US20040058127A1 - Polishing film and method of producing same - Google Patents

Polishing film and method of producing same Download PDF

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Publication number
US20040058127A1
US20040058127A1 US10/329,657 US32965702A US2004058127A1 US 20040058127 A1 US20040058127 A1 US 20040058127A1 US 32965702 A US32965702 A US 32965702A US 2004058127 A1 US2004058127 A1 US 2004058127A1
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US
United States
Prior art keywords
polishing
average diameter
silica particles
polishing layer
resin binder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/329,657
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English (en)
Inventor
Toru Yamazaki
Tetsuya Baba
Osamu Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIHON MOCROCOATING Co Ltd
Nihon Micro Coating Co Ltd
NTT Advanced Technology Corp
Original Assignee
Nihon Micro Coating Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micro Coating Co Ltd filed Critical Nihon Micro Coating Co Ltd
Assigned to NTT ADVANCED TECHNOLOGY CO., LTD., NIHON MOCROCOATING CO., LTD. reassignment NTT ADVANCED TECHNOLOGY CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MURATA, OSAMU, BABA, TETSUYA, YAMAZAKI, TORU
Publication of US20040058127A1 publication Critical patent/US20040058127A1/en
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B19/226—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground of the ends of optical fibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/14—Layered products comprising a layer of synthetic resin next to a particulate layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/02—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a matt or rough surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3863—Details of mounting fibres in ferrules; Assembly methods; Manufacture fabricated by using polishing techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991—Coated
    • Y10T428/2993—Silicic or refractory material containing [e.g., tungsten oxide, glass, cement, etc.]

