TWI888115B - 線切割放電加工裝置、線切割放電加工方法及晶圓之製造方法 - Google Patents

線切割放電加工裝置、線切割放電加工方法及晶圓之製造方法 Download PDF

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Publication number
TWI888115B
TWI888115B TW113115962A TW113115962A TWI888115B TW I888115 B TWI888115 B TW I888115B TW 113115962 A TW113115962 A TW 113115962A TW 113115962 A TW113115962 A TW 113115962A TW I888115 B TWI888115 B TW I888115B
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Taiwan
Prior art keywords
wire
cutting
parallel
workpiece
state
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TW113115962A
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English (en)
Chinese (zh)
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TW202446523A (zh
Inventor
三宅英孝
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日商三菱電機股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02—Wire-cutting
    • B23H7/08—Wire electrodes
    • B23H7/10—Supporting, winding or electrical connection of wire-electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02—Wire-cutting

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
TW113115962A 2023-05-23 2024-04-29 線切割放電加工裝置、線切割放電加工方法及晶圓之製造方法 TWI888115B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2023/019205 WO2024241506A1 (ja) 2023-05-23 2023-05-23 ワイヤ放電加工装置、ワイヤ放電加工方法およびウエハの製造方法
WOPCT/JP2023/019205 2023-05-23

Publications (2)

Publication Number Publication Date
TW202446523A TW202446523A (zh) 2024-12-01
TWI888115B true TWI888115B (zh) 2025-06-21

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ID=89023124

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TW113115962A TWI888115B (zh) 2023-05-23 2024-04-29 線切割放電加工裝置、線切割放電加工方法及晶圓之製造方法

Country Status (5)

Country Link
JP (1) JP7391282B1 (https=)
CN (1) CN121152700A (https=)
DE (1) DE112023006392T5 (https=)
TW (1) TWI888115B (https=)
WO (1) WO2024241506A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1055508A (ja) * 1996-08-08 1998-02-24 Yamaha Corp 薄膜磁気ヘッド用ウェハの切断方法およびその装置
JP2012061550A (ja) * 2010-09-15 2012-03-29 Tokyo Cathode Laboratory Co Ltd マルチワイヤ放電加工装置及びマルチワイヤ放電加工方法並びに炭化ケイ素板の製造方法
WO2012070167A1 (ja) * 2010-11-24 2012-05-31 三菱電機株式会社 ワイヤ放電加工装置および半導体ウエハ製造方法
JP2014168832A (ja) * 2013-03-05 2014-09-18 Canon Marketing Japan Inc 加工装置、加工方法
TW201501846A (zh) * 2013-01-29 2015-01-16 Canon Marketing Japan Kk 線放電加工裝置及線放電加工方法
TW201622860A (zh) * 2014-09-24 2016-07-01 三菱電機股份有限公司 線放電加工裝置及半導體晶圓之製造方法
WO2022054195A1 (ja) * 2020-09-10 2022-03-17 三菱電機株式会社 ワイヤ放電加工装置及び半導体ウエハの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6537440B2 (ja) 2015-11-16 2019-07-03 株式会社ディスコ マルチワイヤ放電加工装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1055508A (ja) * 1996-08-08 1998-02-24 Yamaha Corp 薄膜磁気ヘッド用ウェハの切断方法およびその装置
JP2012061550A (ja) * 2010-09-15 2012-03-29 Tokyo Cathode Laboratory Co Ltd マルチワイヤ放電加工装置及びマルチワイヤ放電加工方法並びに炭化ケイ素板の製造方法
WO2012070167A1 (ja) * 2010-11-24 2012-05-31 三菱電機株式会社 ワイヤ放電加工装置および半導体ウエハ製造方法
TW201501846A (zh) * 2013-01-29 2015-01-16 Canon Marketing Japan Kk 線放電加工裝置及線放電加工方法
JP2014168832A (ja) * 2013-03-05 2014-09-18 Canon Marketing Japan Inc 加工装置、加工方法
TW201622860A (zh) * 2014-09-24 2016-07-01 三菱電機股份有限公司 線放電加工裝置及半導體晶圓之製造方法
WO2022054195A1 (ja) * 2020-09-10 2022-03-17 三菱電機株式会社 ワイヤ放電加工装置及び半導体ウエハの製造方法

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Publication number Publication date
DE112023006392T5 (de) 2026-03-05
JP7391282B1 (ja) 2023-12-04
JPWO2024241506A1 (https=) 2024-11-28
CN121152700A (zh) 2025-12-16
WO2024241506A1 (ja) 2024-11-28
TW202446523A (zh) 2024-12-01

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