolecular pumps customary used in the applications demanding high degrees of vacuum do not discharge directly to the external environment, but they are connected to a forepump. Thus, it is necessary to consider the vibrations generated by forepump and transmitted to the vacuum pump and from the latter to the vacuum chamber.
  • the vacuum pump is often equipped with a vibration damper disposed between the pump and the vacuum chamber.
  • a vacuum pump 100 has an inlet port 110 , a discharge port 120 and gas pumping means 130 that, in case of turbomolecular pumps, consists of a set of pumping stages, each comprising a rotor disc co-operating with a corresponding stator ring.
  • gas pumping means 130 that, in case of turbomolecular pumps, consists of a set of pumping stages, each comprising a rotor disc co-operating with a corresponding stator ring.
  • An example of a turbomolecular pump is disclosed in the U.S. Pat. No. 5,387,079.
  • a flange 115 is provided in correspondence with the inlet port 110 for coupling with flange 210 of chamber 200 where vacuum conditions are to be created.
  • a similar flange 125 is provided in correspondence with discharge port 120 for coupling with a forepump 300 , generally through a flanged bellows 400 .
  • vibration dampers 140 are, for instance, connected between the pump 100 and the chamber 200 . They essentially comprise a first flange 150 coupled with flange 115 of pump 100 , a second flange 160 coupled with flange 210 of vacuum chamber 200 , a flexible steel bellows 170 ensuring vacuum tightness, and a plurality of rubber members 180 (three in the embodiment shown in FIG. 1 ), uniformly spaced around bellows 170 along the circumferences of flanges 150 , 160 and ensuring damping of the mechanical vibrations transmitted by pump 100 .
  • Rings 190 , 290 are provided between the flanges to allow centring O-rings 195 , 295 intended to ensure vacuum tightness between the flanges.
  • a similar damper could also be used downstream vacuum pump 100 and be connected between flange 125 of the discharge port of the pump and flange 310 of the inlet port of forepump 300 .
  • rubber members 180 used according to the prior art form a passive damper, which attenuates vibration propagation from the pump to the vacuum chamber only in part and in small frequency ranges.
  • the vacuum pump according to the invention comprises a damper utilising piezoelectric actuators.
  • Piezoelectric devices are devices that, when fed with an appropriate voltage, are capable of generating a force which intensity depends on the applied voltage and therefore is controllable. Conversely, these devices can be used to generate a voltage signal proportional to a possible applied force.
  • piezoelectric actuators By using piezoelectric actuators it is therefore possible to control the actuators so that they impart a vibration of substantially the same amplitude as that measured onboard the vacuum pump but in phase opposite thereto, whereby a substantially null resulting vibration is obtained.
  • said piezoelectric actuators are arranged around the metal bellows, in place of the conventional rubber members.
  • said piezoelectric actuators may be directly mounted on the flange of the inlet and/or discharge port of the vacuum pump, around the centring ring and the O-ring, so that the metal bellows and the related flanges can be dispensed with, thereby reducing the axial size of the pump-damper assembly.
  • FIG. 1 is a longitudinal sectional view of a vacuum pump equipped a damper according to the prior art.
  • FIG. 2 is a longitudinal sectional view of a damper according to a first embodiment of the invention
  • FIG. 3 a is a block diagram of a first embodiment of a control logic arrangement for the damper
  • FIG. 3 b is a block diagram of a second embodiment of a control logic arrangement for the damper
  • FIG. 4 a is a block diagram of a third embodiment of a control logic arrangement for the damper
  • FIG. 4 b is a block diagram of a fourth embodiment of a control logic arrangement for the damper
  • FIG. 5 a is a partial cross-sectional view of the damper according to a second embodiment of the invention.
  • FIG. 5 b is a partial cross-sectional view of a detail of the damper of FIG. 5 a;
  • FIG. 6 a is a plan view of the damper according to a third embodiment of the invention.
  • FIG. 6 b is a cross-sectional view, taken along line B-B, of the damper of FIG. 6 a;
  • FIG. 6 c is a cross-sectional view, taken along line C-C, of the damper of FIG. 6 a;
  • FIG. 6 d is a cross-sectional view, taken along line B-B, of the damper of FIG. 6 a;
  • FIG. 7 a is a plan view of the damper according to a fourth embodiment of the invention.
  • FIG. 7 b is a cross-sectional view, taken along line B-B, of the damper of FIG. 7 a;
  • FIG. 8 a is a plan view of the damper according to a fifth embodiment of the invention.
  • FIG. 8 b is a cross-sectional view taken along line B-B, of the damper of FIG. 8 a.
  • FIG. 2 there is shown a vibration damper 14 according to the present invention, which is mounted, by means of corresponding flanges 150 , 160 , between a vacuum pump 100 and a chamber 200 where vacuum is to be created.
