KR20230174235A - 검사장치 - Google Patents

검사장치 Download PDF

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Publication number
KR20230174235A
KR20230174235A KR1020237038562A KR20237038562A KR20230174235A KR 20230174235 A KR20230174235 A KR 20230174235A KR 1020237038562 A KR1020237038562 A KR 1020237038562A KR 20237038562 A KR20237038562 A KR 20237038562A KR 20230174235 A KR20230174235 A KR 20230174235A
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KR
South Korea
Prior art keywords
unit
luminance
defect
photographing
aperiodic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237038562A
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English (en)
Korean (ko)
Inventor
후미아키 오니시
이와오 스기모토
슈지 오자키
슈지 후지오카
마사히로 스즈카와
Original Assignee
히다치 조센 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히다치 조센 가부시키가이샤 filed Critical 히다치 조센 가부시키가이샤
Publication of KR20230174235A publication Critical patent/KR20230174235A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/8921—Streaks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/8922—Periodic flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object

Landscapes

  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020237038562A 2021-04-22 2022-03-15 검사장치 Pending KR20230174235A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-072442 2021-04-22
JP2021072442 2021-04-22
PCT/JP2022/011654 WO2022224636A1 (ja) 2021-04-22 2022-03-15 検査装置

Publications (1)

Publication Number Publication Date
KR20230174235A true KR20230174235A (ko) 2023-12-27

Family

ID=83722893

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237038562A Pending KR20230174235A (ko) 2021-04-22 2022-03-15 검사장치

Country Status (6)

Country Link
EP (1) EP4328571A4 (https=)
JP (1) JPWO2022224636A1 (https=)
KR (1) KR20230174235A (https=)
CN (1) CN117222886A (https=)
TW (1) TWI912493B (https=)
WO (1) WO2022224636A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116990324A (zh) * 2023-07-04 2023-11-03 东莞市彤光电子科技有限公司 一种对透明膜材进行投影的缺陷检测装置
CN117491391B (zh) * 2023-12-29 2024-03-15 登景(天津)科技有限公司 基于芯片计算的玻璃基板光三维健康检测方法及设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761550U (https=) * 1980-09-17 1982-04-12
JPH0723211U (ja) * 1993-10-04 1995-04-25 三菱樹脂株式会社 透明プラスチック板の検査装置
JP2001201429A (ja) * 2000-01-18 2001-07-27 Mitsubishi Chemicals Corp 検査基体の欠陥検査方法および装置
JP2003172707A (ja) * 2001-12-05 2003-06-20 Shibuya Kogyo Co Ltd 反射防止膜を付した物品の検査方法とその装置
GB0307345D0 (en) * 2003-03-29 2003-05-07 Pilkington Plc Glazing inspection
US7388989B2 (en) * 2004-11-19 2008-06-17 Xerox Corporation Method for run-time streak detection by profile analysis
JP4779506B2 (ja) * 2005-08-30 2011-09-28 大日本印刷株式会社 カラーフィルター用の基板およびその検査方法、検査装置
JP2007178275A (ja) * 2005-12-28 2007-07-12 Toray Ind Inc スジ状凹凸の検査装置、スジ状凹凸の検査方法およびフィルムの製造方法
JP4960638B2 (ja) 2006-02-08 2012-06-27 積水化学工業株式会社 透明フィルムの検査方法
KR100838655B1 (ko) * 2006-10-27 2008-06-16 (주)쎄미시스코 유리기판의 품질 검사장치 및 그 검사방법
JP5253038B2 (ja) 2008-08-19 2013-07-31 日立造船株式会社 シート・フィルムのロール成形装置およびロール成形方法
TWI497061B (zh) * 2009-04-30 2015-08-21 Corning Inc 用以偵測玻璃板中的缺陷之方法及設備
KR101774074B1 (ko) * 2010-03-10 2017-09-01 쓰리엠 이노베이티브 프로퍼티즈 컴파니 웨브 제조 공정에서의 응용-특정된 반복 결함 검출 시스템
JP2012078144A (ja) * 2010-09-30 2012-04-19 Kaneka Corp 透明体シート状物の表面欠陥検査装置
JP6244260B2 (ja) * 2014-05-08 2017-12-06 株式会社神戸製鋼所 欠陥分析装置及び欠陥分析方法
KR102628620B1 (ko) * 2016-02-05 2024-01-24 도레이 카부시키가이샤 시트 형상물의 검사 장치 및 시트 형상물의 검사 방법
JP7076280B2 (ja) 2018-04-27 2022-05-27 日立造船株式会社 測定方法および測定装置

Also Published As

Publication number Publication date
TW202242392A (zh) 2022-11-01
EP4328571A1 (en) 2024-02-28
EP4328571A4 (en) 2025-08-06
JPWO2022224636A1 (https=) 2022-10-27
TWI912493B (zh) 2026-01-21
CN117222886A (zh) 2023-12-12
WO2022224636A1 (ja) 2022-10-27

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PA0105 International application

Patent event date: 20231108

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
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PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20250123

Comment text: Request for Examination of Application