JPWO2022224636A1 - - Google Patents
Info
- Publication number
- JPWO2022224636A1 JPWO2022224636A1 JP2023516342A JP2023516342A JPWO2022224636A1 JP WO2022224636 A1 JPWO2022224636 A1 JP WO2022224636A1 JP 2023516342 A JP2023516342 A JP 2023516342A JP 2023516342 A JP2023516342 A JP 2023516342A JP WO2022224636 A1 JPWO2022224636 A1 JP WO2022224636A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/8921—Streaks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/8922—Periodic flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8427—Coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8841—Illumination and detection on two sides of object
Landscapes
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Textile Engineering (AREA)
- Engineering & Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021072442 | 2021-04-22 | ||
| PCT/JP2022/011654 WO2022224636A1 (ja) | 2021-04-22 | 2022-03-15 | 検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022224636A1 true JPWO2022224636A1 (https=) | 2022-10-27 |
| JPWO2022224636A5 JPWO2022224636A5 (https=) | 2024-01-31 |
Family
ID=83722893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023516342A Pending JPWO2022224636A1 (https=) | 2021-04-22 | 2022-03-15 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP4328571A4 (https=) |
| JP (1) | JPWO2022224636A1 (https=) |
| KR (1) | KR20230174235A (https=) |
| CN (1) | CN117222886A (https=) |
| TW (1) | TWI912493B (https=) |
| WO (1) | WO2022224636A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116990324A (zh) * | 2023-07-04 | 2023-11-03 | 东莞市彤光电子科技有限公司 | 一种对透明膜材进行投影的缺陷检测装置 |
| CN117491391B (zh) * | 2023-12-29 | 2024-03-15 | 登景(天津)科技有限公司 | 基于芯片计算的玻璃基板光三维健康检测方法及设备 |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761550U (https=) * | 1980-09-17 | 1982-04-12 | ||
| JPH0723211U (ja) * | 1993-10-04 | 1995-04-25 | 三菱樹脂株式会社 | 透明プラスチック板の検査装置 |
| JP2001201429A (ja) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | 検査基体の欠陥検査方法および装置 |
| JP2003172707A (ja) * | 2001-12-05 | 2003-06-20 | Shibuya Kogyo Co Ltd | 反射防止膜を付した物品の検査方法とその装置 |
| US20060109522A1 (en) * | 2004-11-19 | 2006-05-25 | Xerox Corporation | Method for run-time streak detection by profile analysis |
| JP2007065168A (ja) * | 2005-08-30 | 2007-03-15 | Dainippon Printing Co Ltd | カラーフィルター用の基板およびその検査方法、検査装置 |
| JP2007178275A (ja) * | 2005-12-28 | 2007-07-12 | Toray Ind Inc | スジ状凹凸の検査装置、スジ状凹凸の検査方法およびフィルムの製造方法 |
| JP2010507801A (ja) * | 2006-10-27 | 2010-03-11 | セミシスコ・カンパニー・リミテッド | ガラス基板の品質検査装置及びその検査方法 |
| JP2010261948A (ja) * | 2009-04-30 | 2010-11-18 | Corning Inc | ガラスシート内の欠陥検出方法および装置 |
| JP2012078144A (ja) * | 2010-09-30 | 2012-04-19 | Kaneka Corp | 透明体シート状物の表面欠陥検査装置 |
| JP2015215183A (ja) * | 2014-05-08 | 2015-12-03 | 株式会社神戸製鋼所 | 欠陥分析装置及び欠陥分析方法 |
| WO2017134958A1 (ja) * | 2016-02-05 | 2017-08-10 | 東レ株式会社 | シート状物の検査装置およびシート状物の検査方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0307345D0 (en) * | 2003-03-29 | 2003-05-07 | Pilkington Plc | Glazing inspection |
| JP4960638B2 (ja) | 2006-02-08 | 2012-06-27 | 積水化学工業株式会社 | 透明フィルムの検査方法 |
| JP5253038B2 (ja) | 2008-08-19 | 2013-07-31 | 日立造船株式会社 | シート・フィルムのロール成形装置およびロール成形方法 |
| KR101774074B1 (ko) * | 2010-03-10 | 2017-09-01 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 웨브 제조 공정에서의 응용-특정된 반복 결함 검출 시스템 |
| JP7076280B2 (ja) | 2018-04-27 | 2022-05-27 | 日立造船株式会社 | 測定方法および測定装置 |
-
2022
- 2022-03-15 WO PCT/JP2022/011654 patent/WO2022224636A1/ja not_active Ceased
- 2022-03-15 CN CN202280029258.7A patent/CN117222886A/zh active Pending
- 2022-03-15 JP JP2023516342A patent/JPWO2022224636A1/ja active Pending
- 2022-03-15 EP EP22791416.5A patent/EP4328571A4/en active Pending
- 2022-03-15 KR KR1020237038562A patent/KR20230174235A/ko active Pending
- 2022-03-18 TW TW111110204A patent/TWI912493B/zh active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761550U (https=) * | 1980-09-17 | 1982-04-12 | ||
| JPH0723211U (ja) * | 1993-10-04 | 1995-04-25 | 三菱樹脂株式会社 | 透明プラスチック板の検査装置 |
| JP2001201429A (ja) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | 検査基体の欠陥検査方法および装置 |
| JP2003172707A (ja) * | 2001-12-05 | 2003-06-20 | Shibuya Kogyo Co Ltd | 反射防止膜を付した物品の検査方法とその装置 |
| US20060109522A1 (en) * | 2004-11-19 | 2006-05-25 | Xerox Corporation | Method for run-time streak detection by profile analysis |
| JP2007065168A (ja) * | 2005-08-30 | 2007-03-15 | Dainippon Printing Co Ltd | カラーフィルター用の基板およびその検査方法、検査装置 |
| JP2007178275A (ja) * | 2005-12-28 | 2007-07-12 | Toray Ind Inc | スジ状凹凸の検査装置、スジ状凹凸の検査方法およびフィルムの製造方法 |
| JP2010507801A (ja) * | 2006-10-27 | 2010-03-11 | セミシスコ・カンパニー・リミテッド | ガラス基板の品質検査装置及びその検査方法 |
| JP2010261948A (ja) * | 2009-04-30 | 2010-11-18 | Corning Inc | ガラスシート内の欠陥検出方法および装置 |
| JP2012078144A (ja) * | 2010-09-30 | 2012-04-19 | Kaneka Corp | 透明体シート状物の表面欠陥検査装置 |
| JP2015215183A (ja) * | 2014-05-08 | 2015-12-03 | 株式会社神戸製鋼所 | 欠陥分析装置及び欠陥分析方法 |
| WO2017134958A1 (ja) * | 2016-02-05 | 2017-08-10 | 東レ株式会社 | シート状物の検査装置およびシート状物の検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202242392A (zh) | 2022-11-01 |
| EP4328571A1 (en) | 2024-02-28 |
| EP4328571A4 (en) | 2025-08-06 |
| TWI912493B (zh) | 2026-01-21 |
| CN117222886A (zh) | 2023-12-12 |
| WO2022224636A1 (ja) | 2022-10-27 |
| KR20230174235A (ko) | 2023-12-27 |
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