TWI912493B - 檢查裝置 - Google Patents

檢查裝置

Info

Publication number
TWI912493B
TWI912493B TW111110204A TW111110204A TWI912493B TW I912493 B TWI912493 B TW I912493B TW 111110204 A TW111110204 A TW 111110204A TW 111110204 A TW111110204 A TW 111110204A TW I912493 B TWI912493 B TW I912493B
Authority
TW
Taiwan
Prior art keywords
periodic
unit
brightness
auxiliary component
imaging
Prior art date
Application number
TW111110204A
Other languages
English (en)
Chinese (zh)
Other versions
TW202242392A (zh
Inventor
大西史朗
杉本巖生
小﨑修司
藤岡修司
鈴川正紘
Original Assignee
日商科納維股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商科納維股份有限公司 filed Critical 日商科納維股份有限公司
Publication of TW202242392A publication Critical patent/TW202242392A/zh
Application granted granted Critical
Publication of TWI912493B publication Critical patent/TWI912493B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/8921—Streaks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/8922—Periodic flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object

Landscapes

  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW111110204A 2021-04-22 2022-03-18 檢查裝置 TWI912493B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-072442 2021-04-22
JP2021072442 2021-04-22

Publications (2)

Publication Number Publication Date
TW202242392A TW202242392A (zh) 2022-11-01
TWI912493B true TWI912493B (zh) 2026-01-21

Family

ID=83722893

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111110204A TWI912493B (zh) 2021-04-22 2022-03-18 檢查裝置

Country Status (6)

Country Link
EP (1) EP4328571A4 (https=)
JP (1) JPWO2022224636A1 (https=)
KR (1) KR20230174235A (https=)
CN (1) CN117222886A (https=)
TW (1) TWI912493B (https=)
WO (1) WO2022224636A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116990324A (zh) * 2023-07-04 2023-11-03 东莞市彤光电子科技有限公司 一种对透明膜材进行投影的缺陷检测装置
CN117491391B (zh) * 2023-12-29 2024-03-15 登景(天津)科技有限公司 基于芯片计算的玻璃基板光三维健康检测方法及设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001201429A (ja) * 2000-01-18 2001-07-27 Mitsubishi Chemicals Corp 検査基体の欠陥検査方法および装置
JP2012078144A (ja) * 2010-09-30 2012-04-19 Kaneka Corp 透明体シート状物の表面欠陥検査装置
JP2015215183A (ja) * 2014-05-08 2015-12-03 株式会社神戸製鋼所 欠陥分析装置及び欠陥分析方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761550U (https=) * 1980-09-17 1982-04-12
JPH0723211U (ja) * 1993-10-04 1995-04-25 三菱樹脂株式会社 透明プラスチック板の検査装置
JP2003172707A (ja) * 2001-12-05 2003-06-20 Shibuya Kogyo Co Ltd 反射防止膜を付した物品の検査方法とその装置
GB0307345D0 (en) * 2003-03-29 2003-05-07 Pilkington Plc Glazing inspection
US7388989B2 (en) * 2004-11-19 2008-06-17 Xerox Corporation Method for run-time streak detection by profile analysis
JP4779506B2 (ja) * 2005-08-30 2011-09-28 大日本印刷株式会社 カラーフィルター用の基板およびその検査方法、検査装置
JP2007178275A (ja) * 2005-12-28 2007-07-12 Toray Ind Inc スジ状凹凸の検査装置、スジ状凹凸の検査方法およびフィルムの製造方法
JP4960638B2 (ja) 2006-02-08 2012-06-27 積水化学工業株式会社 透明フィルムの検査方法
KR100838655B1 (ko) * 2006-10-27 2008-06-16 (주)쎄미시스코 유리기판의 품질 검사장치 및 그 검사방법
JP5253038B2 (ja) 2008-08-19 2013-07-31 日立造船株式会社 シート・フィルムのロール成形装置およびロール成形方法
TWI497061B (zh) * 2009-04-30 2015-08-21 Corning Inc 用以偵測玻璃板中的缺陷之方法及設備
KR101774074B1 (ko) * 2010-03-10 2017-09-01 쓰리엠 이노베이티브 프로퍼티즈 컴파니 웨브 제조 공정에서의 응용-특정된 반복 결함 검출 시스템
KR102628620B1 (ko) * 2016-02-05 2024-01-24 도레이 카부시키가이샤 시트 형상물의 검사 장치 및 시트 형상물의 검사 방법
JP7076280B2 (ja) 2018-04-27 2022-05-27 日立造船株式会社 測定方法および測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001201429A (ja) * 2000-01-18 2001-07-27 Mitsubishi Chemicals Corp 検査基体の欠陥検査方法および装置
JP2012078144A (ja) * 2010-09-30 2012-04-19 Kaneka Corp 透明体シート状物の表面欠陥検査装置
JP2015215183A (ja) * 2014-05-08 2015-12-03 株式会社神戸製鋼所 欠陥分析装置及び欠陥分析方法

Also Published As

Publication number Publication date
TW202242392A (zh) 2022-11-01
EP4328571A1 (en) 2024-02-28
EP4328571A4 (en) 2025-08-06
JPWO2022224636A1 (https=) 2022-10-27
CN117222886A (zh) 2023-12-12
WO2022224636A1 (ja) 2022-10-27
KR20230174235A (ko) 2023-12-27

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