Definitions

  • This invention relates to a polishing film for use in polishing the surface of materials such as metals, ceramics, plastics and glass as well as to a method of producing such a film. More particularly, this invention relates to a polishing film for the surface finishing of precision instruments such as optical fiber connectors for communications, color filters for liquid crystal displays, optical lenses, magnetic disk substrates and semiconductor wafers that require a very high degree of surface smoothness, as well as a method of producing such a polishing film.
  • precision instruments such as optical fiber connectors for communications, color filters for liquid crystal displays, optical lenses, magnetic disk substrates and semiconductor wafers that require a very high degree of surface smoothness
  • Such optical fiber connectors are formed by passing one or more optical fibers through the center of a ferrule made of partially stabilized zirconia obtained by adding aluminum to yttria and adhesively attached to the ferrule by means of a resin adhesive but their end surface must undergo a final surface polishing process such that the end parts of the optical fibers will not protrude by more than 0.1 ⁇ m or indent by more than 0.05 ⁇ m from the end surface of the connector.
  • polishing tape having a polishing layer of abrading particles (very small spherical silica particles with average diameter of 0.001-0.5 ⁇ m) and a resin binder formed on the surface of a plastic film either in the form of a tape or by cutting into another shape, as disclosed, for example, in Japanese Patent Publications Tokkai 11-333731 and 11-333732.
  • the surface smoothness of a precision-requiring component can be improved by using such abrading particles with very small diameters so as to increase the contact surface of individual particles that act on the surface to be polished. Since the polishing layer is extremely flat, however, there arises the problem of lowered polishing capability such that the throughput is adversely affected and locally unpolished spots are left.
  • the polishing power can be increased while using abrading particles with such very small diameters if the content of silica particles inside the polishing layer is increased such that the number of abrading particles per unit area contacting the target surface to be polished is increased.
  • This causes the contact area of the resin binder inside the polishing layer to be reduced, and this tends to cause the polishing layer to peel off locally during a polishing operation.
  • Such peeled-off portions of the polishing layer tend to damage the surface of the precision instrument, frustrating the effort to carry out a precise surface finishing process.
  • the polishing power can be increased also if relatively larger abrading particles are used. If the diameters of the abrading particles are increased, however, the contact area of the resin binder in the polishing layer with the plastic film increases and hence the problem of the polishing layer locally peeling off the plastic film can be alleviated but there arises instead the problem that the smoothness of the polished surface of the precision instrument is adversely affected.
  • a polishing film embodying this invention may be characterized as comprising a plastic film and a polishing layer formed on its surface, having a mixture of a first group of silica particles with a first average diameter and a second group of silica particles with a second average diameter fixed in a resin binder wherein the first average diameter and the second diameter are different from each other and both within a range of 0.001-10 ⁇ m.
  • the mixture of the two groups of silica particles according to this invention has a granularity (grain size) distribution curve with two peaks at two different diameter values corresponding to the first and second average diameters.
  • silica particles having two different diameters contribute mainly to the polishing and the surface being polished therewith can be made into a smoothly finished surface with a high level of precision and without unpolished spots due to a synergistic effect of these particles, unlike the conventional polishing films in which only particles with only one particular diameter mainly contribute to the polishing.
  • polishing film using a mixture of a group of silica particles with average diameter of 0.02 ⁇ m and another group of silica particles with average diameter of 0.03 ⁇ m at a ratio of 9:1-6:4.
  • a method of producing a polishing film according to this invention may be characterized as comprising the steps of applying on a surface of a plastic film a paint obtained by dispersing in a resin binder solution a mixture of silica particles as described above and drying it to form a polishing layer on the surface of the plastic film.
  • a resin binder solution of a kind containing oligomers with siloxane bonds it is preferred to use a resin binder solution of a kind containing oligomers with siloxane bonds to form a network of cracks on the surface of the polishing layer.
  • This invention therefore provides a polishing film in which silica particles with two different diameters contribute to the polishing process and their synergistic effect makes it possible to obtain a smoothly polished surface without unpolished spots. Moreover, since silica particles with a relatively large diameter are fixed in the polishing layer, the polishing layer does not peel off easily from the plastic film while being used in a polishing process.
  • FIG. 1( a ) is a schematic sectional view of a polishing film embodying this invention
  • FIG. 1( b ) is an enlarged plan view of a portion of the surface of its polishing layer.
  • FIGS. 2 ( a ) and 2 ( b ) are optical microscopic photographs showing the condition of the end surface of an optical fiber connector respectively before and after it was polished by using a polishing film of the test example in the comparison experiment.
  • FIGS. 3 ( a ) and 3 ( b ) are optical microscopic photographs showing the condition of the end surface of an optical fiber connector respectively before and after it was polished by using a polishing film of the comparison test example in the comparison experiment.
  • FIG. 4 is a schematic sectional view of an optical fiber connector having its end surface polished in the comparison experiment.
  • FIG. 5 is a granularity distribution of silica particles with average diameter of 0.02 ⁇ m.
  • FIG. 6 is a granularity distribution of silica particles with average diameter of 0.03 ⁇ m.
  • FIG. 7 is a granularity distribution of the mixture of a group of silica particles with average diameter of 0.02 ⁇ m and another group of silica particles with average diameter of 0.03 ⁇ m of the test example.
  • FIG. 1( a ) shows a polishing film embodying this invention, having a polishing layer 5 formed on the front surface of a plastic film 1 .
  • the polishing layer 5 is formed by fixing a mixture of a first group of silica particles 2 and a second group of silica particles 3 with a resin binder 4 where the silica particles 2 of the first group has a (first) average diameter in the range of 0.001-10 ⁇ m and the silica particles 3 of the second group has a different (second) average diameter also in the same range.
  • FIG. 7 shows the granularity distribution curve of the diameters of this mixture of silica particles, showing two peaks 23 and 24 corresponding to the two different average diameter values for the first and second groups of silica particles 2 and 3 .
  • the granularity distribution of particles is obtained by taking electron microscopic photographs at several arbitrarily selected parts of the particles, counting the number of particles in each range of their diameters and showing the result of the counting in a graph with the particle diameter shown along the horizontal axis and the number or percentage of particles along the vertical axis.
  • the average diameter means where the peak appears on the distribution curve. Particles with the average diameter are most numerously contained and such particles having the average diameter mainly contribute in the polishing process.
  • the distribution curve may be for example as shown in FIG. 5, having only one peak 21 at 0.02 ⁇ m and those silica particles with diameter 0.02 ⁇ m contribute mainly in a polishing process.
  • the distribution curve may, be for example as shown in FIG. 6, having only one peak 22 at 0.03 ⁇ m and those silica particles with diameter 0.03 ⁇ m contribute mainly in a polishing process.
  • silica particles of two different diameter values are caused to contribute mainly in a polishing process such that the target surface of a precision instrument can be finished into a smooth surface with a reduced number of unpolished spots by a synergistic effect of silica particles of two groups with different average diameters.
  • plastic film 1 use may be made of any known flexible plastic film of a known kind having a large tensile strength and a superior resistance against heat and chemicals such as films of polyethylene terephthalate (PET), polyester or polypropylene with thickness about 20-150 ⁇ m.
  • PET polyethylene terephthalate
  • PET polyethylene terephthalate
  • polypropylene with thickness about 20-150 ⁇ m.
  • the ratio of mixing silica particles of the first group and the second group 2 and 3 may be selected appropriately. If the mixing ratio of the group having the larger average diameter is increased, the polishing power is increased to leave fewer unpolished spots and the probability of the polishing layer 5 peeling off from the surface of the plastic film 1 becomes reduced.
  • the mixing ratio of silica particles with the smaller average diameter with respect to those with the larger average diameter should preferably be in the range of 9:1-6:4. This is because the tip portion of optical fibers may sustain an unwanted damage or become deformed if the mixing ratio of silica particles with the larger average diameter exceeds 50%.
  • the ratio of the particles with the larger average diameter may be less than that of the particles with the smaller average diameter.
  • Polishing films according to this invention may be produced by applying a paint material including aforementioned mixed particles and a binder on the surface of a plastic film and then drying it to thereby form a polishing layer on the surface of the plastic film.
  • the binder which may be used for the purpose of this invention include conventional polyurethane and polyester resin binders of known kinds. Methylethyl ketone may be used as its solvent.
  • a hardening agent such as isocyanate may be added to a mixture of a resin binder and a solvent.
  • a mixture of a resin binder and a solvent (and perhaps also a hardening agent) will be hereinafter referred to as a “resin binder solution.”
  • the mixing ratio of the mixed particles with respect to the resin binder solution is within the range of 1:99-99:1
  • Oligomers such polyurethanes and polyesters having a siloxane bond may be used conveniently to form a network of cracks 6 on the surface of the polishing layer 5 as shown in FIG. 1( b ). These cracks 6 serve to take in waste materials generated during a polishing process such that the waste materials can be prevented from damaging the target surface being polished.
  • a polishing film as a test example was prepared by using a mixture of silica particles of two groups with different average diameters of 0.02 ⁇ m and 0.03 ⁇ m and having a distribution curve as shown in FIG. 7 with two peaks at 0.02 ⁇ m and 0.03 ⁇ m.
  • a liquid having silica particles with average diameter 0.02 ⁇ m dispersed therein (IPA-ST by tradename produced by Nissan Chemical Industries Corporation) (3150 g) and another liquid having silica particles with average diameter 0.03 ⁇ m dispersed therein (MA-ST-M by tradename produced by Nissan Chemical Industries Corporation) (1012.5 g) were placed inside a mixer and this mixed liquid with silica particles with different average diameters were mixed together for five minutes by stirring with ultrasonic waves.
  • a resin binder solution comprising oligomers having siloxane bonds (KR-211 by tradename produced by Shinetsu Chemical Industries Corporation) (203.6 g) was gradually added thereafter and mixed together by stirring for five minutes with ultrasonic waves so as to uniformly disperse the mixed particles inside this resin binder solution.
  • another resin binder solution comprising oligomers having siloxane bonds (T8001 by tradename produced by JSR Corporation) (37.5 g) was gradually added and mixed together by stirring for 30 minutes with ultrasonic waves so as to uniformly disperse the mixed particles inside these resin binder solutions and to thereby obtain a paint.
  • this paint was filtered through a 1.0 ⁇ m filter, it was uniformly applied over a surface of a PET film of thickness 75 ⁇ m in an atmosphere of about 20° C. by a gravure reverse coating method, and after it was dried so as to evaporate the solvent in the resin binder, it was further subjected to a heat process in an atmosphere of 100° C. to form a polishing layer of thickness 6 ⁇ m.
  • the PET film was one obtained by extruding PET and polyester resin together and then subjecting the extrusion to a drawing process. In other words, use was made of a PET film with a primer processing carried out thereon. A network of cracks as shown in FIG. 1( b ) was formed on the surface of this polishing layer.
  • FIG. 5 shows the granularity distribution of the silica particles, having a single peak at a diameter value (0.02 ⁇ m) corresponding to their average diameter 0.02 ⁇ m.
  • a liquid having silica particles with average diameter 0.02 ⁇ m dispersed therein (IPA-ST by tradename produced by Nissan Chemical Industries Corporation) (4500 g) was placed inside a mixer and this mixture was stirred together for five minutes with ultrasonic waves.
  • IPA-ST by tradename produced by Nissan Chemical Industries Corporation
  • a resin binder solution comprising oligomers having siloxane bonds (KR-211 by tradename produced by Shinetsu Chemical Industries Corporation) (203.6 g) was gradually added and stirred for five minutes with ultrasonic waves so as to uniformly disperse the siloxane particles inside this resin binder solution.
  • this paint was filtered through a 1.0 ⁇ m filter, it was uniformly applied over a surface of a PET film of thickness 75 ⁇ m in an atmosphere of about 20° C. by a gravure reverse coating method, and after it was dried so as to evaporate the solvent in the resin binder, it was further subjected to a heat process in an atmosphere of 100° C. to form a polishing layer of thickness 6 ⁇ m, as done for the text example. A similar network of cracks as shown in FIG. 1( b ) was formed on the surface of this polishing layer.
  • each of the polishing films of the test and comparison examples was used to finish the end surface of an optical fiber connector 10 as shown in FIG. 4 composed of a communication optical glass fiber 11 penetrating and adhesively attached to a zirconium ferrule 12 preliminarily roughly polished by using a polishing liquid containing diamond particles and a non-woven cloth pad.
  • the polishing was carried out as shown in FIG. 4 by pasting a polishing film 15 on a rotary disk 14 having an elastic pad 13 attached thereto and pressing the end surface of the optical fiber connector with a specified pressure while the disk 14 is rotated.
  • the comparison experiment was carried out by rotating the disk 14 at the rate of 200 rpm and pressing each fiber optical connector at a pressure of 180 g per fiber for 4 minutes.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
US10/329,657 2001-05-14 2002-12-23 Polishing film and method of producing same Abandoned US20040058127A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001180823 2001-05-14
WOPCT/JP02/04275 2002-04-26
PCT/JP2002/004275 WO2002092286A1 (fr) 2001-05-14 2002-04-26 Pellicule abrasive et procede de fabrication