  • Damper 14 further comprises a vacuum-tight steel bellows 170 arranged between flanges 150 , 160 .
  • Piezoelectric actuators A i which in this embodiment made of parallelepiped or cylindrical blocks 18 , are arranged around bellows.
  • the piezoelectric actuators A i are uniformly arranged around bellows 170 : for instance, three actuators, spaced apart by 120°, are provided.
  • the actuators A i are actively controlled through a driving signal capable of generating vibrations substantially equal and opposite to the vibrations, which are produced onboard the vacuum pump and are measured by corresponding sensors, and which are not to be transmitted to vacuum chamber 200 .
  • each control system includes a single-variable regulator R i , implemented in analogue or digital technology, which receives from a corresponding sensor S i , for instance an accelerometer, the value of the corresponding acceleration measured at the pump. Depending on such value, regulator R i determines the suitable signal to be sent to driver D i acting upon the corresponding piezoelectric actuator A i . It is possible that the control signals from regulator R i may also depend on external quantities E i different from those measured by sensors S i .
  • the external quantities E i may represent the external disturbances acting on the system, and measurement thereof may serve to implement an open-loop feed-forward control.
  • a corresponding implementing diagram of the control logic of actuators A i shown in FIG. 3 b, allows for compensating the external disturbances before they affect the vibrations. Such a result can be obtained by implementing inside the regulator an accurate mathematical model capable of predicting the effects of the disturbances on the mechanical system.
  • piezoelectric actuators A i are capable of acting as sensors for detecting an acceleration: thus, other piezoelectric members, with the same structure as the actuators but acting as vibration sensors, can be used in place of the usual accelerometers.
  • the even-position members could for instance be used as actuators and the odd-position members as drivers.
  • the regulators R i can possibly act more effectively if vibration detection is carried out at the point where the actuator force is applied: in such case, sensors and actuators may be located as close as possible to one another, as it is disclosed in more details below.
  • a third embodiment of the control logic circuitry of actuators A i is disclosed.
  • a plurality of vibration sensors S 1 . . . S n mounted onboard pump 100 a plurality of drivers D 1 . . . D n capable of controlling piezoelectric actuators A i . . . A n , and a multi-variable regulator R are provided.
  • the regulator R receives the signals representative of the vibrations from the vacuum pump, through sensors S 1 . . . S n . Depending on such signals, regulator R determines the control signals to be fed to drivers D 1 . . . D n acting on piezoelectric actuators A i . . . A n .
  • the actuators generate a vibration that depends on the signal sent by regulator R, the signal being chosen so that the vibration produced is substantially equal and opposite to that measured by the sensors S 1 . . . S n .
  • control logic is a closed-loop logic. Moreover, it is possible to make such control signals depend also on other quantities E measured at the pump.
  • an implementing diagram of the control logic of actuators A i providing for an open-loop feed-forward control may be envisaged also when a multi-variable regulator R is used.
  • Regulator R is a multi-variable regulator, in which the control law for drivers D i is the same for all actuators A i and depends on the signals coming from all sensors S i .
  • regulator R might be implemented as a cascade of as many single-variable regulators R i as the sensor-actuator pairs are, and of a final multi-variable synthesis block.
  • number of sensors S i may not be equal to the number of piezoelectric actuators A i , even though it is convenient to use the same number of sensors S i and actuators A i for constructive reasons.
  • piezoelectric actuators of a small size i.e. much smaller than those of the conventional rubber members
  • piezoelectric actuators of a small size can be used to dampen the vibrations measured on the vacuum pump.
  • these embodiments could allow for improving the pumping characteristics of the pump-damper assembly, by reducing the flow resistance.
  • FIG. 5 a shows part of a damper 24 of a vacuum pump according to a second embodiment of the invention.
  • flange 115 of the vacuum pump inlet port is directly coupled with counterflange 210 of a vacuum chamber through securing screws 20 uniformly distributed along the circumference of said flange 115 , around centring ring 190 and the corresponding O-ring 195 , and through corresponding securing nuts 21 .
  • Piezoelectric actuators A i are formed by cylindrical washers 28 mounted around stems 20 a of securing screws 20 , in contact with flange 115 on the one side and with counterflange 210 on the other side.
