CN117222886A - 检查装置 - Google Patents

检查装置 Download PDF

Info

Publication number
CN117222886A
CN117222886A CN202280029258.7A CN202280029258A CN117222886A CN 117222886 A CN117222886 A CN 117222886A CN 202280029258 A CN202280029258 A CN 202280029258A CN 117222886 A CN117222886 A CN 117222886A
Authority
CN
China
Prior art keywords
unit
defect
imaging
luminance
aperiodic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280029258.7A
Other languages
English (en)
Chinese (zh)
Inventor
大西史朗
杉本巖生
小崎修司
藤冈修司
铃川正纮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanadevia Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Publication of CN117222886A publication Critical patent/CN117222886A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/8921—Streaks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/8922—Periodic flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object

Landscapes

  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN202280029258.7A 2021-04-22 2022-03-15 检查装置 Pending CN117222886A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-072442 2021-04-22
JP2021072442 2021-04-22
PCT/JP2022/011654 WO2022224636A1 (ja) 2021-04-22 2022-03-15 検査装置

Publications (1)

Publication Number Publication Date
CN117222886A true CN117222886A (zh) 2023-12-12

Family

ID=83722893

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280029258.7A Pending CN117222886A (zh) 2021-04-22 2022-03-15 检查装置

Country Status (6)

Country Link
EP (1) EP4328571A4 (https=)
JP (1) JPWO2022224636A1 (https=)
KR (1) KR20230174235A (https=)
CN (1) CN117222886A (https=)
TW (1) TWI912493B (https=)
WO (1) WO2022224636A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116990324A (zh) * 2023-07-04 2023-11-03 东莞市彤光电子科技有限公司 一种对透明膜材进行投影的缺陷检测装置
CN117491391B (zh) * 2023-12-29 2024-03-15 登景(天津)科技有限公司 基于芯片计算的玻璃基板光三维健康检测方法及设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761550U (https=) * 1980-09-17 1982-04-12
JPH0723211U (ja) * 1993-10-04 1995-04-25 三菱樹脂株式会社 透明プラスチック板の検査装置
JP2001201429A (ja) * 2000-01-18 2001-07-27 Mitsubishi Chemicals Corp 検査基体の欠陥検査方法および装置
JP2003172707A (ja) * 2001-12-05 2003-06-20 Shibuya Kogyo Co Ltd 反射防止膜を付した物品の検査方法とその装置
GB0307345D0 (en) * 2003-03-29 2003-05-07 Pilkington Plc Glazing inspection
US7388989B2 (en) * 2004-11-19 2008-06-17 Xerox Corporation Method for run-time streak detection by profile analysis
JP4779506B2 (ja) * 2005-08-30 2011-09-28 大日本印刷株式会社 カラーフィルター用の基板およびその検査方法、検査装置
JP2007178275A (ja) * 2005-12-28 2007-07-12 Toray Ind Inc スジ状凹凸の検査装置、スジ状凹凸の検査方法およびフィルムの製造方法
JP4960638B2 (ja) 2006-02-08 2012-06-27 積水化学工業株式会社 透明フィルムの検査方法
KR100838655B1 (ko) * 2006-10-27 2008-06-16 (주)쎄미시스코 유리기판의 품질 검사장치 및 그 검사방법
JP5253038B2 (ja) 2008-08-19 2013-07-31 日立造船株式会社 シート・フィルムのロール成形装置およびロール成形方法
TWI497061B (zh) * 2009-04-30 2015-08-21 Corning Inc 用以偵測玻璃板中的缺陷之方法及設備
KR101774074B1 (ko) * 2010-03-10 2017-09-01 쓰리엠 이노베이티브 프로퍼티즈 컴파니 웨브 제조 공정에서의 응용-특정된 반복 결함 검출 시스템
JP2012078144A (ja) * 2010-09-30 2012-04-19 Kaneka Corp 透明体シート状物の表面欠陥検査装置
JP6244260B2 (ja) * 2014-05-08 2017-12-06 株式会社神戸製鋼所 欠陥分析装置及び欠陥分析方法
KR102628620B1 (ko) * 2016-02-05 2024-01-24 도레이 카부시키가이샤 시트 형상물의 검사 장치 및 시트 형상물의 검사 방법
JP7076280B2 (ja) 2018-04-27 2022-05-27 日立造船株式会社 測定方法および測定装置

Also Published As

Publication number Publication date
TW202242392A (zh) 2022-11-01
EP4328571A1 (en) 2024-02-28
EP4328571A4 (en) 2025-08-06
JPWO2022224636A1 (https=) 2022-10-27
TWI912493B (zh) 2026-01-21
WO2022224636A1 (ja) 2022-10-27
KR20230174235A (ko) 2023-12-27

Similar Documents

Publication Publication Date Title
WO2007133581A2 (en) Apparatus and method for characterizing defects in a transparent substrate
CN117222886A (zh) 检查装置
KR101588937B1 (ko) 패턴 검사 장치 및 패턴 검사 방법
CN101427127A (zh) 滤色器检测方法、滤色器制造方法和滤色器检测装置
CN110741245B (zh) 用于检测光学膜的缺陷的装置和方法
TW201241420A (en) Tire shape testing device and tire shape testing method
US12222297B2 (en) Methods and apparatus for inspecting a material
JP4511978B2 (ja) 表面疵検査装置
CN115420750A (zh) 表面缺陷检测系统、表面缺陷检测方法及表面检测产线
EP2386059A1 (en) A system and method for thin film quality assurance
WO2010092744A1 (ja) 外観検査装置及び樹脂成形品の製造方法
TW201315994A (zh) 影像取得裝置及影像取得方法
TWI795552B (zh) 測量方法以及測量裝置
JP5935266B2 (ja) キズ欠点検査方法およびシートの製造方法
JP2004212353A (ja) 光学的検査装置
CN216747463U (zh) 一种在线物体表面缺陷的检测装置
CN116165207A (zh) 检测机构、生产设备及其检测方法
CN223742352U (zh) 一种薄膜缺陷检测装置
CN119936059B (zh) 基于机器视觉的热敏胶片新材料加工用缺陷检测装置
JP2010044049A (ja) 塗工検査方法および塗工検査装置および塗工装置
CN216284967U (zh) 一种外观缺陷检测装置
CN101146661A (zh) 成形薄片与双凸透镜片的制造方法及制造装置
JP2025131351A (ja) フロートガラスの検査方法及び検査装置
JP2004191215A (ja) 鏡面体の検査装置
CN115791788A (zh) 一种基于机器视觉的透明光学膜擦伤的检测系统

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination