TWI824717B - 壓電振動裝置 - Google Patents

壓電振動裝置 Download PDF

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Publication number
TWI824717B
TWI824717B TW111134752A TW111134752A TWI824717B TW I824717 B TWI824717 B TW I824717B TW 111134752 A TW111134752 A TW 111134752A TW 111134752 A TW111134752 A TW 111134752A TW I824717 B TWI824717 B TW I824717B
Authority
TW
Taiwan
Prior art keywords
substrate
connection terminal
vibrator
piezoelectric vibration
external connection
Prior art date
Application number
TW111134752A
Other languages
English (en)
Chinese (zh)
Other versions
TW202322426A (zh
Inventor
藤野和也
大西学
Original Assignee
日商大真空股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商大真空股份有限公司 filed Critical 日商大真空股份有限公司
Publication of TW202322426A publication Critical patent/TW202322426A/zh
Application granted granted Critical
Publication of TWI824717B publication Critical patent/TWI824717B/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H03H9/0552—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the device and the other elements being mounted on opposite sides of a common substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Vibration Prevention Devices (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
TW111134752A 2021-09-30 2022-09-14 壓電振動裝置 TWI824717B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-161145 2021-09-30
JP2021161145 2021-09-30

Publications (2)

Publication Number Publication Date
TW202322426A TW202322426A (zh) 2023-06-01
TWI824717B true TWI824717B (zh) 2023-12-01

Family

ID=85780613

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111134752A TWI824717B (zh) 2021-09-30 2022-09-14 壓電振動裝置

Country Status (5)

Country Link
US (1) US20240396521A1 (https=)
JP (1) JP7747051B2 (https=)
CN (1) CN117546406A (https=)
TW (1) TWI824717B (https=)
WO (1) WO2023053836A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200415849A (en) * 2002-10-23 2004-08-16 Seiko Epson Corp Piezoelectric oscillator and portable telephone and electronic device using it
JP2007243915A (ja) * 2005-11-02 2007-09-20 Matsushita Electric Ind Co Ltd 電子部品パッケージ
JP2016036182A (ja) * 2007-10-30 2016-03-17 京セラ株式会社 弾性波装置および弾性波モジュール
WO2018097132A1 (ja) * 2016-11-24 2018-05-31 株式会社大真空 圧電振動デバイスおよびそれを備えたＳｉＰモジュール
TW202034628A (zh) * 2019-02-28 2020-09-16 日商大真空股份有限公司 壓電振動元件

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666591B2 (ja) * 2002-02-01 2005-06-29 株式会社トッパンＮｅｃサーキットソリューションズ 半導体チップ搭載用基板の製造方法
JP3918794B2 (ja) * 2002-12-10 2007-05-23 セイコーエプソン株式会社 圧電発振器およびその製造方法並びに電子機器
JP5059478B2 (ja) * 2007-04-26 2012-10-24 日本電波工業株式会社 表面実装用の圧電発振器及び圧電振動子
JP5910351B2 (ja) * 2012-01-27 2016-04-27 株式会社大真空 表面実装型圧電発振器
JP6718837B2 (ja) * 2016-04-01 2020-07-08 スカイワークスフィルターソリューションズジャパン株式会社 電子部品とその製造方法、及び電子装置とその製造方法
JP6825971B2 (ja) * 2016-07-07 2021-02-03 日本電波工業株式会社 恒温槽型水晶発振器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200415849A (en) * 2002-10-23 2004-08-16 Seiko Epson Corp Piezoelectric oscillator and portable telephone and electronic device using it
JP2007243915A (ja) * 2005-11-02 2007-09-20 Matsushita Electric Ind Co Ltd 電子部品パッケージ
JP2016036182A (ja) * 2007-10-30 2016-03-17 京セラ株式会社 弾性波装置および弾性波モジュール
WO2018097132A1 (ja) * 2016-11-24 2018-05-31 株式会社大真空 圧電振動デバイスおよびそれを備えたＳｉＰモジュール
TW202034628A (zh) * 2019-02-28 2020-09-16 日商大真空股份有限公司 壓電振動元件

Also Published As

Publication number Publication date
JP7747051B2 (ja) 2025-10-01
US20240396521A1 (en) 2024-11-28
TW202322426A (zh) 2023-06-01
WO2023053836A1 (ja) 2023-04-06
JPWO2023053836A1 (https=) 2023-04-06
CN117546406A (zh) 2024-02-09

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