  • the axial thrust (shown by arrows F 2 ) of actuators 28 can be effective on the one side on the pump and on the other side on the vacuum chamber, thereby compensating for the axial vibrations measured onboard the pump and resulting in a reduction of the transmitted vibration.
  • metal bellows 170 and the corresponding flanges 150 , 160 can therefore be dispensed with, a consequent reduction of the axial size of the pump-damper assembly.
  • damper 24 may comprise a plurality of piezoelectric members A i used as sensors. Also these sensors preferably consist of washers arranged around stems 20 a of securing screws and alternating with the piezoelectric actuators along the circumference of damper 24 .
  • FIGS. 6 a to 6 c show a third embodiment of the invention.
  • piezoelectric actuators A i are formed by parallelepiped or cylindrical blocks 38 . They are mounted between a pair of circular supports 116 , 211 , directly located between flange 115 of the vacuum pump inlet port and counterflange 210 of a vacuum chamber, around centring ring 190 and the corresponding O-ring 195 ensuring vacuum tightness, similarly to the embodiment shown in FIG. 5 a.
  • support 116 comprises suitable seats 116 receiving said actuators 38 .
  • the axial thrust of piezoelectric actuators 38 can be directly transmitted to the vacuum pump and the vacuum chamber through respective flanges 115 , 210 , whereby a substantially null resulting vibration is obtained.
  • FIG. 6 a shows an alternative solution, already mentioned hereinbefore, in which damper 34 comprises piezoelectric sensors 39 .
  • the sensors consist of piezoelectric parallelepiped or cylindrical plates, of the same kind as used for actuators 38 , and are arranged along the circumference of support 116 alternated with actuators 38 .
  • piezoelectric actuators A i are mounted so as to attenuate transmission of axial vibrations from vacuum pump 100 to vacuum chamber 200 .
  • FIGS. 7 a and 7 b show a fourth embodiment of the invention, where a damper 44 according to the invention comprises piezoelectric actuators A i , consisting of parallelepiped or cylindrical plates 48 , which can be used to prevent transmission of radial vibrations.
  • piezoelectric actuators 48 are mounted between a pair of circular supports 117 , 212 located between flange 115 and counterflange 210 , so that they can exert a radial thrust on flanges 115 , 210 (as shown by arrows F 4 in FIG. 7 b ).
  • FIGS. 8 a, 8 b show a pump arrangement according to a fifth embodiment of the invention, comprising first and second piezoelectric actuators 581 , 582 capable of dampening axial vibrations and radial vibrations, respectively (as shown by arrows F 51 , F 52 in FIG. 8 b ).
  • the first and second piezoelectric actuators 581 , 582 can exert an axial thrust and a radial thrust, respectively, on the vacuum pump and the vacuum chamber connected to the pump.
  • the vacuum chamber is connected through flange 210 to a support 213 shaped so as to have a pair of mutually orthogonal walls facing corresponding orthogonal walls of a corresponding support 118 connected to flange 115 of the vacuum pump.
  • piezoelectric actuators 581 , 582 can be mounted as follows.
  • the first actuators 581 are in contact at their bottom ends with support 118 connected to the vacuum pump, and their top ends with support 213 are connected to flange 210 of the vacuum chamber. Therefore the first actuators 581 are capable of transmitting an axial thrust.
  • the second actuators 582 are in contact at their inner sides with support 118 connected to flange 115 of the vacuum pump and at their outer sides with support 213 connected to flange 210 of the vacuum chamber, whereby they are capable of transmitting a radial thrust.
  • the first and second actuators 581 , 582 consist of piezoelectric parallelepiped or cylindrical plates uniformly arranged along the circumference of flange 115 .
  • damper 54 may comprise first and second piezoelectric members A i used as sensors to detect axial vibrations and radial vibrations, respectively.
  • FIG. 6 d An example of such embodiment is shown in FIG. 6 d, with reference to a damper of the kind shown in FIGS. 6 a to 6 c.
  • Arrows F 3 ′, F 3 ′′ denote the operational directions of the sensor and the actuator, respectively, which are therefore coaxially mounted.
  • FIG. 5 b shows an arrangement relevant to the second embodiment of the invention shown in FIG. 5 a.
  • Arrows F 2 ′, F 2 ′′ denote the operational directions of said sensor and actuator, respectively, which are therefore coaxially mounted.
  • a similar damper could be for instance located also at the discharge port, to attenuate vibration transmission from the forepump to said vacuum pump or between the pump and other external units.
US10/984,153 2003-11-18 2004-11-09 Vacuum pump provided with vibration damper Abandoned US20050106043A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03425741A EP1533530B1 (de) 2003-11-18 2003-11-18 Vakuumpumpe mit Schwingungsdämpfer
EP03425741.0 2003-11-18