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US10/372,598 Expired - Lifetime US6958082B2 (en) 2001-05-14 2003-02-21 Polishing film and method of producing same

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US (2) US20040058127A1 (fr)
EP (1) EP1403001A4 (fr)
JP (1) JP3924252B2 (fr)
WO (1) WO2002092286A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10451816B2 (en) 2015-12-08 2019-10-22 Mipox Corporation Polishing sheet equipped with nano-silica polishing particles, and polishing method and manufacturing method for optical fiber connector using polishing sheet

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5196709B2 (ja) * 2005-04-19 2013-05-15 株式会社荏原製作所 半導体ウエハ周縁研磨装置及び方法
US7256032B2 (en) * 2005-12-22 2007-08-14 Ab Enzymes Oy Enzymes
US8038750B2 (en) 2007-07-13 2011-10-18 3M Innovative Properties Company Structured abrasive with overlayer, and method of making and using the same
US20100221982A1 (en) * 2009-02-27 2010-09-02 Illinois Tool Works Inc. Kit having two types of clay
EP3168002B1 (fr) * 2014-07-07 2022-03-23 Bando Chemical Industries, Ltd. Film de polissage
CN106573362B (zh) * 2014-08-21 2019-06-11 阪东化学株式会社 研磨膜
US11865663B2 (en) * 2018-05-10 2024-01-09 George Shuai Optical surface polishing
JP7197603B2 (ja) * 2018-11-13 2022-12-27 株式会社アドマテックス 多心フェルール用研磨材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5573816A (en) * 1995-06-06 1996-11-12 Norton Company Friction coating for film backings

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4044185A (en) * 1975-01-20 1977-08-23 Westinghouse Electric Corporation Decorative sheet for solid color laminates
JP2889994B2 (ja) * 1991-01-09 1999-05-10 富士写真フイルム株式会社 研磨テープおよび磁気ヘッドの研磨方法
JP3305557B2 (ja) * 1995-04-10 2002-07-22 大日本印刷株式会社 研磨テープ、その製造方法および研磨テープ用塗工剤
US5766277A (en) * 1996-09-20 1998-06-16 Minnesota Mining And Manufacturing Company Coated abrasive article and method of making same
JP3978253B2 (ja) * 1997-04-07 2007-09-19 株式会社きもと 光ファイバコネクタ用研磨フィルムおよびそれを用いた研磨方法
US5942015A (en) * 1997-09-16 1999-08-24 3M Innovative Properties Company Abrasive slurries and abrasive articles comprising multiple abrasive particle grades
JPH11333731A (ja) 1998-05-28 1999-12-07 Dainippon Printing Co Ltd 研磨テープ及び該研磨テープ用塗工液並びに研磨テープの製造方法
JP2000354970A (ja) * 1999-06-15 2000-12-26 Fuji Photo Film Co Ltd 研磨体及び研磨体の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5573816A (en) * 1995-06-06 1996-11-12 Norton Company Friction coating for film backings

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10451816B2 (en) 2015-12-08 2019-10-22 Mipox Corporation Polishing sheet equipped with nano-silica polishing particles, and polishing method and manufacturing method for optical fiber connector using polishing sheet

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Publication number Publication date
EP1403001A4 (fr) 2008-05-28
EP1403001A1 (fr) 2004-03-31
US6958082B2 (en) 2005-10-25
JPWO2002092286A1 (ja) 2004-08-26
US20040005460A1 (en) 2004-01-08
WO2002092286A1 (fr) 2002-11-21
JP3924252B2 (ja) 2007-06-06

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Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YAMAZAKI, TORU;BABA, TETSUYA;MURATA, OSAMU;REEL/FRAME:013621/0224;SIGNING DATES FROM 20021209 TO 20021213

Owner name: NIHON MOCROCOATING CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YAMAZAKI, TORU;BABA, TETSUYA;MURATA, OSAMU;REEL/FRAME:013621/0224;SIGNING DATES FROM 20021209 TO 20021213

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