TWI840809B - 光檢測裝置 - Google Patents

光檢測裝置 Download PDF

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Publication number
TWI840809B
TWI840809B TW111118625A TW111118625A TWI840809B TW I840809 B TWI840809 B TW I840809B TW 111118625 A TW111118625 A TW 111118625A TW 111118625 A TW111118625 A TW 111118625A TW I840809 B TWI840809 B TW I840809B
Authority
TW
Taiwan
Prior art keywords
fabry
interference filter
substrate
perot interference
light
Prior art date
Application number
TW111118625A
Other languages
English (en)
Chinese (zh)
Other versions
TW202234030A (zh
Inventor
廣瀬真樹
柴山勝己
笠原隆
川合敏光
八代健彥
峰野充史
鈴木滋
Original Assignee
日商濱松赫德尼古斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商濱松赫德尼古斯股份有限公司 filed Critical 日商濱松赫德尼古斯股份有限公司
Publication of TW202234030A publication Critical patent/TW202234030A/zh
Application granted granted Critical
Publication of TWI840809B publication Critical patent/TWI840809B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Gyroscopes (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Geophysics And Detection Of Objects (AREA)
TW111118625A 2015-04-28 2016-04-27 光檢測裝置 TWI840809B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-092360 2015-04-28
JP2015092360A JP6671860B2 (ja) 2015-04-28 2015-04-28 光検出装置

Publications (2)

Publication Number Publication Date
TW202234030A TW202234030A (zh) 2022-09-01
TWI840809B true TWI840809B (zh) 2024-05-01

Family

ID=57198304

Family Applications (4)

Application Number Title Priority Date Filing Date
TW111118625A TWI840809B (zh) 2015-04-28 2016-04-27 光檢測裝置
TW113112700A TWI885832B (zh) 2015-04-28 2016-04-27 光檢測裝置
TW105113159A TWI714577B (zh) 2015-04-28 2016-04-27 光檢測裝置
TW109141163A TWI769594B (zh) 2015-04-28 2016-04-27 光檢測裝置

Family Applications After (3)

Application Number Title Priority Date Filing Date
TW113112700A TWI885832B (zh) 2015-04-28 2016-04-27 光檢測裝置
TW105113159A TWI714577B (zh) 2015-04-28 2016-04-27 光檢測裝置
TW109141163A TWI769594B (zh) 2015-04-28 2016-04-27 光檢測裝置

Country Status (7)

Country Link
US (2) US11118972B2 (enExample)
EP (3) EP4467943A1 (enExample)
JP (1) JP6671860B2 (enExample)
KR (2) KR20240118188A (enExample)
CN (2) CN113049100B (enExample)
TW (4) TWI840809B (enExample)
WO (1) WO2016175089A1 (enExample)

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FR3050831B1 (fr) * 2016-04-29 2018-04-27 Silios Technologies Dispositif d'imagerie multispectrale
DE102017131049A1 (de) 2016-12-30 2018-07-05 Heimann Sensor Gmbh SMD-fähiger Thermopile Infrarot Sensor
JP2018137284A (ja) * 2017-02-20 2018-08-30 ソニーセミコンダクタソリューションズ株式会社 センサ、固体撮像装置及び電子装置
JP6862216B2 (ja) 2017-02-28 2021-04-21 浜松ホトニクス株式会社 光検出装置
JP7155498B2 (ja) * 2017-03-29 2022-10-19 セイコーエプソン株式会社 光学フィルターデバイス
JP6517309B1 (ja) 2017-11-24 2019-05-22 浜松ホトニクス株式会社 異物除去方法、及び光検出装置の製造方法
JP7313115B2 (ja) * 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
JP6902571B2 (ja) * 2017-11-24 2021-07-14 浜松ホトニクス株式会社 ウェハ
JP6526771B1 (ja) 2017-11-24 2019-06-05 浜松ホトニクス株式会社 ウェハ
JP7043885B2 (ja) * 2018-02-26 2022-03-30 セイコーエプソン株式会社 分光装置、温度特性導出装置、分光システム、分光方法、及び温度特性導出方法
US11101896B2 (en) * 2018-04-12 2021-08-24 Raytheon Company Integrated optical resonant detector
EP3776918B1 (en) 2018-04-12 2023-08-23 Raytheon Company Phase change detection in optical signals
JP7351610B2 (ja) * 2018-10-30 2023-09-27 浜松ホトニクス株式会社 光検出装置
JP7388815B2 (ja) * 2018-10-31 2023-11-29 浜松ホトニクス株式会社 分光ユニット及び分光モジュール
JP2020098258A (ja) * 2018-12-18 2020-06-25 セイコーエプソン株式会社 光学モジュール及び電子機器
JP7181784B2 (ja) * 2018-12-18 2022-12-01 浜松ホトニクス株式会社 モニタ装置、光学フィルタシステム、モニタ方法、電流発生装置
JP7051746B2 (ja) * 2019-04-17 2022-04-11 浜松ホトニクス株式会社 光学装置の製造方法
JP7345404B2 (ja) * 2020-01-22 2023-09-15 京セラ株式会社 Ｍｅｍｓ装置
CN111474618A (zh) * 2020-05-20 2020-07-31 腾景科技股份有限公司 一种空气隙标准具结构的宽波段温度调谐滤波器
JP7114766B2 (ja) * 2021-02-19 2022-08-08 浜松ホトニクス株式会社 光検出装置
JP7647403B2 (ja) * 2021-07-12 2025-03-18 セイコーエプソン株式会社 分光デバイス、及び分光カメラ
CN113703119B (zh) * 2021-09-02 2022-06-07 中国科学院长春光学精密机械与物理研究所 一种光学探测器滤光片精密封装机构
JP2024080070A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024080068A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024080082A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024107867A (ja) * 2023-01-30 2024-08-09 浜松ホトニクス株式会社 蛍光計測装置

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Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US4822998A (en) * 1986-05-15 1989-04-18 Minolta Camera Kabushiki Kaisha Spectral sensor with interference filter
US8462348B2 (en) * 2010-02-16 2013-06-11 Seiko Epson Corporation Tunable interference filter, light sensor and analytical instrument
CN104516041A (zh) * 2013-09-27 2015-04-15 精工爱普生株式会社 干涉滤波器、光学滤波器装置、光模块以及电子设备

Also Published As

Publication number Publication date
CN107532941B (zh) 2021-05-25
CN113049100B (zh) 2023-11-28
US20180113024A1 (en) 2018-04-26
EP3290880B1 (en) 2023-04-12
US11555741B2 (en) 2023-01-17
KR20240118188A (ko) 2024-08-02
TW202234030A (zh) 2022-09-01
EP3290880A1 (en) 2018-03-07
TWI714577B (zh) 2021-01-01
KR102708442B1 (ko) 2024-09-24
EP4467943A1 (en) 2024-11-27
US20210372854A1 (en) 2021-12-02
CN113049100A (zh) 2021-06-29
TW202111295A (zh) 2021-03-16
TWI769594B (zh) 2022-07-01
TW202433020A (zh) 2024-08-16
US11118972B2 (en) 2021-09-14
EP4212836A1 (en) 2023-07-19
TWI885832B (zh) 2025-06-01
TW201643390A (zh) 2016-12-16
JP2016211860A (ja) 2016-12-15
EP3290880A4 (en) 2018-12-19
CN107532941A (zh) 2018-01-02
WO2016175089A1 (ja) 2016-11-03
KR20170140170A (ko) 2017-12-20
JP6671860B2 (ja) 2020-03-25

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