CN117546406A - 压电振动器件 - Google Patents

压电振动器件 Download PDF

Info

Publication number
CN117546406A
CN117546406A CN202280044249.5A CN202280044249A CN117546406A CN 117546406 A CN117546406 A CN 117546406A CN 202280044249 A CN202280044249 A CN 202280044249A CN 117546406 A CN117546406 A CN 117546406A
Authority
CN
China
Prior art keywords
substrate
connection terminal
vibrator
vibration device
external connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280044249.5A
Other languages
English (en)
Chinese (zh)
Inventor
藤野和也
大西学
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Large Vacuum Of Co
Original Assignee
Large Vacuum Of Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Large Vacuum Of Co filed Critical Large Vacuum Of Co
Publication of CN117546406A publication Critical patent/CN117546406A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H03H9/0552—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the device and the other elements being mounted on opposite sides of a common substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Vibration Prevention Devices (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
CN202280044249.5A 2021-09-30 2022-08-31 压电振动器件 Pending CN117546406A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-161145 2021-09-30
JP2021161145 2021-09-30
PCT/JP2022/032821 WO2023053836A1 (ja) 2021-09-30 2022-08-31 圧電振動デバイス

Publications (1)

Publication Number Publication Date
CN117546406A true CN117546406A (zh) 2024-02-09

Family

ID=85780613

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280044249.5A Pending CN117546406A (zh) 2021-09-30 2022-08-31 压电振动器件

Country Status (5)

Country Link
US (1) US20240396521A1 (https=)
JP (1) JP7747051B2 (https=)
CN (1) CN117546406A (https=)
TW (1) TWI824717B (https=)
WO (1) WO2023053836A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666591B2 (ja) * 2002-02-01 2005-06-29 株式会社トッパンＮｅｃサーキットソリューションズ 半導体チップ搭載用基板の製造方法
JP4222147B2 (ja) * 2002-10-23 2009-02-12 セイコーエプソン株式会社 圧電発振器及び圧電発振器を利用した携帯電話装置および圧電発振器を利用した電子機器
JP3918794B2 (ja) * 2002-12-10 2007-05-23 セイコーエプソン株式会社 圧電発振器およびその製造方法並びに電子機器
JP4811232B2 (ja) * 2005-11-02 2011-11-09 パナソニック株式会社 電子部品パッケージ
JP5059478B2 (ja) * 2007-04-26 2012-10-24 日本電波工業株式会社 表面実装用の圧電発振器及び圧電振動子
WO2009057699A1 (ja) * 2007-10-30 2009-05-07 Kyocera Corporation 弾性波装置
JP5910351B2 (ja) * 2012-01-27 2016-04-27 株式会社大真空 表面実装型圧電発振器
JP6718837B2 (ja) * 2016-04-01 2020-07-08 スカイワークスフィルターソリューションズジャパン株式会社 電子部品とその製造方法、及び電子装置とその製造方法
JP6825971B2 (ja) * 2016-07-07 2021-02-03 日本電波工業株式会社 恒温槽型水晶発振器
CN109716646A (zh) * 2016-11-24 2019-05-03 株式会社大真空 压电振动器件以及具备其的sip模块
JP6780718B2 (ja) * 2019-02-28 2020-11-04 株式会社大真空 圧電振動デバイス

Also Published As

Publication number Publication date
TWI824717B (zh) 2023-12-01
JP7747051B2 (ja) 2025-10-01
US20240396521A1 (en) 2024-11-28
TW202322426A (zh) 2023-06-01
WO2023053836A1 (ja) 2023-04-06
JPWO2023053836A1 (https=) 2023-04-06

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