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US20050106043A1 true US20050106043A1 (en) 2005-05-19

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EP (1) EP1533530B1 (de)
JP (1) JP2005147151A (de)
DE (1) DE60304870T2 (de)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050248072A1 (en) * 2004-05-09 2005-11-10 Rami Ben-Maimon Vacuum pump vibration isolator
US20080023896A1 (en) * 2004-02-06 2008-01-31 Barrie Dudley Brewster Vibration Damper
US20080100953A1 (en) * 2006-10-25 2008-05-01 Seagate Technology Llc Feedforward compensator for induced vibration
US20080226387A1 (en) * 2004-12-20 2008-09-18 Boc Edwarda Japan Limited Structure for Connecting End Parts and Vacuum System Using the Structure
US20100054957A1 (en) * 2006-07-26 2010-03-04 Oerlikon Leybold Vacuum Gmbh Method for determining a statement of a state of a turbomolecular pump and a turbomolecular pump
US20140170001A1 (en) * 2012-12-18 2014-06-19 Pfeiffer Vacuum Gmbh Vacuum system
US20150275902A1 (en) * 2012-10-30 2015-10-01 Edwards Limited Vacuum pump
US20160056009A1 (en) * 2014-08-21 2016-02-25 Nuflare Technology, Inc. Charged-particle beam drawing apparatus and vibration damping mechanism
US9822788B2 (en) 2012-10-30 2017-11-21 Edwards Limited Vacuum pump with back-up bearing contact sensor
GB2552324A (en) * 2016-07-18 2018-01-24 Edwards Ltd Vibration damping connector systems
CN113250979A (zh) * 2021-05-11 2021-08-13 柳丽 一种轴流风机
EP4130481A4 (de) * 2020-03-31 2024-04-10 Edwards Japan Ltd Vakuumpumpe und rohrleitungsstruktur für vakuumpumpe

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DE102005019054A1 (de) * 2005-04-23 2006-10-26 Pfeiffer Vacuum Gmbh Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
IT1399567B1 (it) 2010-04-16 2013-04-19 Varian Spa Smorzatore di vibrazioni per pompe di vuoto
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
KR102317426B1 (ko) * 2019-12-27 2021-10-26 주식회사 에스에프에이 실리콘 카바이드 단결정 성장장치

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US20050204754A1 (en) * 2004-03-22 2005-09-22 Alcatel Vacuum pump damping adapter

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US3759626A (en) * 1970-10-23 1973-09-18 Pfeiffer Gmbh A Bearing arrangement for molecular and turbo molecular pumps
US4523612A (en) * 1983-04-15 1985-06-18 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for suppressing vibration and displacement of a bellows
US5387079A (en) * 1991-07-10 1995-02-07 Varian Associates, Inc. Pumping state turbomolecular pumps
US5860494A (en) * 1995-06-13 1999-01-19 Sumitomo Electric Industries, Ltd. Vibration damper for use in disk brake
US5765817A (en) * 1995-07-27 1998-06-16 Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. Interface for vibration reduction in structural-dynamic systems
US6047794A (en) * 1996-12-19 2000-04-11 Sumitomo Electric Industries, Ltd. Vibration damper for use in wheel brake
US6361483B1 (en) * 1999-10-22 2002-03-26 Morrison Berkshire, Inc. System for controlling vibration of a dynamic surface
US6572178B2 (en) * 2001-03-16 2003-06-03 Benteler Automobiltechnik Gmbh & Co. Kg Dashboard support with vibration-damping feature
US20030051958A1 (en) * 2001-09-18 2003-03-20 Esche Sven K. Adaptive shock and vibration attenuation using adaptive isolators
US20050204754A1 (en) * 2004-03-22 2005-09-22 Alcatel Vacuum pump damping adapter

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080023896A1 (en) * 2004-02-06 2008-01-31 Barrie Dudley Brewster Vibration Damper
US8181944B2 (en) * 2004-02-06 2012-05-22 Edwards Limited Vibration damper
US20050248072A1 (en) * 2004-05-09 2005-11-10 Rami Ben-Maimon Vacuum pump vibration isolator
US7478710B2 (en) * 2004-05-09 2009-01-20 Rami Ben-Maimon Vacuum pump vibration isolator
US20080226387A1 (en) * 2004-12-20 2008-09-18 Boc Edwarda Japan Limited Structure for Connecting End Parts and Vacuum System Using the Structure
US20100054957A1 (en) * 2006-07-26 2010-03-04 Oerlikon Leybold Vacuum Gmbh Method for determining a statement of a state of a turbomolecular pump and a turbomolecular pump
US20080100953A1 (en) * 2006-10-25 2008-05-01 Seagate Technology Llc Feedforward compensator for induced vibration
US7460329B2 (en) * 2006-10-25 2008-12-02 Seagate Technology Llc Feedforward compensator for induced vibration
US9822788B2 (en) 2012-10-30 2017-11-21 Edwards Limited Vacuum pump with back-up bearing contact sensor
US20150275902A1 (en) * 2012-10-30 2015-10-01 Edwards Limited Vacuum pump
US10024328B2 (en) * 2012-10-30 2018-07-17 Edwards Limited Vacuum pump
US20140170001A1 (en) * 2012-12-18 2014-06-19 Pfeiffer Vacuum Gmbh Vacuum system
US20160056009A1 (en) * 2014-08-21 2016-02-25 Nuflare Technology, Inc. Charged-particle beam drawing apparatus and vibration damping mechanism
US9431208B2 (en) * 2014-08-21 2016-08-30 Nuflare Technology, Inc. Charged-particle beam drawing apparatus and vibration damping mechanism
GB2552324A (en) * 2016-07-18 2018-01-24 Edwards Ltd Vibration damping connector systems
GB2552324B (en) * 2016-07-18 2019-06-12 Edwards Ltd Vibration damping connector systems
US11608916B2 (en) 2016-07-18 2023-03-21 Edwards Limited Vibration damping connector systems
EP4130481A4 (de) * 2020-03-31 2024-04-10 Edwards Japan Ltd Vakuumpumpe und rohrleitungsstruktur für vakuumpumpe
CN113250979A (zh) * 2021-05-11 2021-08-13 柳丽 一种轴流风机

Also Published As

Publication number Publication date
JP2005147151A (ja) 2005-06-09
EP1533530A1 (de) 2005-05-25
EP1533530B1 (de) 2006-04-26
DE60304870D1 (de) 2006-06-01
DE60304870T2 (de) 2006-11-30

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